Vapor deposition furnace cooling device

Abstract

The utility model belongs to the field of vapor deposition furnaces, and particularly relates to a vapor deposition furnace cooling device which comprises a cooling cylinder. The side surface of the cooling cylinder is fixedly connected with a bracket; a cooling frame is arranged in the cooling cylinder; a plurality of cooling pipes are arranged on the cooling frame; the cooling pipe is designed to be of an L-shaped structure; a plurality of spray heads are fixedly connected to the cooling pipe; by arranging a plurality of cooling pipes, sprayers, a cooling frame, an annular pipeline and a water injection pipe, during use, a cooling cylinder sleeves a reaction chamber, the cooling frame is used for fixing the cooling pipes, and then cooling water pumped from the outside is conveyed to the annular pipeline through the water injection pipe, then is shunted to the plurality of cooling pipes and is sprayed on the reaction chamber through the sprayers; the plurality of cooling pipes are arranged, the plurality of cooling pipes are annularly distributed, and the reaction chamber is positioned in the middle of the plurality of annularly distributed cooling pipes, so that the spraying area of cooling water is increased, and the cooling uniformity of the reaction chamber can be improved.

Description

Technical Field

[0001] The utility model relates to the field of vapor deposition furnaces, in particular to a vapor deposition furnace cooling device. Background Art

[0002] The vapor deposition furnace is a special industrial equipment, which is mainly used for the preparation of pyrolytic carbon coating on the surface of graphite, semiconductor devices and heat-resistant erosion materials, such as thin film material coating, hard coating and anti-corrosion coating.

[0003] In the current existing technology, the vapor deposition furnace is mainly composed of a workbench, a cooling cylinder, a heating cylinder, a reaction chamber and a robotic arm, wherein the reaction chamber is installed on the workbench, and the cooling cylinder and the heating cylinder are also placed on the workbench respectively. When heating is required, the robotic arm grabs the heating cylinder and puts it on the reaction chamber. When a cooling chamber is needed, the cooling cylinder is grabbed and put on the reaction chamber. There are two cooling methods, namely forced air cooling and spray water cooling. The cooling cylinder of the spray water cooling is provided with a cooling pipe inside, and a nozzle is installed on the cooling pipe. The cooling water is pumped to the cooling pipe by an external pump, and then the cooling water is sprayed on the reaction chamber to complete the cooling of the reaction chamber.

[0004] However, in the current prior art, the spraying range of cooling water is relatively single and the cooling area is small, which leads to poor cooling uniformity of the reaction chamber; therefore, a vapor deposition furnace cooling device is proposed to address the above problem. Utility Model Content

[0005] In order to make up for the deficiencies of the prior art and solve at least one technical problem raised in the background technology, the utility model proposes a cooling device for a vapor deposition furnace.

[0006] The technical solution adopted by the utility model to solve its technical problems is: the utility model describes a vapor deposition furnace cooling device, comprising a cooling cylinder; a bracket is fixedly connected to the side of the cooling cylinder; a cooling rack is arranged inside the cooling cylinder; a plurality of cooling pipes are arranged on the cooling rack; the cooling pipe is designed in an L-shaped structure; a plurality of nozzles are fixedly connected to the cooling pipe; a plurality of cooling pipes are distributed in a ring shape on the cooling rack; an annular pipe is fixedly connected to the inner side wall at the top of the cooling cylinder; the annular pipe and the cooling pipe are connected by a pipe joint; a water injection pipe is fixedly connected to the top of the annular pipe.

[0007] Preferably, a motor is fixedly connected to the top of the cooling cylinder; a transmission shaft is fixedly connected to the output end of the motor; the bottom end of the transmission shaft is fixedly connected to the cooling rack; the annular pipe includes an annular tube seat and a top seat; the top seat is fixedly connected to the inner wall of the cooling cylinder; the annular tube seat is rotatably connected to the top seat; the annular tube seat and the cooling tube are connected via a pipe joint.

[0008] Preferably, a base is provided at the bottom of the cooling cylinder; the bottom of the cooling tube is inserted into the interior of the base and is slidably connected thereto; a water collecting bucket is fixedly connected to the middle of the base; the water collecting bucket is a concave structure; a through groove is opened in the middle of the water collecting bucket; and a drainage pipe is fixedly connected to the bottom of the water collecting bucket.

[0009] Preferably, a plurality of electric push rods are fixedly connected to the bottom of the cooling cylinder; a push plate is fixedly connected to the output end of the electric push rod; a fixing groove is provided at the bottom of the push plate; a connecting seat is fixedly connected to the side wall of the base at a position corresponding to the fixing groove; and the connecting seat is designed as a trapezoidal structure.

[0010] Preferably, a support is fixedly connected to the bottom of the cooling cylinder; an annular groove is opened in the middle of the support; a slider is slidably connected in the annular groove; and the slider is fixedly connected to the bottom of the cooling rack.

[0011] Preferably, a rubber ring is fixed to the bottom of the cooling cylinder.

[0012] The utility model is beneficial in that:

[0013] 1. The utility model is provided with a plurality of cooling tubes, nozzles, cooling racks, annular pipes and water injection pipes. When in use, the cooling tube is sleeved on the reaction chamber, the cooling rack is used to fix the cooling tube, and then the cooling water pumped from the outside is delivered to the annular pipe through the water injection pipe, and then divided to the plurality of cooling tubes, and then sprayed on the reaction chamber through the nozzle, so as to cool the reaction chamber. In particular, by providing a plurality of cooling tubes, and the plurality of cooling tubes are distributed in an annular shape, and the reaction chamber is located in the middle of the plurality of cooling tubes distributed in an annular shape, the spraying area of ​​the cooling water is increased, and the uniformity of the cooling of the reaction chamber can be improved;

[0014] 2. The utility model is provided with a motor, a rotating shaft, a top seat and an annular tube seat. When in use, the motor can drive the transmission shaft to rotate, and then drive the cooling rack to rotate, thereby improving the uniformity of cooling water spraying, and then improving the uniformity of cooling. During the rotation of the rotating shaft, the annular tube seat will slide on the top seat, and the cold water in the water injection pipe will be sent into the annular tube seat, and then injected into the cooling pipe for spraying. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0016] Figure 1 It is a structural schematic diagram of the utility model;

[0017] Figure 2 This is a schematic diagram of the cross-sectional structure of the cooling cylinder of the utility model;

[0018] Figure 3 This is a schematic diagram of the push plate structure of the utility model;

[0019] Figure 4 This is a schematic diagram of the cooling rack structure of the utility model;

[0020] Figure 5 It is a structural schematic diagram of the water collecting bucket of the utility model.

[0021] In the figure: 11, cooling cylinder; 12, cooling rack; 13, cooling pipe; 14, nozzle; 15, water injection pipe; 21, motor; 22, transmission shaft; 23, top seat; 24, annular pipe seat; 31, base; 32, water collecting bucket; 33, through groove; 41, electric push rod; 42, push plate; 43, connecting seat; 51, support; 52, slider; 53, annular groove; 61, rubber ring; 7, pulley. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] Specific examples are given below.

[0024] See also Figure 1-2As shown in Figure 4, a vapor deposition furnace cooling device comprises a cooling cylinder 11; a bracket is fixedly connected to the side of the cooling cylinder 11; a cooling rack 12 is arranged inside the cooling cylinder 11; a plurality of cooling pipes 13 are arranged on the cooling rack 12; the cooling pipe 13 is designed in an L-shaped structure; a plurality of nozzles 14 are fixedly connected to the cooling pipe 13; a plurality of cooling pipes 13 are distributed in an annular shape on the cooling rack 12; an annular pipe is fixedly connected to the inner side wall of the top of the cooling cylinder 11; the annular pipe is connected to the cooling pipe 13 through a pipe joint; the top of the annular pipe A water injection pipe 15 is fixedly connected; when in use, the cooling cylinder 11 is sleeved on the reaction chamber, and the cooling frame 12 is used to fix the cooling pipe 13, and then the cooling water pumped from the outside is transported to the annular pipeline through the water injection pipe 15, and then divided to multiple cooling pipes 13, and then sprayed on the reaction chamber through the nozzle 14, so as to cool the reaction chamber, wherein multiple cooling pipes 13 are arranged, and the multiple cooling pipes 13 are annularly distributed, and the reaction chamber is located in the middle of the multiple annularly distributed cooling pipes 13, so as to increase the spraying area of ​​the cooling water and improve the uniformity of the cooling of the reaction chamber.

[0025] Further, such as Figure 2 and 4 As shown, a motor 21 is fixedly connected to the top of the cooling cylinder 11; a transmission shaft 22 is fixedly connected to the output end of the motor 21; the bottom end of the transmission shaft 22 is fixedly connected to the cooling rack 12; the annular pipe includes an annular pipe seat 24 and a top seat 23; the top seat 23 is fixedly connected to the inner wall of the cooling cylinder 11; the annular pipe seat 24 is rotatably connected to the top seat 23; the annular pipe seat 24 and the cooling pipe 13 are connected via a pipe joint; when in use, the motor 21 can drive the transmission shaft 22 to rotate, and then drive the cooling rack 12 to rotate, so as to improve the uniformity of cooling water spraying, and then improve the uniformity of cooling and cooling. During the rotation of the shaft, the annular pipe seat 24 will slide on the top seat 23, and the cold water in the water injection pipe 15 will be sent into the annular pipe seat 24, and then injected into the cooling pipe 13 for spraying.

[0026] Further, such as Figure 2 and 5 As shown, a base 31 is provided at the bottom of the cooling cylinder 11; the bottom of the cooling tube 13 is inserted into the interior of the base 31 and is slidably connected thereto; a water collecting bucket 32 ​​is fixedly connected to the middle of the base 31; the water collecting bucket 32 ​​is a concave structure; a through groove 33 is provided in the middle of the water collecting bucket 32; a drainage pipe is fixedly connected to the bottom of the water collecting bucket 32; when in use, the base 31 is installed on the workbench of the vapor deposition furnace, and the reaction chamber of the vapor deposition furnace is installed on the through groove 33 in the middle of the water collecting bucket 32. The downward movement of the cooling cylinder 11 will cause its bottom to be inserted into the interior of the base 31, and the water vapor and cooling water generated by cooling will be collected by the water collecting bucket 32 ​​and discharged through the drainage pipe.

[0027] Further, such as Figure 2-3 As shown, a plurality of electric push rods 41 are fixedly connected to the bottom of the cooling cylinder 11; a push plate 42 is fixedly connected to the output end of the electric push rod 41; a fixing groove is opened at the bottom of the push plate 42; a connecting seat 43 is fixedly connected to the side wall of the base 31 at a position corresponding to the fixing groove; the connecting seat 43 is designed as a trapezoidal structure; when in use, the cooling cylinder 11 is inserted into the interior of the base 31, and then the electric push rod 41 is started to pull the push plate 42 to move, and the movement of the push plate 42 will cause the connecting seat 43 to be inserted into the fixing groove. During the insertion process, the push plate 42 and the connecting seat 43 cooperate with each other, so as to improve the connection fit between the base 31 and the cooling cylinder 11, so as to reduce the gap at the connection. Since the cooling water sprays the high-temperature reaction chamber, it will generate a large amount of high-temperature water vapor. By improving the connection fit between the base 31 and the cooling cylinder 11, the leakage of high-temperature water vapor can be reduced.

[0028] Further, such as Figure 2 As shown, a support 51 is fixedly connected to the bottom of the cooling cylinder 11; an annular groove 53 is opened in the middle of the support 51; a slider 52 is slidably connected in the annular groove 53; the slider 52 is fixedly connected to the bottom of the cooling rack 12; when in use, the rotation of the cooling rack 12 will drive the slider 52 to slide in the annular groove 53, and the cooling rack 12 is supported by the annular groove 53 and the slider 52 on the support 51, thereby improving the rotation stability of the cooling rack 12.

[0029] Further, such as Figure 2 As shown, a rubber ring 61 is fixed to the bottom of the cooling cylinder 11; when in use, the rubber ring 61 is provided to further improve the sealing between the cooling cylinder 11 and the base 31, thereby reducing the high-temperature water vapor ejected from between the bottom of the cooling cylinder 11 and the base 31 during the cooling process.

[0030] Further, such as Figure 3 As shown, the bottom of the fixed groove is rotatably connected with a pulley 7. When in use, the pulley 7 is set to reduce the contact friction between the fixed groove of the push plate 42 and the connecting seat 43, thereby facilitating the movement of the push plate 42.

[0031] Working principle: when in use, the cooling cylinder 11 is put on the reaction chamber, the cooling frame 12 is used to fix the cooling pipe 13, and then the cooling water pumped from the outside is delivered to the annular pipe through the water injection pipe 15, and then divided to multiple cooling pipes 13, and then sprayed on the reaction chamber through the nozzle 14, so as to cool the reaction chamber, wherein multiple cooling pipes 13 are arranged, and the multiple cooling pipes 13 are distributed in an annular shape, and the reaction chamber is located in the middle of the multiple cooling pipes 13 distributed in an annular shape, so as to increase the spraying area of ​​the cooling water and improve the uniformity of the cooling of the reaction chamber, and the motor 21 can drive The transmission shaft 22 rotates, which can drive the cooling rack 12 to rotate, so as to improve the uniformity of cooling water spraying, and thus improve the uniformity of cooling. During the rotation of the shaft, its annular tube seat 24 will slide on the top seat 23, and the cold water in the water injection pipe 15 will be sent into the annular tube seat 24, and then injected into the cooling tube 13 for spraying. The base 31 is installed on the workbench of the vapor deposition furnace, and the reaction chamber of the vapor deposition furnace is installed on the through groove 33 in the middle of the water collecting bucket 32. The downward movement of the cooling tube 11 will cause its bottom to be inserted into the interior of the base 31, and the cooling The generated water vapor and cooling water will be collected by the water collecting bucket 32 ​​and discharged through the drain pipe. When in use, the cooling cylinder 11 is inserted into the interior of the base 31, and then the electric push rod 41 is started to pull the push plate 42 to move. The movement of the push plate 42 will cause the connecting seat 43 to be inserted into the fixed groove. During the insertion process, the push plate 42 and the connecting seat 43 cooperate to improve the connection fit between the base 31 and the cooling cylinder 11, thereby reducing the gap at the connection. Since the cooling water sprays the high-temperature reaction chamber, it will generate a large amount of high-temperature water vapor, relying on improving the base The connection fit between 31 and the cooling cylinder 11 can reduce the leakage of high-temperature water vapor. When in use, the rotation of the cooling rack 12 will drive the slider 52 to slide in the annular groove 53, and the cooling rack 12 is supported by the annular groove 53 and the slider 52 on the support 51, so as to improve the rotation stability of the cooling rack 12. By setting the rubber ring 61, the fit and sealing between the cooling cylinder 11 and the base 31 can be further improved, thereby reducing the high-temperature water vapor ejected from the bottom of the cooling cylinder 11 and the base 31 during the cooling process.

[0032] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0033] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, and these changes and improvements fall within the scope of the utility model to be protected.

Claims

1. A cooling device for a vapor deposition furnace, comprising a cooling cylinder (11); a bracket is fixedly connected to the side of the cooling cylinder (11); characterized in that: A cooling rack (12) is provided inside the cooling cylinder (11); a plurality of cooling pipes (13) are provided on the cooling rack (12); the cooling pipe (13) is designed in an L-shaped structure; a plurality of nozzles (14) are fixedly connected to the cooling pipe (13); the plurality of cooling pipes (13) are distributed in a ring shape on the cooling rack (12); an annular pipe is fixedly connected to the inner side wall of the top of the cooling cylinder (11); the annular pipe and the cooling pipe (13) are connected via a pipe joint; and a water injection pipe (15) is fixedly connected to the top of the annular pipe.

2. A vapor deposition furnace cooling device according to claim 1, characterized in that: The top of the cooling cylinder (11) is fixedly connected to a motor (21); the output end of the motor (21) is fixedly connected to a transmission shaft (22); the bottom end of the transmission shaft (22) is fixedly connected to a cooling rack (12); the annular pipe comprises an annular pipe seat (24) and a top seat (23); the top seat (23) is fixedly connected to the inner wall of the cooling cylinder (11); the annular pipe seat (24) is rotatably connected to the top seat (23); the annular pipe seat (24) and the cooling pipe (13) are connected via a pipe joint.

3. A vapor deposition furnace cooling device according to claim 2, characterized in that: A base (31) is provided at the bottom of the cooling cylinder (11); the bottom of the cooling tube (13) is inserted into the interior of the base (31) and is slidably connected thereto; a water collecting bucket (32) is fixedly connected to the middle of the base (31); the water collecting bucket (32) is a concave structure; a through groove (33) is provided in the middle of the water collecting bucket (32); and a drainage pipe is fixedly connected to the bottom of the water collecting bucket (32).

4. A vapor deposition furnace cooling device according to claim 3, characterized in that: A plurality of electric push rods (41) are fixedly connected to the bottom of the cooling cylinder (11); a push plate (42) is fixedly connected to the output end of the electric push rod (41); a fixing groove is provided at the bottom of the push plate (42); a connecting seat (43) is fixedly connected to a position on the side wall of the base (31) corresponding to the fixing groove; the connecting seat (43) is designed as a trapezoidal structure.

5. The cooling device for a vapor deposition furnace according to claim 3, characterized in that: A support (51) is fixedly connected to the bottom of the cooling cylinder (11); an annular groove (53) is provided in the middle of the support (51); a sliding block (52) is slidably connected in the annular groove (53); and the sliding block (52) is fixedly connected to the bottom of the cooling rack (12).

6. The vapor deposition furnace cooling device according to claim 3, characterized in that: A rubber ring (61) is fixedly connected to the bottom of the cooling cylinder (11).

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