Sampling unit

Abstract

The utility model provides a sampling unit which comprises a sampling bottle, a sampling box and a liquid inlet part, the sampling bottle is arranged in the sampling box, the liquid inlet part comprises a liquid inlet pipe and a bevel gear transmission device, the liquid inlet pipe penetrates through the sampling box and the top of the sampling bottle, the first end, located in the sampling bottle, of the liquid inlet pipe is provided with a bent part, and the second end of the liquid inlet pipe is located outside the sampling box; and the bevel gear transmission device sleeves the second end of the liquid inlet pipe. The non-contact chemical rinsing structure is additionally arranged, and the leaked liquid discharging structure and the sampling bottle fixing structure are perfected, so that the reliability of the sampling unit is improved, the reliability of the whole equipment system is further improved, and the personnel and property loss and the environmental pollution risk are greatly reduced.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a sampling unit. Background Art

[0002] Most equipment in semiconductor production plants (including production equipment and supply equipment) use liquid chemicals, and most machines that use liquid chemicals require regular sampling and testing at the equipment end. However, the sampling units of existing equipment are Figure 1 As shown, it is composed of a liquid inlet pipe 101, a sampling bottle 10 (with a sampling port for the liquid inlet pipe 101 to extend into) and a sampling box 20 (with a drainage port 201 at the bottom). It has no rinsing structure and only meets the basic sampling and discharge functions. Rinsing the sampling bottle before sampling helps to ensure that the concentration of the liquid chemical does not change after addition, so as to achieve more accurate measurement. In addition, if a chemical leak occurs in the sampling unit (for example, the sampling port of the sampling bottle), it can only be discharged through the drainage port of the sampling box. Therefore, Figure 1 The sampling unit shown is not designed perfectly. There are problems such as no rinsing structure, imperfect liquid conduction and drainage design, and no sampling bottle fixing structure, which may lead to greater safety, health and environmental risks. Utility Model Content

[0003] In view of the above-mentioned shortcomings of the prior art, the purpose of the present application is to provide a sampling unit for solving the problems in the prior art that the sampling unit has no rinsing structure, no sampling bottle fixing structure, and imperfect liquid guiding and draining designs.

[0004] An embodiment of the present application provides a sampling unit, comprising a sampling bottle, a sampling box and a liquid inlet part, wherein the sampling bottle is arranged in the sampling box, the liquid inlet part comprises a liquid inlet pipe and a bevel gear transmission device, the liquid inlet pipe passes through the sampling box and the top of the sampling bottle respectively, the first end of the liquid inlet pipe located in the sampling bottle has a bending part, the second end of the liquid inlet pipe is located outside the sampling box, and the bevel gear transmission device is sleeved on the second end of the liquid inlet pipe.

[0005] In some embodiments, the sampling bottle includes a bottle body and a bottle cap, and the bent portion of the liquid inlet tube is located at the connection between the bottle body and the bottle cap.

[0006] In some embodiments, the bevel gear transmission device includes a first bevel gear, a second bevel gear, a bevel gear seat, a shaft and a shaft seat, the second bevel gear is meshed with the first bevel gear, the first bevel gear is sleeved on the second end of the liquid inlet pipe, the second bevel gear is arranged at the first end of the shaft, meshed with the first bevel gear and supported by the bevel gear seat, the second end of the shaft passes through the shaft seat, and the shaft seat is arranged on the top of the sampling box.

[0007] In some embodiments, a clamp is provided on the inner side wall of the sampling box to fix the sampling bottle.

[0008] In some embodiments, the sampling box includes a box body and a door, the door is pivotally disposed on the box body, and a guide plate is disposed at the lower inner side of the door of the sampling box.

[0009] In some embodiments, the bottom of the sampling box is configured as a funnel shape.

[0010] In some embodiments, a grid is provided at the top of the funnel-shaped bottom of the sampling box, and the sampling bottle is placed on the grid.

[0011] In some embodiments, the bottom of the sampling box is connected to a drain pipe, and the drain pipe is connected to a discharge interface.

[0012] In some embodiments, a valve is provided at the discharge interface.

[0013] In some embodiments, the second end of the liquid inlet tube of the sampling bottle is rotatably connected to the delivery tube.

[0014] As described above, the sampling unit of the present application has the following beneficial effects: by adding a contactless chemical rinsing structure, improving the leakage discharge structure and the sampling bottle fixing structure, the reliability of the sampling unit is improved, thereby improving the reliability of the entire equipment system, and greatly reducing the risk of personal and property losses and environmental pollution. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The following figures describe in detail the exemplary embodiments disclosed in this application. The same reference numerals represent similar structures in several views of the drawings. Those skilled in the art will understand that these embodiments are non-limiting, exemplary embodiments, and the drawings are only for the purpose of illustration and description, and are not intended to limit the scope of this application. Other embodiments may also accomplish the inventive intent in this application. It should be understood that the drawings are not drawn to scale.

[0016] in:

[0017] Figure 1 It is a sampling unit in the prior art;

[0018] Figure 2 Schematic diagram of a sampling unit according to some embodiments of the present application;

[0019] Figure 3 yes Figure 2 A schematic side view of the sampling unit;

[0020] Figure 4 is a front schematic diagram of a bevel gear transmission device of a liquid inlet portion according to some embodiments of the present application;

[0021] Figure 5 yes Figure 4 Schematic side view of . DETAILED DESCRIPTION

[0022] The following description provides specific application scenarios and requirements of the present application, with the purpose of enabling those skilled in the art to make and use the content in the present application. It will be apparent to those skilled in the art that various local modifications to the disclosed embodiments are apparent, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of the present application. Therefore, the present application is not limited to the embodiments shown, but to the widest scope consistent with the claims.

[0023] like Figure 2 , Figure 3 As shown, an embodiment of the present application provides a sampling unit, including a sampling bottle 1, a sampling box 2 and a liquid inlet part, wherein the sampling bottle 1 is arranged in the sampling box 2, wherein the liquid inlet part includes a liquid inlet pipe 32 and a bevel gear transmission device 31, the liquid inlet pipe 32 passes through the sampling box 2 and the top of the sampling bottle 1 respectively, the first end of the liquid inlet pipe 32 located in the sampling bottle 1 has a bending portion 121, the second end of the liquid inlet pipe 32 is located outside the sampling box 2, and the bevel gear transmission device 31 is sleeved on the second end of the liquid inlet pipe 32. After the bevel gear transmission device 31 is rotated, the liquid inlet pipe 32 is driven to rotate 360°, so that the bending portion 121 of the liquid inlet pipe 32 can rotate 360° in the sampling bottle 1. The liquid flows out of the liquid inlet pipe 32 to rinse the inside of the sampling bottle 1. In some embodiments, the sampling bottle 1 includes a bottle body 111 and a bottle cap 112, and the bending portion 121 of the liquid inlet pipe 32 is located at the connection between the bottle body 111 and the bottle cap 112. The liquid sprayed out by the rotating bending portion 121 can flow down the bottle body 111 from the bottle mouth, and the number of rotations is determined according to the needs to fully rinse the bottle body 111.

[0024] In some embodiments, the sampling bottle 1 and the sampling box 2 can be made of corrosion-resistant materials, such as tetrafluoroethylene, polypropylene, polyethylene, etc. The materials of the sampling bottle 1 and the sampling box 2 can also be adjusted according to the actual chemicals used.

[0025] In some embodiments, the size of the sampling box 2 can be adjusted according to different situations in actual usage scenarios. For example, the height of the sampling box 2 is 200 cm, and the width and depth are 310 cm respectively.

[0026] refer to Figure 4 and Figure 5 Combined with Figure 1In some embodiments, the bevel gear transmission device 31 includes a first bevel gear 311, a second bevel gear 312, a shaft 313 and a shaft seat 314. The second bevel gear 312 is meshed with the first bevel gear 311. The first bevel gear 311 is sleeved on the second end of the liquid inlet pipe 32. The second bevel gear 312 is fixedly arranged at the first end of the shaft 313. The second end of the shaft 313 passes through the shaft seat 314. The shaft seat 314 is arranged on the top of the sampling box 2. Specifically, the liquid inlet pipe 32 passes through the axis of the first bevel gear 311. The first end of the shaft 313 is inserted into the axis of the second bevel gear 312 and is supported by the shaft seat 314. The shaft 313 is kept parallel to the top of the sampling box 2, so that the rotation direction of the second bevel gear 312 is perpendicular to the shaft 313.

[0027] In some embodiments, a handle 3131 with a curve is disposed at the second end of the shaft 313 to facilitate operation of the rotating shaft 313 .

[0028] In some embodiments, the second bevel gear 312 is disposed at the first end of the shaft 313 and meshes with the first bevel gear 311. Specifically, a bevel gear seat 315 is disposed at the first end of the shaft 313 to support the second bevel gear 312 and enable the second bevel gear 312 to mesh with the first bevel gear 311.

[0029] Specifically, by turning the handle 3131, the second bevel gear 312 is driven to rotate on the vertical plane through the rotating shaft 313, and the first bevel gear 311 meshing therewith is further driven to convert into rotation on the horizontal plane, and finally the liquid inlet tube 32 is driven to rotate 360°, and the sampling liquid is sprayed on the inner walls around the upper part of the sampling bottle 1 to rinse the sampling bottle 1.

[0030] In some embodiments, a clamp 21 is provided on the inner side wall of the sampling box 2 to fix the sampling bottle 1. The clamp 21 is elastic, and its inner diameter is less than or equal to the outer diameter of the sampling bottle body 111, so that the bottle body 111 of the sampling bottle 1 can be clamped in the clamp 21 and will not move. The clamp 21 is provided with an opening to facilitate taking and placing the sampling bottle 1.

[0031] In some embodiments, the sampling box 2 includes a box body and a door 23, the door 23 is pivotally arranged on the box body, and a guide plate 24 is arranged below the inner side of the door 23 of the sampling box 2. The guide plate 24 forms an acute angle with the door 23, that is, the guide plate 24 has a certain outward tilt relative to the door 23, which can block the splashed solution and make the solution flow along the guide plate 24 from the lower edge of the guide plate 24, and will not flow out from the door gap below the door 23. Preferably, the guide plate 24 is arranged near the lower end of the door gap. In some embodiments, the door 23 is connected to the box body by a hinge 231, and a door handle 232 is arranged on the door 23 to facilitate opening and closing of the door.

[0032] In some embodiments, the sampling box bottom 25 is configured to be funnel-shaped. The sampling box bottom 25 has a slope, which is more convenient for liquid to flow out than a horizontal bottom, and does not accumulate at the bottom of the sampling box 2 .

[0033] In some embodiments, a grid 26 is provided at the top of the funnel-shaped bottom 25 of the sampling box, and the sampling bottle 1 is placed on the grid 26. The grid 26 supports the sampling bottle 1, and the liquid can flow from the holes of the grid 26 to the funnel-shaped bottom.

[0034] In some embodiments, the bevel gear seat 315, the guide plate 24 and the grille 26 may be made of a high-strength, corrosion-resistant metal material, such as stainless steel.

[0035] In some embodiments, the sampling box bottom 25 is connected to a drain pipe 27 , and the drain pipe 27 is connected to a discharge interface 28 . Liquid flowing down from the grid 26 and the funnel-shaped sampling box bottom 25 flows into the discharge interface 28 through the drain pipe 27 .

[0036] In some embodiments, a valve (not shown) is provided at the discharge interface 28. The valve can control the discharge and flow rate of the leaked liquid.

[0037] In some embodiments, the second end of the liquid inlet tube 32 of the sampling bottle is rotatably connected to the delivery tube 5 , and is connected to a solvent source (not shown) through the delivery tube 5 .

[0038] In some embodiments, a fixing device 4 is provided on the outside of the sampling box 2, and the sampling box 2 can be fixed on a workbench or a target position. In some embodiments, the fixing device 4 is four mounting parts, which can be installed on the top and bottom edges of the sampling box 2. Preferably, four mounting parts are respectively installed at the four corners of the top and bottom of the door. A hole 41 is provided on the mounting part, and the sampling box 2 can be fixed to the target position by using a screw through the hole 41, or a hook (not shown) can be provided at the target position and hung on the hook through the hole 41. When the sampling box 2 needs to be removed, the sampling box 2 can be detached from the hole 41.

[0039] The method of using the sampling unit of the present application is as follows: when in use, first connect the chemical delivery tube 5 to the second end of the liquid inlet tube 32, and connect the discharge tube 27 to the discharge interface 28, then rotate the handle 3131 of the bevel gear transmission device 31 to rinse the sample bottle, then take samples, and finally disconnect the chemical delivery tube 5 from the second end of the liquid inlet tube 32, and connect the discharge tube 27 to the discharge interface 28, take out the sample bottle 1 for sampling, or remove the sampling box 2 together with the sample bottle 1 for inspection.

[0040] The beneficial effects that may be brought about by the embodiments of the present application include but are not limited to: the sampling unit of the present application includes a sampling bottle and a sampling box, wherein the liquid inlet pipe of the sampling bottle can be rotated 360° at the bottle mouth of the sampling bottle through the control of the bevel gear transmission device, which plays the role of contactless rinsing of the sampling bottle. A clamp is provided in the sampling box body, which can be used to fix the sampling bottle. A guide plate is also provided on the door of the sampling box, and the guide plate can block the bottom of the door gap to prevent leakage from the door gap. In addition, the bottom of the sampling box is funnel-shaped, and a grid is provided on the top of the funnel. The grid can be used to support the sampling bottle, and the leakage can flow from the holes of the grid. The gentle slope of the funnel shape can facilitate the leakage to flow into the drain pipe and out of the sampling box. The sampling unit of the present application improves the safety performance and greatly reduces the risk of hidden dangers involving the chemical working environment.

[0041] It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other beneficial effects that may be obtained.

[0042] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only for example and does not constitute a limitation of this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements and corrections to this application. Such modifications, improvements and corrections are suggested in this specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of this application.

[0043] It should be noted that in the description of this application, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", and "fix" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a rotating connection or a sliding connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood in combination with specific circumstances.

[0044] In addition, when terms such as "first", "second", and "third" are used in the specification of this application to describe various features, these terms are only used to distinguish these features and cannot be understood as indicating or implying the relationship between the features, the relative importance, or implicitly indicating the number of features indicated.

[0045] In addition, the present specification describes exemplary embodiments by reference to idealized exemplary cross-sectional views and / or plan views and / or stereograms. Therefore, differences from the illustrated shapes due to, for example, manufacturing techniques and / or tolerances are foreseeable. Therefore, the exemplary embodiments should not be interpreted as being limited to the shapes of the regions shown herein, but should include deviations in shapes caused by, for example, manufacturing. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to illustrate the actual shapes of the regions of the device nor to limit the scope of the exemplary embodiments.

[0046] At the same time, the present application uses specific words to describe the embodiments of this specification. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in the present application does not necessarily refer to the same embodiment. In addition, some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.

[0047] Similarly, it should be noted that in order to simplify the description of the disclosure of this application and thus help understand one or more embodiments of the invention, in the above description of the embodiments of this application, multiple features are sometimes combined into one embodiment, figure or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than the features mentioned in the claims. In fact, the features of the embodiments are less than all the features of the single embodiment disclosed above.

[0048] Finally, it should be understood that the embodiments described in this application are only used to illustrate the principles of the embodiments of the present application. Other variations may also fall within the scope of the present application. Therefore, as an example and not a limitation, the alternative configurations of the embodiments of the present application may be considered to be consistent with the teachings of the present application. Accordingly, the embodiments of the present application are not limited to the embodiments explicitly introduced and described in this application.

Claims

1. A sampling unit, characterized in that: It includes a sampling bottle, a sampling box and a liquid inlet part, the sampling bottle is arranged in the sampling box, the liquid inlet part includes a liquid inlet pipe and a bevel gear transmission device, the liquid inlet pipe passes through the sampling box and the top of the sampling bottle respectively, the first end of the liquid inlet pipe located in the sampling bottle has a bending part, the second end of the liquid inlet pipe is located outside the sampling box, and the bevel gear transmission device is sleeved on the second end of the liquid inlet pipe.

2. The sampling unit according to claim 1, characterized in that: The sampling bottle comprises a bottle body and a bottle cap, and the bent portion of the liquid inlet tube is located at the connection between the bottle body and the bottle cap.

3. The sampling unit according to claim 1, characterized in that: The bevel gear transmission device includes a first bevel gear, a second bevel gear, a bevel gear seat, a shaft and a shaft seat. The second bevel gear is meshed with the first bevel gear. The first bevel gear is sleeved on the second end of the liquid inlet pipe. The second bevel gear is arranged at the first end of the shaft, meshed with the first bevel gear and supported by the bevel gear seat. The second end of the shaft passes through the shaft seat, and the shaft seat is arranged on the top of the sampling box.

4. The sampling unit according to claim 1, characterized in that: A clamp is provided on the inner side wall of the sampling box for fixing the sampling bottle.

5. The sampling unit according to claim 1, characterized in that: The sampling box comprises a box body and a door. The door is pivotally arranged on the box body. A guide plate is arranged at the lower inner side of the door of the sampling box.

6. The sampling unit according to claim 1, characterized in that: The bottom of the sampling box is configured to be funnel-shaped.

7. The sampling unit according to claim 6, characterized in that: A grid is arranged on the top of the funnel-shaped bottom of the sampling box, and the sampling bottle is placed on the grid.

8. The sampling unit according to claim 6, characterized in that: The bottom of the sampling box is connected to a drainage pipe, and the drainage pipe is connected to a discharge interface.

9. The sampling unit according to claim 8, characterized in that: A valve is arranged at the discharge interface.

10. The sampling unit according to claim 1, characterized in that: The second end of the liquid inlet tube of the sampling bottle is rotatably connected to the delivery tube.

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