Evaporation boat for evaporation and evaporation boat assembly

Abstract

The evaporation boat comprises a melting tank and an evaporation tank, the evaporation boat and the evaporation tank are located on the same side of the evaporation boat, the evaporation boat is communicated with the evaporation tank, and liquid in the melting tank is suitable for flowing into the evaporation tank. By arranging the melting tank and the evaporation tank, the melting area and the evaporation area of the evaporation material can be separated, the risk that the liquid level in the evaporation tank is unstable due to adjustment or movement of the evaporation material is reduced, the evaporation stability is improved, and therefore the evaporation film forming quality is improved.

Description

Technical Field

[0001] The present application relates to the technical field of evaporation, and in particular to an evaporation boat for evaporation and an evaporation boat assembly having the evaporation boat. Background Art

[0002] In the related art, an evaporation boat is used to melt and evaporate the deposition material. The melting and evaporation of the deposition material are both in the same tank. The speed fluctuation, jitter and melting state of the deposition material during melting will disturb the liquid surface in the evaporation boat, affecting the evaporation state of the evaporation boat, thereby resulting in poor film quality of evaporation by the evaporation boat. Utility Model Content

[0003] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, one purpose of the present application is to propose an evaporation boat for evaporation, which separates the melting area of ​​the evaporation material from the evaporation area, which is conducive to improving the stability of evaporation, thereby improving the film quality of evaporation.

[0004] The present application further proposes an evaporation boat assembly.

[0005] In a first aspect, an embodiment of the present application provides an evaporation boat for evaporation, comprising:

[0006] The evaporation boat is formed with a melting tank and an evaporation tank, the melting tank and the evaporation tank are located on the same side of the evaporation boat, the melting tank and the evaporation tank are connected, and the liquid in the melting tank is suitable for flowing into the evaporation tank.

[0007] In the above technical scheme, by setting up a melting tank and an evaporation tank, the melting area of ​​the vapor deposition material can be separated from the evaporation area, reducing the risk of unstable liquid level in the evaporation tank due to adjustment or movement of the vapor deposition material, which is beneficial to improving the stability of vapor deposition and thus improving the film quality of vapor deposition.

[0008] In some embodiments, the evaporation boat includes: an evaporation boat body and an annular limiting wall, an evaporation groove is formed on the upper surface of the evaporation boat body, and the annular limiting wall is arranged on the upper surface of the evaporation boat body to define a melting groove.

[0009] In the above technical scheme, an evaporation groove is formed on the upper surface of the evaporation boat body, and an annular limiting wall is arranged on the upper surface of the evaporation boat body to define a melting groove, thereby realizing the arrangement of the evaporation groove and the melting groove, which is beneficial for the evaporation material to melt into liquid in the melting groove, and then flow into the evaporation groove and evaporate in the evaporation groove, thereby reducing the risk of liquid level disturbance in the evaporation groove caused by the melting process of the evaporation material, improving the stability of evaporation, and further facilitating the improvement of the film quality of evaporation.

[0010] In some embodiments, the annular limiting wall is formed with a flow hole, and the liquid in the melting tank is suitable for flowing into the evaporation tank through the flow hole.

[0011] In the above technical solution, a flow hole is formed through the annular limiting wall, so that the liquid in the melting tank can flow into the evaporation tank through the flow hole, which is beneficial to improving the continuity and stability of the evaporation process, thereby improving the working efficiency and film forming effect of the evaporation boat.

[0012] In some embodiments, along the arrangement direction of the melting tank and the evaporation tank, a flow hole is formed on the wall portion of the annular limiting wall facing the evaporation tank.

[0013] In the above technical scheme, along the arrangement direction of the melting tank and the evaporation tank, a flow hole is formed on the wall portion of the annular limiting wall facing the evaporation tank, so that the flow distance of the liquid in the melting tank through the flow hole into the evaporation tank can be shortened, which is convenient for reducing the time for the liquid to flow from the melting tank into the evaporation tank, which is beneficial to further improve the continuity and stability of the evaporation process, thereby improving the working efficiency and film forming effect of the evaporation boat.

[0014] In some embodiments, the evaporation boat further includes: a guide portion, which is disposed on the upper surface of the evaporation boat body and is located between the melting tank and the evaporation tank, and the guide portion is formed with a guide groove, which connects the flow hole and the evaporation tank.

[0015] In the above technical solution, the guide part is provided on the upper surface of the evaporation boat body and is located between the melting tank and the evaporation tank, so that the guide part is formed with a guide tank, and the guide tank connects the flow hole and the evaporation tank. The liquid evaporation material melted in the melting tank can flow into the evaporation tank through the flow hole and the guide part in sequence, which is conducive to further improving the continuity and stability of the evaporation process, thereby further improving the working efficiency and film forming effect of the evaporation boat. The guide part is provided on the upper surface of the evaporation boat body and is located between the melting tank and the evaporation tank, and the guide part can also act as a reinforcing rib, which is conducive to strengthening the connection strength between the annular limiting wall and the evaporation boat body, reducing the risk of cracking or even breaking of the annular limiting wall and the evaporation boat body due to thermal stress, thereby helping to extend the service life of the evaporation boat.

[0016] In some embodiments, along the arrangement direction of the melting tank and the evaporation tank, the guide tank has a first open end and a second open end opposite to each other, the first open end corresponds to the flow hole, and the second open end is connected to the evaporation tank.

[0017] In the above technical scheme, the guide groove is provided with a first open end and a second open end relative to each other, and the first open end corresponds to the flow hole and the second open end is connected to the evaporation groove, so as to achieve the effect that the guide groove connects the flow hole and the evaporation groove, so that the liquid evaporation material melted in the melting tank can flow into the evaporation groove through the flow hole, the first open end, the guide groove and the second open end in sequence, so that the liquid evaporation material can evaporate into a film in the evaporation groove.

[0018] In some embodiments, the bottom wall of the guide groove is configured as a guide slope, and the guide slope is suitable for guiding the liquid to the evaporation groove.

[0019] In the above technical scheme, by constructing the bottom wall of the guide groove as a guide slope, and the guide slope guides the liquid to the evaporation groove, it is beneficial to convert the gravitational potential energy of the liquid evaporation material melted in the melting groove into kinetic energy, thereby increasing the flow rate of the liquid evaporation material, facilitating the liquid evaporation material melted in the melting groove to flow smoothly into the evaporation groove, and also facilitating the liquid evaporation material to be evenly spread in the evaporation groove, thereby improving the evaporation efficiency, so that the liquid evaporation material can evaporate into a film in the evaporation groove, and can also wash the impurities in the evaporation groove to the vicinity of the groove wall of the evaporation groove, which is beneficial to further improve the film-forming effect of the evaporation boat.

[0020] In some embodiments, the angle between the guide slope and the upper surface of the evaporation boat body is greater than or equal to 1° and less than or equal to 3°.

[0021] In the above technical scheme, by setting the angle between the guide slope and the upper surface of the evaporation boat body to be greater than or equal to 1° and less than or equal to 3°, the risk of the liquid in the melting tank not being able to flow smoothly into the evaporation tank due to the angle between the guide slope and the upper surface of the evaporation boat body being too small can be reduced. The risk of the liquid disturbing the liquid in the evaporation tank due to the angle between the guide slope and the upper surface of the evaporation boat body being too large can also be reduced, thereby reducing the risk of liquid splashing and scalding the film surface, so that the liquid can flow slowly and stably along the guide slope into the evaporation tank, which is beneficial to the continuity and stability of the process of the liquid flowing from the melting tank into the evaporation tank, thereby improving the working efficiency and film forming effect of the evaporation boat.

[0022] In some embodiments, a side wall of the evaporation boat body is formed with a notch structure.

[0023] In the above technical solution, by forming a notch structure on the side wall of the evaporation boat body, when the evaporation boat is powered on, the evaporation boat body can generate more heat within the same time, which is beneficial to increase the temperature of the evaporation boat body and reduce the risk of solidification of the liquid evaporation material due to low temperature, which is beneficial to improve the evaporation efficiency of the liquid evaporation material, thereby further improving the film-forming effect of the evaporation boat.

[0024] In some embodiments, the evaporation boat further includes: a protection sheet, which is assembled in the melting tank and disposed on the bottom wall of the melting tank.

[0025] In the above technical solution, by providing a protective sheet and assembling the protective sheet in the melting tank and on the bottom wall of the melting tank, the risk of the evaporation boat being corroded by the continuous impact of the evaporation material on the bottom wall of the melting tank can be reduced, and the risk of the bottom wall of the melting tank being corroded by the high-temperature liquid can also be reduced, thereby increasing the service life of the evaporation boat.

[0026] In some embodiments, the evaporation boat is constructed as a ceramic piece.

[0027] In the above technical solution, by constructing the evaporation boat as a ceramic part, the efficiency of heat conduction of the evaporation boat can be improved, which is beneficial to improving the evaporation effect of the evaporation boat and can also improve the working stability and service life of the evaporation boat.

[0028] In a second aspect, an embodiment of the present application further provides an evaporation boat assembly, comprising a plurality of evaporation boats, wherein the evaporation boats are the above-mentioned evaporation boats for evaporation, the plurality of evaporation boats are arranged in sequence along a first direction, the melting tank and the evaporation tank of each evaporation boat are arranged along a second direction, and the melting tanks and the evaporation tanks of at least two evaporation boats are arranged in opposite directions.

[0029] In the above technical solution, by arranging multiple evaporation boats of the evaporation boat assembly in sequence along the first direction, the melting tank and the evaporation tank of each evaporation boat are arranged along the second direction, and the melting tanks and the evaporation tanks of at least two evaporation boats are arranged in opposite directions, the evaporation material can be fed along both sides of the second direction, which is beneficial to increase the evaporation area of ​​the evaporation boat assembly along the second direction, thereby facilitating the increase of the film forming space of the evaporation boat assembly, and further improving the working efficiency of the evaporation boat assembly. The space between two adjacent melting tanks and evaporation tanks can also be increased to improve the heat dissipation effect between two adjacent evaporation boats. Multiple feeding mechanisms are respectively arranged on both sides of the evaporation boat assembly along the second direction. When it is necessary to adjust the evaporation material or to repair and inspect the evaporation boat, the operating space of the staff can be increased, which is convenient for the repair and inspection of the evaporation boat assembly, thereby helping to extend the service life of the evaporation boat assembly.

[0030] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0032] Figure 1 A schematic diagram of the structure of an evaporation boat assembly provided in some embodiments of the present application;

[0033] Figure 2 A top view of an evaporation boat assembly provided for some embodiments of the present application;

[0034] Figure 3 for Figure 2 A sectional view of the

[0035] Figure 4 A schematic diagram of the structure of an evaporation boat provided in some embodiments of the present application;

[0036] Figure 5A top view of an evaporation boat provided for some embodiments of the present application;

[0037] Figure 6 for Figure 5 Cross-sectional view at point B.

[0038] Reference numerals:

[0039] Evaporation boat 100;

[0040] Melting tank 1;

[0041] Evaporation tank 2;

[0042] Evaporation boat body 3; notch structure 31;

[0043] Annular limiting wall 4; circulation hole 41;

[0044] The guide part 5;

[0045] Guide groove 51;

[0046] A first open end 511; a second open end 512; a flow guiding slope 513;

[0047] First end 5131; second end 5132;

[0048] Protective sheet 6;

[0049] Evaporation boat assembly 200;

[0050] Support beam 201;

[0051] X-third direction; Y-second direction; Z-first direction. DETAILED DESCRIPTION

[0052] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0053] Unless otherwise defined, all technical and scientific terms used in this application have the same meanings as those commonly understood by technicians in the technical field of this application; the terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" in the specification and claims of this application and the above-mentioned drawings and any variations thereof are intended to cover non-exclusive inclusions. The terms "first", "second", etc. in the specification and claims of this application or the above-mentioned drawings are used to distinguish different objects, rather than to describe a specific order or a primary and secondary relationship.

[0054] Reference to "embodiment" in this application means that a particular feature, structure, or characteristic described in conjunction with the embodiment may be included in at least one embodiment of the present application. The appearance of the phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments.

[0055] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "attached" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0056] The term "and / or" in this application is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this application generally indicates that the associated objects before and after are in an "or" relationship.

[0057] In the embodiments of the present application, the same reference numerals represent the same components, and for the sake of brevity, detailed descriptions of the same components are omitted in different embodiments. It should be understood that the thickness, length, width and other dimensions of various components in the embodiments of the present application shown in the drawings, as well as the overall thickness, length, width and other dimensions of the integrated device are only exemplary descriptions and should not constitute any limitation to the present application.

[0058] The term "plurality" used in the present application refers to two or more (including two).

[0059] The evaporation process is a process that vaporizes the metal material by heating, and then covers it on the surface of the object to be plated to form a relatively uniform metal film. Before the evaporation process, the workpiece needs to be prepared, including grinding, degreasing and cleaning, to ensure the flatness and cleanliness of the surface. During the evaporation process, the object to be plated is placed in the evaporation equipment. The vacuum chamber in the equipment forms a certain vacuum degree through the exhaust system, and then the evaporation material is heated by the power system to evaporate and form a gas. The evaporation material gradually becomes a gas during the heating process, and then is deposited on the surface of the object to be plated through a vacuum environment to form a metal film.

[0060] The evaporation process is widely used in many fields. In the field of optics, evaporation can change the transmission, reflection, refraction and other optical properties of optical components such as lenses and filters. In the field of electronics, evaporation of metals or alloys can improve the current carrying and conductivity of microelectronic devices. In the chemical industry, evaporation anti-corrosion layers can protect chemical equipment such as pipelines and containers from corrosion by chemicals. In the field of machinery, evaporation films can enhance the hardness, wear resistance and corrosion resistance of parts.

[0061] In the prior art, an evaporation boat is used to melt and evaporate the deposition material. The melting and evaporation of the deposition material are both in the same tank. The speed fluctuation, jitter and melting state of the deposition material during melting will disturb the liquid surface in the evaporation boat, affecting the evaporation state of the evaporation boat, thereby resulting in poor film quality of evaporation by the evaporation boat.

[0062] Based on the above considerations, in order to solve the technical problem that the speed fluctuation and jitter of the evaporation material when it is melted, as well as the disturbance of the liquid surface in the evaporation boat caused by the melting state, lead to poor film quality of evaporation by the evaporation boat, the present application proposes an evaporation boat for evaporation, including: the evaporation boat is formed with a melting tank and an evaporation tank, the evaporation boat and the evaporation tank are located on the same side of the evaporation boat, the evaporation boat and the evaporation tank are connected, and the liquid in the melting tank is suitable for flowing into the evaporation tank.

[0063] In such an evaporation boat, by setting up a melting tank and an evaporation tank, the melting area of ​​the vapor deposition material can be separated from the evaporation area, reducing the risk of unstable liquid level in the evaporation tank due to adjustment or movement of the vapor deposition material, which is beneficial to improving the stability of vapor deposition and thus improving the film quality of vapor deposition.

[0064] Reference below Figure 1-Figure 6 The evaporation boat 100 used for evaporation according to the embodiment of the present application is described. As an example, the evaporation material used for evaporation can be evenly fed through a wire reel. The evaporation boat 100 can be provided with active and passive wheels of a feeding mechanism. The evaporation material can be pressed and melted by the active and passive wheels and then transported to the evaporation boat 100. The evaporation boat 100 can carry high-temperature molten evaporation material. The evaporation material can be a metal wire. The present application takes aluminum wire as the evaporation material as an example for explanation.

[0065] Reference Figure 4-Figure 6 As shown, the evaporation boat 100 according to the embodiment of the present application includes: the evaporation boat 100 is formed with a melting tank 1 and an evaporation tank 2, the melting tank 1 and the evaporation tank 2 are located on the same side of the evaporation boat 100, the melting tank 1 and the evaporation tank 2 are connected, and the liquid in the melting tank 1 is suitable for flowing into the evaporation tank 2.

[0066] Among them, the evaporation boat 100 is formed with a melting tank 1 and an evaporation tank 2. The evaporation material is melted into liquid in the melting tank 1, and the melted liquid evaporation material flows into the evaporation tank 2. The liquid evaporation material can evaporate in the evaporation tank 2, which is beneficial to the evaporation film formation of the evaporation material.

[0067] The melting tank 1 and the evaporation tank 2 are located on the same side of the evaporation boat 100. As an example, along the thickness direction of the evaporation boat 100, the thickness direction of the evaporation boat 100 is Figure 6 In the X direction, the evaporation boat 100 has two side surfaces, an upper side and a lower side, and the melting tank 1 and the evaporation tank 2 can both be located on the upper side of the evaporation boat 100. The upper end of the melting tank 1 is configured as an open end, and the upper end of the evaporation tank 2 is configured as an open end.

[0068] As some embodiments of the present application, the melting tank 1 and the evaporation tank 2 are connected, and a flow hole 41 can be provided between the melting tank 1 and the evaporation tank 2. The flow hole 41 connects the melting tank 1 and the evaporation tank 2, and the liquid in the melting tank 1 (i.e., liquid evaporation material) can flow into the evaporation tank 2 through the flow hole 41.

[0069] As some embodiments of the present application, the melting tank 1 and the evaporation tank 2 are connected, and a circulation groove can be arranged between the melting tank 1 and the evaporation tank 2, and the circulation groove connects the melting tank 1 and the evaporation tank 2, and the liquid in the melting tank 1 (i.e., liquid evaporation material) can flow into the evaporation tank 2 through the circulation groove.

[0070] As some embodiments of the present application, there is no specific limitation on the connection mode between the melting tank 1 and the evaporation tank 2, and a specific connection mode can be selected according to the needs, as long as the liquid in the melting tank 1 can flow into the evaporation tank 2. It is beneficial for the evaporation material to be melted in the melting tank 1 first, and the melted liquid evaporation material flows into the evaporation tank 2 and evaporates in the evaporation tank 2, reducing the risk of liquid level disturbance in the evaporation tank 2 caused by adjustment or movement of the evaporation material, improving the stability of evaporation, and thus helping to improve the quality of evaporation film formation.

[0071] In the above technical scheme, by setting up a melting tank 1 and an evaporation tank 2, the melting area of ​​the vapor deposition material can be separated from the evaporation area, thereby reducing the risk of unstable liquid level in the evaporation tank 2 due to adjustment or movement of the vapor deposition material, which is beneficial to improving the stability of vapor deposition and thus improving the film quality of vapor deposition.

[0072] According to some embodiments of the present application, referring to Figure 4 As shown, the evaporation boat 100 includes: an evaporation boat body 3 and an annular limiting wall 4 , an evaporation groove 2 is formed on the upper surface of the evaporation boat body 3 , and the annular limiting wall 4 is arranged on the upper surface of the evaporation boat body 3 to define a melting groove 1 .

[0073] The evaporation boat 100 may include an evaporation boat body 3 and an annular limiting wall 4. The evaporation boat body 3 and the annular limiting wall 4 may be integrally formed, and the annular limiting wall 4 may also be bonded to the evaporation boat body 3. However, the present application is not limited thereto. As long as the annular limiting wall 4 is provided on the evaporation boat body 3, the present application takes the integral forming of the evaporation boat body 3 and the annular limiting wall 4 as an example for explanation. The integral forming may improve the connection reliability of the evaporation boat body 3 and the annular limiting wall 4, reduce the risk of separation of the evaporation boat body 3 and the annular limiting wall 4, and help to improve the service life of the evaporation boat 100. It may also reduce the risk of leakage of the melted liquid evaporation material from between the evaporation boat body 3 and the annular limiting wall 4, thereby improving the working stability of the evaporation boat 100.

[0074] An evaporation groove 2 is formed on the upper surface of the evaporation boat body 3. As an example, a limit ring is provided on the upper surface of the evaporation boat body 3, and the limit ring and the upper surface of the evaporation boat body 3 jointly define the evaporation groove 2. As another example, the evaporation groove 2 can be a groove that is recessed inwardly on the upper surface of the evaporation boat body 3. The present application takes the groove that is recessed inwardly on the upper surface of the evaporation boat body 3 as an example for explanation. The melted liquid evaporation material can flow into the evaporation groove 2 and evaporate in the evaporation groove 2, which is conducive to the liquid evaporation material being stably evaporated in the evaporation groove 2, thereby improving the stability of evaporation, and further facilitating the improvement of the film quality of evaporation. The annular limit wall 4 is provided on the upper surface of the evaporation boat body 3 to define the melting groove 1. The evaporation material is melted into a liquid state in the melting groove 1, which can reduce the risk of liquid surface disturbance in the evaporation groove 2 caused by the evaporation material during the melting process.

[0075] In the above technical scheme, an evaporation tank 2 is formed on the upper surface of the evaporation boat body 3, and an annular limiting wall 4 is arranged on the upper surface of the evaporation boat body 3 to define the melting tank 1, so as to realize the arrangement of the evaporation tank 2 and the melting tank 1, which is beneficial for the evaporation material to melt into liquid in the melting tank 1, and then flow into the evaporation tank 2 and evaporate in the evaporation tank 2, thereby reducing the risk of liquid level disturbance in the evaporation tank 2 caused by the melting process of the evaporation material, improving the stability of evaporation, and further facilitating the improvement of the film quality of evaporation.

[0076] According to some embodiments of the present application, referring to Figure 4 As shown, the annular limiting wall 4 is formed with a flow hole 41 , and the liquid in the melting tank 1 is suitable for flowing into the evaporation tank 2 through the flow hole 41 .

[0077] Among them, the annular limiting wall 4 can be formed with a flow hole 41, and the liquid in the melting tank 1 can flow into the evaporation tank 2 through the flow hole 41. The annular limiting wall 4 can be but not limited to forming a polygonal or circular flow hole 41. The present application takes the annular limiting wall 4 formed with a rectangular flow hole 41 as an example for explanation. The annular limiting wall 4 is formed with a rectangular flow hole 41 to facilitate the liquid evaporation material melted in the melting tank 1 to flow into the evaporation tank 2 through the flow hole 41, which is beneficial to improving the continuity and stability of the evaporation process, thereby improving the working efficiency and film forming effect of the evaporation boat 100.

[0078] In the above technical solution, a flow hole 41 is formed in the in-shaped limiting wall so that the liquid in the melting tank 1 can flow into the evaporation tank 2 through the flow hole 41, which is beneficial to improving the continuity and stability of the evaporation process, thereby improving the working efficiency and film forming effect of the evaporation boat 100.

[0079] According to some embodiments of the present application, referring to Figure 4 As shown, along the arrangement direction of the melting tank 1 and the evaporation tank 2 , the wall portion of the annular limiting wall 4 facing the evaporation tank 2 is formed with a flow hole 41 .

[0080] Among them, along the arrangement direction of the melting tank 1 and the evaporation tank 2, as an example, the melting tank 1 and the evaporation tank 2 are arranged along the length direction of the evaporation boat 100, that is, Figure 4 In the Y direction, the wall portion of the annular limiting wall 4 facing the evaporation tank 2 is formed with a flow hole 41. The annular limiting wall 4 can have four wall portions opposite to each other. Among the four wall portions of the annular limiting wall 4, the flow hole 41 is formed facing the evaporation tank 2 (that is, the wall portion closest to the evaporation tank 2). The flow distance of the liquid in the melting tank 1 when flowing into the evaporation tank 2 through the flow hole 41 can be shortened, which is convenient for reducing the time for the liquid to flow from the melting tank 1 into the evaporation tank 2, which is beneficial to further improve the continuity and stability of the evaporation process, thereby improving the working efficiency and film forming effect of the evaporation boat 100.

[0081] In the above technical scheme, along the arrangement direction of the melting tank 1 and the evaporation tank 2, a flow hole 41 is formed on the wall portion of the annular limiting wall 4 facing the evaporation tank 2, so that the flow distance of the liquid in the melting tank 1 when flowing into the evaporation tank 2 through the flow hole 41 can be shortened, which is convenient for reducing the time for the liquid to flow from the melting tank 1 into the evaporation tank 2, which is beneficial to further improve the continuity and stability of the evaporation process, thereby improving the working efficiency and film forming effect of the evaporation boat 100.

[0082] According to some embodiments of the present application, referring to Figure 4 As shown, the evaporation boat 100 further includes: a guide portion 5 , which is disposed on the upper surface of the evaporation boat body 3 and located between the melting tank 1 and the evaporation tank 2 , and has a guide groove 51 , which connects the flow hole 41 and the evaporation tank 2 .

[0083] The evaporation boat 100 may further include a guide portion 5, which is disposed on the upper surface of the evaporation boat body 3 and between the melting tank 1 and the evaporation tank 2. The guide portion 5 may be connected to the evaporation boat body 3 and the annular limiting wall 4. As an example, the guide portion 5 may be integrally formed with the evaporation boat body 3 and the annular limiting wall 4. The guide portion 5 may guide the liquid evaporation material so that the liquid evaporation material melted in the melting tank 1 may flow smoothly into the evaporation tank 2. The guide portion 5 is formed with a guide groove 51, which connects the flow hole 41 and the evaporation tank 2. The liquid in the melting tank 1 first flows into the guide groove 51 through the flow hole 41, and then is guided into the evaporation tank 2 through the guide groove 51. The liquid in the melting tank 1 flows in the guide groove 51, which reduces the risk of liquid evaporation material overflowing along the edge of the guide portion 5, and is conducive to the liquid melted in the melting tank 1 to flow smoothly into the evaporation tank 2, further improving the continuity and stability of the evaporation process, thereby further improving the working efficiency and film forming effect of the evaporation boat 100.

[0084] Furthermore, the guide portion 5 is arranged on the upper surface of the evaporation boat body 3 and is located between the melting tank 1 and the evaporation tank 2, so that the guide portion 5 can play the role of a reinforcing rib, which is beneficial to strengthen the connection strength between the annular limiting wall 4 and the evaporation boat body 3, and reduce the risk of cracking or even breaking of the annular limiting wall 4 and the evaporation boat body 3 due to thermal stress, thereby helping to extend the service life of the evaporation boat 100.

[0085] In the above technical solution, the guide part 5 is provided on the upper surface of the evaporation boat body 3 and between the melting tank 1 and the evaporation tank 2, so that the guide part 5 is formed with a guide groove 51, and the guide groove 51 connects the flow hole 41 and the evaporation tank 2. The liquid evaporation material melted in the melting tank 1 can flow into the evaporation tank 2 through the flow hole 41 and the guide part 5 in sequence, which is conducive to further improving the continuity and stability of the evaporation process, thereby further improving the working efficiency and film forming effect of the evaporation boat 100. The guide part 5 is provided on the upper surface of the evaporation boat body 3 and between the melting tank 1 and the evaporation tank 2, and the guide part 5 can also play the role of a reinforcing rib, which is conducive to strengthening the connection strength between the annular limiting wall 4 and the evaporation boat body 3, reducing the risk of cracking or even breaking of the annular limiting wall 4 and the evaporation boat body 3 due to thermal stress, thereby helping to extend the service life of the evaporation boat 100.

[0086] According to some embodiments of the present application, referring to Figure 4 As shown, along the arrangement direction of the melting tank 1 and the evaporation tank 2 , the guide tank 51 has a first open end 511 and a second open end 512 opposite to each other, the first open end 511 corresponds to the flow hole 41 , and the second open end 512 is connected to the evaporation tank 2 .

[0087] Among them, along the arrangement direction of the melting tank 1 and the evaporation tank 2, that is, the length direction of the evaporation boat 100, that is, Figure 4In the Y direction, the guide groove 51 has a first open end 511 and a second open end 512 opposite to each other. The first open end 511 corresponds to the flow hole 41, so that the liquid evaporation material melted in the melting tank 1 can flow into the guide groove 51 through the flow hole 41 and the first open end 511 in sequence. The second open end 512 is connected to the evaporation tank 2, so that the liquid evaporation material guided by the guide groove 51 can flow into the evaporation tank 2 through the second open end 512, so that the liquid evaporation material can evaporate into a film in the evaporation tank 2.

[0088] In the above technical scheme, by making the guide groove 51 have a relative first open end 511 and a second open end 512, and the first open end 511 corresponds to the flow hole 41, and the second open end 512 is connected to the evaporation tank 2, the effect of the guide groove 51 connecting the flow hole 41 and the evaporation tank 2 is achieved, so that the liquid evaporation material melted in the melting tank 1 can flow into the evaporation tank 2 through the flow hole 41, the first open end 511, the guide groove 51 and the second open end 512 in sequence, so that the liquid evaporation material can evaporate into a film in the evaporation tank 2.

[0089] According to some embodiments of the present application, referring to Figure 4 As shown, the bottom wall of the guide groove 51 is configured as a guide slope 513 , and the guide slope 513 is suitable for guiding the liquid to the evaporation groove 2 .

[0090] Among them, the bottom wall of the guide groove 51 can be constructed as a guide slope 513, and the guide slope 513 can convert the gravitational potential energy of the liquid into kinetic energy, so that the guide slope 513 can guide the liquid to the evaporation tank 2. In the present application, the guide slope 513 can make the liquid evaporation material melted in the melting tank 1 have a certain kinetic energy, improve the flow speed of the liquid evaporation material, facilitate the liquid evaporation material melted in the melting tank 1 to flow smoothly into the evaporation tank 2, and also facilitate the liquid evaporation material to be spread evenly in the evaporation tank 2, improve the evaporation efficiency, so that the liquid evaporation material can evaporate and form a film in the evaporation tank 2. In addition, in the evaporation tank 2, the melted liquid evaporation material can react with the evaporation boat 100 to produce impurities. By setting the guide slope 513, the melted liquid evaporation material flows into the evaporation tank 2 through the guide slope 513, which is conducive to flushing the impurities in the evaporation tank 2 to the vicinity of the tank wall of the evaporation tank 2, reducing the risk of impurities affecting the stability of the liquid, and is conducive to further improving the film-forming effect of the evaporation boat 100.

[0091] In the above technical scheme, the bottom wall of the guide groove 51 is constructed as a guide slope 513, and the guide slope 513 guides the liquid to the evaporation groove 2, which is beneficial to convert the gravitational potential energy of the liquid evaporation material melted in the melting groove 1 into kinetic energy, thereby increasing the flow rate of the liquid evaporation material, facilitating the liquid evaporation material melted in the melting groove 1 to flow smoothly into the evaporation groove 2, and also beneficial for the liquid evaporation material to be evenly spread in the evaporation groove 2, thereby improving the evaporation efficiency, so that the liquid evaporation material can evaporate and form a film in the evaporation groove 2, and can also wash the impurities in the evaporation groove 2 to the vicinity of the groove wall of the evaporation groove 2, which is beneficial to further improve the film-forming effect of the evaporation boat 100.

[0092] According to some embodiments of the present application, referring to Figure 4 As shown, the angle between the guide slope 513 and the upper surface of the evaporation boat body 3 is greater than or equal to 1° and less than or equal to 3°.

[0093] Among them, the upper surface of the evaporation boat body 3 can be a plane, and the angle between the guide slope 513 and the upper surface of the evaporation boat body 3 is greater than or equal to 1° and less than or equal to 3°, that is, the angle between the guide slope 513 and the upper surface of the evaporation boat body 3 can be any value between 1° and 3°, and the angle between the guide slope 513 and the upper surface of the evaporation boat body 3 can be but not limited to 1°, 2° or 3°. Such a setting can reduce the risk that the liquid in the melting tank 1 cannot flow smoothly into the evaporation tank 2 due to the small angle between the guide slope 513 and the upper surface of the evaporation boat body 3, and can also reduce the risk of the liquid disturbing the liquid in the evaporation tank 2 due to the large angle between the guide slope 513 and the upper surface of the evaporation boat body 3, thereby reducing the risk of liquid splashing and scalding the film surface, so that the liquid can flow slowly and stably along the guide slope 513 into the evaporation tank 2, which is beneficial to the continuity and stability of the process of the liquid flowing from the melting tank 1 into the evaporation tank 2, thereby improving the working efficiency and film forming effect of the evaporation boat 100.

[0094] In the above technical scheme, by setting the angle between the guide slope 513 and the upper surface of the evaporation boat body 3 to be greater than or equal to 1° and less than or equal to 3°, the risk of the liquid in the melting tank 1 not being able to flow smoothly into the evaporation tank 2 due to the angle between the guide slope 513 and the upper surface of the evaporation boat body 3 being too small can be reduced. The risk of the liquid disturbing the liquid in the evaporation tank 2 due to the angle between the guide slope 513 and the upper surface of the evaporation boat body 3 being too large can also be reduced, thereby reducing the risk of liquid splashing and scalding the film surface, so that the liquid can flow slowly and stably along the guide slope 513 into the evaporation tank 2, which is beneficial to the continuity and stability of the process of the liquid flowing from the melting tank 1 to the evaporation tank 2, thereby improving the working efficiency and film forming effect of the evaporation boat 100.

[0095] According to some embodiments of the present application, referring to Figure 4As shown, along the arrangement direction of the melting tank 1 and the evaporation tank 2, the guide slope 513 has a first end 5131 and a second end 5132 relative to each other, the first end 5131 is connected to the annular limiting wall 4 and is located between the upper edge of the flow hole 41 and the upper surface of the evaporation boat body 3, and the second end 5132 is adjacent to the evaporation tank 2.

[0096] Among them, along the arrangement direction of the melting tank 1 and the evaporation tank 2, that is, the length direction of the evaporation boat 100, that is, Figure 4 In the Y direction, the guide slope 513 has a first end 5131 and a second end 5132 opposite to each other, the first end 5131 is an end close to the annular limiting wall 4, and the second end 5132 is an end close to the evaporation tank 2. The first end 5131 is connected to the annular limiting wall 4 and is located between the upper edge of the flow hole 41 and the upper surface of the evaporation boat body 3. That is to say, the first end 5131 can be located at any position between the upper edge of the flow hole 41 and the upper surface of the evaporation boat body 3. As an example: the first end 5131 can be located at the lower edge of the flow hole 41, and the first end 5131 can also be located at a position between the lower edge of the flow hole 41 and the upper surface of the evaporation boat body 3. As long as the first end 5131 can be located between the upper edge of the flow hole 41 and the upper surface of the evaporation boat body 3, it is beneficial for the liquid in the melting tank 1 to smoothly flow out of the melting tank 1 through the flow hole 41, so that the liquid in the melting tank 1 can smoothly flow into the guide groove 51. The second end 5132 may be adjacent to the evaporation tank 2 , which is beneficial for the liquid to flow into the evaporation tank 2 through the second end 5132 , thereby allowing the liquid to flow smoothly from the melting tank 1 into the evaporation tank 2 .

[0097] In the above technical scheme, along the arrangement direction of the melting tank 1 and the evaporation tank 2, the guide slope 513 has a first end 5131 and a second end 5132 relative to each other, and the first end 5131 is connected to the annular limiting wall 4 and is located between the upper edge of the flow hole 41 and the upper surface of the evaporation boat body 3, and the second end 5132 is adjacent to the evaporation tank 2, which is conducive to the liquid in the melting tank 1 to flow out of the melting tank 1 smoothly through the flow hole 41, and then flow into the evaporation tank 2 through the second end 5132, so that the liquid can flow smoothly from the melting tank 1 into the evaporation tank 2.

[0098] According to some embodiments of the present application, referring to Figure 4 As shown, a notch structure 31 is formed on the side wall of the evaporation boat body 3 .

[0099] Among them, the side wall of the evaporation boat body 3 can be formed with a notch structure 31. As an example: the cross-section of the evaporation boat body 3 can be but not limited to an inverted trapezoid. Setting the notch structure 31 can reduce the cross-sectional area of ​​the evaporation boat body 3, thereby increasing the resistance of the evaporation boat 100. When the evaporation boat 100 is powered on, the evaporation boat body 3 can generate more heat within the same time, which is beneficial to increase the temperature of the evaporation boat body 3, reduce the risk of solidification of the liquid evaporation material due to low temperature, and help improve the evaporation efficiency of the liquid evaporation material, thereby further improving the film forming effect of the evaporation boat 100.

[0100] In the above technical solution, by forming a notch structure 31 on the side wall of the evaporation boat body 3, when the evaporation boat 100 is powered on, the evaporation boat body 3 can generate more heat within the same time, which is beneficial to increase the temperature of the evaporation boat body 3, reduce the risk of liquid evaporation material solidifying due to low temperature, and help improve the evaporation efficiency of the liquid evaporation material, thereby further improving the film forming effect of the evaporation boat 100.

[0101] According to some embodiments of the present application, referring to Figure 4 As shown, the evaporation boat 100 further includes a protection sheet 6 , which is assembled in the melting tank 1 and disposed on the bottom wall of the melting tank 1 .

[0102] The evaporation boat 100 may further include a protective sheet 6, which may be a refractory metal sheet such as metal tungsten and tungsten-rhenium alloy, but the present application is not limited thereto. The protective sheet 6 may also be other metal sheets having the same effect as metal tungsten and tungsten-rhenium alloy. The protective sheet 6 is assembled in the melting tank 1 and arranged on the bottom wall of the melting tank 1. The shape and size of the protective sheet 6 may be adapted to the shape of the bottom wall of the melting tank 1, thereby reducing the risk that the protective sheet 6 cannot be assembled in the melting tank 1 due to the excessive size of the protective sheet 6, and also reducing the risk that the protective sheet 6 cannot reliably protect the bottom wall of the melting tank 1 due to the small size of the protective sheet 6. The protective sheet 6 is assembled in the melting tank 1 and arranged on the bottom wall of the melting tank 1, thereby reducing the risk that the evaporation material continuously hits the bottom wall of the melting tank 1 and corrodes the evaporation boat 100, and also reducing the risk that the high-temperature liquid scours and corrodes the bottom wall of the melting tank 1, thereby increasing the service life of the evaporation boat 100. It should be noted that the service life of the evaporation boat 100 can usually be extended from 20 hours to 30 hours.

[0103] In the above technical solution, by providing a protective sheet 6 and assembling the protective sheet 6 in the melting tank 1 and provided on the bottom wall of the melting tank 1, the risk of the evaporation boat 100 corroded by the continuous collision of the evaporation material with the bottom wall of the melting tank 1 can be reduced, and the risk of the bottom wall of the melting tank 1 corroded by the high-temperature liquid can also be reduced, thereby improving the service life of the evaporation boat 100.

[0104] According to some embodiments of the present application, referring to Figure 4As shown, the evaporation boat 100 is constructed as a ceramic part.

[0105] Among them, the evaporation boat 100 can be constructed as a ceramic part. Ceramics have high thermal conductivity. Constructing the evaporation boat 100 as a ceramic part can improve the efficiency of heat conduction of the evaporation boat 100, which is beneficial to improving the evaporation effect of the evaporation boat 100. In addition, ceramics have good corrosion resistance. Constructing the evaporation boat 100 as a ceramic part can also improve the working stability and service life of the evaporation boat 100.

[0106] In the above technical solution, by constructing the evaporation boat 100 as a ceramic part, the heat conduction efficiency of the evaporation boat 100 can be improved, which is beneficial to improving the evaporation effect of the evaporation boat 100 and can also improve the working stability and service life of the evaporation boat 100.

[0107] Refer to the following Figure 1-Figure 3 The evaporation boat assembly 200 according to an embodiment of the present application is described.

[0108] Reference Figure 1-Figure 3 As shown, the evaporation boat assembly 200 according to the embodiment of the present application includes a plurality of evaporation boats 100, and the evaporation boat 100 is the evaporation boat 100 for evaporation of the above embodiment. The plurality of evaporation boats 100 are arranged in sequence along a first direction, and the melting tank 1 and the evaporation tank 2 of each evaporation boat 100 are arranged along a second direction, and the melting tank 1 and the evaporation tank 2 of at least two evaporation boats 100 are arranged in opposite directions.

[0109] The evaporation boat assembly 200 includes a plurality of evaporation boats 100, and the evaporation boat 100 is the evaporation boat 100 for evaporation in the above-mentioned embodiment. The evaporation boat 100 may be provided with 2, 3, 4 or more evaporation boats. The present application takes the evaporation boat 100 provided with 4 as an example for explanation. The 4 evaporation boats 100 are arranged in sequence along a first direction, i.e., Figure 1 In the Z direction, the melting tank 1 and the evaporation tank 2 of each evaporation boat 100 are arranged along the second direction, that is, the length direction of the evaporation boat 100, that is, Figure 1 In the Y direction, the first direction, the second direction and the third direction are perpendicular to each other, and the third direction is Figure 1 The X direction in the diagram, i.e., the third direction, is the thickness direction of the evaporation boat 100. Moreover, the melting tanks 1 and the evaporation tanks 2 of at least two evaporation boats 100 are arranged in opposite directions, that is, along the second direction, the melting tanks 1 and the evaporation tanks 2 of at least two evaporation boats 100 are arranged in opposite directions. Such an arrangement enables the evaporation material to be fed along both sides of the second direction. Multiple feeding mechanisms are respectively arranged on both sides of the evaporation boat assembly 200 along the second direction, which is also conducive to increasing the evaporation area of ​​the evaporation boat assembly 200 along the second direction, thereby facilitating increasing the film forming space of the evaporation boat assembly 200, and further improving the working efficiency of the evaporation boat assembly 200.

[0110] Along the second direction, the melting tanks 1 and evaporation tanks 2 of at least two evaporation boats 100 are arranged in opposite directions. As an example, the melting tanks 1 and evaporation tanks 2 of two adjacent evaporation boats 100 are arranged in opposite directions, so that the melting tanks 1 and evaporation tanks 2 of two adjacent evaporation boats 100 can be arranged separately, which is conducive to increasing the space between the two adjacent melting tanks 1 and evaporation tanks 2, improving the heat dissipation effect between the two adjacent evaporation boats 100, and extending the service life of the evaporation boat assembly 200. Multiple feeding mechanisms are arranged on both sides of the evaporation boat assembly 200 along the second direction. When it is necessary to adjust the evaporation material or to repair and inspect the evaporation boat 100, the operating space of the staff can be increased, which is convenient for the repair and inspection of the evaporation boat assembly 200, thereby further extending the service life of the evaporation boat assembly 200.

[0111] In the above technical solution, by arranging the multiple evaporation boats 100 of the evaporation boat assembly 200 in sequence along the first direction, the melting tank 1 and the evaporation tank 2 of each evaporation boat 100 are arranged along the second direction, and the melting tank 1 and the evaporation tank 2 of at least two evaporation boats 100 are arranged in opposite directions, the evaporation material can be fed along the two sides of the second direction, which is beneficial to increase the evaporation area of ​​the evaporation boat assembly 200 along the second direction, thereby facilitating the increase of the film forming space of the evaporation boat assembly 200, and further improving the working efficiency of the evaporation boat assembly 200. The space between two adjacent melting tanks 1 and evaporation tanks 2 can also be increased, and the heat dissipation effect between two adjacent evaporation boats 100 can be improved. The multiple feeding mechanisms are respectively arranged on the two sides of the evaporation boat assembly 200 along the second direction. When it is necessary to adjust the evaporation material or to repair and inspect the evaporation boat 100, the operating space of the staff can be increased, which is convenient for the repair and inspection of the evaporation boat assembly 200, thereby helping to extend the service life of the evaporation boat assembly 200.

[0112] As some embodiments of the present application, the evaporation boat assembly 200 may further include two support beams 201, both of which extend along the arrangement direction of the evaporation boats 100, that is, extend along the first direction, and the two support beams 201 are arranged opposite to and spaced apart to form an assembly space between the two support beams 201, so as to facilitate the assembly of multiple evaporation boats 100 in the assembly space between the two support beams 201, and both of the two support beams 201 support multiple evaporation boats 100, which is beneficial for the evaporation boat 100 to reliably perform the evaporation function between the two support beams 201, thereby improving the stability of the evaporation process and thus improving the film quality of the evaporation.

[0113] As some embodiments of the present application, the two support beams 201 can be set as electrodes. Specifically, one of the two support beams 201 can be set as a positive electrode, and the other of the two support beams 201 can be set as a negative electrode. When the evaporation boat 100 needs to perform the evaporation function, the two support beams 201 are powered on respectively. After the two support beams 201 are powered on, the temperature rises, thereby raising the temperature of the evaporation boat 100, which facilitates the evaporation boat 100 to perform the evaporation function.

[0114] According to some embodiments of the present application, the evaporation boat 100 of the present application is formed with a melting tank 1 and an evaporation tank 2, the melting tank 1 and the evaporation tank 2 are located on the same side of the evaporation boat 100, the melting tank 1 and the evaporation tank 2 are connected, and the liquid in the melting tank 1 can flow into the evaporation tank 2. The evaporation boat 100 includes an evaporation boat body 3 and an annular limiting wall 4, the upper surface of the evaporation boat body 3 is formed with the evaporation tank 2, and the annular limiting wall 4 is arranged on the upper surface of the evaporation boat body 3 to define the melting tank 1. The annular limiting wall 4 is formed with a flow hole 41, and the liquid in the melting tank 1 is suitable for flowing into the evaporation tank 2 through the flow hole 41. Along the arrangement direction of the melting tank 1 and the evaporation tank 2, the wall portion of the annular limiting wall 4 facing the evaporation tank 2 is formed with a flow hole 41. The evaporation boat 100 also includes a guide portion 5, the guide portion 5 is arranged on the upper surface of the evaporation boat body 3 and is located between the melting tank 1 and the evaporation tank 2, and the guide portion 5 is formed with a guide groove 51, and the guide groove 51 connects the flow hole 41 and the evaporation tank 2. Along the arrangement direction of the melting tank 1 and the evaporation tank 2, the guide groove 51 has a first open end 511 and a second open end 512 opposite to each other, the first open end 511 corresponds to the flow hole 41, and the second open end 512 is connected to the evaporation tank 2. The bottom wall of the guide groove 51 is configured as a guide slope 513, and the guide slope 513 is suitable for guiding the liquid to the evaporation tank 2. The angle between the guide slope 513 and the upper surface of the evaporation boat body 3 is greater than or equal to 1° and less than or equal to 3°. Along the arrangement direction of the melting tank 1 and the evaporation tank 2, the guide slope 513 has a first end 5131 and a second end 5132 opposite to each other, the first end 5131 is connected to the annular limiting wall 4 and is located between the upper edge of the flow hole 41 and the upper surface of the evaporation boat body 3, and the second end 5132 is adjacent to the evaporation tank 2. The side wall of the evaporation boat body 3 is formed with a notch structure 31.

[0115] The evaporation material used for evaporation can be fed evenly through the wire reel. The evaporation material is pressed and melted by the active and passive wheels of the feeding mechanism above the evaporation boat 100 and then transported to the melting tank 1 of the evaporation boat 100. The high-temperature molten evaporation material in the melting tank 1 can flow out of the melting tank 1 through the flow hole 41 and flow into the guide tank 51 through the first open end 511. Under the guiding effect of the guide slope 513, the high-temperature molten evaporation material can slowly flow into the evaporation tank 2 along the guide slope 513 in a relatively stable manner, so that the high-temperature molten evaporation material can be evenly spread in the evaporation tank 2 and evaporated to form a film in the evaporation tank 2, reducing the risk of the high-temperature molten evaporation material disturbing the liquid level in the evaporation tank 2, which is beneficial to improving the continuity and stability of the process of the high-temperature molten evaporation material flowing from the melting tank 1 into the evaporation tank 2, thereby improving the working efficiency and film-forming effect of the evaporation boat 100.

[0116] The evaporation boat 100 further includes a protective sheet 6, which is installed in the melting tank 1 and disposed on the bottom wall of the melting tank 1 to reduce the risk of the high-temperature molten evaporation material constantly eroding and corroding the bottom wall of the melting tank 1, thereby increasing the service life of the evaporation boat 100. The evaporation boat 100 is constructed as a ceramic part.

[0117] According to some embodiments of the present application, the evaporation boat assembly 200 includes a plurality of evaporation boats 100, and the evaporation boat 100 is the evaporation boat 100 for evaporation of the above-mentioned embodiment, and the plurality of evaporation boats 100 are arranged in sequence along a first direction, and the melting tank 1 and the evaporation tank 2 of each evaporation boat 100 are arranged along a second direction, and the melting tank 1 and the evaporation tank 2 of at least two evaporation boats 100 are arranged in opposite directions.

[0118] During the evaporation process, the object to be coated is located above the evaporation boat 100 , and the object to be coated moves along a first direction.

[0119] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application may be combined with each other.

[0120] The above are only preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. An evaporation boat for evaporation, characterized in that: include: The evaporation boat is formed with a melting tank and an evaporation tank, the melting tank and the evaporation tank are located on the same side of the evaporation boat, the melting tank and the evaporation tank are communicated, and the liquid in the melting tank is suitable for flowing into the evaporation tank.

2. The evaporation boat for evaporation according to claim 1, characterized in that: The evaporation boat comprises: an evaporation boat body and an annular limiting wall. The evaporation groove is formed on the upper surface of the evaporation boat body. The annular limiting wall is arranged on the upper surface of the evaporation boat body to define the melting groove.

3. The evaporation boat for evaporation according to claim 2, characterized in that: The annular limiting wall is formed with a flow hole, and the liquid in the melting tank is suitable for flowing into the evaporation tank through the flow hole.

4. The evaporation boat for evaporation according to claim 3, characterized in that: Along the arrangement direction of the melting tank and the evaporation tank, the flow hole is formed on the wall portion of the annular limiting wall facing the evaporation tank.

5. The evaporation boat for evaporation according to claim 3, characterized in that: Also includes: The guide part is arranged on the upper surface of the evaporation boat body and is located between the melting tank and the evaporation tank. The guide part is formed with a guide groove, and the guide groove communicates with the flow hole and the evaporation tank.

6. The evaporation boat for evaporation according to claim 5, characterized in that: Along the arrangement direction of the melting tank and the evaporation tank, the guide tank has a first open end and a second open end opposite to each other, the first open end corresponds to the flow hole, and the second open end is communicated with the evaporation tank.

7. The evaporation boat for evaporation according to claim 5, characterized in that: The bottom wall of the guide groove is configured as a guide slope, and the guide slope is suitable for guiding the liquid to the evaporation groove.

8. The evaporation boat for evaporation according to claim 7, characterized in that: The angle between the guide slope and the upper surface of the evaporation boat body is greater than or equal to 1° and less than or equal to 3°.

9. The evaporation boat for evaporation according to claim 2, characterized in that: A notch structure is formed on the side wall of the evaporation boat body.

10. The evaporation boat for evaporation according to any one of claims 1 to 9, characterized in that: Also includes: A protection sheet is installed in the melting tank and arranged on the bottom wall of the melting tank.

11. The evaporation boat for evaporation according to any one of claims 1 to 9, characterized in that: The evaporation boat is constructed as a ceramic part.

12. An evaporation boat assembly, characterized in that: include: A plurality of evaporation boats, wherein the evaporation boats are evaporation boats for evaporation according to any one of claims 1 to 11, wherein the plurality of evaporation boats are arranged in sequence along a first direction, the melting tank and the evaporation tank of each evaporation boat are arranged along a second direction, and the melting tanks and the evaporation tanks of at least two of the evaporation boats are arranged in opposite directions.

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