Liquid medicine heating device with accurate temperature control

Abstract

The utility model discloses a liquid medicine heating device with accurate temperature control, which comprises a shell, and an accommodating space is arranged in the shell; the liquid medicine channel is arranged in the containing space, a liquid inlet pipe and a liquid outlet pipe which penetrate out of the two ends of the shell are arranged in the liquid medicine channel, and the liquid medicine channel is formed by sequentially communicating multiple layers of spiral pipelines up and down. The first heating part is arranged between the upper and lower adjacent layers of spiral pipelines; and the second heating part is arranged between the bottommost spiral pipeline and the bottom of the shell. Liquid medicine can stay in the spiral pipeline for a long time, then the liquid medicine is fully heated through the first heating part and the second heating part, the temperature loss in the conveying process is small, and the temperature of the liquid medicine flowing out of the liquid outlet pipe is accurately controlled; the second heating part is composed of a plurality of heating rings which are sleeved and connected in the radial direction, and the highest temperature of the plurality of heating rings is sequentially increased from inside to outside, so that the lower shell with the heat conduction function in the shell can uniformly preserve heat and heat liquid medicine on a wafer, and the cleaning effect is improved.

Description

Technical Field

[0001] The utility model relates to a medicine liquid heating device, in particular to a medicine liquid heating device with precise temperature control. Background Art

[0002] When performing wafer cleaning processes in the field of semiconductor technology, some cleaning processes require the solution to be heated to a set temperature and then sprayed onto the wafer surface to improve the cleaning effect of the solution. Some cleaning processes also require the temperature of the solution to be maintained for a period of time during the spray cleaning process to further improve the relevant cleaning effect.

[0003] At present, the commonly used heating method is to directly heat the medicine liquid, and then transmit the heated medicine liquid to the nozzle for spraying. However, some problems have been found after the use of the existing heating method. When the medicine liquid is transmitted through a long-distance pipeline, there is a loss of medicine liquid temperature. In this way, the temperature of the medicine liquid cannot be accurately controlled during use. In addition, in the cleaning process, the medicine liquid sprayed from the spray head cannot be kept warm and heated accordingly, so that the temperature of the medicine liquid cannot reach the set requirements for wafer cleaning during cleaning, which further causes the wafer cleaning effect to fail to meet the requirements. Utility Model Content

[0004] The utility model aims to overcome the deficiencies of the prior art and to provide a liquid medicine heating device with precise temperature control, which can precisely control the temperature of the liquid medicine when it is sprayed out and can keep the liquid medicine warm and heat it during the cleaning process, thereby achieving a good cleaning effect on the wafer.

[0005] In order to achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a liquid medicine heating device with precise temperature control, comprising:

[0006] A housing, wherein a receiving space is provided inside the housing;

[0007] A liquid medicine channel is arranged in the containing space, wherein a liquid inlet pipe and a liquid outlet pipe are arranged in the liquid medicine channel and extend from the top and the bottom of the shell, wherein the liquid medicine channel is formed by multiple layers of spiral pipes connected in sequence from top to bottom;

[0008] A first heating part is disposed between two adjacent layers of the spiral pipelines and along the length direction of the spiral pipeline to transfer heat to the spiral pipeline;

[0009] The second heating part is arranged between the bottommost spiral pipeline and the bottom of the shell, and is used for transferring heat to the spiral pipeline.

[0010] Furthermore, the shell includes an upper shell and a lower shell which are connected to each other up and down.

[0011] Furthermore, a heat insulation plate is provided between the upper surface of the medicine liquid channel and the lower surface of the upper shell.

[0012] Furthermore, the medicine liquid channel includes a first spiral pipeline and a second spiral pipeline connected up and down through a plurality of connecting plates; the liquid inlet pipe is located on one side of the center of the first spiral pipeline, and the liquid outlet pipe is located at the center of the second spiral pipeline; one end of the first spiral pipeline is connected to one side of the second spiral pipeline through a connecting pipeline.

[0013] Furthermore, the first heating part is a heating plate arranged along the length direction of each layer of the spiral pipeline, and the heating plate is provided with a heating resistor for heating the upper surface and the lower surface of the heating plate.

[0014] Furthermore, the second heating part is composed of a plurality of heating rings which are sequentially arranged, and the heating temperature of the outermost heating ring is greater than the temperature of the innermost heating ring; and the shell is a heat-conducting component.

[0015] Furthermore, an opening is provided at the top of the liquid outlet pipe, and the opening extends upward to pass through the top of the liquid medicine channel; a temperature measuring sensor is provided at the opening and is inserted into the liquid outlet pipe.

[0016] Furthermore, it also includes a lifting mechanism for driving the liquid medicine heating device to move up and down.

[0017] Furthermore, the distance between the bottom of the shell and the wafer is 1-2 mm.

[0018] Due to the application of the above technical solution, the utility model has the following advantages compared with the prior art:

[0019] The utility model has a liquid medicine heating device with precise temperature control. When the liquid medicine is heated and sprayed, the first heating part and the second heating part heat the liquid medicine in the liquid medicine pipeline. The liquid medicine pipeline is a spiral pipeline, so the liquid medicine can stay in the spiral pipeline for a sufficient time to be fully heated and heated. Then the liquid medicine heating device is lowered to a distance above one end of the wafer for spraying and cleaning. The temperature loss of the liquid medicine is small during the transmission process, and the temperature of the liquid medicine sprayed out of the liquid outlet pipe meets the needs, so that the temperature of the liquid medicine can be accurately and effectively controlled, and the cleaning efficiency of the liquid medicine is improved.

[0020] Secondly, the second heating part is composed of a plurality of radially sleeved and connected heating rings, which transfer heat to the lower outer shell. The lower outer shell ensures that the medicine liquid below it can be kept warm and heated, thereby increasing the temperature of the medicine liquid to meet the use requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The technical solution of the utility model is further described below in conjunction with the accompanying drawings:

[0022] Figure 1 This is a schematic diagram of the structure of an embodiment of the utility model;

[0023] Figure 2 for Figure 1 A structural diagram from another perspective;

[0024] Figure 3 It is a top view of the utility model;

[0025] Figure 4 for Figure 3 Partial cross-sectional view of AA;

[0026] Figure 5 This is a schematic diagram of the three-dimensional structure of the liquid medicine channel in one embodiment of the utility model;

[0027] Figure 6 for Figure 5 A structural diagram from another perspective;

[0028] Figure 7 It is a structural schematic diagram of the liquid medicine channel, the first heating part and the second heating part when they are assembled in one embodiment of the utility model;

[0029] Figure 8 for Figure 7 A schematic diagram of a three-dimensional structure from another perspective;

[0030] Fig. 9 In one embodiment of the utility model, there is a heat insulation board Figure 7 A structural diagram from another perspective;

[0031] Fig.10 This is a schematic diagram of an embodiment of the utility model in use;

[0032] Among them: shell 1, liquid channel 2, first heating part 3, second heating part 4, temperature sensor 5, heat insulation board 6, wafer 7, upper shell 10, lower shell 11, liquid inlet pipe 20, liquid outlet pipe 21, spiral pipeline 22, first heating ring 40, second heating ring 41, third heating ring 42, fourth heating ring 43, opening 210, first spiral pipeline 220, second spiral pipeline 221, connecting pipeline 222, connecting plate 223. DETAILED DESCRIPTION

[0033] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present application.

[0034] The utility model provides a liquid medicine heating device with precise temperature control to solve the problems in the prior art that the temperature of the liquid medicine sprayed during cleaning cannot be precisely controlled, and the liquid medicine cannot be kept warm and heated during the cleaning process, resulting in poor stability and uniformity of the liquid medicine temperature and the wafer cleaning efficiency cannot be effectively guaranteed.

[0035] For ease of understanding, the specific process in the embodiments of the present application is described below. Figures 1 to 4 A temperature-precisely controlled liquid medicine heating device in the embodiment of the present application comprises a shell 1, a liquid medicine channel 2, a first heating part 3 and a second heating part 4; a housing space is provided inside the shell 1; the liquid medicine channel 2 is arranged in the housing space, and a liquid inlet pipe 20 and a liquid outlet pipe 21 are provided in the liquid medicine channel 2, which penetrate from the top and the bottom of the shell 1; the liquid medicine channel 2 is formed by multiple layers of spiral pipes 22 connected in sequence from top to bottom; the first heating part 3 is arranged between the spiral pipes 22 of two adjacent layers above and below, and is arranged along the length direction of the spiral pipes 22; the second heating part 4 is arranged between the spiral pipe 22 at the bottom and the bottom of the shell 1.

[0036] The temperature-controlled precise liquid medicine heating device of the present invention allows the liquid medicine to stay in the spiral pipe 2 for a sufficient time to be fully heated by the first heating part 3 and the second heating part 4, so that the liquid medicine will not be damaged by temperature during transmission, and the liquid medicine temperature can be accurately and effectively controlled, thereby improving the cleaning effect of the liquid medicine.

[0037] Further, based on Figure 1 and Figure 4 In this embodiment, the shell 1 includes an upper shell 10 and a lower shell 11 which are connected to each other up and down, and the upper shell 10 and the lower shell 11 constitute a storage space for accommodating the medicine liquid pipeline 2, the first heating part 3 and the second heating part 4.

[0038] Further, based on Figure 5 to Figure 6 The medicine liquid channel 2 in this embodiment includes a first spiral pipeline 220 and a second spiral pipeline 221 which are connected up and down by eight connecting plates 223, and the first spiral pipeline 220 and the second spiral pipeline 221 are disc-shaped; the liquid inlet pipe 20 is located on one side of the center of the first spiral pipeline 220, and the liquid outlet pipe 21 is located at the center of the second spiral pipeline 221; one end of the first spiral pipeline 220 is connected to one side of the second spiral pipeline 221 through a connecting pipeline 222; the number of spiral pipelines 22 is not limited to the above two. When the target temperature of the medicine liquid heating and the temperature difference of the medicine liquid flowing out of the liquid outlet pipe 21 are large, a spiral pipeline structure with three or more layers can be adopted.

[0039] In addition, the connecting plate 223 may also be made of a plate of heat-conducting material, so as to connect the first spiral pipeline 220 and the second spiral pipeline 221 to each other through heat conduction, thereby making the temperature of the medicine in the first spiral pipeline 220 and the second spiral pipeline 221 more uniform and stable.

[0040] During operation, the medicine flows in from the liquid inlet pipe 20, then flows into the second spiral pipe 221 after passing through the first spiral pipe 220 and the connecting pipe 222, and then flows out from the liquid outlet pipe 21, thereby realizing the circulation transmission of the medicine. Since the medicine liquid pipeline 2 is composed of two spiral pipes connected, the medicine can stay in the medicine liquid pipeline 2 for a sufficient time, so that the first heating part 3 and the second heating part 4 have enough time to heat the medicine. The first heating part and the second heating part can also make the medicine heat up quickly, so that the set temperature can be accurately controlled to flow out from the liquid outlet pipe 21, and the temperature stability is good.

[0041] Further, based on Figure 7 The first heating part 3 is a heating plate arranged along the length direction of each layer of spiral pipe 22, and the heating plate is a circular plate-shaped member. A heating resistor for heating the upper and lower surfaces of the heating plate is arranged inside the heating plate, and the heating resistor is energized and heated by an external heating wire, and the heated heating resistor causes the upper and lower surfaces of the heating plate to heat up.

[0042] based on Figure 4 and Figure 7 In this embodiment, the heating plate is arranged between the first spiral pipeline 220 and the second spiral pipeline 221, and the upper and lower surfaces of the heating plate are respectively in contact with the lower surface of the first spiral pipeline 220 and the upper surface of the second spiral pipeline 221. The heat generated by the heating plate can be quickly and effectively transferred to the first spiral pipeline 220 and the second spiral pipeline 221, so that the medicine liquid can be quickly heated up. Finally, the temperature of the medicine liquid flowing out of the liquid outlet pipe 21 can be accurately controlled because the medicine liquid is always in a heated state.

[0043] Further, based on Figure 8 The second heating part 4 includes a first heating ring 40, a second heating ring 41, a third heating ring 42 and a fourth heating ring 43. The above four heating rings are sequentially arranged and connected to the outer shell, and the upper surfaces and lower surfaces of the four heating rings are flush. The upper surfaces of the four heating rings are in contact with the second spiral pipeline 221, and the lower surfaces are in contact with the lower outer shell 11.

[0044] When the temperature of the medicine needs to be increased, the upper surfaces of the four heating rings contact the bottom of the second spiral pipeline 221. After being heated by the four heating rings, the temperature of the medicine in the second spiral pipeline 221 is rapidly increased, so that the temperature of the medicine sprayed from the liquid outlet pipe 21 is uniform and stable, and the temperature of the sprayed medicine can meet the set requirements.

[0045] In addition, since the temperature of the medicine sprayed from the liquid outlet pipe 21 at the center of the lower shell 11 is constantly decreasing during the process of flowing radially along the wafer, the temperatures of the heating in the first heating ring, the second heating ring, the third heating ring and the fourth heating ring increase successively, thus forming a stepped heating zone in the radial direction. At the same time, the lower shell 11 is a heat-conducting component, and there is a gap of 1-2 mm between the lower shell 11 and the wafer. After the medicine flows out from the liquid outlet, the medicine diffuses outward from the center of the wafer. Since the lower shell 11 is a heat-conducting component, and there is only a gap of 1-2 mm between the lower shell 11 and the wafer, the second heating part composed of four heating rings can transfer heat to the medicine on the wafer through the lower shell 11, and the transferred heat is in a stepped heating zone, so that the temperature uniformity of the medicine is good, thereby achieving the purpose of continuously heating the medicine and ensuring that the temperature of the medicine remains stable.

[0046] Furthermore, it also includes a lifting mechanism that drives the liquid medicine heating device to move up and down. The lifting mechanism can make the liquid medicine heating device move down to the top of the wafer, and the distance between the lower shell and the wafer is 1-2mm to accommodate the liquid medicine sprayed from the middle of the liquid outlet pipe 21 onto the wafer. Such a short distance means less temperature loss of the liquid medicine, which meets the actual usage needs.

[0047] In addition, based on Figure 5 and Figure 6 An opening 210 is provided at the top of the liquid outlet pipe 21, and the opening 210 extends upward and then passes through the top of the liquid medicine channel 2; a temperature sensor 5 is provided at the opening 210 and is inserted into the liquid outlet pipe 21. The temperature of the liquid medicine can be effectively measured by the temperature sensor 5, thereby facilitating subsequent operations.

[0048] Furthermore, a heat insulation board 6 is provided between the upper surface of the medicine liquid channel 2 and the upper surface of the upper shell 10. The heat insulation board 6 serves to keep warm and reduce heat conduction, thereby preventing heat from being transferred from the upper shell 10 and ensuring the stability of the medicine liquid temperature as much as possible.

[0049] Here’s how the operation works:

[0050] 1. A certain amount of liquid medicine is introduced into the liquid medicine pipeline 2 through the liquid inlet pipe 20, and then the first heating part 3 and the second heating part 4 start to transfer heat to the spiral pipe 22, so as to stabilize the liquid medicine in the spiral pipe 22 at a set temperature. When the temperature sensor 5 detects that the liquid medicine temperature at the outlet of the liquid outlet pipe 21 reaches the process temperature, the relevant cleaning process is started.

[0051] 2. The liquid medicine heating device is lowered to a distance of 1-2mm from the upper surface of the wafer through an external lifting mechanism, and then the corresponding high-temperature liquid medicine is sprayed from the liquid outlet pipe 21 of the bottom spiral pipeline 22 to perform high-temperature cleaning on the wafer. During the cleaning process, the four heating rings arranged radially from the inside to the outside can keep the liquid medicine within the process temperature range, so that the wafer can be cleaned at high temperature, and the cleaning effect is good.

[0052] In summary, the utility model transmits the chemical liquid through the spiral pipeline heated by the first heating part 3 and the second heating part 4, thereby ensuring that the chemical liquid can be sprayed out with precise temperature control, and through the four radially arranged heating rings, the chemical liquid can be kept within the cleaning process temperature range when the wafer is cleaned, thereby improving the cleaning efficiency and quality.

[0053] As described above, the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A liquid medicine heating device with precise temperature control, characterized in that: include: A housing, wherein a receiving space is provided inside the housing; A liquid medicine channel is arranged in the containing space, wherein a liquid inlet pipe and a liquid outlet pipe are arranged in the liquid medicine channel and extend from the top and the bottom of the shell, wherein the liquid medicine channel is formed by multiple layers of spiral pipes connected in sequence from top to bottom; A first heating part is disposed between two adjacent layers of the spiral pipelines and along the length direction of the spiral pipeline to transfer heat to the spiral pipeline; The second heating part is arranged between the bottommost spiral pipeline and the bottom of the shell, and is used for transferring heat to the spiral pipeline.

2. The liquid medicine heating device with precise temperature control as claimed in claim 1, characterized in that: The shell comprises an upper shell and a lower shell which are connected up and down.

3. The liquid medicine heating device with precise temperature control as claimed in claim 2, characterized in that: A heat insulation plate is also provided between the upper surface of the medicine liquid channel and the lower surface of the upper shell.

4. The liquid medicine heating device with precise temperature control as claimed in claim 1, characterized in that: The medicine liquid channel includes a first spiral pipeline and a second spiral pipeline connected up and down through a plurality of connecting plates; the liquid inlet pipe is located on one side of the center of the first spiral pipeline, and the liquid outlet pipe is located at the center of the second spiral pipeline; one end of the first spiral pipeline is connected to one side of the second spiral pipeline through a connecting pipeline.

5. The liquid medicine heating device with precise temperature control as claimed in claim 1, characterized in that: The first heating part is a heating plate arranged along the length direction of each layer of the spiral pipeline, and a heating resistor for heating the upper surface and the lower surface of the heating plate is arranged in the heating plate.

6. The liquid medicine heating device with precise temperature control as claimed in claim 1, characterized in that: The second heating part is composed of a plurality of heating rings which are sequentially sleeved, and the heating temperature of the outermost heating ring is greater than the temperature of the innermost heating ring. The shell is a heat-conducting component.

7. The liquid medicine heating device with precise temperature control as claimed in claim 1, characterized in that: The top of the liquid outlet pipe is provided with an opening, and the opening extends upward to pass through the top of the liquid medicine channel; a temperature measuring sensor is provided at the opening and is inserted into the inside of the liquid outlet pipe.

8. The liquid medicine heating device with precise temperature control as claimed in claim 1, characterized in that: The utility model also comprises a lifting mechanism for driving the liquid medicine heating device to move up and down.

9. The liquid medicine heating device with precise temperature control as claimed in claim 1, characterized in that: The distance between the bottom of the shell and the wafer is 1-2 mm.

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