Crucible for evaporation of sublimation type OLED (Organic Light Emitting Diode) material
By setting up an airtight sealing structure and nozzle guide groove at the connection part of the OLED material vapor deposition crucible and the lower end of the cover plate, the problem of insufficient airtightness of the existing OLED material vapor deposition crucible is solved, significantly improving the airtightness of the crucible, preventing material cross-contamination, and improving product performance.
Patent Information
- Application Number
- CN202421534221.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-01
- Publication Date
- 2025-05-02
- Estimated Expiration
- 2034-07-01
AI Technical Summary
The airtightness of the existing OLED material evaporation crucibles is poor, resulting in vapor diffusion of OLED material, causing cross-contamination of materials, and affecting product performance.
A crucible for evaporation of sublimation OLED material is designed. By providing an airtight sealing structure where the connection part comes into contact with the lower end of the cover plate, and a nozzle and a guide groove are provided on the cover plate to guide the steam to the nozzle, avoiding the steam from contacting the connection part and improving the airtightness.
It effectively improves the airtightness of the crucible, prevents the vapor diffusion of OLED materials, reduces material cross-contamination, and improves product performance.
Smart Images

Figure CN222821625U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of OLED manufacturing process, in particular to a crucible used for evaporation of sublimation type OLED materials. Background Art
[0002] OLED is a flat panel display technology with great development prospects. It has excellent display performance, self-luminescence, simple structure, ultra-thin, fast response speed, wide viewing angle, low power consumption and flexible display. It is known as the "dream display". In addition, its production equipment investment is much smaller than TFT-LCD, which has won the favor of major display manufacturers and has become the main force of the third generation of display devices in the field of display technology. At present, OLED is on the eve of large-scale mass production. With the further in-depth research and the continuous emergence of new technologies, OLED display devices will surely have a breakthrough development.
[0003] OLED materials are currently generally formed by vacuum thermal evaporation, a process used by most factories in the flat panel display industry, such as Samsung, LG, etc. Vacuum thermal evaporation technology is to heat the material from a solid state to a vapor state in a vacuum environment below 5x 10-5Pa. The high-speed moving gas molecules reach the glass substrate and are deposited and solidified on the substrate, and then turned back into a solid film of OLED material.
[0004] The sealing of the crucible is an important manifestation of the performance of the crucible. However, in actual evaporation production technology, due to the gap between the crucible cover and the crucible body, the airtightness is poor, and the OLED material vapor diffuses to the periphery of the evaporation source through the gap. If other materials are used next time, these materials attached to the evaporation source may evaporate, causing cross contamination of materials and affecting product performance. Utility Model Content
[0005] The utility model aims to design a crucible for evaporation of sublimation type OLED materials, so as to improve the air tightness of the crucible.
[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:
[0007] A crucible for evaporation of sublimation-type OLED materials comprises a crucible body and a cover plate, wherein the crucible body comprises a body portion and a connecting portion, wherein the connecting portion is located at the upper end of the body portion, wherein a matching groove for matching with the lower end of the cover plate is provided on the connecting portion, wherein a nozzle is provided on the cover plate, and wherein an airtight sealing structure is provided at the place where the connecting portion contacts the lower end of the cover plate.
[0008] Furthermore, in the above-mentioned crucible for evaporation of sublimation-type OLED materials, a guide groove is provided inside the cover plate, and the guide groove has an oblique side wall for guiding the steam to the nozzle.
[0009] Furthermore, in the above-mentioned crucible for sublimation OLED material evaporation, the lower end of the cover plate is provided with a guide end, the inner wall of the guide end and the oblique side wall are in the same plane, and the outer wall of the guide end cooperates with the main body.
[0010] Furthermore, in the above-mentioned crucible for evaporation of sublimation-type OLED materials, the inner side wall of the main body has an angle with the vertical direction, and the inner side wall is inclined outward.
[0011] Furthermore, in the above-mentioned crucible for sublimation-type OLED material evaporation, the connecting portion is provided with positioning blocks at both ends of the matching groove, and the positioning blocks are provided with positioning grooves. A limiting block is connected between the two positioning blocks through the positioning grooves, and the lower end of the limiting block abuts against the upper surface of the lower end of the cover plate.
[0012] Compared with the prior art, the utility model has the following beneficial effects: the utility model provides a crucible for sublimation-type OLED material evaporation, in which an airtight sealing structure is provided at the place where the connecting part contacts the lower end of the cover plate; when the cover plate is located in the matching groove, under the action of the cover plate's own weight, the connecting part and the lower end of the cover plate are tightly attached, and it is difficult for the OLED material vapor to leave the gap between the connecting part and the lower end of the cover plate, thereby improving the airtightness of the crucible. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0014] Figure 1 It is a structural schematic diagram of the utility model;
[0015] Figure 2 It is a cross-sectional view of the utility model;
[0016] Figure 3 Another perspective cross-sectional view of the present invention;
[0017] Figure 4 This is a schematic diagram of the main structure of the crucible of the utility model;
[0018] Figure 5 This is a schematic diagram of the cover structure of the utility model;
[0019] Figure 6 This is a schematic diagram of the cover structure from another perspective of the utility model;
[0020] The names of the components marked in the figure are as follows:
[0021] 1. Crucible body; 11. Main body; 12. Connecting part; 121. Positioning block; 122. Matching groove; 2. Cover plate; 21. Nozzle; 22. Matching part; 23. Guide end; 3. Limiting block. DETAILED DESCRIPTION
[0022] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined purpose of the utility model, the specific implementation method, structure, characteristics and effects of the present invention are described in detail below in combination with the accompanying drawings and preferred embodiments.
[0023] Example: Please refer to Figure 1-6 A crucible for evaporation of sublimation-type OLED materials. The crucible is square and includes a crucible body 1 and a cover plate 2.
[0024] The crucible body 1 includes a main body 11 and a connecting part 12, wherein the connecting part 12 is located at the upper end of the main body 11 and is fixedly connected to or integrally formed with the main body 11. The inner side wall of the main body 11 has an angle with the vertical direction, and the inner side wall is inclined outward, with an angle of 0 to 65 degrees, and more preferably, an angle of 5 to 25 degrees, so that when the OLED material is heated and sublimated, the remaining solid OLED material sinks under the action of gravity and continues to maintain full contact with the inner side wall of the main body 11, so that it is heated more fully, while ensuring the stability of the evaporation rate. The material of the inner wall of the main body 11 can be any one of Cu, Ag or Al or a combination thereof, and has good thermal conductivity, which can ensure that heat is quickly transferred, so that the temperature deviation at a certain position will be quickly transferred to other areas, so that the OLED material in contact with the inner wall can be evaporated evenly.
[0025] The connecting portion 12 is provided with a matching groove 122 that matches with the lower end of the cover plate 2. The lower end of the cover plate 2 is the matching portion 22. The matching groove 122 is connected to the material groove formed by the inner walls of the main body 11. An airtight sealing structure (not shown in the figure) is provided at the place where the connecting portion 12 contacts the lower end of the cover plate 2. The airtight sealing structure belongs to the prior art and will not be described here. Positioning blocks 121 are provided on the connecting portion 12 and at both ends of the matching groove 122. The positioning blocks 121 are provided with positioning grooves. The two opposite positioning blocks 121 are detachably connected with a limiting block 3. The two ends of the limiting block 3 are gap-matched with the positioning groove, and the lower end of the limiting block 3 abuts against the upper surface of the lower end of the cover plate 2.
[0026] The cover plate 2 is provided with a nozzle 21, and a guide groove is provided inside the cover plate 2. The inner side wall of the guide groove is an oblique side wall, which has the function of guiding the steam to the nozzle 21. A guide end 23 is provided at the lower end of the cover plate 2. The inner wall of the guide end 23 and the oblique side wall are in the same plane, and the outer wall of the guide end 23 matches the inner side wall of the body part 11. The guide end 23 avoids the steam from contacting the position where the matching part 22 contacts the connecting part 12, thereby improving the air tightness, and at the same time, together with the oblique side wall, guides the steam to the nozzle 21.
[0027] Working principle of this embodiment: This embodiment provides a crucible for sublimation type OLED material evaporation, in which an airtight sealing structure is provided at the place where the connecting portion 12 contacts the lower end of the cover plate 2. When the cover plate 2 is located in the matching groove 122, under the action of the self-weight of the cover plate 2, the connecting portion 12 is tightly attached to the lower end of the cover plate 2, and it is difficult for the OLED material vapor to leave the gap between the connecting portion 12 and the lower end of the cover plate 2, thereby improving the airtightness of the crucible. Further, the limiting block 3 is inserted into the positioning grooves on the two relative positioning blocks 121. At this time, the lower end of the limiting block 3 is in contact with the lower end of the cover plate 2. The upper surface of the end abuts against each other, further making the connecting portion 12 close to the lower end of the cover plate 2, thereby enhancing the air tightness. The inner side wall of the main body 11 tilted outward allows the remaining solid OLED material to sink under the action of gravity after the OLED material is heated and sublimated, and continues to maintain full contact with the inner side wall of the main body 11, so that it is heated more fully and the evaporation rate is stable. The guide groove and the guide end 23 of the cover plate 2 together guide the steam to the nozzle 21. At the same time, the guide end 23 avoids the steam from contacting the position where the matching portion 22 contacts the connecting portion 12, thereby improving the air tightness.
[0028] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be an element centered thereon. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an element centered thereon. The terms "upper", "lower", "left", "right", "front", "rear" and similar expressions used herein are for illustrative purposes only.
[0029] The above description is only a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Although the present invention has been disclosed as a preferred embodiment as above, it is not intended to limit the present invention. Any technical personnel in this field can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.
Claims
1. A crucible for evaporation of sublimation type OLED materials, comprising a crucible body (1) and a cover plate (2), characterized in that: The crucible body (1) comprises a main body portion (11) and a connecting portion (12); the connecting portion (12) is located at the upper end of the main body portion (11); the connecting portion (12) is provided with a matching groove (122) matching with the lower end of the cover plate (2); the cover plate (2) is provided with a nozzle (21); and an airtight sealing structure is provided at the place where the connecting portion (12) contacts the lower end of the cover plate (2).
2. The crucible for sublimation OLED material evaporation according to claim 1, characterized in that: A guide groove is provided inside the cover plate (2), and the guide groove has an oblique side wall for guiding steam to the nozzle (21).
3. The crucible for sublimation OLED material evaporation according to claim 2, characterized in that: A guide end (23) is provided at the lower end of the cover plate (2), the inner wall of the guide end (23) and the oblique side wall are in the same plane, and the outer wall of the guide end (23) cooperates with the main body (11).
4. The crucible for sublimation OLED material evaporation according to claim 1, characterized in that: The inner side wall of the main body (11) has an angle with the vertical direction, and the inner side wall is inclined outwards.
5. The crucible for sublimation OLED material evaporation according to claim 1, characterized in that: The connecting portion (12) is provided with positioning blocks (121) at both ends of the matching groove (122), and the positioning blocks (121) are provided with positioning grooves. A limiting block (3) is connected between the two positioning blocks (121) via the positioning grooves, and the lower end of the limiting block (3) abuts against the upper surface of the lower end of the cover plate (2).