Transmission device of vacuum coating equipment

Abstract

The utility model relates to the technical field of photovoltaic coating, and particularly discloses a vacuum coating equipment transmission device which comprises a device body and a plurality of transmission shaft assemblies. The transmission shaft assembly comprises a transmission shaft, a shaft sleeve and a synchronous belt. The transmission shaft is fixedly connected with the shaft sleeve; the shaft sleeve is rotatably arranged on the device main body; the multiple transmission shaft assemblies are linearly distributed at intervals. And in any two adjacent transmission shaft assemblies, the two shaft sleeves are synchronously and rotationally connected through the synchronous belt. According to the scheme, the multiple transmission shafts drive the conveying belt to move so that the conveying belt can transmit the base material; meanwhile, any two transmission shafts are synchronously and rotationally connected through the shaft sleeves and the synchronous belts, it can be guaranteed that the rotating speeds of all the transmission shafts are kept synchronous, and therefore the overall transmission stability of the transmission device is improved, the coating effect of the base material is guaranteed, and the problem that an existing transmission device is poor in conveying stability is effectively solved.

Description

Technical Field

[0001] The present application relates to the field of photovoltaic coating technology, and in particular to a transmission device for vacuum coating equipment. Background Art

[0002] In the process of coating photovoltaic substrates such as photovoltaic glass, the substrate needs to be driven to move in the reaction chamber by a transmission device. The stability of the substrate movement driven by the transmission device affects the film thickness and uniformity of the coating, and the existing transmission device has the problem of poor stability, which affects the coating effect of the substrate. Utility Model Content

[0003] In view of this, the purpose of the present application is to provide a transmission device for vacuum coating equipment, which is used to solve the problem of poor conveying stability of existing transmission devices.

[0004] In order to achieve the above technical purpose, the present application provides a vacuum coating equipment transmission device, including: a device body and a plurality of transmission shaft assemblies;

[0005] The transmission shaft assembly comprises: a transmission shaft and a synchronous belt;

[0006] The transmission shaft is rotatably arranged on the device body;

[0007] The plurality of transmission shaft assemblies are distributed in a straight line and at intervals;

[0008] In any two adjacent transmission shaft assemblies, the transmission shafts of the two transmission shaft assemblies are connected in synchronous rotation via the synchronous belt.

[0009] Furthermore, the transmission shaft assembly further includes: a shaft sleeve;

[0010] The transmission shaft is fixedly connected to the shaft sleeve;

[0011] The shaft sleeve can be rotatably arranged on the device body.

[0012] Furthermore, at least two annular grooves are arranged on the shaft sleeve at intervals in the axial direction;

[0013] The annular groove is used for the synchronous belt to be inserted.

[0014] Further, the transmission shaft assembly further comprises: a first driving member and a first tensioning member;

[0015] The first tensioning member abuts against the synchronous belt;

[0016] The first driving member is disposed on the device body, and the output end of the first driving member is connected to the first tensioning member;

[0017] The first driving member is used to drive the first tensioning member to move along the radial direction of the transmission shaft to adjust the tightness of the synchronous belt.

[0018] Furthermore, the first tensioning member is telescopically arranged along the axial direction of the shaft sleeve.

[0019] Furthermore, it also includes: a transmission motor, a linkage shaft, a second tensioning member, a second driving member and a second synchronous belt;

[0020] The transmission motor is arranged on the device body, and the output end of the transmission motor is connected to the linkage shaft;

[0021] The linkage shaft is connected to the transmission shaft via the second synchronous belt;

[0022] The second tensioning member abuts against the second synchronous belt;

[0023] The second driving member is disposed on the device body, and an output end of the second driving member is connected to the second tensioning member;

[0024] The second driving member is used to drive the second tensioning member to move so as to adjust the tightness of the second synchronous belt.

[0025] Furthermore, the plurality of transmission shaft assemblies are arranged in two rows and are symmetrically disposed on both sides of the transmission motor.

[0026] Further, the transmission shaft assembly also includes: a magnetic fluid shaft;

[0027] The magnetic fluid shaft is arranged on the transmission shaft;

[0028] The transmission shaft is connected to the vacuum chamber;

[0029] The magnetic fluid shaft is used for sealing connection with the vacuum chamber.

[0030] Furthermore, the transmission shaft assembly further includes: an insulating flange;

[0031] The magnetic fluid shaft is connected to the vacuum chamber through the insulating flange.

[0032] Furthermore, the inner end of the transmission shaft is fixedly connected with a transmission wheel.

[0033] It can be seen from the above technical scheme that the present application provides a transmission device for vacuum coating equipment, comprising: a device main body and multiple transmission shaft assemblies; the transmission shaft assembly comprises: a transmission shaft, a bushing and a synchronous belt; the transmission shaft is fixedly connected to the bushing; the bushing can be rotatably arranged on the device main body; multiple transmission shaft assemblies are distributed in a straight line at intervals; in any two adjacent transmission shaft assemblies, the two bushings are synchronously rotated and connected through the synchronous belt.

[0034] This solution uses multiple transmission shafts to drive the conveyor belt to move, so that the conveyor belt can transmit the substrate; at the same time, any two transmission shafts are connected to each other in synchronous rotation through bushings and synchronous belts, which can ensure that the rotation rates of the various transmission shafts remain synchronized, thereby helping to improve the overall transmission stability of the transmission device, ensure the coating effect of the substrate, and effectively solve the problem of poor transmission stability of existing transmission devices. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0036] Figure 1 A three-dimensional diagram of a transmission device of a vacuum coating equipment provided in an embodiment of the present application;

[0037] Figure 2 A front view of a transmission device of a vacuum coating equipment provided in an embodiment of the present application;

[0038] Figure 3 A transmission device for vacuum coating equipment provided in an embodiment of the present application;

[0039] In the figure: 10, transmission shaft assembly; 11, transmission shaft; 12, bushing; 13, synchronous belt; 14, first driving member; 15, first tensioning member; 16, magnetic fluid shaft; 20, transmission motor; 21, linkage shaft; 31, second tensioning member; 32, second driving member; 33, second synchronous belt; 100, vacuum chamber; 121, annular groove. DETAILED DESCRIPTION

[0040] The technical solutions of the embodiments of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the specification of the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection requested by the present application.

[0041] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0042] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a replaceable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0043] See also Figures 1 to 3 A vacuum coating equipment transmission device provided in an embodiment of the present application includes: a device body and a plurality of transmission shaft assemblies 10. The device body is used for installing other components and playing a supporting role. The device body is not shown in the embodiment provided in the present application, and it can be a structure such as a mounting bracket of a conveyor belt.

[0044] The transmission shaft assembly 10 includes: a transmission shaft 11 and a synchronous belt 13. The transmission shaft 11 is rotatably arranged on the device body. The transmission shaft 11 can be used to connect the conveyor belt to drive the conveyor belt to rotate and transport the substrate. In order to facilitate the overall structure of the transmission device, the conveyor belt is also not shown in this embodiment.

[0045] A plurality of transmission shaft assemblies 10 are distributed in a straight line at intervals for laying the conveyor belt. In any two adjacent transmission shaft assemblies 10, the transmission shafts 11 of the two transmission shaft assemblies 10 are connected by synchronous rotation through a synchronous belt 13, so that any two adjacent transmission shafts 11 can maintain the same rotation speed through the synchronous belt 13, avoiding the situation where the rotation speed of the plurality of transmission shafts 11 is uneven and affects the transmission stability of the conveyor belt, realizing the synchronous transmission of power without slip of the front and rear transmission shafts 11, realizing stable transmission and consistent speed ratio, and ensuring the coating effect of the substrate on the conveyor belt.

[0046] In application, the transmission shaft 11 can be fixedly sleeved on the shaft sleeve 12, and the shaft sleeve 12 can be rotatably connected to the device body.

[0047] In one embodiment, at least two annular grooves 121 are arranged on the shaft sleeve 12 at intervals in the axial direction; the annular grooves 121 are used for the synchronous belt 13 to be inserted into.

[0048] Specifically, the inner side of the synchronous belt 13 may be provided with saw teeth; a gear groove is provided in the annular groove 121; the saw teeth of the synchronous belt 13 mesh with the gear groove of the annular groove 121. The annular grooves 121 arranged at intervals along the axial direction of the sleeve 12 can accommodate multiple synchronous belts 13 to be placed one by one, thereby avoiding interference between different synchronous belts 13.

[0049] In one embodiment, the transmission shaft assembly 10 also includes: a first driving member 14 and a first tensioning member 15; the first tensioning member 15 abuts against the synchronous belt 13; the first driving member 14 is arranged on the device body, and the output end of the first driving member 14 is connected to the first tensioning member 15; the first driving member 14 is used to drive the first tensioning member 15 to move to adjust the tightness of the synchronous belt 13.

[0050] In this embodiment, each transmission shaft assembly 10 is provided with a first driving member 14 and a first tensioning member 15, and the first tensioning member 15 corresponds one-to-one to the synchronous belt 13, so that each synchronous belt 13 can be adjusted in tension by the first tensioning member 15, ensuring that adjacent transmission shafts 11 can be synchronously driven by the synchronous belt 13.

[0051] As a further improvement, the first tensioning member 15 is telescopically arranged along the axial direction of the shaft sleeve 12 , so that the first tensioning member 15 can adjust the distance from the synchronous belt 13 along the axial direction according to whether the synchronous belt 13 is installed on different annular grooves 121 .

[0052] In another embodiment, the transmission device of the vacuum coating equipment also includes: a transmission motor 20, a linkage shaft 21, a second tensioning member 31, a second driving member 32 and a second synchronous belt 33; the transmission motor 20 is arranged on the device body, and the output end of the transmission motor is connected to the linkage shaft 21; the linkage shaft 21 is connected to the sleeve 12 through the second synchronous belt 33; the second tensioning member 31 abuts against the second synchronous belt 33; the second driving member 32 is arranged on the device body, and the output end of the second driving member 32 is connected to the second tensioning member 31; the second driving member 32 is used to drive the second tensioning member 31 to move to adjust the tightness of the second synchronous belt 33.

[0053] The transmission motor 20 may be a servo motor, which can accurately control the transmission. Meanwhile, the second tensioning member 31 and the second driving member 32 can adjust the tightness of the second synchronous belt 33 between the linkage shaft 21 and the transmission shaft 11 .

[0054] In application, the first driving member 14 and the second driving member 32 can both be telescopic cylinders to drive the first tensioning member 15 and the second tensioning member 31 to move linearly.

[0055] As an implementation manner, a plurality of transmission shaft assemblies 10 are arranged in two rows and symmetrically disposed on both sides of the transmission motor 20 .

[0056] In this embodiment, the transmission motor 20 drives the multiple transmission shafts 11 on both sides to rotate simultaneously, and the symmetrical arrangement of the transmission shaft assemblies 10 on both sides can make the torque on both sides consistent, thereby ensuring transmission stability.

[0057] In one embodiment, the transmission shaft assembly 10 further includes: a magnetic fluid shaft 16 ; the magnetic fluid shaft 16 is disposed on the transmission shaft 11 ; the transmission shaft 11 is connected to the vacuum chamber 100 ; the magnetic fluid shaft 16 is used for sealingly connecting the vacuum chamber 100 .

[0058] Specifically, in this embodiment, the outer end of the transmission shaft 11 is connected to the synchronous belt 13 and the second synchronous belt 33 through the shaft sleeve 12, and the inner end of the transmission shaft 11 passes through the vacuum chamber 100 and enters the interior of the vacuum chamber 100. The magnetic fluid shaft 16 can realize the sealed connection between the transmission shaft assembly 10 and the vacuum chamber 100, and the distance between the transmission shaft 11 on both sides of the transmission motor 20 can be adjusted by adjusting the length of the magnetic fluid shaft 16 to realize the transmission of different carriers or substrates.

[0059] Furthermore, the transmission shaft assembly 10 further includes: an insulating flange 17; the magnetic fluid shaft 16 is connected to the vacuum chamber 100 via the insulating flange 17. The insulating flange 17 is used to insulate the magnetic fluid shaft 16 from the vacuum chamber 100.

[0060] It should be noted that a transmission wheel 18 may be fixedly provided at the inner end of the transmission shaft 11 extending into the vacuum chamber 100, and a conveyor belt may be sleeved on the transmission wheel 18 to drive the conveyor belt to drive. In practical applications, the transmission wheel 18 may also directly contact the substrate or the carrier, for example, the two sides of the carrier are respectively placed on the transmission wheels 18 on the two sides of the transmission motor 20, and it is ensured that both sides of the carrier are in contact with at least 5-6 transmission wheels 18, so that the transmission wheel 18 can smoothly drive the carrier to move.

[0061] The transmission device of the vacuum coating equipment provided in this embodiment can meet the requirements of the continuous line transmission mechanism and can be adjusted within a certain range according to different carriers and substrates; and, the device uses a magnetic fluid shaft 16 to seal and connect the transmission shaft 11 and the vacuum chamber 100, which can reduce the occupancy of the internal space of the vacuum chamber 100, help reduce the overall volume of the vacuum chamber 100, and reduce costs.

[0062] The above are only preferred embodiments of the present application and are not intended to limit the present utility model. Although the present application has been described in detail with reference to the examples, those skilled in the art can still modify the technical solutions recorded in the aforementioned examples or make equivalent substitutions for some of the technical features therein. However, any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A vacuum coating equipment transmission device, characterized in that: include: A device body and a plurality of transmission shaft assemblies (10); The transmission shaft assembly (10) comprises: a transmission shaft (11) and a synchronous belt (13); The transmission shaft (11) is rotatably arranged on the device body; The plurality of transmission shaft assemblies (10) are distributed in a straight line and at intervals; In any two adjacent transmission shaft assemblies (10), the transmission shafts (11) of the two transmission shaft assemblies (10) are connected in synchronous rotation via the synchronous belt (13).

2. The transmission device of vacuum coating equipment according to claim 1, characterized in that: The transmission shaft assembly (10) further includes: a shaft sleeve (12); The transmission shaft (11) is fixedly connected to the shaft sleeve (12); The shaft sleeve (12) is rotatably arranged on the device body.

3. The transmission device of vacuum coating equipment according to claim 2, characterized in that: At least two annular grooves (121) are arranged on the shaft sleeve (12) at intervals in the axial direction; The annular groove (121) is used for the synchronous belt (13) to be inserted into.

4. The vacuum coating equipment transmission device according to claim 3, characterized in that: The transmission shaft assembly (10) further comprises: a first driving member (14) and a first tensioning member (15); The first tensioning member (15) abuts against the synchronous belt (13); The first driving member (14) is arranged on the device body, and the output end of the first driving member (14) is connected to the first tensioning member (15); The first driving member (14) is used to drive the first tensioning member (15) to move radially along the transmission shaft (11) to adjust the tightness of the synchronous belt (13).

5. The transmission device of vacuum coating equipment according to claim 4, characterized in that: The first tensioning member (15) is telescopically arranged along the axial direction of the shaft sleeve (12).

6. The transmission device of vacuum coating equipment according to any one of claims 1 to 5, characterized in that: Also includes: A transmission motor (20), a linkage shaft (21), a second tensioning member (31), a second driving member (32) and a second synchronous belt (33); The transmission motor (20) is arranged on the device body, and the output end of the transmission motor (20) is connected to the linkage shaft (21); The linkage shaft (21) is connected to the transmission shaft (11) via the second synchronous belt (33); The second tensioning member (31) abuts against the second synchronous belt (33); The second driving member (32) is arranged on the device body, and the output end of the second driving member (32) is connected to the second tensioning member (31); The second driving member (32) is used to drive the second tensioning member (31) to move so as to adjust the tightness of the second synchronous belt (33).

7. The transmission device of vacuum coating equipment according to claim 6, characterized in that: The plurality of transmission shaft assemblies (10) are arranged in two rows and are symmetrically disposed on both sides of the transmission motor (20).

8. The transmission device of vacuum coating equipment according to claim 1, characterized in that: The transmission shaft assembly (10) further includes: a magnetic fluid shaft (16); The magnetic fluid shaft (16) is arranged on the transmission shaft (11); The transmission shaft (11) is connected to the vacuum chamber (100); The magnetic fluid shaft (16) is used for sealingly connecting the vacuum chamber (100).

9. The transmission device of vacuum coating equipment according to claim 8, characterized in that: The transmission shaft assembly (10) further comprises: an insulating flange (17); The magnetic fluid shaft (16) is connected to the vacuum chamber (100) via the insulating flange (17).

10. The transmission device of vacuum coating equipment according to claim 1, characterized in that: The inner end of the transmission shaft (11) is fixedly connected with a transmission wheel (18).

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