Reciprocating motion system for uniformly depositing diamond film by HFCVD (High Frequency Chemical Vapor Deposition) method

Abstract

The utility model discloses a reciprocating motion system for uniformly depositing a diamond film by an HFCVD (High Frequency Chemical Vapor Deposition) method, and relates to the technical field of film preparation. In order to solve the problems that the space of an existing equipment cavity is limited, a workpiece table must be circular and can do uniform circular motion, and the size and the coating efficiency of the workpiece table are limited, the following technical scheme is provided: the device comprises a reciprocating mechanism box, the workpiece table and an electrode assembly; a rotating disc center shaft, a rotating disc, a rotating disc eccentric shaft and a reciprocating swing assembly are arranged in the reciprocating mechanism box, the rotating disc center shaft is connected to the side wall of the reciprocating mechanism box, one side of the rotating disc is connected to the inner end of the rotating disc center shaft, and the other side of the rotating disc is connected with the inner side of the rotating disc eccentric shaft. And the hot wire is positioned above the workpiece table. According to the utility model, the cavity space of the existing equipment is increased, the workpiece table in other shapes except a circle can do uniform circular motion, and the coating efficiency is obviously improved while the size of the workpiece table is not limited.

Description

Technical Field

[0001] The utility model relates to the technical field of film preparation, in particular to a reciprocating motion system for uniformly depositing diamond films using a HFCVD method. Background Art

[0002] In the field of diamond film deposition technology, the preparation of high-quality diamond coatings has always been a hot topic and a difficult point in research. The traditional chemical vapor deposition (CVD) method, especially the high frequency induction heating chemical vapor deposition (HFCVD) technology, is widely used in the industrial production of diamond films due to its high efficiency, low cost and easy control. However, in the HFCVD process, the quality of diamond films is affected by a combination of factors, among which the mechanical motion mode of the workpiece stage (or stage) is a key parameter.

[0003] In the prior art, in order to improve the uniformity and crystal quality of diamond films, the workpiece stage generally adopts uniform circular motion. In this mode, the workpiece stage carries the sample and performs uniform circular motion synchronously, aiming to achieve uniform deposition of diamond films by dynamically controlling the distribution of parameters such as temperature field and concentration field in the deposition environment. However, this motion mode faces many limitations in practical applications:

[0004] Size and efficiency limitations: Due to the limited space in the equipment chamber, in order to ensure the smooth progress of uniform circular motion, the workpiece stage is usually designed to be circular or approximately circular, which greatly limits the size of the workpiece stage, thereby affecting the number of samples processed in a single deposition and reducing coating efficiency.

[0005] Single motion trajectory: Although uniform circular motion can optimize the deposition effect to a certain extent, the singleness of its motion trajectory may not be able to fully adapt to the deposition requirements of samples of different shapes, sizes or materials, limiting the wide applicability of diamond films in different application fields.

[0006] Increased equipment complexity: In order to achieve precise uniform circular motion, a complex transmission system and control mechanism are required, which not only increases the manufacturing cost and maintenance difficulty of the equipment, but may also introduce additional vibration and noise, affecting the stability of the deposition environment. Utility Model Content

[0007] The utility model aims to provide a reciprocating motion system for uniformly depositing diamond film by HFCVD method, so as to solve the problem that the chamber space of existing equipment is limited and the workpiece table must be round to perform uniform circular motion, which limits the size of the workpiece table and the coating efficiency.

[0008] The technical solution of the utility model to solve the above technical problems is as follows:

[0009] A reciprocating motion system for uniformly depositing a diamond film by an HFCVD method comprises a reciprocating mechanism box, a workpiece table and an electrode assembly; a rotating disc central axis, a rotating disc, a rotating disc eccentric shaft and a reciprocating swing assembly are arranged in the reciprocating mechanism box, the rotating disc central axis is connected to the side wall of the reciprocating mechanism box, one side of the rotating disc is connected to the inner end of the rotating disc central axis, the other side of the rotating disc is connected to the inner side of the rotating disc eccentric shaft, the rotating disc eccentric shaft is connected to the reciprocating swing assembly, the reciprocating swing assembly is connected to the workpiece table, the electrode assembly is arranged on the top of the reciprocating mechanism box, and a hot wire arranged on the top of the electrode assembly is located above the workpiece table.

[0010] Preferably, the reciprocating swing assembly includes a reciprocating swing rod positioning shaft and a reciprocating swing rod, the reciprocating swing rod positioning shaft is installed on the inner wall of the reciprocating mechanism box, one end of the reciprocating swing rod is sleeved on the reciprocating swing rod positioning shaft, the rotating disc eccentric shaft is sleeved on the middle part of the reciprocating swing rod, and the rotating disc eccentric shaft drives the reciprocating swing rod to reciprocate around the reciprocating swing rod positioning shaft.

[0011] Preferably, the reciprocating end of the reciprocating swing rod is sleeved on one end of the reciprocating swing shaft, and the other end of the reciprocating swing shaft is connected to the bottom of the workpiece table.

[0012] Preferably, the reciprocating swing shaft is sleeved on the positioning slide rail, both ends of the positioning slide rail are fixed to the inner wall of the reciprocating mechanism box, and the reciprocating swing shaft reciprocates along the axial direction of the positioning slide rail.

[0013] Preferably, the electrode assembly comprises vertical electrode rods and transverse electrode rods, the vertical electrode rods are symmetrically arranged on the top of the reciprocating mechanism box, the transverse electrode rods are arranged on the top of the vertical electrode rods, and the heating wires are arranged on the top of the transverse electrode rods.

[0014] Preferably, a chamber bottom plate is provided between the vertical electrode rod and the reciprocating mechanism box.

[0015] Preferably, a sliding key is provided between the reciprocating swing shaft and the positioning slide rail.

[0016] The utility model has the following beneficial effects:

[0017] The utility model increases the chamber space of the existing equipment, and the workpiece table can also perform uniform circular motion when it is in shapes other than circular. The size of the workpiece table is not limited, and the coating efficiency is significantly improved.

[0018] Improve deposition uniformity: The reciprocating motion system of the utility model enables the diamond film to evenly receive the heat source generated by the hot wire during the deposition process through the reciprocating motion of the workpiece table, thereby avoiding the problem of uneven deposition that may occur in traditional static deposition methods and significantly improving the deposition uniformity of the film.

[0019] Improve film quality: The uniform deposition process helps reduce defects, cracks and impurities in the film, making the diamond film have higher crystal quality and better physical and chemical properties, such as hardness, wear resistance, thermal conductivity, etc.

[0020] Enhanced production efficiency: The system of the utility model has a compact structure and is easy to operate. It can stably and reliably achieve continuous and uniform deposition of diamond films, improve production efficiency, and reduce production costs. At the same time, due to the improvement of film quality, the need for subsequent processing and treatment is also reduced, further improving the overall production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a three-dimensional structural diagram of the reciprocating motion system of the utility model;

[0022] Figure 2 This is the internal structure diagram of the reciprocating motion system of the utility model;

[0023] Figure 1 to Figure 2 The reference numerals shown in the figure respectively represent: reciprocating mechanism box 1, workpiece table 2, rotating disk center axis 31, rotating disk 32, rotating disk eccentric axis 33, reciprocating swing rod positioning axis 41, reciprocating swing rod 42, reciprocating swing axis 43, positioning slide rail 44, vertical electrode rod 51, horizontal electrode rod 52, chamber bottom plate 6, hot wire 7. DETAILED DESCRIPTION

[0024] The following is a clear and complete description of the technical solution of the utility model in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the utility model.

[0025] Please refer to Figure 1-2 The utility model provides a reciprocating motion system for uniformly depositing a diamond film by a HFCVD method, which mainly comprises a reciprocating mechanism box 1, a workpiece table 2 and an electrode assembly.

[0026] The reciprocating mechanism box 1 is provided with a rotating disc central shaft 31, a rotating disc 32, a rotating disc eccentric shaft 33 and a reciprocating swinging assembly.

[0027] The electrode assembly is arranged on the top of the reciprocating mechanism box 1 , including a vertical electrode rod 51 and a horizontal electrode rod 52 , and the hot wire 7 arranged on the top of the electrode assembly is located above the workpiece table 2 .

[0028] Internal structure of reciprocating mechanism box:

[0029] The central axis 31 of the rotating disc is connected to the side wall of the reciprocating mechanism box 1 and serves as the main support and power input point of the rotating disc 32 .

[0030] One side of the rotating disc 32 is connected to the inner end of the rotating disc central shaft 31 , and the other side is connected to the inner side of the rotating disc eccentric shaft 33 .

[0031] The reciprocating swing assembly includes a reciprocating swing rod positioning shaft 41 and a reciprocating swing rod 42. The reciprocating swing rod positioning shaft 41 is installed on the inner wall of the reciprocating mechanism box 1, and one end of the reciprocating swing rod 42 is sleeved on the reciprocating swing rod positioning shaft 41, and the middle part is sleeved with a rotating disc eccentric shaft 33.

[0032] Reciprocating motion realization method:

[0033] When the power source provides power to the central axis 31 of the rotating disk, the rotating disk 32 performs a circular motion accordingly.

[0034] The circular motion of the rotating disc 32 drives the eccentric shaft 33 to perform uniform circular motion. Since the eccentric shaft 33 is connected to the reciprocating swing rod 42, one end of the reciprocating swing rod 42 performs reciprocating motion within a certain distance.

[0035] The reciprocating end of the reciprocating swing rod 42 is sleeved on one end of the reciprocating swing shaft 43, and the other end of the reciprocating swing shaft 43 is connected to the bottom of the workpiece platform 2, thereby driving the workpiece platform 2 to perform the same reciprocating motion.

[0036] Guiding and supporting of reciprocating swing shaft:

[0037] The reciprocating swing shaft 43 is sleeved on the positioning slide rail 44 , and both ends of the positioning slide rail 44 are fixed to the inner wall of the reciprocating mechanism box 1 to ensure that the reciprocating swing shaft 43 can reciprocate along the axial direction of the positioning slide rail 44 .

[0038] In order to enhance the sliding stability and accuracy of the reciprocating swing shaft 43 on the positioning slide rail 44, a sliding key (not shown in the figure) may be provided between the two.

[0039] Electrode assembly and hot wire 7 settings:

[0040] The vertical electrode rods 51 are symmetrically arranged on the top of the reciprocating mechanism box 1 , and the transverse electrode rods 52 are arranged on the top of the vertical electrode rods 51 .

[0041] The hot wire 7 is arranged on the top of the transverse electrode rod 52, above the workpiece stage 2, and is used to provide a heat source required for depositing the diamond film.

[0042] A chamber bottom plate 6 is provided between the vertical electrode rod 51 and the reciprocating mechanism box 1 for separating the vacuum chamber.

[0043] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

Claims

1. A reciprocating motion system for uniformly depositing diamond film by HFCVD method, characterized in that: include: A reciprocating mechanism box (1), a workpiece table (2) and an electrode assembly; the reciprocating mechanism box (1) is provided with a rotating disk central axis (31), a rotating disk (32), a rotating disk eccentric axis (33) and a reciprocating swinging assembly, the rotating disk central axis (31) is connected to the side wall of the reciprocating mechanism box (1), one side of the rotating disk (32) is connected to the inner end of the rotating disk central axis (31), the other side of the rotating disk (32) is connected to the inner side of the rotating disk eccentric axis (33), the rotating disk eccentric axis (33) is connected to the reciprocating swinging assembly, the reciprocating swinging assembly is connected to the workpiece table (2), the electrode assembly is arranged on the top of the reciprocating mechanism box (1), and the hot wire (7) arranged on the top of the electrode assembly is located above the workpiece table.

2. The reciprocating motion system for uniformly depositing diamond thin film by HFCVD method according to claim 1, characterized in that: The reciprocating swing assembly comprises a reciprocating swing rod positioning shaft (41) and a reciprocating swing rod (42), wherein the reciprocating swing rod positioning shaft (41) is mounted on the inner wall of the reciprocating mechanism box (1), one end of the reciprocating swing rod (42) is sleeved on the reciprocating swing rod positioning shaft (41), the rotating disc eccentric shaft (33) is sleeved on the middle part of the reciprocating swing rod (42), and the rotating disc eccentric shaft (33) drives the reciprocating swing rod (42) to reciprocate around the reciprocating swing rod positioning shaft (41).

3. The reciprocating motion system for uniformly depositing diamond thin film by HFCVD method according to claim 2, characterized in that: The reciprocating end of the reciprocating swing rod (42) is sleeved on one end of the reciprocating swing shaft (43), and the other end of the reciprocating swing shaft (43) is connected to the bottom of the workpiece platform (2).

4. The reciprocating motion system for uniformly depositing diamond thin film by HFCVD method according to claim 3, characterized in that: The reciprocating swing shaft (43) is sleeved on a positioning slide rail (44), both ends of the positioning slide rail (44) are fixed to the inner wall of the reciprocating mechanism box (1), and the reciprocating swing shaft (43) reciprocates along the axial direction of the positioning slide rail (44).

5. The reciprocating motion system for uniformly depositing diamond thin film by HFCVD method according to claim 1, characterized in that: The electrode assembly comprises a vertical electrode rod (51) and a transverse electrode rod (52); the vertical electrode rod (51) is symmetrically arranged on the top of the reciprocating mechanism box (1); the transverse electrode rod (52) is arranged on the top of the vertical electrode rod (51); and the hot wire (7) is arranged on the top of the transverse electrode rod (52).

6. The reciprocating motion system for uniformly depositing diamond thin films by HFCVD method according to claim 5, characterized in that: A chamber bottom plate (6) is provided between the vertical electrode rod (51) and the reciprocating mechanism box (1).

7. The reciprocating motion system for uniformly depositing diamond thin films by HFCVD method according to claim 4, characterized in that: A sliding key is provided between the reciprocating swing shaft (43) and the positioning slide rail (44).

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