Door window of spin dryer and spin dryer
By designing the two-part dryer door window, the combination of transparent and opaque materials is used to solve the problem of easy bursting in the high-speed rotation of the sealing capsule, reducing maintenance costs and downtime, and ensuring stable operation of the production line.
Patent Information
- Application Number
- CN202421767432.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-24
- Publication Date
- 2025-04-25
- Estimated Expiration
- 2034-07-24
AI Technical Summary
Because the existing SEMITOOL dryer doors and windows are made of brittle transparent glass, the surrounding area of the sealing capsule is prone to burst during high-speed rotation, resulting in damage to the window, reduced sealing performance, increased maintenance costs and reduced production efficiency.
A two-part dryer door window is designed. The window body is a transparent material and the carrier member is an opaque material. The window body is detachably fixed to the carrier through a fixing member to cover the weak area around the sealing capsule.
It reduces the risk of rupture caused by material brittleness, reduces maintenance costs and downtime, and ensures the continuous and stable operation of the production line.
Smart Images
Figure CN222799436U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of industrial equipment manufacturing, and in particular to a dryer door window and a dryer. Background Art
[0002] The SEMITOOL spin dryer is an industrial-grade device specifically designed for the semiconductor manufacturing industry. Its primary function is to efficiently dry silicon wafers using centrifugal force, ensuring they remain dry and clean during subsequent manufacturing steps. This is crucial for ensuring the performance and quality of semiconductor devices. A U-shaped, air-filled capsule is embedded in a groove around the SEMITOOL spin dryer's door window to prevent water and nitrogen leakage, maintaining the equipment's seal and operational safety.
[0003] However, the existing SEMITOOL dryer door window is an integrated structure made of transparent glass. Due to the brittle nature of this material, the thin perimeter of the sealing capsule is prone to cracking during the dryer's high-speed rotation. This cracking not only damages the window but also affects the sealing performance of the capsule, increasing maintenance costs, reducing production efficiency, and affecting the continuous operation of the production line. Utility Model Content
[0004] In order to overcome the technical problems mentioned in the above technical background, an embodiment of the present application provides a dryer door window, wherein the dryer door window includes a window body, a window carrier and a fixing member;
[0005] The window body is a transparent window body, and the window body includes at least one first fixing through hole arranged near the edge of the window body;
[0006] The window carrier is opaque, includes an opening, and includes at least one second fixing through hole disposed adjacent to the opening, wherein the first fixing through hole and the second fixing through hole are disposed correspondingly;
[0007] The fixing member detachably fixes the window body to the window carrier through the first fixing through hole and the second fixing through hole, wherein the window body covers the opening.
[0008] In a possible implementation, the window body further includes a first window body and a second window body, the geometric centers of the first window body and the second window body overlap, the first window body is circular, and the second window body is annular, wherein at least one first fixing through hole is provided on the second window body;
[0009] There are a plurality of first fixing through holes, and the first fixing through holes are centrally symmetrically distributed about the center of the window body.
[0010] In a possible implementation, the window carrier is annular, and further includes a first annular fixing member and a second annular fixing member, wherein the first annular fixing member is inscribed in the inner side of the second annular fixing member;
[0011] The first annular fixing member and the second annular fixing member form a supporting step for supporting the window body, wherein the supporting step is used to support the second window body, and the height of the supporting step is the same as the thickness of the second window body;
[0012] At least one second fixing through hole is provided on the first annular fixing member, and there are a plurality of second fixing through holes, which are centrally symmetrically distributed about the center of the window carrier.
[0013] In a possible implementation, the inner diameter of the opening of the window carrier is the same as the diameter of the first window body, wherein the size of the opening accounts for 1 / 3 to 2 / 3 of the size of the dryer door window.
[0014] In a possible implementation, the first window body and the second window body are integrally formed, and the first annular fixing member and the second annular fixing member are also integrally formed.
[0015] In one possible implementation, the dryer door window further includes a seal, which is located between the second window body and the first annular fixing member and is arranged close to the first annular fixing member, and is used to seal the connection surface between the window body and the window carrier.
[0016] In a possible implementation, the dryer door window further includes an expansion member, and the window carrier includes a receiving groove for receiving the expansion member, and the receiving groove is provided on the outer periphery of the second annular fixing member away from the opening.
[0017] In a possible implementation, the walls of the first fixing through hole and the second fixing through hole are provided with threads, and the fixing member is engaged with the first fixing through hole and the second fixing through hole through threads to fix the window body to the window carrier;
[0018] The fixing member is a screw.
[0019] In a possible implementation, the window body is made of polyvinyl chloride, and the window carrier is made of polypropylene.
[0020] Another object of the present application is to provide a dryer, comprising a dryer door frame and a plurality of the dryer door windows provided by the present application, wherein the dryer door windows are arranged on the dryer door frame.
[0021] Based on any of the above aspects, the embodiments of the present application provide a door window for a spin dryer and a spin dryer. By constructing the SEMITOOL spin dryer door window in two parts and reusing a non-fragile material around the sealing capsule, not only does this reduce the risk of breakage due to material brittleness, but it also reduces repair costs and downtime caused by damage to the door window, ensuring the continued stable operation of the production line. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.
[0023] Figure 1 This is one of the schematic diagrams of a dryer door window provided in this embodiment;
[0024] Figure 2 This is one of the partial structural diagrams of a dryer door window provided in this embodiment;
[0025] Figure 3 This is a second partial structural diagram of a dryer door window provided in this embodiment;
[0026] Figure 4 This is a second schematic diagram of a dryer door window provided in this embodiment;
[0027] Figure 5 This is a schematic diagram of the dryer provided in this embodiment.
[0028] Icons: 10-dryer door window, 20-window body, 30-window bearing member, 40-fixing member, 50-seal, 60-expansion member, 70-through hole, 80-dryer, 200-first fixed through hole, 210-first window body, 220-second window body, 300-opening, 310-second fixed through hole, 320-first annular fixing member, 330-second annular fixing member, 340-bearing step, 350-accommodation groove, 800-dryer door frame. DETAILED DESCRIPTION
[0029] To make the objectives, technical solutions, and advantages of the embodiments of the present application more clear, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Generally, the components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.
[0030] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for protection, but merely represents selected embodiments of the present application. All other embodiments obtained by persons of ordinary skill in the art based on the embodiments in the present application without creative work are within the scope of protection of the present application.
[0031] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.
[0032] In the description of this application, it should be noted that the terms "upper" and "lower" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or the orientations or positional relationships in which the product of this application is typically placed when in use. These terms are intended solely to facilitate the description of this application and simplify the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first" and "second" and the like are used solely for distinction and should not be construed as indicating or implying relative importance.
[0033] It should be noted that, in the absence of conflict, different features in the embodiments of the present application can be combined with each other.
[0034] In order to solve the technical problems mentioned in the above background technology, the inventors innovatively designed the following technical solutions, and the specific implementation solutions of this application will be described in detail with reference to the accompanying drawings.
[0035] See Figure 1 , Figure 1 Schematic diagram of a dryer door window 10 provided in this embodiment. The dryer door window 10 includes a window body 20, a window carrier 30 and a fixing member 40.
[0036] See Figure 2 , Figure 2 Schematic diagram of the window body 20 provided in this embodiment. The window body 20 is a transparent window body, and the window body 20 includes at least one first fixing through hole 200 arranged near the edge of the window body 20.
[0037] It is worth noting that the window body 20 is mainly used to observe the internal situation of the dryer.
[0038] See Figure 2 and Figure 3 , Figure 3 Schematic diagram of a window carrier 30 provided in this embodiment. The window carrier 30 is opaque and includes an opening 300. The window carrier 30 includes at least one second fixing hole 310 disposed adjacent to the opening 300. The first fixing hole 200 and the second fixing hole 310 are disposed correspondingly.
[0039] See Figure 1 , Figure 2 and Figure 3 The fixing member 40 detachably fixes the window body 20 on the window carrier 30 through the first fixing through hole 200 and the second fixing through hole 310 , wherein the window body 20 covers the opening 300 .
[0040] Further, see Figure 2 The window body 20 also includes a first window body 210 and a second window body 220, the geometric centers of the first window body 210 and the second window body 220 overlap, the first window body 210 is circular, and the second window body 220 is annular, wherein at least one of the first fixing through holes 200 is set on the second window body 220.
[0041] It is worth noting that the operator mainly observes the internal situation of the dryer through the first window body 210 , and the second window body 220 is mainly used to fix the window body 20 on the window carrier 30 .
[0042] There are multiple first fixing holes 200, and the first fixing holes 200 are centrally symmetrically distributed about the center of the window body 20. For example, when the number of the first fixing holes 200 is 4, the distribution of the first fixing holes 200 is as follows: Figure 2 shown.
[0043] Further, see Figure 3 The window carrier 30 is annular and further includes a first annular fixing member 320 and a second annular fixing member 330 . The first annular fixing member 320 is inscribed on the inner side of the second annular fixing member 330 .
[0044] See Figure 4 , Figure 4This is a front view of a dryer door window 10 provided in this embodiment. The first annular fixing member 320 and the second annular fixing member 330 form a supporting step 340 for supporting the window body 20. The supporting step 340 is used to support the second window body 220, and the height of the supporting step 340 is the same as the thickness of the second window body 220.
[0045] In this embodiment, the height of the first annular fixing member 320 is smaller than that of the second annular fixing member 330, so the first annular fixing member 320 and the second annular fixing member 330 form a supporting step 340. The height of the supporting step 340 is the same as the thickness of the second window body 220, so that the window body 20 can be matched with the window carrier 30, and the first window body 210 can cover the opening 300 of the window carrier 30.
[0046] See Figure 3 At least one second fixing through hole 310 is set on the first annular fixing member 320, and there are multiple second fixing through holes 310. The second fixing through holes 310 are centrally symmetrically distributed about the center of the window carrier 30.
[0047] In this embodiment, at least one first fixing through hole 200 is corresponding to at least one second fixing through hole 310, so the first fixing through holes 200 and the second fixing through holes 310 are distributed in the same manner. For example, when the number of the second fixing through holes 310 is 4, the distribution of the second fixing through holes 310 is as follows: Figure 3 shown.
[0048] It is worth noting that the number of the first fixing through holes 200 and the second fixing through holes 310 is not specifically limited here, but the size, number and distribution of the first fixing through holes 200 and the second fixing through holes 310 should be the same to ensure the reasonable fixation of the window body 20 and the window carrier 30.
[0049] Further, see Figure 4 The inner diameter d1 of the opening 300 of the window carrier 30 is the same as the diameter d2 of the first window body. The size of the opening 300 is 1 / 3 to 2 / 3 of the size of the dryer door window 10. For example, the size of the opening 300 is 1 / 3, 4 / 11, 2 / 5, 4 / 9, 1 / 2, 4 / 7, and 2 / 3 of the size of the dryer door window 10. Preferably, the size of the opening 300 is 1 / 2 of the size of the dryer door window 10.
[0050] Furthermore, the first window body 210 and the second window body 220 are integrally formed, and the first annular fixing member 320 and the second annular fixing member 330 are also integrally formed.
[0051] Further, see Figure 4 The dryer door window 10 also includes a seal 50, which is located between the second window body 220 and the first annular fixing member 320, and is arranged close to the first annular fixing member 320. The seal 50 is used to seal the connection surface between the window body 20 and the window carrier 30.
[0052] In this embodiment, the seal 50 can be silicone rubber, which has good elasticity and sealing properties. It is set on the connecting surface between the window body 20 and the window carrier 30 (that is, the connecting surface between the second window body 220 and the first annular fixing member 320), which can improve the durability and sealing of the door window and reduce equipment failures caused by poor sealing.
[0053] It is worth noting that the material of the sealing member 50 is not limited here, but needs to be selected according to actual conditions.
[0054] Further, please see again Figure 4 The dryer door window further includes an expansion member 60 , and the window carrier 40 includes a receiving groove 350 for receiving the expansion member 60 . The receiving groove 350 is arranged on the outer periphery of the second annular fixing member 330 away from the opening 300 .
[0055] In this embodiment, the second annular fixing member 330 is a circular ring, and the receiving groove 350 is arranged along the circumference of the second annular fixing member 330. The expansion member 60 can be a sealed capsule. Nitrogen is filled into the sealed capsule, which swells and seals against the dryer door frame to prevent water and nitrogen from leaking from the dryer.
[0056] It is worth noting that the expansion member 60 is not specifically limited here, but its shape and size need to be selected according to the shape and size of the accommodating groove 350 .
[0057] Further, please see again Figure 4 , please set threads on the hole walls of the first fixing through hole 200 and the second fixing through hole 310, and the fixing member 40 is screwed together with the first fixing through hole 200 and the second fixing through hole 310 to fix the window body 20 on the window carrier 30.
[0058] In this embodiment, the fixing member 40 is a screw.
[0059] Furthermore, the window body 20 is made of materials including but not limited to polyvinyl chloride (PVC). In this embodiment, PVC has good transparency and corrosion resistance, so that the operator can more clearly observe the working conditions of the silicon wafer inside the dryer.
[0060] The window carrier 30 is made of a material including but not limited to polypropylene (PP). In this embodiment, PP has higher toughness than organic glass, so that the dryer door window is not easily broken when subjected to impact or pressure from the dryer, thereby improving the durability of the dryer.
[0061] The embodiment of the present application further provides a dryer 80 , which includes a dryer door frame 800 and any one of the aforementioned dryer door windows 10 , wherein the dryer door window 10 is disposed on the dryer door frame 800 .
[0062] In this embodiment, the dryer door window 10 is further provided with a through hole 70 , and the through hole 70 is used to fix the dryer door window 10 on the dryer door frame 800 .
[0063] In summary, an embodiment of the present application provides a dryer door window and a dryer. The dryer door window includes a window body, a window carrier, and a fixing member. The window body is a transparent window body, and the window body includes at least one first fixing through-hole arranged near the edge of the window body. The window carrier is opaque, and the window carrier includes an opening, and the window carrier includes at least one second fixing through-hole arranged near the opening, wherein the first fixing through-hole and the second fixing through-hole are arranged correspondingly. The fixing member detachably fixes the window body to the window carrier through the first fixing through-hole and the second fixing through-hole, wherein the window body covers the opening. In this way, the SEMITOOL dryer door window is constructed of two parts, and a material that is not easy to explode is reselected around the sealing capsule, which not only reduces the risk of breakage due to the brittleness of the material, but also reduces the maintenance cost and downtime caused by damage to the door window, ensuring that the production line can operate continuously and stably.
[0064] The above description is merely a preferred embodiment of the present application and is not intended to limit the present application. Various modifications and variations are possible for those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present application shall be included within the scope of protection of the present application.
Claims
1. A door window of a spin dryer, characterized in that: The door window of the spin dryer comprises a window body, a window bearing member and a fixing member; The window body is a transparent window body, and the window body includes at least one first fixing through hole arranged near the edge of the window body; The window carrier is opaque, the window carrier comprises an opening, and the window carrier comprises at least one second fixing through hole arranged near the opening, wherein the first fixing through hole and the second fixing through hole are arranged correspondingly; The fixing member detachably fixes the window body to the window carrier through the first fixing through hole and the second fixing through hole, wherein the window body covers the opening.
2. The door window of the spin dryer according to claim 1, characterized in that: The window body further comprises a first window body and a second window body, the geometric centers of the first window body and the second window body overlap, the first window body is circular, the second window body is annular, and at least one of the first fixing through holes is arranged on the second window body; There are a plurality of first fixing through holes, and the first fixing through holes are centrally symmetrically distributed about the center of the window body.
3. The door window of the spin dryer according to claim 2, characterized in that: The window carrier is in the shape of a circular ring, and further comprises a first annular fixing member and a second annular fixing member, wherein the first annular fixing member is inscribed on the inner side of the second annular fixing member; The first annular fixing member and the second annular fixing member form a bearing step for bearing the window body, wherein the bearing step is used to bear the second window body, and the height of the bearing step is the same as the thickness of the second window body; At least one of the second fixing through holes is disposed on the first annular fixing member, and there are a plurality of the second fixing through holes, which are centrally symmetrically distributed about the center of the window carrier.
4. The door window of the spin dryer according to claim 3, characterized in that: The inner diameter of the opening of the window carrier is the same as the diameter of the first window body, wherein the size of the opening accounts for 1 / 3 to 2 / 3 of the size of the door window of the spin dryer.
5. The door window according to claim 4, characterized in that: The first window body and the second window body are integrally formed, and the first annular fixing member and the second annular fixing member are also integrally formed.
6. The door window of the spin dryer according to claim 5, characterized in that: The door window of the spin dryer further comprises a sealing member, which is located between the second window body and the first annular fixing member and is arranged close to the first annular fixing member, and is used for sealing the connection surface between the window body and the window carrier.
7. The door window of the spin dryer according to claim 6, characterized in that: The door window of the spin dryer further comprises an expansion member, and the window carrier comprises a receiving groove for receiving the expansion member, and the receiving groove is arranged on the outer periphery of the second annular fixing member away from the opening.
8. The door window of the spin dryer according to claim 7, characterized in that: The hole walls of the first fixing through hole and the second fixing through hole are provided with threads, and the fixing member is engaged with the first fixing through hole and the second fixing through hole to fix the window body on the window carrier through threads; The fixing member is a screw.
9. The door window of the spin dryer according to claim 8, characterized in that: The window body is made of polyvinyl chloride, and the window carrier is made of polypropylene.
10. A spin dryer, characterized in that: The dryer comprises a dryer door frame and a door window of the dryer according to any one of claims 1 to 9, and the door window of the dryer is arranged on the dryer door frame.