Coating substrate rotary adjusting device for vacuum coating machine

Abstract

The utility model provides a film coating substrate rotary adjusting device for a vacuum film coating machine, which comprises a vacuum film coating box and a vacuum device connected with the vacuum film coating box, a rotating table is arranged in the vacuum film coating box, a driving motor is arranged at the center of the bottom of the rotating table, support rods are respectively fixed on two sides of the rotating table, a substrate frame is fixedly arranged on the support rods, and the substrate frame is arranged on the rotating table. A film material pipe is installed in the middle of the substrate frame through a bearing sleeve, a feeding port is formed in the top end of the film material pipe, and the bottom end of the film material pipe communicates with the film material evaporation column. The substrate frame is driven by the driving motor to rotate along with the rotation of the rotating table, so that the coating is more uniform, and the coating effect of a finished product is good.

Description

Technical Field

[0001] The utility model relates to the field of vacuum coating machines, in particular to a coating substrate rotation adjustment device for vacuum coating machines. Background Art

[0002] Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a high vacuum degree. There are many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, etc. The main idea is to divide it into two types: evaporation and sputtering. The substrate to be coated is called the substrate, and the material to be coated is called the target.

[0003] The substrate and the target are in the same vacuum chamber. Evaporation coating generally heats the target so that the surface components are evaporated in the form of atomic groups or ions. They are then deposited on the surface of the substrate and form a thin film through the film forming process.

[0004] However, the existing coating devices have certain defects when used, such as uneven coating, resulting in poor coating effect of the finished product. Utility Model Content

[0005] The utility model aims to provide a coating substrate rotation adjustment device for a vacuum coating machine to solve the problems raised in the above-mentioned background technology.

[0006] In order to solve the above technical problems, the utility model provides the following technical solutions: a coating substrate rotation device for a vacuum coating machine, comprising a vacuum coating box and a vacuum device connected to the vacuum coating box, a rotating table is arranged in the vacuum coating box, a driving motor is arranged at the bottom center of the rotating table, support rods are respectively fixed on both sides of the rotating table, a substrate frame is fixed on the support rods, a film material tube is installed in the middle of the substrate frame through a bearing sleeve, a feed port is arranged at the top of the film material tube, and the bottom end is connected to the film material evaporation column.

[0007] Rollers are arranged on the peripheral side of the rotating platform, and the rollers are placed in the guide rails, and the guide rails are fixedly arranged in the vacuum coating box.

[0008] The driving motor is a low-speed motor.

[0009] The bottom of the film material evaporation column is rotatably mounted on the rotating table via a support shaft.

[0010] Compared with the prior art, the utility model has the following beneficial effects: the substrate rack of the utility model rotates with the rotation of the rotating table under the drive of the driving motor, so that the coating is more uniform and the coating effect of the finished product is better. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. In the accompanying drawings:

[0012] Figure 1 It is a structural schematic diagram of the utility model;

[0013] Figure 2 yes Figure 1 The enlarged view of point A in the middle;

[0014] In the figure: 1 vacuum coating box; 2 vacuum device; 3 rotating table; 4 driving motor; 5 support rod; 6 substrate rack; 7 film material pipe; 8 feed port; 9 film material evaporation column; 10 roller; 11 guide rail; 12 support shaft. DETAILED DESCRIPTION

[0015] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0016] See also Figure 1-2 The utility model provides a technical solution: a coating substrate rotation device for a vacuum coating machine, comprising a vacuum coating box 1 and a vacuum device 2 connected to the vacuum coating box 1, a rotating table 3 is arranged in the vacuum coating box 1, a driving motor 4 is arranged at the bottom center of the rotating table 3, support rods 5 are respectively fixed on both sides of the rotating table 3, a substrate frame 6 is fixed on the support rods 5, a film material tube 7 is installed in the middle of the substrate frame 6 through a bearing sleeve, a feed port 8 is arranged at the top of the film material tube 7, and the bottom end is connected to a film material evaporation column 9.

[0017] Rollers 10 are disposed on the circumference of the rotating table 3 . The rollers 10 are placed in the guide rails 11 . The guide rails 11 are fixedly disposed in the vacuum coating box 1 .

[0018] The driving motor 4 is a low-speed motor.

[0019] The bottom of the film material evaporation column 9 is rotatably mounted on the rotating table 3 via a support shaft 12 .

[0020] Specific working principle:

[0021] When in use, the operator first puts the film material into the film material evaporation column 9 through the feed port 8, and then starts the electric heating rod inside the film material evaporation column 9, so that the electric heating rod heats and evaporates the film material. At the same time, the drive motor 4 is started to drive the rotating table 3 to rotate, and the substrate rack 6 is driven to rotate through the support rod 5, so that the coating is more uniform and the coating effect of the finished product is better.

[0022] It should be noted that relational terms such as first and second, etc. are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0023] Finally, it should be noted that the above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A coating substrate rotation device for a vacuum coating machine, comprising a vacuum coating box (1) and a vacuum device (2) connected to the vacuum coating box (1), characterized in that: A rotating table (3) is arranged in the vacuum coating box (1), a driving motor (4) is arranged at the bottom center of the rotating table (3), support rods (5) are fixed on both sides of the rotating table (3), a substrate frame (6) is fixed on the support rods (5), a film material tube (7) is installed in the middle of the substrate frame (6) through a bearing sleeve, a feed port (8) is arranged at the top end of the film material tube (7), and the bottom end is connected to a film material evaporation column (9).

2. The coating substrate rotation device for a vacuum coating machine according to claim 1, characterized in that: Rollers (10) are arranged on the circumference of the rotating platform (3), and the rollers (10) are placed in guide rails (11). The guide rails (11) are fixedly arranged in the vacuum coating box (1).

3. The coating substrate rotation device for a vacuum coating machine according to claim 1, characterized in that: The driving motor (4) is a low-speed motor.

4. The coating substrate rotation device for a vacuum coating machine according to claim 1, characterized in that: The bottom of the film material evaporation column (9) is rotatably mounted on the rotating table (3) via a support shaft (12).

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