Novel furnace barrel of single crystal furnace

Abstract

The utility model discloses a novel furnace barrel of a single crystal furnace, which belongs to the technical field of furnace barrels of single crystal furnaces, aims at solving the problem that the temperature of the bottom of a crucible cannot be adjusted, and comprises a furnace body, the furnace body is sequentially provided with an upper heat preservation barrel, a middle heat preservation barrel and a lower heat preservation barrel from top to bottom, a heat preservation felt is arranged in the middle heat preservation cylinder, an installation mechanism is arranged between the heat preservation felt and the middle heat preservation cylinder, a cooling mechanism is arranged in the middle heat preservation cylinder below the heat preservation felt, a crucible is arranged on the inner side of the heat preservation felt, a crucible support is fixedly installed at the bottom of the crucible, and a supporting rod is fixedly connected to the bottom of the crucible support. The supporting rod penetrates through the bottom of the lower heat preservation cylinder. The cooling mechanism is arranged, the temperature gradient at the bottom of the crucible is controlled through the flow of argon in the circulating wall in the crystal pulling process, the oxygen content of a crystal bar is reduced by 15% according to the influence of the temperature gradient, and the quality of the crystal bar is improved by 15%.

Description

Technical Field

[0001] The utility model belongs to the technical field of single crystal furnace drums, and in particular relates to a new type of single crystal furnace drum. Background Art

[0002] Single crystal furnace is a device that melts polycrystalline materials and grows single crystals by Czochralski method. The diameter of single crystals during growth can be affected by temperature, pulling speed and rotation speed, crucible tracking speed and rotation speed, flow rate of protective gas, etc. Among them, temperature mainly determines whether crystal formation can be achieved.

[0003] In the prior art, the traditional middle furnace barrel is designed with straight arms, which does not have the conditions for regional cooling, and thus cannot control the temperature gradient at the bottom of the crucible during the crystal pulling process to improve the production quality of the crystal rod.

[0004] Therefore, a new type of furnace drum for a single crystal furnace is needed to solve the problem in the prior art that the temperature of the bottom of the crucible cannot be adjusted. Utility Model Content

[0005] The purpose of the utility model is to provide a new type of furnace drum of a single crystal furnace to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned objectives, the utility model provides the following technical solutions: a new furnace barrel of a single crystal furnace, comprising a furnace body, wherein the furnace body is sequentially arranged from top to bottom into an upper insulation barrel, a middle insulation barrel and a lower insulation barrel, wherein a guide barrel is arranged in the upper insulation barrel, an insulation felt is arranged in the middle insulation barrel, an installation mechanism is arranged between the insulation felt and the middle insulation barrel, a cooling mechanism is arranged in the middle insulation barrel below the insulation felt, a crucible is arranged on the inner side of the insulation felt, a crucible support is fixedly installed at the bottom of the crucible, a support rod is fixedly connected to the bottom of the crucible support, the support rod passes through the bottom of the lower insulation barrel, a bottom heater is fixedly installed at the bottom of the lower insulation barrel and is arranged at the lower part of the crucible.

[0007] It should be noted in the solution that the thermal insulation felt is a spliced ​​cured felt and is fixedly connected to the middle thermal insulation cylinder through a mounting mechanism.

[0008] It is further worth noting that there are multiple installation mechanisms, and the multiple installation mechanisms are arranged on the inner wall surface of the middle insulation cylinder.

[0009] It should be further explained that the cooling mechanism includes a sleeve, the sleeve is fixedly connected to the inner wall of the middle insulation cylinder, a connecting pipe is fixedly connected to the sleeve, and the end of the connecting pipe is fixedly connected to the circulation wall.

[0010] As a preferred embodiment, two connecting pipes are provided, and the two connecting pipes are symmetrically arranged on both sides of the circulation wall.

[0011] As a preferred embodiment, the mounting mechanism includes a fixing sleeve, which is fixedly connected to the inner wall of the middle insulation cylinder, a limiting groove is provided on the fixing sleeve, and an opening is arranged on the side away from the middle insulation cylinder, a connecting sleeve is movably arranged on the outer side of the fixing sleeve, a limiting rod is fixedly connected inside the connecting sleeve, and a rotating block is fixedly connected in the middle of the limiting rod.

[0012] As a preferred implementation, two limiting grooves are provided, the two limiting grooves are symmetrically arranged about the center of the fixing sleeve, and the limiting rod is matched with the limiting groove.

[0013] Compared with the prior art, the utility model provides a new type of furnace drum for a single crystal furnace, which has at least the following beneficial effects:

[0014] (1) Through the cooling mechanism, the temperature gradient at the bottom of the crucible is controlled by the flow rate of argon gas in the circulating wall during the crystal pulling process. According to the influence of the temperature gradient, the oxygen content of the crystal rod is reduced by 15%, and the quality of the crystal rod is improved by 15%.

[0015] (2) The installation mechanism is provided to facilitate the installation of the insulation felt. At the same time, it is easy to disassemble and replace it during maintenance and replacement work, thereby improving its insulation effect on the crucible and further improving the crystal pulling efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the structure of the utility model;

[0017] Figure 2 It is a schematic diagram of the internal structure of the utility model;

[0018] Figure 3 This is a schematic diagram of the internal split structure of the middle insulation cylinder of the utility model;

[0019] Figure 4 It is a schematic diagram of the disassembled structure of the installation mechanism of the utility model.

[0020] In the figure: 1. furnace body; 101. upper insulation tube; 102. middle insulation tube; 103. lower insulation tube; 2. guide tube; 3. support rod; 4. crucible support; 5. bottom heater; 6. cooling mechanism; 601. sleeve; 602. connecting pipe; 603. circulating wall; 7. insulation felt; 8. installation mechanism; 801. fixing sleeve; 802. limiting groove; 803. limiting rod; 804. rotating block; 805. connecting sleeve; 9. crucible. DETAILED DESCRIPTION

[0021] The present invention will be further described below in conjunction with the embodiments.

[0022] See also Figure 1-4The utility model provides a new type of furnace drum of a single crystal furnace, including a furnace body 1, which is arranged from top to bottom as an upper insulation tube 101, a middle insulation tube 102 and a lower insulation tube 103, a guide tube 2 is arranged in the upper insulation tube 101, an insulation felt 7 is arranged in the middle insulation tube 102, a mounting mechanism 8 is arranged between the insulation felt 7 and the middle insulation tube 102, a cooling mechanism 6 is arranged in the middle insulation tube 102 below the insulation felt 7, a crucible 9 is arranged on the inner side of the insulation felt 7, a crucible support 4 is fixedly installed at the bottom of the crucible 9, a support rod 3 is fixedly connected to the bottom of the crucible support 4, the support rod 3 passes through the bottom of the lower insulation tube 103, a bottom heater 5 is fixedly installed at the bottom of the lower insulation tube 103 and is arranged at the lower part of the crucible 9.

[0023] The cooling mechanism 6 facilitates controlling the bottom temperature of the crucible 9 , and through the temperature influence, reduces the oxygen content of the crystal rod and improves its production quality. Meanwhile, the installation mechanism 8 facilitates installation and fixation of the thermal insulation felt 7 .

[0024] Further Figure 1 , Figure 2 and Figure 3 As shown, it is worth explaining in detail that the thermal insulation felt 7 adopts a spliced ​​cured felt and is fixedly connected to the middle thermal insulation tube 102 through the mounting mechanism 8 to avoid heat leakage caused by loosening and misalignment of the thermal insulation felt 7.

[0025] Further Figure 1 , Figure 2 and Figure 3 As shown, it is worth explaining in detail that a plurality of mounting mechanisms 8 are provided, and the plurality of mounting mechanisms 8 are arranged on the inner wall surface of the middle insulation tube 102 to further improve the stability of the installation of the insulation felt 7.

[0026] Further Figure 1 , Figure 2 and Figure 3 As shown, it is worth to explain in detail that the cooling mechanism 6 includes a sleeve 601, the sleeve 601 is fixedly connected to the inner wall of the middle heat preservation cylinder 102, a connecting pipe 602 is fixedly connected to the sleeve 601, and the end of the connecting pipe 602 is fixedly connected to the circulation wall 603, and two connecting pipes 602 are provided, and the two connecting pipes 602 are symmetrically arranged on both sides of the circulation wall 603;

[0027] During the crystal pulling process, the temperature gradient at the bottom of the crucible 9 is controlled by the flow rate of argon gas in the circulating wall 603 , thereby reducing the oxygen content of the crystal rod according to the influence of the temperature gradient and improving the production quality of the crystal rod.

[0028] According to the above working process, it can be known that: through the cooling mechanism 6, the temperature gradient at the bottom of the crucible 9 is controlled by the flow of argon gas in the circulating wall 603 during the crystal pulling process, and the oxygen content of the crystal rod is reduced by 15% according to the influence of the temperature gradient, thereby improving the quality of the crystal rod by 15%.

[0029] Further as Figure 2 , Figure 3 and Figure 4 As shown, it is worth specifically explaining that the mounting mechanism 8 includes a fixing sleeve 801, the fixing sleeve 801 is fixedly connected to the inner wall of the middle insulation tube 102, a limiting groove 802 is provided on the fixing sleeve 801, and an opening is provided on the side away from the middle insulation tube 102, a connecting sleeve 805 is movably provided on the outer side of the fixing sleeve 801, a limiting rod 803 is fixedly connected inside the connecting sleeve 805, a rotating block 804 is fixedly connected in the middle of the limiting rod 803, two limiting grooves 802 are provided, and the two limiting grooves 802 are symmetrically arranged about the center of the fixing sleeve 801, and the limiting rod 803 is matched with the limiting groove 802;

[0030] The thermal insulation felt 7 is installed on the fixing sleeve 801 by aligning the thermal insulation felt 7 with the fixing sleeve 801. At this time, the limiting rod 803 is inserted into the limiting groove 802, and the thermal insulation felt 7 is squeezed and fixed by the connecting sleeve 805. At the same time, the rotating block 804 is rotated to make the limiting rod 803 slide and limit in the limiting groove 802, thereby improving the fixing effect of the thermal insulation felt 7.

[0031] This scheme has the following working process: when this device is used, the raw material is melted in the crucible 9. During the crystal pulling process, the temperature gradient at the bottom of the crucible 9 is controlled by the flow rate of argon gas in the circulating wall 603. According to the influence of the temperature gradient, the oxygen content of the crystal rod is reduced by 15%, and the quality of the crystal rod is improved by 15%, which is convenient for improving the production quality. At the same time, when the thermal insulation felt 7 is installed, the thermal insulation felt 7 is installed on the fixed sleeve 801 by aligning it with the fixed sleeve 801. At this time, the limiting rod 803 is inserted into the limiting groove 802, and the thermal insulation felt 7 is squeezed and fixed by the connecting sleeve 805. At the same time, the rotary block 804 is rotated to make the limiting rod 803 slide and limit in the limiting groove 802, thereby improving the fixing effect of the thermal insulation felt 7.

[0032] In summary: through the cooling mechanism 6, the temperature gradient at the bottom of the crucible 9 is controlled by the flow rate of argon gas in the circulating wall 603 during the crystal pulling process, and the oxygen content of the crystal rod is reduced by 15% according to the influence of the temperature gradient, thereby improving the quality of the crystal rod by 15%. Through the installation mechanism 8, the installation of the insulation felt 7 is convenient, and it is convenient to disassemble and replace it during maintenance and replacement work, thereby improving its insulation effect on the crucible 9 and further improving the crystal pulling efficiency.

Claims

1. A new type of furnace drum for a single crystal furnace, comprising a furnace body (1), characterized in that: The furnace body (1) is sequentially provided from top to bottom as an upper insulation tube (101), a middle insulation tube (102) and a lower insulation tube (103); a flow guide tube (2) is provided in the upper insulation tube (101); an insulation felt (7) is provided in the middle insulation tube (102); a mounting mechanism (8) is provided between the insulation felt (7) and the middle insulation tube (102); a cooling mechanism (6) is provided in the middle insulation tube (102) below the insulation felt (7); a crucible (9) is provided inside the insulation felt (7); a crucible support (4) is fixedly installed at the bottom of the crucible (9); a support rod (3) is fixedly connected to the bottom of the crucible support (4); the support rod (3) passes through the bottom of the lower insulation tube (103); a bottom heater (5) is fixedly installed at the bottom of the lower insulation tube (103) and is provided at the bottom of the crucible (9).

2. The new type of furnace drum of a single crystal furnace according to claim 1, characterized in that: The thermal insulation felt (7) is a spliced ​​curing felt and is fixedly connected to the middle thermal insulation cylinder (102) via a mounting mechanism (8).

3. The new type of furnace drum of a single crystal furnace according to claim 1, characterized in that: A plurality of the mounting mechanisms (8) are provided, and the plurality of the mounting mechanisms (8) are arranged on the inner wall surface of the middle heat-insulating cylinder (102).

4. The new type of furnace drum of a single crystal furnace according to claim 1, characterized in that: The cooling mechanism (6) comprises a sleeve (601), the sleeve (601) is fixedly connected to the inner wall of the middle heat-insulating cylinder (102), a connecting pipe (602) is fixedly connected to the sleeve (601), and the end of the connecting pipe (602) is fixedly connected to a circulation wall (603).

5. The new type of furnace drum of a single crystal furnace according to claim 4, characterized in that: Two connecting pipes (602) are provided, and the two connecting pipes (602) are symmetrically arranged on both sides of the circulation wall (603).

6. The new type of furnace drum of a single crystal furnace according to claim 1, characterized in that: The mounting mechanism (8) comprises a fixing sleeve (801), the fixing sleeve (801) being fixedly connected to the inner wall of the middle heat-insulating cylinder (102), the fixing sleeve (801) being provided with a limiting groove (802), and being provided with an opening at a side away from the middle heat-insulating cylinder (102), a connecting sleeve (805) being movably provided on the outer side of the fixing sleeve (801), a limiting rod (803) being fixedly connected inside the connecting sleeve (805), and a rotating block (804) being fixedly connected in the middle of the limiting rod (803).

7. The new type of furnace drum for a single crystal furnace according to claim 6, characterized in that: There are two limit grooves (802), and the two limit grooves (802) are symmetrically arranged about the center of the fixed sleeve (801), and the limit rod (803) is matched with the limit groove (802).

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