Gas distribution device and MOCVD (Metal Organic Chemical Vapor Deposition) equipment

Abstract

The utility model relates to the technical field of semiconductor production, and provides a gas distribution device and MOCVD equipment, the gas distribution device comprises an upper cover plate, a splitter plate, a plurality of first gas source connectors and a plurality of second gas source connectors, the upper cover plate is provided with a plurality of first gas channels and a plurality of second gas channels, the plurality of first air source joints are arranged on the upper side of the upper cover plate and are respectively communicated with the plurality of first air passages, and the plurality of second air source joints are arranged on the upper side of the upper cover plate and are respectively communicated with the plurality of second air passages; the splitter plate is arranged on the lower side face of the upper cover plate, multiple rows of third air channels and multiple rows of fourth air channels are alternately arranged on the splitter plate in the first direction, the multiple rows of third air channels communicate with the multiple first air channels correspondingly, and the multiple rows of fourth air channels communicate with the multiple second air channels correspondingly. According to the gas distribution device, the flow of the third gas channels in each row can be consistent or basically consistent, the flow of the fourth gas channels in each row can be consistent or basically consistent, and the uniformity of vertical gas distribution can be improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor production technology, and in particular to a gas distribution device and MOCVD equipment. Background Art

[0002] MOCVD (Metal-organic Chemical Vapor Deposition) equipment is an epitaxial equipment that uses metal organic compounds for vapor phase growth, and can prepare a variety of compounds and multi-component solid solutions. During the epitaxial reaction process, the reaction gas is introduced from the gas source into the reaction chamber through the gas distribution device, so that the epitaxial wafer placed in the reaction chamber can be epitaxially produced to form a lattice structure film.

[0003] In order to effectively control the chemical reaction process of epitaxial growth, it is usually necessary for the reaction gas to form a boundary layer with uniform concentration, uniform velocity and uniform temperature on the surface of the epitaxial wafer to meet the various requirements of the epitaxially grown thin film in terms of lattice structure and performance, thereby improving the growth quality and yield rate. Therefore, the design of the gas distribution device becomes very critical.

[0004] At present, there are two ways of distributing gas in the gas distribution device, namely horizontal distribution and vertical distribution. Horizontal distribution is easy to cause particles to fall at the top of the reaction chamber, affecting the yield rate; although vertical distribution can greatly reduce the formation of particles at the top, the uniformity of vertical distribution is relatively poor. Utility Model Content

[0005] In view of this, the embodiments of the present application provide a gas distribution device and MOCVD equipment to solve the problem of relatively poor uniformity of vertical gas distribution.

[0006] The first aspect of the present application proposes an air distribution device, including an upper cover plate, a diverter plate, a plurality of first air source connectors and a plurality of second air source connectors, wherein the upper cover plate is used to seal a reaction chamber, and a plurality of first air channels and a plurality of second air channels are provided on the upper cover plate, wherein the plurality of first air source connectors are provided on the upper side of the upper cover plate and are respectively connected to the plurality of first air channels, and the plurality of second air source connectors are provided on the upper side of the upper cover plate and are respectively connected to the plurality of second air channels; the diverter plate is provided on the lower side of the upper cover plate, and a plurality of rows of third air channels and a plurality of rows of fourth air channels are alternately arranged along a first direction on the diverter plate, wherein the plurality of rows of the third air channels are respectively connected to the plurality of the first air channels, and the plurality of rows of the fourth air channels are respectively connected to the plurality of the second air channels.

[0007] The beneficial effect of the air distribution device provided by the embodiment of the present application is: by alternately arranging multiple rows of third air ducts and multiple rows of fourth air ducts along the first direction on the diverter plate, the first air source and the second air source are diverted to improve the uniformity of vertical air distribution. Since multiple rows of third air ducts are respectively connected to multiple first air ducts, and multiple rows of fourth air ducts are respectively connected to multiple second air ducts, and the number of third air ducts in each row is different or not completely the same, and the number of fourth air ducts in each row is different or not completely the same; by arranging multiple first air source connectors on the upper side of the upper cover plate and respectively connected to multiple first air ducts, and arranging multiple second air source connectors on the upper side of the upper cover plate and respectively connected to multiple second air ducts, the flow rate of the first air source entering each row of the third air duct through each first air duct can be controlled separately, and the flow rate of the second air source entering each row of the fourth air duct through each second air duct can be controlled separately, so that the flow rate of each row of the third air duct is consistent or basically consistent, and the flow rate of each row of the fourth air duct is consistent or basically consistent, which is conducive to improving the uniformity of vertical air distribution.

[0008] In some embodiments, the upper cover plate includes a cover plate body and a fixing plate detachably fixed to the upper side of the cover plate body, and a plurality of the first gas source connectors and / or a plurality of the second gas source connectors are arranged on the fixing plate.

[0009] Since the multiple first gas source connectors and / or the multiple second gas source connectors are arranged on the fixing plate, and the fixing plate can be detachably fixed to the cover plate body, the fixing plate can be removed from the cover plate body, thereby facilitating the maintenance and replacement of the multiple first gas source connectors and / or the multiple second gas source connectors.

[0010] In some embodiments, a plurality of the first gas source connectors and a plurality of the second gas source connectors are alternately arranged on the upper cover plate along the first direction.

[0011] Since multiple rows of third air ducts and multiple rows of fourth air ducts are alternately arranged along the first direction, by alternately arranging multiple first air source connectors and multiple second air source connectors on the upper cover plate along the first direction, multiple first air source connectors can be respectively arranged directly above the multiple rows of third air ducts, and multiple second air source connectors can be respectively arranged directly above the multiple rows of fourth air ducts. Therefore, the multiple first air ducts and the multiple second air ducts can be designed as vertical channels, which is conducive to the processing of the multiple first air ducts and the multiple second air ducts.

[0012] In some embodiments, the upper side surface of the diverter plate is alternately arranged with a plurality of first strip grooves and a plurality of second strip grooves along a first direction, a plurality of the first air ducts are respectively arranged corresponding to the plurality of the first strip grooves, and the air inlets of each row of the third air ducts are arranged in the corresponding first strip grooves; a plurality of the second air ducts are respectively arranged corresponding to the plurality of the second strip grooves, and the air inlets of each row of the fourth air ducts are arranged in the corresponding second strip grooves.

[0013] In some embodiments, the air distribution device also includes a plurality of nozzles provided on the lower side of the diverter plate, and the plurality of nozzles are respectively arranged corresponding to the plurality of rows of the third air ducts; the nozzle includes an air cavity and a plurality of air inlet holes and a plurality of air outlet holes connected to the air cavity, the air cavity extends along a second direction, the plurality of air inlet holes are arranged at intervals along the second direction and are respectively connected to the plurality of third air ducts in each row of the third air ducts, the plurality of air outlet holes are arranged at intervals along the second direction and are alternately arranged with the plurality of air inlet holes in the second direction; wherein the first direction is perpendicular to the second direction.

[0014] By adopting the above technical solution, the third air duct and the fourth air duct are staggered in the height direction, which can effectively prevent the two gas sources from contacting and reacting prematurely and causing the problem of premature precipitation; the third air duct and the fourth air duct are staggered in the second direction, which is beneficial to the uniformity of gas distribution of the first gas source and the second gas source in the reaction chamber.

[0015] In some embodiments, the nozzle includes a rectangular section and a triangular section, the air inlet and the air cavity are arranged on the rectangular section, and the air outlet is arranged on the triangular section.

[0016] By adopting the above technical solution, the nozzle includes a rectangular segment and a triangular segment, and the structure is relatively regular and simple, which is conducive to the processing of the nozzle.

[0017] In some embodiments, the air distribution device further includes a heat insulation ring fixed to the lower side of the upper cover plate, and the heat insulation ring is arranged around the diverter plate.

[0018] By adopting the above technical solution, the heat insulation ring can isolate a certain amount of heat to reduce the temperature increase rate of the upper cover plate.

[0019] In some embodiments, the insulation ring is a graphite ring, and the air distribution device further includes a ceramic member disposed between the graphite ring and the upper cover plate, wherein a plurality of the ceramic members are arranged at intervals along the circumference of the graphite ring.

[0020] By adopting the above technical solution, the thermal conductivity of the graphite ring is low, which is conducive to heat insulation, and the ceramic parts are arranged between the graphite ring and the upper cover plate and arranged at intervals along the circumference of the graphite ring, which can reduce the contact area between the graphite ring and the upper cover plate, thereby reducing heat conduction and further reducing the temperature rise rate of the upper cover plate.

[0021] In some embodiments, a cooling channel is provided on the upper cover plate.

[0022] By adopting the above technical solution, the coolant in the cooling channel is used to dissipate heat from the upper cover plate, so as to reduce the temperature of the upper cover plate.

[0023] A second aspect of the present application provides an MOCVD device, which includes a reaction chamber and a gas distribution device as described in the first aspect, wherein the gas distribution device covers the reaction chamber.

[0024] The MOCVD device adopts any one or more embodiments of the above-mentioned gas distribution device, and thus has the beneficial effects of the above-mentioned embodiments, which will not be described one by one here.

[0025] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or conventional technical descriptions will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 is a schematic structural diagram of an air distribution device provided in some embodiments of the present application from a first perspective;

[0028] Figure 2 yes Figure 1 A cross-sectional view of the air distribution device shown in FIG.

[0029] Figure 3 yes Figure 2 The enlarged view of point B in the middle;

[0030] Figure 4 yes Figure 2 Enlarged view of point C in the middle;

[0031] Figure 5 is a schematic structural diagram of an air distribution device provided in some embodiments of the present application from a second perspective;

[0032] Figure 6 yes Figure 2 Schematic diagram of the structure of the middle manifold;

[0033] Figure 7 yes Figure 2 a cross-sectional view of the middle nozzle cut along a first direction;

[0034] Figure 8 yes Figure 2 a cross-sectional view of the middle nozzle cut along a second direction;

[0035] Fig. 9is a schematic diagram of the flow direction of the first gas source provided in some embodiments of the present application;

[0036] Fig.10 It is a flow diagram of the second gas source provided in some embodiments of the present application.

[0037] The meanings of the marks in the figure are:

[0038] 10. Air distribution device;

[0039] 11. upper cover plate; 111. cover plate body; 1111. first air channel; 1112. second air channel; 1113. cooling channel; 112. fixing plate;

[0040] 12. splitter plate; 121. third air channel; 122. fourth air channel; 123. first strip groove; 124. second strip groove;

[0041] 13. First gas source connector; 131. First gas source;

[0042] 14. Second gas source connector; 141. Second gas source;

[0043] 15, nozzle; 151, rectangular section; 1511, air cavity; 1512, air inlet; 152, triangular section; 1521, air outlet;

[0044] 16. Thermal insulation ring;

[0045] 17. Ceramic parts. DETAILED DESCRIPTION

[0046] The following embodiments of the technical solution of the present application are described in detail in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present application, and are therefore only used as examples, and cannot be used to limit the scope of protection of the present application.

[0047] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by technicians in the technical field to which this application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" in the specification and claims of this application and the above-mentioned figure descriptions and any variations thereof are intended to cover non-exclusive inclusions.

[0048] In the description of the embodiments of the present application, the technical terms "first", "second", etc. are only used to distinguish different objects, and cannot be understood as indicating or implying relative importance or implicitly indicating the number, specific order or primary and secondary relationship of the indicated technical features. In the description of the embodiments of the present application, the meaning of "multiple" is more than two, unless otherwise clearly and specifically defined.

[0049] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0050] In the description of the embodiments of the present application, the term "and / or" is only a description of the association relationship of the associated objects, indicating that there may be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0051] In the description of the embodiments of the present application, the term "multiple" refers to more than two (including two). Similarly, "multiple groups" refers to more than two groups (including two groups), and "multiple pieces" refers to more than two pieces (including two pieces).

[0052] In the description of the embodiments of the present application, the orientations or positional relationships indicated by technical terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be understood as limitations on the embodiments of the present application.

[0053] In the description of the embodiments of the present application, unless otherwise clearly specified and limited, technical terms such as "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0054] The first embodiment of the present application provides an air distribution device. Figure 1 , Figure 2 , Figure 3 and Figure 6The gas distribution device 10 includes an upper cover plate 11, a flow divider 12, a plurality of first gas source connectors 13, and a plurality of second gas source connectors 14. The upper cover plate 11 is used to cover the reaction chamber. The upper cover plate 11 is provided with a plurality of first gas channels 1111 and a plurality of second gas channels 1112. The plurality of first gas source connectors 13 are provided on the upper side of the upper cover plate 11 and are respectively connected to the plurality of first gas channels 1111. The plurality of second gas source connectors 14 are provided on the upper side of the upper cover plate 11 and are respectively connected to the plurality of second gas channels 1112. The flow divider 12 is provided on the lower side of the upper cover plate 11. The flow divider 12 is provided with a plurality of rows of third gas channels 121 and a plurality of rows of fourth gas channels 122 alternately arranged along the first direction X. The plurality of rows of third gas channels 121 are respectively connected to the plurality of first gas channels 1111, and the plurality of rows of fourth gas channels 122 are respectively connected to the plurality of second gas channels 1112.

[0055] A sealing ring is provided at the lower side edge of the upper cover plate 11 to ensure the sealing of the reaction chamber after the upper cover plate 11 covers the reaction chamber.

[0056] A plurality of first air passages 1111 and a plurality of second air passages 1112 are provided on the upper cover plate 11 , wherein the first air passages 1111 and the second air passages 1112 may be vertical passages or inclined passages.

[0057] A plurality of first gas source connectors 13 are provided on the upper side of the upper cover plate 11. Optionally, the plurality of first gas source connectors 13 are spaced apart on the upper side of the upper cover plate 11 along the first direction X. The first gas source connectors 13 may be welded and fixed to the upper side of the upper cover plate 11, or may be fixed to the upper side of the upper cover plate 11 by fasteners.

[0058] The multiple first gas source connectors 13 are respectively connected to the multiple first gas channels 1111 . It can be understood that each first gas source connector 13 is connected to one first gas channel 1111 , and they do not affect each other.

[0059] A plurality of second gas source connectors 14 are provided on the upper side of the upper cover plate 11. Optionally, the plurality of second gas source connectors 14 are spaced apart on the upper side of the upper cover plate 11 along the first direction X. The second gas source connectors 14 may be welded and fixed to the upper side of the upper cover plate 11, or may be fixed to the upper side of the upper cover plate 11 by fasteners.

[0060] The plurality of second gas source connectors 14 are respectively connected to the plurality of second gas channels 1112 . It can be understood that each second gas source connector 14 is connected to one second gas channel 1112 , and they do not affect each other.

[0061] The diverter plate 12 is arranged on the lower side of the upper cover plate 11. It can be understood that the diverter plate 12 is welded and fixed to the lower side of the upper cover plate 11; or, the diverter plate 12 is fixed to the lower side of the upper cover plate 11 by fasteners. At this time, a sealing ring is provided between the diverter plate 12 and the upper cover plate 11.

[0062] Multiple rows of third air channels 121 and multiple rows of fourth air channels 122 are alternately arranged on the manifold plate 12 along the first direction X. It can be understood that, in the first direction X, one row of fourth air channels 122 is arranged between two rows of third air channels 121, or one row of third air channels 121 is arranged between two rows of fourth air channels 122. Among them, each row of third air channels 121 is provided with multiple third air channels 121 and arranged at intervals along the second direction Y, and each row of fourth air channels 122 is provided with multiple fourth air channels 122 and arranged at intervals along the second direction Y, and the first direction X is perpendicular to the second direction Y.

[0063] Multiple rows of third air ducts 121 are respectively connected to multiple first air ducts 1111, which can be understood as each row of third air ducts 121 is connected to one first air duct 1111; multiple rows of fourth air ducts 122 are respectively connected to multiple second air ducts 1112, which can be understood as each row of fourth air ducts 122 is connected to one second air duct 1112.

[0064] The air distribution device 10 provided in the embodiment of the present application improves the uniformity of vertical air distribution by alternately arranging multiple rows of third air ducts 121 and multiple rows of fourth air ducts 122 on the diverter plate 12 along the first direction X to divert the first air source 131 and the second air source 141. Since the multiple rows of third air ducts 121 are respectively connected to the multiple first air ducts 1111, and the multiple rows of fourth air ducts 122 are respectively connected to the multiple second air ducts 1112, and the number of third air ducts 121 in each row is different or not completely the same, and the number of fourth air ducts 122 in each row is different or not completely the same; by arranging multiple first air source connectors 13 on the upper side of the upper cover plate 11 and respectively connecting to the multiple first air ducts 1111, and arranging multiple second air source connectors 14 on the upper side of the upper cover plate 11 and respectively connecting to the multiple first air ducts 1111. It is connected to multiple second air channels 1112, so that the flow of the first air source 131 entering each row of the third air channels 121 through each first air channel 1111 can be individually controlled, and the flow of the second air source 141 entering each row of the fourth air channels 122 through each second air channel 1112 can be individually controlled, so that the flow of each row of the third air channels 121 is consistent or basically consistent, and the flow of each row of the fourth air channels 122 is consistent or basically consistent, which is beneficial to improving the uniformity of vertical gas distribution, thereby improving the uniformity of film formation.

[0065] Moreover, vertical gas distribution can also reduce particle formation on the top of the reaction chamber and improve yield.

[0066] Optionally, the first gas source 131 is a Mo source, and the second gas source 141 is a Si source.

[0067] Please also refer to Figures 1 to 3 In some embodiments, the upper cover 11 includes a cover body 111 and a fixing plate 112 detachably fixed to the upper side of the cover body 111 , and a plurality of first gas source connectors 13 and a plurality of second gas source connectors 14 are disposed on the fixing plate 112 .

[0068] A sealing ring is provided at the edge of the lower side of the cover body 111 to ensure the sealing of the reaction chamber after the upper cover 11 covers the reaction chamber.

[0069] Optionally, the fixing plate 112 is a rectangular plate.

[0070] The edge of the fixing plate 112 is fixed to the cover body 111 by threaded fasteners (such as screws, bolts, etc.) to achieve detachable fixing of the fixing plate 112 to the cover body 111. A sealing ring is provided between the fixing plate 112 and the cover body 111 to ensure the sealing after the fixing plate 112 is fixed to the cover body 111.

[0071] The size of the fixing plate 112 is much smaller than that of the cover body 111. Multiple first gas source connectors 13 and multiple second gas source connectors 14 are arranged on the fixing plate 112, and the fixing plate 112 can be detachably fixed to the cover body 111. Therefore, the fixing plate 112 can be removed from the cover body 111, thereby facilitating the maintenance and replacement of the multiple first gas source connectors 13 and multiple second gas source connectors 14.

[0072] In other embodiments, multiple first gas source connectors 13 may be disposed on the fixed plate 112 , and multiple second gas source connectors 14 may be disposed on the cover plate body 111 ; or, multiple first gas source connectors 13 may be disposed on the cover plate body 111 , and multiple second gas source connectors 14 may be disposed on the fixed plate 112 .

[0073] Please refer to Figure 1 and Figure 2 In some embodiments, a plurality of first gas source connectors 13 and a plurality of second gas source connectors 14 are alternately arranged along the first direction X on the upper cover plate 11 .

[0074] It can be understood that, in the first direction X, a second gas source connector 14 is provided between two adjacent first gas source connectors 13 , or a first gas source connector 13 is provided between two adjacent second gas source connectors 14 .

[0075] It can be understood that the plurality of first gas source connectors 13 and the plurality of second gas source connectors 14 can be arranged in a straight line; or, the plurality of first gas source connectors 13 and the plurality of second gas source connectors 14 can be arranged in a staggered manner in the second direction Y.

[0076] Since multiple rows of third air ducts 121 and multiple rows of fourth air ducts 122 are alternately arranged along the first direction X, by alternately arranging multiple first air source connectors 13 and multiple second air source connectors 14 on the upper cover plate 11 along the first direction X, the multiple first air source connectors 13 can be respectively arranged directly above the multiple rows of third air ducts 121, and the multiple second air source connectors 14 can be respectively arranged directly above the multiple rows of fourth air ducts 122. Therefore, the multiple first air ducts 1111 and the multiple second air ducts 1112 can be designed as vertical channels, which is beneficial to the processing of the multiple first air ducts 1111 and the multiple second air ducts 1112.

[0077] In other embodiments, a plurality of first gas source connectors 13 are arranged at intervals on the upper cover plate 11 along the first direction X, a plurality of second gas source connectors 14 are arranged at intervals on the upper cover plate 11 along the first direction X, and each first gas source connector 13 and each second gas source connector 14 are aligned in the second direction Y. In this case, it is necessary to design the first air duct 1111 as an inclined channel and the second air duct 1112 as a vertical channel; or, design the first air duct 1111 as a vertical channel and design the second air duct 1112 as an inclined channel, or both the first air duct 1111 and the second air duct 1112 as inclined channels.

[0078] Please also refer to Figure 2 , Figure 3 and Figure 6 In some embodiments, the upper side of the diverter plate 12 is alternately provided with a plurality of first strip grooves 123 and a plurality of second strip grooves 124 along the first direction X, a plurality of first air channels 1111 are respectively arranged corresponding to the plurality of first strip grooves 123, and the air inlets of each row of the third air channels 121 are arranged in the corresponding first strip grooves 123; a plurality of second air channels 1112 are respectively arranged corresponding to the plurality of second strip grooves 124, and the air inlets of each row of the fourth air channels 122 are arranged in the corresponding second strip grooves 124.

[0079] The plurality of first strip grooves 123 and the plurality of second strip grooves 124 are alternately arranged along the first direction X. It can be understood that one second strip groove 124 is provided between two adjacent first strip grooves 123 , or one first strip groove 123 is provided between two adjacent second strip grooves 124 .

[0080] The first strip groove 123 and the second strip groove 124 both extend along the second direction Y.

[0081] The plurality of first air passages 1111 are respectively arranged corresponding to the plurality of first strip grooves 123, which can be understood as follows. Fig. 9As shown, each first air channel 1111 corresponds to a first strip groove 123, that is, the first air source 131 in each first air channel 1111 enters a corresponding first strip groove 123; the air inlet of each row of third air channels 121 is arranged in the corresponding first strip groove 123, that is, the first air source 131 entering the first strip groove 123 from the first air channel 1111 can enter the corresponding third air channel 121 from the air inlet of each row of third air channels 121.

[0082] The plurality of second air passages 1112 are respectively arranged corresponding to the plurality of second strip grooves 124, which can be understood as follows. Fig.10 As shown, each second air channel 1112 corresponds to a second strip groove 124, that is, the second air source 141 in each second air channel 1112 enters a corresponding second strip groove 124; the air inlet of each row of fourth air channels 122 is arranged in the corresponding second strip groove 124, that is, the second air source 141 entering the second strip groove 124 from the second air channel 1112 can enter the corresponding fourth air channel 122 from the air inlet of each row of fourth air channels 122, and be ejected downward from the air outlet of the fourth air channel 122.

[0083] Optionally, the diverter plate 12 is a circular plate, and the lengths of the plurality of first strip grooves 123 and the plurality of second strip grooves 124 are not exactly the same; specifically, in the first direction X, the middle strip groove is relatively longer, and the strip grooves at both ends are relatively shorter.

[0084] In other embodiments, a plurality of third strip grooves and a plurality of fourth strip grooves are alternately arranged on the lower side surface of the upper cover plate 11 along the first direction X, an air outlet of each first air duct 1111 is arranged in a corresponding third strip groove, and a plurality of rows of third air ducts 121 are respectively arranged corresponding to the plurality of third strip grooves; an air outlet of each second air duct 1112 is arranged in a corresponding fourth strip groove, and a plurality of rows of fourth air ducts 122 are respectively arranged corresponding to the plurality of fourth strip grooves.

[0085] Please also refer to Figure 2 , Figure 5 and Figure 7 In some embodiments, the air distribution device 10 also includes a plurality of nozzles 15 provided on the lower side of the diverter plate 12, and the plurality of nozzles 15 are respectively arranged corresponding to the plurality of rows of third air ducts 121; the nozzle 15 includes an air cavity 1511 and a plurality of air inlet holes 1512 and a plurality of air outlet holes 1521 connected to the air cavity 1511, the air cavity 1511 extends along the second direction Y, the plurality of air inlet holes 1512 are arranged at intervals along the second direction Y and are respectively connected to the plurality of third air ducts 121 of each row of third air ducts 121, and the plurality of air outlet holes 1521 are arranged at intervals along the second direction Y and are alternately arranged with the plurality of air inlet holes 1512 in the second direction Y.

[0086] The plurality of nozzles 15 are respectively arranged corresponding to the plurality of rows of third air channels 121 , which can be understood as each nozzle 15 being arranged corresponding to each row of third air channels 121 . In particular, each row of fourth air channels 122 is located between two adjacent nozzles 15 .

[0087] like Fig. 9 As shown, the first gas source 131 in the third gas channel 121 enters the gas cavity 1511 through the gas inlet 1512, and is ejected downward from the gas outlet 1521 after being split in the gas cavity 1511. The gas outlet 1521 and the fourth gas channel 122 are staggered in the second direction Y.

[0088] By adopting the above technical solution, the third air duct 121 and the fourth air duct 122 are staggered in the height direction, which can effectively prevent the problem of premature contact and reaction between the first gas source 131 and the second gas source 141 and premature formation of precipitation; the third air duct 121 and the fourth air duct 122 are staggered in the second direction Y, which is beneficial to the uniformity of gas distribution of the first gas source 131 and the second gas source 141 in the reaction chamber.

[0089] Please also refer to Figure 7 and Figure 8 In some embodiments, the nozzle 15 includes a rectangular section 151 and a triangular section 152 , the air inlet 1512 and the air cavity 1511 are provided on the rectangular section 151 , and the air outlet 1521 is provided on the triangular section 152 .

[0090] It can be understood that the rectangular segment 151 and the triangular segment 152 can be an integral structure; or, the rectangular segment 151 and the triangular segment 152 can also be a separate structure, and the rectangular segment 151 and the triangular segment 152 are fixed together by welding, fastener connection, etc.

[0091] The rectangular section 151 is located above the triangular section 152 , and the rectangular section 151 is fixed on the diverter plate 12 by welding, fastener connection, or the like.

[0092] Optionally, the air cavity 1511 is a rectangular cavity.

[0093] By adopting the above technical solution, the nozzle 15 includes a rectangular segment 151 and a triangular segment 152 , and the structure is relatively regular and simple, which is conducive to the processing of the nozzle 15 .

[0094] In other embodiments, the nozzle 15 may also be of other structures as long as the usage requirements are met.

[0095] Please also refer to Figure 2 and Figure 4 In some embodiments, the air distribution device 10 further includes a heat insulation ring 16 fixed to the lower side of the upper cover plate 11 , and the heat insulation ring 16 is arranged around the diverter plate 12 .

[0096] Optionally, the heat insulation ring 16 is fixed to the upper cover plate 11 by threaded fasteners (such as screws, bolts, etc.).

[0097] Optionally, the diverter plate 12 is a circular plate, and the heat insulation ring 16 is a circular ring.

[0098] By adopting the above technical solution, the heat insulation ring 16 can isolate a certain amount of heat to reduce the temperature increase rate of the upper cover plate 11.

[0099] In some embodiments, the insulation ring 16 is a graphite ring, and the gas distribution device 10 further includes a ceramic member 17 disposed between the graphite ring and the upper cover plate 11 , and a plurality of ceramic members 17 are arranged at intervals along the circumference of the graphite ring.

[0100] It can be understood that the ceramic member 17 can be a ceramic ring, a ceramic block, etc.

[0101] When the ceramic member 17 is a ceramic ring, when the threaded fasteners (such as screws, bolts, etc.) fix the heat insulating ring 16 on the upper cover plate 11, the threaded fasteners pass through the ceramic ring to limit the ceramic ring and prevent the ceramic ring from moving in the radial direction. In order to further limit the radial movement of the ceramic ring, a limiting groove is further provided on the lower side of the upper cover plate 11, and the upper end of the ceramic ring is located in the limiting groove; of course, a limiting groove can also be provided on the upper side of the graphite ring.

[0102] By adopting the above technical solution, the thermal conductivity of the graphite ring is low, which is conducive to isolating heat, and the ceramic member 17 is arranged between the graphite ring and the upper cover plate 11 and is arranged at intervals along the circumference of the graphite ring, so that the graphite ring is not in contact with the upper cover plate 11, thereby reducing heat conduction and further reducing the temperature rise rate of the upper cover plate 11.

[0103] Please also refer to Figure 1 and Figure 2 In some embodiments, a cooling channel 1113 is provided on the upper cover plate 11 .

[0104] It can be understood that the cooling channel 1113 can be provided inside the upper cover plate 11 or on the upper surface of the upper cover plate 11 .

[0105] The trajectory of the cooling channel 1113 is not limited in this application, as long as it can effectively cool the upper cover plate 11 .

[0106] Optionally, the upper cover plate 11 includes a cover plate body 111 and a fixing plate 112 , and the cooling channel 1113 is disposed on the upper side of the cover plate body 111 and around the fixing plate 112 .

[0107] By adopting the above technical solution, the coolant in the cooling channel 1113 is used to dissipate heat from the upper cover plate 11 to reduce the temperature of the upper cover plate 11 .

[0108] The gas distribution device 10 provided in the embodiment of the present application is processed with surface accuracy and roughness to make the overall assembly tight, so that the two gas sources are in a separate state before entering the reaction chamber, each flows in its own flow channel, and reaches the gas outlet after a uniform gas flow through the flow channel. The gas outlet is staggered in the vertical direction and the second direction Y to perform a secondary uniform gas flow, so that the two gas sources are more uniform when sprayed to the surface to be reacted. By controlling the gas flow rate, the gas flow rate is controlled, so that the two gas sources are sprayed vertically to the surface to be reacted after coming out of the gas outlet, and converge at the surface to be reacted to react.

[0109] The second aspect of the present application provides a MOCVD device, which includes a reaction chamber and a gas distribution device 10 as described in the first aspect, the gas distribution device 10 covers the reaction chamber and sprays a first gas source 131 and a second gas source 141 toward a surface to be reacted in the reaction chamber.

[0110] The MOCVD device adopts any one or more embodiments of the above-mentioned gas distribution device 10, and thus has the beneficial effects of the above-mentioned embodiments, which will not be described one by one here.

[0111] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. These modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be included in the protection scope of the present application.

Claims

1. An air distribution device, characterized in that: It includes an upper cover plate, a diverter plate, a plurality of first gas source connectors and a plurality of second gas source connectors, the upper cover plate is used to seal the reaction chamber, a plurality of first gas channels and a plurality of second gas channels are arranged on the upper cover plate, the plurality of first gas source connectors are arranged on the upper side of the upper cover plate and are respectively connected to the plurality of first gas channels, a plurality of second gas source connectors are arranged on the upper side of the upper cover plate and are respectively connected to the plurality of second gas channels; the diverter plate is arranged on the lower side of the upper cover plate, a plurality of rows of third gas channels and a plurality of rows of fourth gas channels are alternately arranged along a first direction on the diverter plate, a plurality of rows of the third gas channels are respectively connected to a plurality of the first gas channels, a plurality of rows of the fourth gas channels are respectively connected to a plurality of the second gas channels.

2. The air distribution device according to claim 1, characterized in that: The upper cover plate includes a cover plate body and a fixing plate detachably fixed to the upper side of the cover plate body, and a plurality of the first gas source connectors and / or a plurality of the second gas source connectors are arranged on the fixing plate.

3. The air distribution device according to claim 1, characterized in that: A plurality of the first gas source connectors and a plurality of the second gas source connectors are alternately arranged on the upper cover plate along the first direction.

4. The air distribution device according to claim 1, characterized in that: The upper side surface of the splitter plate is alternately provided with a plurality of first strip grooves and a plurality of second strip grooves along a first direction, a plurality of the first air channels are respectively arranged corresponding to the plurality of the first strip grooves, and the air inlet of each row of the third air channels is arranged in the corresponding first strip groove; The plurality of second air passages are respectively arranged corresponding to the plurality of second strip-shaped grooves, and the air inlets of each row of the fourth air passages are arranged in the corresponding second strip-shaped grooves.

5. The air distribution device according to any one of claims 1 to 4, characterized in that: The air distribution device also includes a plurality of nozzles provided on the lower side of the diverter plate, and the plurality of nozzles are respectively arranged corresponding to the plurality of rows of the third air ducts; the nozzle includes an air cavity and a plurality of air inlet holes and a plurality of air outlet holes connected to the air cavity, the air cavity extends along a second direction, the plurality of air inlet holes are arranged at intervals along the second direction and are respectively connected to the plurality of third air ducts in each row of the third air ducts, the plurality of air outlet holes are arranged at intervals along the second direction and are alternately arranged with the plurality of air inlet holes in the second direction; wherein the first direction is perpendicular to the second direction.

6. The air distribution device according to claim 5, characterized in that: The nozzle comprises a rectangular section and a triangular section, the air inlet and the air cavity are arranged on the rectangular section, and the air outlet is arranged on the triangular section.

7. The air distribution device according to any one of claims 1 to 4, characterized in that: The air distribution device also includes a heat insulation ring fixed on the lower side of the upper cover plate, and the heat insulation ring is arranged around the diverter plate.

8. The air distribution device according to claim 7, characterized in that: The heat-insulating ring is a graphite ring, and the air distribution device further comprises a ceramic component arranged between the graphite ring and the upper cover plate, wherein a plurality of the ceramic components are arranged at intervals along the circumference of the graphite ring.

9. The air distribution device according to any one of claims 1 to 4, characterized in that: The upper cover plate is provided with a cooling channel.

10. A MOCVD device, characterized in that: It comprises a reaction chamber and a gas distribution device as described in any one of claims 1 to 9, wherein the gas distribution device covers the reaction chamber.

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