Preparation equipment of scanning electron microscope powder sample

Abstract

The utility model discloses preparation equipment for a powder sample of a scanning electron microscope, which relates to the technical field of scanning electron microscopes and comprises a bottom cover, a cavity is arranged on the upper portion of the bottom cover, a boss A is arranged on the upper portion of the cavity, a circular sample area is arranged in the boss A, a plurality of uniformly distributed grids are arranged in the middle of the sample area, and the grids are arranged on the bottom cover. A plurality of round holes A are formed in the circumference of the sample area, a groove is formed in the center of the bottom of the cavity, a scanning electron microscope sample table is embedded in the groove, a conductive double-sided tape is laid on the upper surface of the scanning electron microscope sample table, and the other pasting face of the conductive double-sided tape is tightly pasted and attached to the lower surface of a grating. The powder sample preparation device is reasonable in design and simple in structure, sample accumulation and sample pollution are avoided, the quality and purity of powder sample preparation of the scanning electron microscope are guaranteed, the sample preparation efficiency is improved, the sample preparation cost is reduced, the sample preparation cost is reduced, and the sample preparation device is suitable for large-scale popularization and application. And the preparation efficiency of the powder sample is further improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of scanning electron microscopes, and particularly relates to a preparation device for a powder sample of a scanning electron microscope. Background Art

[0002] Scanning electron microscopy is a technology that observes the surface morphology of samples by collecting and analyzing multiple signals generated by the interaction between a focused high-energy electron beam and the sample. Samples used for scanning electron microscopy observation in many fields such as materials and medicine are in powder form, and the powder samples usually need to be fixed on a conductive double-sided tape for observation.

[0003] The quality of sample preparation directly affects the observation effect of electron microscopy images. Ideally, powder sample particles are firmly adhered to the conductive double-sided tape one by one to form a single particle layer without multiple particle accumulation. However, due to the small size of the powder, it is difficult to obtain such high-quality SEM samples. In addition, if multiple powder samples are prepared on a sample stage, in order to prevent loosely adhered powder particles from detaching from the conductive double-sided tape during the test and entering the vacuum chamber of the SEM to destroy the vacuum degree, it is usually necessary to blow away the powder with a hair dryer. However, due to the small size of the sample stage, powder splashes when placing the sample or particles blown up by the hair dryer are very likely to contaminate other samples. Therefore, it is very necessary to provide a SEM powder sample preparation device with a reasonable design, simple structure, and avoidance of sample accumulation and sample contamination. Summary of the invention

[0004] The utility model aims to overcome the shortcomings of the prior art and to provide a scanning electron microscope powder sample preparation device which has a reasonable design, a simple structure and avoids sample accumulation and sample contamination.

[0005] The purpose of the utility model is achieved as follows: a preparation device for a powder sample for a scanning electron microscope, comprising a bottom cover, a cavity is arranged on the upper part of the bottom cover, a boss A is arranged on the upper part of the cavity, a circular sample area is arranged inside the boss A, a plurality of evenly distributed grids are arranged in the middle of the sample area, a positioning hole is arranged at the upper left corner of the circumference of the sample area, a plurality of circular holes A are arranged at other positions on the circumference of the sample area except the positioning hole, a groove is opened at the center of the bottom of the cavity, a scanning electron microscope sample stage is embedded in the groove, a conductive double-sided tape is laid on the upper surface of the scanning electron microscope sample stage, the other adhesive surface of the conductive double-sided tape is tightly adhered to the lower surface of the grid, the cavity and the bottom cover are fixedly connected by bolt fasteners, a conversion joint is arranged on the upper part of the cavity, and a hose joint is connected to the top of the conversion joint.

[0006] Preferably, the boss A is a circular boss structure, and the bottom of the conversion joint is tightly embedded in the boss A on the cavity.

[0007] Preferably, the conversion joint is made of plastic or metal.

[0008] Preferably, the grid is a square lattice structure, and the height of the grid is 8-12 mm.

[0009] Preferably, a plurality of circular holes B are provided at the outer circumferential end of the cavity, and circular holes C having the same number and size as the circular holes B are provided at the outer circumferential end of the bottom cover.

[0010] Preferably, the center lines of the circular hole B and the circular hole C coincide with each other in the vertical direction, and the bolt fastener passes through the circular hole B and the circular hole C to fix the cavity and the bottom cover.

[0011] Preferably, a circular boss B is provided at the lower end of the scanning electron microscope sample stage, and the bottom plane of the boss B is tightly fitted with the center position of the upper surface of the bottom cover.

[0012] Preferably, a center hole is opened at the center of the bottom cover, and the center hole and the center of the boss B are on the same vertical line.

[0013] Preferably, the cavity is an integrally formed structure, and the cavity and the bottom cover are both made of metal.

[0014] Preferably, the hose connector is adapted for an industrial-grade vacuum cleaner air inlet hose connector, and the hose connector is tightly connected to the conversion connector. When the conversion connector is embedded in the hose connector, the outer diameter of the top interface of the conversion connector is slightly smaller than but infinitely close to the inner diameter of the hose connector. When the hose connector is embedded in the conversion connector, the inner diameter of the top interface of the conversion connector is slightly larger than but infinitely close to the outer diameter of the hose connector.

[0015] The beneficial effects of the utility model are as follows:

[0016] 1. The utility model adopts a hose connector, a conversion connector, a cavity and a scanning electron microscope sample stage to form a closed space. The other end of the hose connector is connected to an industrial-grade vacuum cleaner. The formation of the closed space allows the vacuum cleaner to suck out all the excess or loosely adhered powder samples on the conductive double-sided tape, avoiding the contamination of other samples in the grid due to powder splashing, and also avoiding the accumulation of samples in the same grid that affects the quality of the samples, thereby ensuring the quality and purity of the samples on the scanning electron microscope sample stage;

[0017] 2. The utility model adopts a method of setting a plurality of evenly distributed grids in the middle of the sample area, so that multiple samples can be prepared in different grids at the same time, thereby improving the preparation efficiency of powder samples;

[0018] In general, the utility model has reasonable design and simple structure, avoids sample accumulation and sample contamination, ensures the quality and purity of powder sample preparation, and further improves the preparation efficiency of powder samples. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 The utility model is a three-dimensional schematic diagram of a scanning electron microscope powder sample preparation device.

[0020] Figure 2 The utility model is a structural explosion diagram of a scanning electron microscope powder sample preparation device.

[0021] Figure 3 The utility model is a front view of a device for preparing powder samples for a scanning electron microscope.

[0022] Figure 4 The utility model is a three-dimensional schematic diagram of a cavity of a scanning electron microscope powder sample preparation device.

[0023] Figure 5 The utility model is a front view of a cavity of a scanning electron microscope powder sample preparation device.

[0024] Figure 6 The utility model is a cross-sectional schematic diagram of a cavity of a scanning electron microscope powder sample preparation device.

[0025] Figure 7 The utility model is a cross-sectional schematic diagram of a scanning electron microscope sample stage of a scanning electron microscope powder sample preparation device.

[0026] In the figure: 1. conversion joint 2. cavity 201. boss A 202. sample area 203. grid 204. circular hole A 205. circular hole B 206. groove 3. scanning electron microscope sample stage 301. boss B 302. conductive double-sided tape 4. bottom cover 401. circular hole C402. center hole 5. hose connector 6. bolt fastener. DETAILED DESCRIPTION

[0027] The following are specific embodiments of the present invention, and the technical solution of the present invention is further described in conjunction with the accompanying drawings, but the present invention is not limited to these embodiments.

[0028] like Figure 1-7As shown, a preparation device for a powder sample of a scanning electron microscope comprises a bottom cover 4, a cavity 2 is arranged on the top of the bottom cover 4, a boss A201 is arranged on the top of the cavity 2, a circular sample area 202 is arranged inside the boss A201, a plurality of evenly distributed grids 203 are arranged in the middle of the sample area 202, a positioning hole 207 is arranged at the upper left corner of the circumference of the sample area 202, and a plurality of circular holes A207 are arranged at other positions of the circumference of the sample area 202 except the positioning hole 207. 204, a groove 206 is opened at the center of the bottom of the cavity 2, and a scanning electron microscope sample stage 3 is embedded in the groove 206. A conductive double-sided tape 302 is laid on the upper surface of the scanning electron microscope sample stage 3, and the other adhesive surface of the conductive double-sided tape 302 is tightly adhered to the lower surface of the grille 203. The cavity 2 and the bottom cover 4 are fixedly connected by bolt fasteners 6. A conversion joint 1 is arranged on the upper part of the cavity 2, and a hose joint 5 is connected to the top of the conversion joint 1.

[0029] The positioning hole 207 is set. When the powder sample in the grid 203 is prepared, the accurate position of the sample can be determined according to the relative position relationship between the grid 203 and the positioning hole 207. At the same time, when the scanning electron microscope sample stage 3 needs to be taken out from the cavity 2, a short metal rod can be used to manually apply pressure to the scanning electron microscope sample stage 3 through the positioning hole 207 and each circular hole A204 to remove it. The setting of the groove 206 ensures the horizontal positioning of the scanning electron microscope sample stage 3 and avoids horizontal movement. The connecting bolt fasteners 6 can better position the scanning electron microscope sample stage 3 in the vertical direction. The two positionings further ensure the tightness and airtightness of the equipment connection. The adhesive surface of the conductive double-sided tape 302 fits tightly with the lower surface of the grid 203. At the same time, the cavity 2 and the bottom cover 4 are connected together by the bolt fasteners 6, which can make the grid 203 and the conductive double-sided tape 302 fit more closely, and produce traces of the grid 203 on the conductive double-sided tape 302 to form a sample spacing zone, which has a better distinguishing effect.

[0030] The boss A201 is a circular boss structure, and the bottom of the conversion joint 1 is tightly embedded in the boss A201 on the cavity 2. The material of the conversion joint 1 is plastic or metal.

[0031] The conversion connector 1 made of plastic or metal is tightly embedded in the boss A201 of the cavity 2, which can further ensure the airtightness of the enclosed space formed by the hose connector 5, the conversion connector 1, the cavity 2 and the scanning electron microscope sample stage 3, which is conducive to the excess or loosely adhered powder samples on the conductive double-sided tape 302 to be better, more comprehensive and faster to be sucked out.

[0032] The grid 203 is a square grid structure or a circular structure, and the height of the grid 203 is 8-12 mm. By setting the grids 203 with a certain height and shape, it is possible to avoid mutual contamination of sample powders in different grids 203.

[0033] Among them, the outer end of the circumference of the cavity 2 is provided with a plurality of circular holes B205, and the outer end of the circumference of the bottom cover 4 is provided with circular holes C401 with the same number and size as the circular holes B205. The center lines of the circular holes B205 and the circular holes C401 coincide with each other in the vertical direction, and the bolt fasteners 6 pass through the circular holes B205 and the circular holes C401 to fix the cavity 2 and the bottom cover 4.

[0034] The arrangement of the circular hole B205 and the circular hole C401 with their center lines overlapping in the vertical direction can make it easier for the bolt fastener 6 to pass through, thereby ensuring the tightness and stability of the connection between the bottom cover 4 and the cavity 2.

[0035] Among them, a circular boss B301 is set at the lower end of the scanning electron microscope sample stage 3, and the bottom plane of the boss B301 is tightly fitted with the center position of the upper surface of the bottom cover 4. A center hole 402 is opened at the center position of the bottom cover 4, and the center hole 402 and the center of the boss B301 are on the same vertical line.

[0036] The bottom plane of the boss B301 fits tightly with the center of the upper surface of the bottom cover 4, further ensuring the tight connection between the scanning electron microscope sample stage 3 and the grid 203, facilitating the preparation of powder samples. A center hole 402 is opened at the center of the bottom cover 4 to facilitate the fixation of the sample stage with pins on the lower surface.

[0037] Among them, the cavity 2 is an integrated structure, and the cavity 2 and the bottom cover 4 are both made of metal. The cavity 2 adopts an integrated structure to ensure the tightness of the connection and avoid mutual contamination of sample powders in different grids 203. The metal cavity 2 and the bottom cover 4 also ensure the stability of the device connection.

[0038] Among them, the hose connector 5 is adapted to the air inlet hose connector 5 of an industrial-grade vacuum cleaner. The hose connector 5 is tightly connected to the conversion connector 1. When the conversion connector 1 is embedded in the hose connector 5, the outer diameter of the top interface of the conversion connector 1 is slightly smaller than but infinitely close to the inner diameter of the hose connector 5. When the hose connector 5 is embedded in the conversion connector 1, the inner diameter of the top interface of the conversion connector 1 is slightly larger than but infinitely close to the outer diameter of the hose connector 5, which further ensures the tightness of the equipment connection.

[0039] The working principle of the utility model is as follows:

[0040] When the utility model is used for preparing powder samples, a plurality of sample powders are poured into different grids 203 inside the cavity 2. According to the relative position relationship between the grids 203 and the positioning holes 207, the accurate position of the sample can be determined. After recording the position, the cavity 2 is tilted at a small angle and slightly vibrated up and down, and the powder in contact with the conductive double-sided tape 302 is made to adhere to the conductive double-sided tape 302 as much as possible by gravity. Then, the cavity 2, the conversion joint 1, the hose joint 5 and the industrial-grade vacuum cleaner are tightly connected, and the excess powder is sucked out by the strong suction of the industrial-grade vacuum cleaner, and then the vacuum cleaner is removed. Hose connector 5 and conversion connector 1, put the cavity 2 and the scanning electron microscope sample stage 3 and bottom cover 4 tightly connected thereto into an oven, take them out after drying at a certain temperature for several hours, then connect the vacuum cleaner hose connector 5 and conversion connector 1, suck out the loosely adhering powder again, and then repeat this process 2-4 times, you can prepare a single-layer flat powder sample that can be observed by a scanning electron microscope, when it is necessary to remove the powder sample on the scanning electron microscope sample stage 3 from the cavity 2, you can manually use a metal short rod to apply pressure to the scanning electron microscope sample stage 3 from the positioning hole 207 and each circular hole A204 to remove it.

[0041] In general, the utility model has reasonable design and simple structure, avoids sample accumulation and sample contamination, ensures the quality and purity of powder sample preparation, and further improves the preparation efficiency of powder samples.

[0042] Finally, it should be noted that the above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A device for preparing powder samples for a scanning electron microscope, comprising a bottom cover (4), characterized in that: The upper part of the bottom cover (4) is provided with a cavity (2), the upper part of the cavity (2) is provided with a boss A (201), a circular sample area (202) is provided inside the boss A (201), a plurality of evenly distributed grids (203) are provided in the middle of the sample area (202), a positioning hole (207) is provided at the upper left corner of the circumference of the sample area (202), a plurality of circular holes A (204) are provided at other positions on the circumference of the sample area (202) except the positioning hole (207), and the center of the bottom of the cavity (2) is provided with a plurality of circular holes A (204). A groove (206) is provided at a position, a scanning electron microscope sample stage (3) is embedded in the groove (206), a conductive double-sided tape (302) is adhered to the upper surface of the scanning electron microscope sample stage (3), the other adhesive surface of the conductive double-sided tape (302) is tightly adhered to the lower surface of the grid (203), the cavity (2) and the bottom cover (4) are fixedly connected by bolt fasteners (6), a conversion joint (1) is provided on the upper part of the cavity (2), and a hose joint (5) is connected to the top of the conversion joint (1).

2. The device for preparing powder samples for scanning electron microscopy according to claim 1, characterized in that: The boss A (201) is a circular boss structure, and the bottom of the conversion joint (1) is tightly embedded in the boss A (201) on the cavity (2).

3. The device for preparing powder samples for scanning electron microscopy according to claim 2, characterized in that: The conversion joint (1) is made of plastic or metal.

4. The device for preparing powder samples for scanning electron microscopy according to claim 1, characterized in that: The grid (203) is a square grid structure or a circular structure, and the height of the grid (203) is 5-15 mm.

5. The device for preparing powder samples for scanning electron microscopy according to claim 1, characterized in that: The outer end of the circumference of the cavity (2) is provided with a plurality of circular holes B (205), and the outer end of the circumference of the bottom cover (4) is provided with circular holes C (401) with the same number and size as the circular holes B (205).

6. The device for preparing powder samples for scanning electron microscopy according to claim 5, characterized in that: The center lines of the circular hole B (205) and the circular hole C (401) coincide with each other in the vertical direction, and the bolt fastener (6) passes through the circular hole B (205) and the circular hole C (401) to fix the cavity (2) and the bottom cover (4) together.

7. The device for preparing powder samples for scanning electron microscopy according to claim 1, characterized in that: A circular boss B (301) is provided at the lower end of the scanning electron microscope sample stage (3), and the bottom plane of the boss B (301) is tightly fitted with the center position of the upper surface of the bottom cover (4).

8. The device for preparing powder samples for scanning electron microscopy according to claim 7, characterized in that: A center hole (402) is provided at the center of the bottom cover (4), and the center hole (402) and the center of the boss B (301) are on the same vertical line.

9. The device for preparing powder samples for scanning electron microscopy according to claim 1, characterized in that: The cavity (2) is an integrally formed structure, and the cavity (2) and the bottom cover (4) are both made of metal.

10. The device for preparing powder samples for scanning electron microscopy according to claim 1, characterized in that: The hose connector (5) is adapted to the air inlet hose connector (5) of an industrial-grade vacuum cleaner. The hose connector (5) is tightly connected to the conversion connector (1). When the conversion connector is embedded in the hose connector (5), the outer diameter of the top interface of the conversion connector (1) is slightly smaller than but infinitely close to the inner diameter of the hose connector (5). When the hose connector (5) is embedded in the conversion connector, the inner diameter of the top interface of the conversion connector (1) is slightly larger than but infinitely close to the outer diameter of the hose connector (5).

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