Supporting structure and crucible cooling equipment

Abstract

The utility model discloses a supporting structure which comprises a base, a shaft support and a rotating shaft, the rotating shaft comprises a connecting part and a containing part, the connecting part is used for connecting a die, and the containing part is connected with the shaft support in an inserted mode. During use, hot gas in the vacuumizing process flows out from the first vacuum cavity from top to bottom, water in the first water inlet cavity flows from bottom to top and enters a mold through the first water inlet and the second water inlet, and the hot gas in the first vacuum cavity is cooled by the water in the first water inlet cavity in the process; therefore, the gas is cooled before entering the vacuum pump, and the service life of the vacuum pump is prolonged. And meanwhile, water in the mold enters the first water return cavity through the first water return opening and the second water return opening after being circulated, water circulation is achieved, and effective heat exchange is guaranteed. The utility model further discloses crucible cooling equipment.

Description

Technical Field

[0001] The utility model relates to the technical field of crucible melting equipment, in particular to a supporting structure and crucible cooling equipment. Background Art

[0002] Crucible melting furnace is the core equipment in the production process of quartz crucible. Quartz crucible is prepared by vacuum arc method, which is to put high-purity quartz sand into a rotatable molding mold, and spread the quartz sand evenly through centrifugal force. Then move it to the graphite electrode rod, energize the electrode to start the arc, and evacuate while rotating, so that it quickly melts into fused quartz in the shape of a crucible at high temperature, and takes it out after cooling, and the preparation of quartz crucible is completed.

[0003] The quartz crucible is formed in a mold, which is divided into two parts. One part is the mold body, which has many vacuum holes on the inner wall, which are used to evacuate the mold during the melting process and control the thickness of the transparent layer of the quartz crucible. The other part is a water cooling jacket, which is used to cool the mold body. The water cooling jacket has a water channel inside, and the purpose of cooling the mold body is achieved by circulating cooling water. There is a vacuum cavity between the mold body and the water cooling jacket. A vacuum port is provided in the middle of the bottom of the water cooling jacket. The vacuum cavity is connected to the vacuum pipeline through the vacuum port, and the vacuum pipeline is connected to the vacuum pump.

[0004] During the melting process of the quartz crucible, the vacuum pump performs the vacuum operation, and the hot gas generated by the water cooling jacket is continuously transported out of the vacuum pipeline. The hot gas directly enters the vacuum pump, which will damage the vacuum pump system and affect its service life.

[0005] Therefore, how to improve the service life of the vacuum pump is a technical problem that technicians in this field currently need to solve. Utility Model Content

[0006] In view of this, the first object of the present utility model is to provide a support structure to increase the service life of a vacuum pump;

[0007] The second purpose of the utility model is to provide a crucible cooling device.

[0008] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0009] A support structure comprises a base, an axis support and a rotating axis, wherein:

[0010] The shaft support is fixed to the base and is used to support the rotating shaft;

[0011] The rotating shaft can rotate around its own axis relative to the shaft support;

[0012] The rotating shaft comprises a connecting portion and a receiving portion, wherein the connecting portion is used to connect the mold, and the receiving portion is plug-connected with the shaft support;

[0013] The accommodating portion is provided with a first vacuum chamber, a first water inlet chamber and a first water return chamber in the axial direction, the first water inlet chamber is arranged between the first vacuum chamber and the first water return chamber, and the first vacuum chamber is arranged in the middle of the rotating shaft;

[0014] The connecting portion is provided with a first water inlet, a second water inlet, a first water return port and a second water return port;

[0015] The first water inlet and the second water inlet are connected to the first water inlet cavity and are used to supply water to the mold;

[0016] The first water return port and the second water return port are connected to the first water return chamber and are used for returning water.

[0017] Optionally, in the above-mentioned support structure, the shaft support is provided with a second vacuum chamber, a second water inlet chamber and a second water return chamber, and when the accommodating portion is plugged into the shaft support, the second vacuum chamber, the second water inlet chamber and the second water return chamber are respectively connected to the first vacuum chamber, the first water inlet chamber and the first water return chamber.

[0018] Optionally, in the above-mentioned supporting structure, the base is provided with a total water inlet and a total water return port, the total water inlet is connected to the bottom of the second water inlet chamber, and the total water return port is connected to the bottom of the second water return chamber.

[0019] Optionally, in the above-mentioned supporting structure, the first water inlet and the second water inlet are arranged opposite to each other and have the same diameter, and the first water return port and the second water return port are arranged opposite to each other and have the same diameter.

[0020] Optionally, in the above-mentioned supporting structure, an abutment platform is provided on the top of the second water return chamber, and the abutment platform is used to connect to the outer wall of the accommodating portion.

[0021] Optionally, in the above-mentioned supporting structure, the base is provided with an inlet pipe and a return pipe, the inlet pipe is used to connect the second return water chamber with the main return water port, the return water pipe is used to connect the second water inlet chamber with the main water inlet, the inlet pipe is L-shaped, and the return water pipe is L-shaped or straight.

[0022] Optionally, in the above-mentioned supporting structure, the base includes a vacuum pipe, and the vacuum pipe is connected to the first vacuum chamber.

[0023] The support structure provided by the utility model, when in use, the hot gas in the vacuum process flows out from the first vacuum chamber from top to bottom, the water in the first water inlet chamber flows from bottom to top, and enters the mold through the first water inlet and the second water inlet. In this process, the water in the first water inlet chamber cools the hot gas in the first vacuum chamber, so that the gas is cooled before entering the vacuum pump, thereby improving the service life of the vacuum pump. At the same time, the water in the mold enters the first water return chamber through the first water return port and the second water return port after circulation, realizing water circulation and ensuring effective heat exchange.

[0024] A crucible cooling device comprises a mold and any one of the above-mentioned supporting structures, wherein the mold is connected to a connecting portion of the supporting structure.

[0025] Optionally, in the above-mentioned crucible cooling device, the bottom of the mold is fixedly connected to the connecting part, and the bottom of the mold is provided with a third water inlet, a fourth water inlet, a third water return port and a fourth water return port connected to the first water inlet, the second water inlet, the first water return port and the second water return port, and the bottom of the mold is provided with a vacuum port connected to the first vacuum chamber.

[0026] Optionally, in the above crucible cooling device, a rubber gasket for sealing is arranged between the mold and the connecting part.

[0027] The crucible cooling device provided by the utility model has the above-mentioned support structure, and thus has all the technical effects of the above-mentioned support structure, which will not be described in detail herein. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 The overall structure diagram of the crucible cooling device disclosed in the embodiment of the utility model;

[0030] Figure 2 It is a structural schematic diagram of the mold disclosed in the embodiment of the utility model;

[0031] Figure 3 It is a structural schematic diagram of the support structure disclosed in the embodiment of the utility model;

[0032] Figure 4 It is a schematic diagram of the structure of the rotating shaft disclosed in the embodiment of the utility model;

[0033] Figure 5 This is a schematic diagram of the structure of the shaft support disclosed in the embodiment of the utility model;

[0034] Figure 6 A cross-sectional view of a support structure disclosed in an embodiment of the utility model;

[0035] Figure 7 It is a partial enlarged view of the support structure disclosed in the embodiment of the utility model;

[0036] in:

[0037] Mold 1, support structure 2, rotating shaft 20, shaft support 21, base 3, total water inlet 4, total water return port 5, first water inlet 6, second water inlet 7, first water return port 8, second water return port 9,

[0038] The first vacuum chamber a, the first water inlet chamber b, the first water return chamber c, the second vacuum chamber d, the second water inlet chamber e, and the second water return chamber f. DETAILED DESCRIPTION

[0039] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without making novel work are within the scope of protection of the utility model.

[0040] In the description of the present invention, it should be understood that the terms "upper", "lower", "top surface", "bottom surface" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the positions or elements referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limitations of the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0041] like Figure 1-Figure 7 As shown, the support structure 2 disclosed in the utility model includes a base 3, an axis support 21 and a rotating shaft 20, wherein the axis support 21 is fixed to the base 3 and is used to support the rotating shaft 20, and the rotating shaft 20 can rotate around its own axis relative to the axis support 21, and the rotating shaft 20 includes a connecting portion and a receiving portion, the connecting portion is used to connect the mold 1, the receiving portion and the axis support 21 are plug-in, and the receiving portion is axially provided with a first vacuum chamber a, a first water inlet chamber b and a first water return chamber c, the first water inlet chamber b is arranged between the first vacuum chamber a and the first water return chamber c, and the first vacuum chamber a is arranged in the middle of the rotating shaft 20, the connecting portion is provided with a first water inlet 6, a second water inlet 7, a first water return port 8 and a second water return port 9, the first water inlet 6 and the second water inlet 7 are connected to the first water inlet chamber b, and are used to supply water to the mold 1, the first water return port 8 and the second water return port 9 are connected to the first water return chamber c, and are used to return water. Specifically, there is a mechanical seal between the rotating shaft 20 and the shaft support 21, which is a sealing method that relies on the contact pressure of the elastic element and the sealing element to prevent the leakage of the medium. Specifically, the mold 1 is fixedly connected to the connecting part, and the external motor drives the rotating shaft 20 to rotate to provide centrifugal force, and the shaft support 21 is stationary during this process.

[0042] When the support structure 2 provided by the utility model is used, the hot gas in the vacuum process flows out from the first vacuum chamber a from top to bottom, and the water in the first water inlet chamber b flows from bottom to top and enters the mold 1 through the first water inlet 6 and the second water inlet 7. In this process, the water in the first water inlet chamber b cools the hot gas in the first vacuum chamber a, so that the gas is cooled before entering the vacuum pump, thereby improving the service life of the vacuum pump. At the same time, the water in the mold 1 enters the first water return chamber c through the first water return port 8 and the second water return port 9 after circulation, realizing the circulation of water and ensuring effective heat exchange.

[0043] Specifically, the mold 1 includes a water-cooling jacket, and the liquid in the first water inlet chamber b is used to enter the water-cooling jacket and form a circulation to cool the mold 1. During the melting process, the heat of the crucible itself is much higher than the heat contained in the gas extracted by the vacuum pump. Therefore, a small amount of heat exchange is performed in advance before the liquid in the first water inlet chamber b enters the mold 1, which will not affect the cooling effect of the liquid in the first water inlet chamber b on the crucible. After cooling the gas extracted by the vacuum pump, the damage of this gas to the vacuum pump and the vacuum pipeline is minimized, which is beneficial to maintaining the vacuum pumping effect of the vacuum pump and extending the service life of the vacuum pump.

[0044] In order to optimize the above technical solution, the shaft support 21 is provided with a second vacuum chamber d, a second water inlet chamber e and a second water return chamber f, and when the accommodating portion is plugged into the shaft support 21, the second vacuum chamber d, the second water inlet chamber e and the second water return chamber f are respectively connected with the first vacuum chamber a, the first water inlet chamber b and the first water return chamber c. Specifically, when the accommodating portion is plugged into the shaft support 21, the first vacuum chamber a and the second vacuum chamber d are combined to form a vacuum channel for the gas extracted by the vacuum pump to circulate, the first water inlet chamber b and the second water inlet chamber e are combined to form a water inlet channel for the coolant (water) to circulate, and the water inlet channel is adjacent to the vacuum channel, so the coolant (water) that has just entered can effectively cool down the gas in the vacuum channel, and the first water return chamber c and the second water return chamber f are combined to form a water return channel for the coolant (water) after heat exchange to circulate, so as to discharge the coolant (water) out of the support structure 2. Such an arrangement can realize primary heat exchange of the coolant in the water inlet channel and secondary heat exchange in the mold 1, and finally discharge the coolant from the support structure 2 through the return water channel, thereby realizing water circulation, ensuring effective heat exchange, and improving the service life of the vacuum pump.

[0045] In order to optimize the above technical solution, the base 3 is provided with a total water inlet 4 and a total water return port 5. The total water inlet 4 is connected to the bottom of the second water inlet chamber e, and the total water return port 5 is connected to the bottom of the second water return chamber f. Specifically, the total water inlet 4 can be directly arranged at the bottom of the second water inlet chamber e, and the total water return port 5 can be directly arranged at the bottom of the second water return chamber f. When there is no need to exchange heat with the gas, the total water inlet 4 and the total water return port 5 are in a sealed state. When in use, water is passed through the total water inlet 4, and the water accumulates in the water inlet channel and enters the mold 1 through the first water inlet 6 and the second water inlet 7. The water that has completed heat exchange inside the mold 1 enters the water return channel through the first water return port 8 and the second water return port 9, and is discharged from the support structure 2 through the total water return port 5.

[0046] In order to optimize the above technical solution, the first water inlet 6 and the second water inlet 7 are arranged opposite to each other and have the same diameter, and the first water return port 8 and the second water return port 9 are arranged opposite to each other and have the same diameter. Further, the first water inlet 6, the second water inlet 7, the first water return port 8 and the second water return port 9 are evenly arranged around the first vacuum chamber a and have the same diameter, so that when water is inlet and water is returned, the vacuum pipe, the water inlet pipe and the water return pipe are subjected to the same pressure, thereby ensuring the stability of the support structure 2.

[0047] In order to optimize the above technical solution, a butt platform is provided on the top of the second water return chamber f, and the butt platform is used to connect the outer wall of the accommodating part. When in use, when the accommodating part is inserted into the shaft support 21, the butt platform butts against the outer wall of the accommodating part, forming a limit for the accommodating part, ensuring that the first vacuum chamber a, the first water inlet chamber b and the first water return chamber c of the accommodating part are correspondingly butted and spliced ​​with the second vacuum chamber d, the second water inlet chamber e and the second water return chamber f of the shaft support 21 to form a tight passage, and at the same time, the first vacuum chamber a butts against the second vacuum chamber d, and the first water inlet chamber b butts against the second water inlet chamber e, thereby ensuring the sealing and structural stability of the support structure 2.

[0048] Furthermore, the operator can arrange sealant or other sealing connecting materials at corresponding positions of the second vacuum chamber d, the second water inlet chamber e and the abutment platform before inserting the shaft support 21 into the accommodating portion, so that when the first vacuum chamber a, the first water inlet chamber b and the first water return chamber c move downward, they are sealed and connected with the second vacuum chamber d, the second water inlet chamber e and the second water return chamber f through the sealant or other sealing connecting materials, so as to improve the sealing effect of the vacuum channel, the water inlet channel and the water return channel.

[0049] In order to optimize the above technical solution, the base 3 is provided with an inlet pipe and a return pipe. The inlet pipe is used to connect the second return water chamber f with the total return water port 5, and the return water pipe is used to connect the second inlet chamber e with the total water inlet 4. The inlet pipe is L-shaped, and the return water pipe is L-shaped or straight. Specifically, the inlet pipe, the inlet channel, the return water channel and the return water pipe together form a path for the circulation of cooling water. The utility model preferably arranges the total return water port 5 and the total water inlet 4 on the side of the base 3, that is, the utility model preferably arranges the inlet pipe in L shape, and the return water pipe in L shape or straight. Such an arrangement facilitates the connection of the water supply equipment pipeline, thereby improving the efficiency of water supply.

[0050] In order to optimize the above technical solution, the base 3 includes a vacuum pipe, which is connected to the first vacuum chamber a. Specifically, the vacuum pipe is connected to the vacuum passage, and the vacuum pipe is connected to the vacuum channel of the support structure 2, the filter tank and the vacuum pump. The gas extracted from the inside of the mold 1 by the vacuum pump passes through the first vacuum chamber a, the second vacuum chamber d and the vacuum pipe and enters the filter tank and the vacuum pump.

[0051] The utility model also discloses a crucible cooling device, comprising a mold 1 and a supporting structure 2 of any one of the above items, wherein the mold 1 is connected to a connecting portion of the supporting structure 2. Specifically, the mold 1 comprises a mold body and a water cooling jacket, wherein the inner wall of the mold body has many vacuum holes, which are used to draw a vacuum into the mold 1 during the melting process to control the thickness of the transparent layer of the quartz crucible, and the water cooling jacket is used to cool the mold body, wherein the interior of the water cooling jacket has a water path, and the purpose of cooling the mold body is achieved by circulating cooling water, and a vacuum cavity is provided between the mold body and the water cooling jacket, and a vacuum port is provided at the middle position of the bottom of the water cooling jacket, and the vacuum cavity is connected to the first vacuum cavity a through the vacuum port, and when the vacuum port is connected to the first vacuum cavity a, the accommodating portion cooperates with the shaft support 21. Such an arrangement enables water to cool down the gas in the vacuum channel before entering the water path inside the water cooling jacket, and then circulates in the water path inside the water cooling jacket, thereby realizing the reuse of water, saving energy, and protecting the vacuum pump and the filter tank.

[0052] In order to optimize the above technical solution, the bottom of the mold 1 is fixedly connected to the connecting part, and the bottom of the mold 1 is provided with a third water inlet, a fourth water inlet, a third water return port and a fourth water return port connected to the first water inlet 6, the second water inlet 7, the first water return port 8 and the second water return port 9, and the bottom of the mold 1 is provided with a vacuum port connected to the first vacuum chamber a. Specifically, when the accommodating part cooperates with the shaft support 21, the first water inlet 6 is aligned with the third water inlet, the second water inlet 7 is aligned with the fourth water inlet, the first water return port 8 is aligned with the third water return port, the second water return port 9 is aligned with the fourth water return port, and the vacuum port is aligned with the first vacuum chamber a, and the first vacuum chamber a is connected to the second vacuum chamber d. Such an arrangement realizes the precise connection of each passage, thereby avoiding liquid or gas leakage, and improving the sealing and use safety of the crucible cooling equipment.

[0053] In order to optimize the above technical solution, a rubber gasket for sealing is arranged between the mold 1 and the connection part. Specifically, by forming a tight seal between the mold 1 and the connection part, the operating safety of the crucible cooling device and the sealing of each passage can be ensured, thereby further extending the service life of the vacuum pump.

[0054] Since the above-mentioned support structure 2 has the above-mentioned effects, the crucible cooling device including the support structure 2 has corresponding effects, which will not be described in detail here.

[0055] The advantages of the utility model are:

[0056] (1) Extend the service life of the vacuum pump;

[0057] (2) High security;

[0058] (3) The vacuum pumping effect is improved.

[0059] It should be noted that the support structure and crucible cooling device provided by the utility model can be used in the technical field of crucible melting equipment or other fields. Other fields are any fields other than the technical field of crucible melting equipment. The above is only an example and does not limit the application field of the support structure and crucible cooling device provided by the utility model.

[0060] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0061] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

[0062] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0063] The preferred embodiments of the utility model disclosed above are only used to help explain the utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the utility model to only specific implementation methods. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can well understand and use the utility model. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A support structure, characterized in that: It includes a base, an axis support and a rotating axis, wherein: The shaft support is fixed to the base and is used to support the rotating shaft; The rotating shaft can rotate around its own axis relative to the shaft support; The rotating shaft comprises a connecting portion and a receiving portion, wherein the connecting portion is used to connect the mold, and the receiving portion is plug-connected with the shaft support; The accommodating portion is provided with a first vacuum chamber, a first water inlet chamber and a first water return chamber in the axial direction, the first water inlet chamber is arranged between the first vacuum chamber and the first water return chamber, and the first vacuum chamber is arranged in the middle of the rotating shaft; The connecting portion is provided with a first water inlet, a second water inlet, a first water return port and a second water return port; The first water inlet and the second water inlet are connected to the first water inlet cavity and are used to supply water to the mold; The first water return port and the second water return port are connected to the first water return chamber and are used for returning water.

2. The support structure according to claim 1, characterized in that The shaft support is provided with a second vacuum chamber, a second water inlet chamber and a second water return chamber, and when the accommodating portion is plugged into the shaft support, the second vacuum chamber, the second water inlet chamber and the second water return chamber are respectively connected to the first vacuum chamber, the first water inlet chamber and the first water return chamber.

3. The support structure according to claim 2, characterized in that: The base is provided with a total water inlet and a total water return port, the total water inlet is communicated with the bottom of the second water inlet cavity, and the total water return port is communicated with the bottom of the second water return cavity.

4. The support structure according to claim 1, characterized in that The first water inlet and the second water inlet are arranged opposite to each other and have the same diameter. The first water return port and the second water return port are arranged opposite to each other and have the same diameter.

5. The support structure according to claim 2, characterized in that: A contact platform is provided on the top of the second water return chamber, and the contact platform is used to connect to the outer wall of the accommodating portion.

6. The support structure according to claim 3, characterized in that: The base is provided with an inlet pipe and a return pipe, the inlet pipe is used to connect the second return water chamber with the main return water port, the return water pipe is used to connect the second inlet chamber with the main water inlet, the inlet pipe is L-shaped, and the return water pipe is L-shaped or straight.

7. The support structure according to any one of claims 1 to 6, characterized in that: The base comprises a vacuum pipe, and the vacuum pipe is communicated with the first vacuum chamber.

8. A crucible cooling device, characterized in that: The invention comprises a mold and a supporting structure as claimed in any one of claims 1 to 7, wherein the mold is connected to a connecting portion of the supporting structure.

9. The crucible cooling device according to claim 8, characterized in that: The bottom of the mold is fixedly connected to the connecting part, and the bottom of the mold is provided with a third water inlet, a fourth water inlet, a third water return port and a fourth water return port which are connected to the first water inlet, the second water inlet, the first water return port and the second water return port, and the bottom of the mold is provided with a vacuum port which is connected to the first vacuum chamber.

10. The crucible cooling device according to claim 8, characterized in that: A rubber gasket for sealing is arranged between the mold and the connecting part.

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