Guiding type labyrinth seal thermal insulation structure for thermal insulation system of third-generation semiconductor SiC material purification equipment

Abstract

The utility model discloses a guide type labyrinth seal heat preservation structure for a heat preservation system of third-generation semiconductor SiC material purification equipment, and belongs to the technical field of semiconductor material manufacturing. Comprising multiple layers of heat preservation felts which are tightly attached and connected end to end and are of a polygonal structure, and each layer of heat preservation felt is formed by sequentially and alternately splicing odd heat preservation felts and even heat preservation felts; the odd heat preservation felt and the even heat preservation felt are both of an isosceles trapezoid structure, and during splicing, the waist of the even heat preservation felt in each layer is tightly attached to the lower bottom edge of the odd heat preservation felt; between every two adjacent layers, the lower bottom edge of the odd heat preservation felt located on the outer layer is tightly attached to the upper bottom edge of the odd heat preservation felt located on the inner layer, and the lower bottom edge of the even heat preservation felt located on the outer layer is tightly attached to the upper bottom edge of the even heat preservation felt located on the inner layer; the thickness of the heat preservation felt does not need to be increased, and the temperature of hot air flowing from 2400 DEG C inside the heat preservation system to the outside of the heat preservation felt is within 300 DEG C only through the structural design.

Description

Technical Field

[0001] The utility model belongs to the technical field of third-generation semiconductor material manufacturing, and relates to a thermal insulation structure, in particular to a guided labyrinth sealing thermal insulation structure for a thermal insulation system of third-generation semiconductor SiC material purification equipment. Background Art

[0002] The third generation of semiconductors, also known as wide bandgap semiconductors, are semiconductor materials represented by silicon carbide (SiC) and gallium nitride (GaN), which have the characteristics of high voltage, high temperature, high frequency and high power. At present, they have been widely used in wireless infrastructure (base stations), satellite communications, rail transportation, new energy vehicles, consumer electronics and other fields. Among them, high temperature purification equipment is an essential equipment for the preparation of third generation semiconductor SiC materials.

[0003] The insulation system of high-temperature purification equipment is the core system of the entire equipment. The internal temperature of the insulation system is as high as 2400℃. After the insulation is carried out by the insulation system, the temperature outside the insulation system is only 300℃. Therefore, the design of the insulation system is very critical. In the process of designing the insulation system, graphite felt with good thermal insulation performance is selected as the insulation material. The thermal conductivity of the graphite felt is 0.15-02W / mK, which can well insulate heat. However, there is a problem of heat loss at the joints of the insulation felt. Therefore, in addition to the selection of insulation materials, the insulation system of high-temperature purification equipment must also be optimized in structural design. In order to prevent heat loss, the insulation system needs to be designed for sealing and insulation. The existing sealing and insulation method is step cross sealing. The length of this step cross sealing is limited. In order to ensure that the 2400℃ airflow passes through the step cross sealing of the insulation felt, the airflow temperature outside the insulation system drops to 300℃, the thickness of the insulation felt needs to be increased, and then the length of the step cross sealing is increased to ensure the insulation effect.

[0004] like Figure 1 , Figure 2 and Figure 3As shown, the existing step cross sealing method is that the first layer of insulation felt is sealed with the adjacent first layer of insulation felt through a step, the second layer of insulation felt is sealed with the adjacent second layer of insulation felt through a step, the third layer of insulation felt is sealed with the adjacent third layer of insulation felt through a step, and so on, through the four layers of insulation felt, the airflow temperature outside the insulation system is guaranteed to drop to 300°C. When the airflow inside the insulation system reaches point A through the first layer of insulation felt, it can choose to go left or right according to the direction of the gap (the angles to the left and right are both 90°), and the left or right is randomly selected. When the airflow flows to the left, the sealing length is very long, and the impact of the airflow on the outside is negligible; when the airflow flows to the right, the sealing length is only the thickness of one layer of insulation felt. At this time, after the airflow passes through the first layer of insulation felt and reaches point B, it can choose to go up or down according to the direction of the gap (the angles to the up and down are both 90°), and the upward or downward is randomly selected. When the airflow flows downward, the sealing length is very long, and the impact of the airflow on the outside is negligible; when the airflow flows upward, the sealing length is only one layer of insulation felt. The thickness of the insulation felt. At this time, after the airflow reaches point C through the second layer of insulation felt, it can choose to go left or right according to the direction of the gap (the angles of left and right are both 90°), and the left or right direction is randomly selected. When the airflow flows to the left, the sealing length is very long, and the impact of the airflow on the outside is negligible; when the airflow flows to the right, the sealing length is only the thickness of one layer of insulation felt. At this time, the airflow reaches point D. According to the direction of the gap, it can choose to go up or down (the angles of up and down are both 90°), and the upward or downward direction is randomly selected. When the airflow flows downward, the sealing length is very long, and the impact of the airflow on the outside is negligible; when the airflow flows upward, the sealing length is only the thickness of one layer of insulation felt. At this time, the airflow passes through the third layer of insulation felt and reaches point E. The airflow repeats the above operation until the airflow reaches the outside of the insulation layer and reaches point G. The airflow completes the entire process of flowing from the inside of the insulation felt to the outside of the insulation felt; thus, this part of the hot airflow will be lost to the outside of the insulation felt, affecting the insulation effect. Utility Model Content

[0005] The utility model overcomes the shortcomings of the prior art and proposes a guided labyrinth sealing insulation structure for the insulation system of third-generation semiconductor SiC material purification equipment. The structure does not need to increase the thickness of the insulation felt, and can ensure that the temperature of the air flow flowing to the outside of the insulation felt is within 300°C only through structural design.

[0006] In order to achieve the above purpose, the utility model is implemented through the following technical solutions.

[0007] A guided labyrinth seal insulation structure for a third-generation semiconductor SiC material purification equipment insulation system, comprising multiple layers of insulation felt, the multiple layers of insulation felt are tightly fitted and connected end to end to form an insulation internal cavity inside a high-temperature purification equipment; the multiple layers of insulation felt are a polygonal structure, and the number of sides of the polygonal structure is ≥12; each layer of insulation felt is composed of odd insulation felts and even insulation felts alternately spliced ​​in sequence; the odd insulation felts and even insulation felts are both isosceles trapezoidal structures, and the upper base length of the odd insulation felt in each layer of insulation felt is greater than the upper base length of the even insulation felt, and the lower base length of the odd insulation felt in each layer of insulation felt is greater than the lower base length of the even insulation felt; from inside to outside, the cross-section of the odd insulation felt between layers gradually increases, and the cross-section of the even insulation felt between layers gradually increases;

[0008] When splicing, the waist of the even insulation felt in each layer fits tightly with the lower bottom edge of the odd insulation felt; the lower bottom edge of the odd insulation felt in the outer layer between two adjacent layers fits tightly with the upper bottom edge of the odd insulation felt in the inner layer, and the lower bottom edge of the even insulation felt in the outer layer between two adjacent layers fits tightly with the upper bottom edge of the even insulation felt in the inner layer.

[0009] Preferably, the number of sides of the polygonal structure is 12.

[0010] Preferably, the number of layers of the multi-layer thermal insulation felt is four.

[0011] Preferably, the furnace shell of the high-temperature purification equipment is a water-cooled jacket structure.

[0012] The beneficial effects of the utility model compared with the prior art are:

[0013] The utility model adopts at least 12-sided guided labyrinth sealing form, which guides the airflow to flow along a pre-designed path through gas dynamics. The airflow flowing along this path is difficult to get out of the labyrinth. This method can effectively block the overflow of hot air flow. The guided sealing labyrinth changes the angle of the airflow from the inside to the outside of the insulation felt, so that most of the airflow flows from the 30° sealing surface (this path is very long and there are other airflows on this path to offset and delay the airflow speed), and only a small part of the airflow flows from the 150° sealing surface. The airflow from the first layer of insulation felt to the fourth layer of insulation felt needs to repeatedly pass through the 30° and 150° labyrinth selections. Finally, only a small amount of airflow is likely to get out of the guided labyrinth and reach the outside of the insulation system, thereby playing a role of step-by-step blocking and cooling, and ensuring that the temperature outside the insulation system is 300°C.

[0014] The utility model cleverly uses the principle of gas dynamics to allow the random hot air flow to flow along the designed angle. By extending the hot air flow path, the thickness of the insulation system is reduced to save costs. When the high-temperature purification equipment is a circular furnace body, the effective space surrounded by the 12-sided guided labyrinth seal is larger than the effective space surrounded by the 4-sided step cross seal, which increases the effective space inside the insulation system, can place more materials, and improve the production efficiency of the equipment.

[0015] In the utility model, the odd insulation felt of the first layer of the guided labyrinth insulation system needs to be adjacent to the odd insulation felt of the second layer, so that a labyrinth can be formed by the different sizes of each layer of odd insulation felt, so that the hot air flow is not easy to escape to the outside of the insulation system. According to this design requirement, it can be ensured that the hot air flow has the longest path in the guided labyrinth seal. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of an existing step cross sealing structure;

[0017] Figure 2 for Figure 1 The enlarged view of point A in the middle;

[0018] Figure 3 It is a schematic diagram of the airflow movement trajectory of the existing step cross sealing structure;

[0019] Figure 4 It is a schematic diagram of the guided labyrinth sealing and heat preservation structure of the utility model;

[0020] Figure 5 for Figure 4 Schematic diagram of airflow trajectory at point B in the middle;

[0021] Figure 6 It is a schematic diagram of the path of most of the gas in the guided labyrinth seal insulation structure of the utility model flowing from point A to the outside of the insulation system;

[0022] Figure 7 This is a schematic diagram of hedging and deceleration on the J-J' path when the flow from point A and point A' to the outside of the insulation system during the actual operation of the insulation system;

[0023] Figure 8 It is a schematic diagram of the structure of odd insulation felt and even insulation felt in each layer of insulation felt;

[0024] Fig. 9 It is a schematic diagram of the structure in which the odd insulation felt and the even insulation felt are adjacent to each other between the layers after the layers are incorrectly spliced;

[0025] Fig.10 This is a schematic diagram of the path from point A to the outside of the insulation system after incorrect splicing;

[0026] Fig.11This is a schematic diagram of the structure of "odd-odd adjacent incorrect installation - incomplete symmetry" after all odd insulation felts are assembled in the same layer.

[0027] Fig.12 Schematic diagram of the structure of a complete symmetrical body with correct installation of even and odd adjacent bodies.

[0028] Numbers in the figure:

[0029] 101. First layer of odd insulation felt; 102. First layer of even insulation felt; 201. Second layer of odd insulation felt; 202. Second layer of even insulation felt; 301. Third layer of odd insulation felt; 302. Third layer of even insulation felt; 401. Fourth layer of odd insulation felt; 402. Fourth layer of even insulation felt; 5. High-temperature purification equipment; 6. Insulation internal cavity; 7. Furnace shell water-cooling jacket. DETAILED DESCRIPTION

[0030] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail in combination with the embodiments and the accompanying drawings. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention. The technical solution of the present invention is described in detail below in combination with the embodiments and the accompanying drawings, but the scope of protection is not limited thereto.

[0031] See also Figures 4 to 8 This embodiment proposes a guided labyrinth sealing insulation structure for the insulation system of the third-generation semiconductor SiC material purification equipment, including four layers of insulation felt, which are tightly fitted and connected end to end to form an insulation internal cavity 6 inside the high-temperature purification equipment 5; the outermost edge of the high-temperature purification equipment 5 is provided with a furnace shell water cooling jacket 7.

[0032] The four layers of thermal insulation felt are of a 12-sided structure, and each layer of thermal insulation felt is composed of odd thermal insulation felts and even thermal insulation felts that are alternately assembled in sequence; the odd thermal insulation felts and even thermal insulation felts are both isosceles trapezoidal structures, and the upper base length of the odd thermal insulation felts in each layer of thermal insulation felt is greater than the upper base length of the even thermal insulation felts, and the lower base length of the odd thermal insulation felts in each layer of thermal insulation felt is greater than the lower base length of the even thermal insulation felts; from inside to outside, the cross-section of the odd thermal insulation felts between layers gradually increases, and the cross-section of the even thermal insulation felts between layers gradually increases;

[0033] When splicing, the waist of the even insulation felt in each layer fits tightly with the lower bottom edge of the odd insulation felt; the lower bottom edge of the odd insulation felt in the outer layer between two adjacent layers fits tightly with the upper bottom edge of the odd insulation felt in the inner layer, and the lower bottom edge of the even insulation felt in the outer layer between two adjacent layers fits tightly with the upper bottom edge of the even insulation felt in the inner layer.

[0034] Specifically, in the present embodiment, the guided labyrinth seal is a contact seal, and the specific sealing method is that the first layer of odd insulation felt 101 and the adjacent first layer of even insulation felt 102 are sealed through a guided labyrinth seal, the second layer of odd insulation felt 201 and the adjacent second layer of even insulation felt 202 are sealed through a guided labyrinth seal, the third layer of odd insulation felt 301 and the adjacent third layer of even insulation felt 302 are sealed through a guided labyrinth seal, the fourth layer of odd insulation felt 401 and the adjacent fourth layer of even insulation felt 402 are sealed through a guided labyrinth seal, and so on, through the layer-by-layer barrier of four layers of insulation felt, the air flow temperature outside the insulation system is ensured to drop to 300°C.

[0035] See also Figure 5 When the airflow inside the insulation system passes through the joint of the first layer of odd insulation felt 101 and the first layer of even insulation felt 102 and reaches point A, most of the airflow will actively choose to flow through the gap that is 30° with its own direction of movement according to the direction of the gap. Only a small part of the airflow will choose to flow through the gap that is 150° with its own direction of movement due to airflow congestion. When most of the airflow chooses to flow through the gap that is 30° with its own direction of movement, since the sealing length in this sealing direction is very long, if it wants to flow to the outside of the insulation system, it needs to pass through Figure 6 The path of points "H, I, J, K, L, M" shown in the figure, when the airflow flows to point M of the fourth layer of insulation felt, the impact of the airflow on the outside is negligible.

[0036] During the actual operation of the high-temperature purification equipment, the gas inside the insulation system will flow into the guided labyrinth seal insulation system from any gap in the 12-sided shape of the first layer of insulation felt. Figure 7 For example, the gas flowing from point A and point A' to the outside of the insulation system will be decelerated on the J-J' path, further reducing the airflow flowing to the outside of the insulation system. For a small part of the airflow, due to the congestion of the gap airflow at point A, it will choose to flow through the gap with an angle of 150° to its own direction of movement. After reaching point B, a small part (most of the middle) of the airflow will actively choose to flow through the gap with an angle of 30° to its own direction of movement according to the gap direction. Only a small part (a small part of the middle) of the airflow will choose to flow through the gap with an angle of 150° to its own direction of movement due to the congestion of the airflow at point B. After reaching point C, the airflow repeats the flow according to the guided labyrinth sealing structure until it reaches point G after changing the angle many times. At this time, there is little airflow inside the insulation felt, which can play a good role in cooling down, and it does not need to be as thick as the insulation felt in the form of step cross sealing to play the same role. Through actual testing, this new guided labyrinth seal can reduce the thickness of the insulation felt by 30% compared with the step cross seal, which effectively reduces the cost of the insulation felt. When the high-temperature purification equipment is a circular furnace body, the effective space enclosed by the 12-sided guided labyrinth seal is larger than the effective space enclosed by the 4-sided step cross seal, which increases the effective space inside the insulation system, allows for more materials to be placed, and improves the production efficiency of the equipment.

[0037] In this embodiment, each layer of insulation felt in the guided labyrinth seal is divided into odd insulation felt and even insulation felt (a total of four layers of insulation felt, and each layer has a different size). During the installation process, it needs to be installed according to the design requirements. The requirements between each layer are: the two insulation felts adjacent to the left and right of each layer of odd insulation felt must be even insulation felt. The requirements between layers are: the inner layer of odd insulation felt needs to be adjacent to the adjacent outer layer of odd insulation felt, so that a maze can be formed by the different sizes of each layer of odd insulation felt, making it difficult for the hot air flow to escape to the outside of the insulation system. According to this design requirement, it can be ensured that the hot air flow has the longest path in the guided labyrinth seal.

[0038] If the installation is not carried out in accordance with this design requirement, the hot air flow will have a short running path in the guided labyrinth seal, resulting in poor insulation effect. Fig. 9 and Fig.10 For example, when the first layer of odd insulation felt 101 is adjacent to the second layer of even insulation felt 202, a complete guided labyrinth seal insulation system can also be assembled according to this installation method. However, in this method, the running path of the hot air flow in the guided labyrinth seal is the path of points "H, I, J", which reduces the sealing of three sealing surfaces compared with the path "H, I, J, K, L, M" required for installation in the design. In this way, the hot air flow has a great impact on the outside, affecting the insulation effect.

[0039] See also Fig.12 The guided maze insulation system is designed with an anti-misinstallation structure. Each layer of insulation felt has "odd" insulation felt and "even" insulation felt. Its assembly method is to install "odd" and "even" adjacently. If "odd" and "odd" are installed adjacently or "even" and "even" are installed adjacently, then a complete symmetrical body will not be formed after installation. Fig.11 Another way of misinstallation is to install odd-odd pieces next to each other or even-even pieces next to each other in the same layer of insulation felt. Then, after installation, a complete symmetrical body will not be formed, nor will a gas path of a certain length be formed.

[0040] In summary, the guided labyrinth seal insulation system adopted by the utility model guides the hot air flow inside the insulation system to flow out along the designed path. The temperature of the hot air flow gradually decreases during the flow of the path, and the hot air flow will encounter the impact of the hot air flow entering from other inlets on the path, which reduces its speed. In ordinary labyrinth seal systems, the path that the hot air flow follows after entering the labyrinth seal is randomly selected, and the path cannot be pre-set. In order to prevent the hot air flow from leaving the labyrinth through the shortest path and affecting the stability of the insulation system, the ordinary labyrinth seal insulation system needs to be made very thick during design to avoid the impact of the hot air flow on the external furnace body.

[0041] The guided maze insulation system is designed with an anti-misinstallation structure. Each layer of insulation felt has "odd" insulation felt and "even" insulation felt. Its assembly method is to install "odd" and "even" adjacently. If "odd" and "odd" are installed adjacently or "even" and "even" are installed adjacently, then a complete symmetrical body will not be formed after installation.

[0042] For the 12-sided structure used in this embodiment, each insulation felt in the guided labyrinth sealing insulation system has 30° and 150°. For the two paths where the airflow movement path is at an angle of 30° and 150° to the original path, according to the principle of gas dynamics, the airflow will choose the path that is 30° to the original path to flow. The utility model cleverly uses the principle of gas dynamics to allow the random hot air flow to flow along the designed angle. Of course, the number of side lengths can also be appropriately increased, but considering the manufacturing cost and other reasons, the number of side lengths is 12 and the number of insulation felt layers is 4, which can achieve the desired effect.

[0043] The "odd" insulation felt of the first layer of the guided labyrinth insulation system needs to be adjacent to the "odd" insulation felt of the second layer, so that a labyrinth can be formed by the different sizes of each layer of "odd" insulation felt, making it difficult for the hot air flow to escape to the outside of the insulation system. According to this design requirement, it can be ensured that the path of the hot air flow in the guided labyrinth seal is the longest. The utility model reduces the thickness of the insulation system and saves costs by extending the hot air flow path. When the high-temperature purification equipment is a circular furnace body, the effective space enclosed by the 12-sided guided labyrinth seal is larger than the effective space enclosed by the 4-sided step cross seal, thereby increasing the effective space inside the insulation system, allowing for more materials to be placed, and improving the production efficiency of the equipment.

[0044] The above content is a further detailed description of the utility model in combination with a specific preferred implementation method. It cannot be determined that the specific implementation methods of the utility model are limited to this. For ordinary technicians in the technical field to which the utility model belongs, they can make several simple deductions or substitutions without departing from the utility model, which should be regarded as belonging to the utility model and the scope of patent protection determined by the submitted claims.

Claims

1. A guided labyrinth seal insulation structure for a third-generation semiconductor SiC material purification equipment insulation system, comprising multiple layers of insulation felt, the multiple layers of insulation felt are tightly fitted and connected end to end to form an insulation internal cavity inside the high-temperature purification equipment; characterized in that: The multi-layer insulation felt is a polygonal structure, and the number of sides of the polygonal structure is ≥12; each layer of insulation felt is composed of odd insulation felts and even insulation felts that are alternately assembled in sequence; the odd insulation felts and even insulation felts are both isosceles trapezoidal structures, and the upper base length of the odd insulation felt in each layer of insulation felt is greater than the upper base length of the even insulation felt, and the lower base length of the odd insulation felt in each layer of insulation felt is greater than the lower base length of the even insulation felt; from inside to outside, the cross-section of the odd insulation felt between layers gradually increases, and the cross-section of the even insulation felt between layers gradually increases; When splicing, the waist of the even insulation felt in each layer fits tightly with the lower bottom edge of the odd insulation felt; the lower bottom edge of the odd insulation felt in the outer layer between two adjacent layers fits tightly with the upper bottom edge of the odd insulation felt in the inner layer, and the lower bottom edge of the even insulation felt in the outer layer between two adjacent layers fits tightly with the upper bottom edge of the even insulation felt in the inner layer.

2. A guided labyrinth seal insulation structure for a third-generation semiconductor SiC material purification equipment insulation system according to claim 1, characterized in that: The number of sides of the polygonal structure is 12.

3. The guided labyrinth sealing insulation structure for the insulation system of the third-generation semiconductor SiC material purification equipment according to claim 1 is characterized in that: The number of layers of multi-layer insulation felt is four.

4. The guided labyrinth sealing insulation structure for the insulation system of the third-generation semiconductor SiC material purification equipment according to claim 1, characterized in that: The furnace shell of the high-temperature purification equipment is a water-cooled jacket structure.

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