Side plate for coating machine cavity

Abstract

The utility model discloses a side plate for a cavity of a coating machine, relates to the field of optical coating, and aims to solve the problems that a hinge side plate can only be simply opened and closed, the function is relatively single, different use requirements are met, and the adaptability is relatively poor, the key points of the technical scheme are that the side plate comprises a coating machine side plate, and a fan-shaped window is arranged on the coating machine side plate in a penetrating and opening manner; a rotating shaft is rotationally arranged on the side plate of the coating machine in a clamping manner, a circular disc covering the fan-shaped window is fixedly arranged at one end, close to the inner wall of the coating machine, of the rotating shaft, a plurality of fan-shaped functional areas are formed in a disc body of the circular disc, the shape of the functional areas is matched with that of the fan-shaped window, and the functional areas comprise a maintenance area, an observation area and a sealing area; and a servo motor connected with the rotating shaft is fixedly arranged on the outer wall of the side plate of the coating machine and is externally connected with a control system, so that the effect that an operator can conveniently and independently select the side plate to use, overhaul, observe, seal and the like according to actual requirements is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of optical coating, in particular to a side plate for a coating machine cavity. Background Art

[0002] Ion source is an applied science and technology with wide applications, many types, many sciences involved, strong process technology, and rapid development. Its function is to ionize neutral atoms or molecules and draw ion beams from them. Ion sources are widely used and can be used in optical coating, plasma cleaning, atomic layer deposition and other equipment.

[0003] The current ion sources include Kaufman ion source, Hall source and high-energy radio frequency ion source. The Kaufman ion source emits electrons by heating the cathode tungsten filament. The electrons collide with the gas molecules introduced into the ion source to produce ions, and then an ion beam is formed through the accelerating electric field generated by the porous grid; the Hall source has a magnetic field. The electrons are first emitted by heating the cathode tungsten filament and migrate to the anode. The electrons collide with the gas molecules to ionize them. The electrons form Hall currents in the magnetic field to generate electric fields. The ions are accelerated by the Hall electric field and drawn out to form an ion beam; the high-energy radio frequency ion source uses an alternating radio frequency field to generate electrons. The electrons absorb energy in the radio frequency field and oscillate in the electric field to ionize the gas. The electrons are confined in the discharge chamber due to the action of the electromagnetic field, and the ions are accelerated by the grid to form an ion beam and are drawn out.

[0004] The above-mentioned existing technical solutions have the following defects: the side panels of the existing ion source coating machines are generally whole sealing panels or side hinge panels, and the hinged side panels can only be simply opened and closed, with relatively single functions and poor adaptability to different usage requirements. Utility Model Content

[0005] The utility model aims to provide a side plate for a cavity of a coating machine.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A fan-shaped window is penetrated through the side panel of the coating machine, and a rotating shaft is arranged on the side panel of the coating machine for rotation. A circular disk covering the fan-shaped window is fixedly arranged at one end of the rotating shaft close to the inner wall of the coating machine, and the circular disk body is provided with a plurality of fan-shaped functional areas, and the shapes of the functional areas match the fan-shaped window settings. The functional areas include an inspection area, an observation area, and a sealing area. A servo motor connected to the rotating shaft is fixedly arranged on the outer wall of the side panel of the coating machine, and the servo motor is externally connected to a control system.

[0008] By adopting the above technical scheme, areas with different functions are set on the circular disk body, and the rotation of the rotating shaft is controlled by a servo motor to rotate the circular disk body according to actual needs, so that the fan-shaped window is consistent with the functional area, so as to facilitate the operator to independently choose the side panel use maintenance, observation, sealing and other functions according to actual needs. In actual applications, the functional areas may be further enriched according to the usage scenarios, which has good functional expandability and effectively improves the scope of application of the side panels.

[0009] Furthermore, the inspection area is an opening penetrating the circular disk body, the observation area is a translucent window penetrating the circular disk body, and the sealing area is a fan-shaped window arrangement of the circular disk body sealing cover.

[0010] By adopting the above technical scheme, the opening setting of the maintenance area combined with the fan-shaped window makes it convenient for the operator to put his arm into the interior to perform maintenance operations on the machine. The observation area can facilitate the operator to observe the operating status on site when the equipment is running. The sealing area can effectively seal the fan-shaped window to prevent the spread of substances harmful to the human body inside the equipment while preventing the operator's body parts from entering the interior of the equipment when the equipment is running.

[0011] Furthermore, a sound insulation sealing plate covering the fan-shaped window is slidably provided on the outer wall of the side panel of the coating machine, and the sound insulation sealing plate is fan-shaped and filled with sound insulation material. A slide rail matching the sound insulation sealing plate is fixedly provided on the outer wall of the side panel of the coating machine.

[0012] By adopting the above technical solution, the sound insulation sealing plate slides along the slide rail and can independently select its relative position with the fan-shaped window. When the noise of the equipment is too loud during operation, the sound insulation sealing plate is started to cover the fan-shaped window to further isolate the noise and reduce the physical harm to the operator.

[0013] Furthermore, the slide rail includes an upper rail and a lower rail, and the upper rail and the lower rail are arranged along the length direction of the arc edge of the fan-shaped window. The outer wall of the side panel of the coating machine is fixedly provided with a first limit plate and a second limit plate. The first limit plate is arranged in contact with the side edge of the fan-shaped window, and the second limit plate is arranged away from the fan-shaped window along the arc edge trajectory of the fan-shaped window.

[0014] By adopting the above technical solution, the first limiting plate combined with the second limiting plate can effectively limit the sliding range of the sound insulation sealing plate to prevent derailment. When the sound insulation sealing plate contacts the first limiting plate, the fan-shaped window is completely covered. When the sound insulation sealing plate contacts the second limiting plate, the fan-shaped window can be completely opened.

[0015] Furthermore, the upper rail is provided with a movable latch penetrating into the sound insulation sealing plate, and the outer wall of the sound insulation sealing plate is fixedly provided with a gripping handle.

[0016] By adopting the above technical solution, the movable pin can lock the sound insulation sealing plate, which is convenient for controlling the combination state of the sound insulation sealing plate and the slide rail according to actual needs. The setting of the gripping handle is convenient for the operator to grip and control the sound insulation sealing plate, which is convenient for force control.

[0017] In summary, the beneficial technical effects of the utility model are:

[0018] 1. The rotating shaft, circular disk and functional area are adopted, so that the side panel can be selected for maintenance, observation, sealing and other functions according to actual needs;

[0019] 2. The sound insulation sealing plate is used to further isolate the noise and reduce the physical harm to the operator;

[0020] 3. The first limit plate and the second limit plate are used to effectively limit the sliding range of the sound insulation sealing plate and prevent derailment. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification, but do not constitute a limitation of the present invention. In the accompanying drawings:

[0022] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0023] Figure 2 It is an exploded schematic diagram of the overall structure of the utility model;

[0024] Figure 3 yes Figure 2 Enlarged schematic diagram of the structure of part A in the middle.

[0025] In the figure, 1. side panel of coating machine; 2. fan-shaped window; 3. rotating shaft; 4. circular disk; 5. functional area; 51. maintenance area; 52. observation area; 53. sealing area; 54. servo motor; 6. sound insulation sealing plate; 61. slide rail; 611. upper rail; 612. lower rail; 62. first limit plate; 63. second limit plate; 64. movable latch; 65. grab handle. DETAILED DESCRIPTION

[0026] The utility model is further described in detail below in conjunction with the accompanying drawings.

[0027] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] See also Figure 1-3 , the utility model provides a technical solution:

[0029] A fan-shaped window 2 is penetrated and opened and closed on the side panel 1 of the coating machine. A rotating shaft 3 is arranged on the side panel 1 of the coating machine for locking and rotating. A circular disk 4 covering the fan-shaped window 2 is fixedly arranged at one end of the rotating shaft 3 close to the inner wall of the coating machine. The circular disk 4 is provided with a plurality of fan-shaped functional areas 5. The shape of the functional area 5 matches the setting of the fan-shaped window 2. The functional area 5 includes an inspection area 51, an observation area 52, and a sealing area 53. A servo motor 54 connected to the rotating shaft 3 is fixedly arranged on the outer wall of the side panel 1 of the coating machine. The servo motor 54 is externally connected to a control system. Areas with different functions are arranged on the body of the circular disk 4. The rotation of the rotating shaft 3 is controlled by the servo motor 54, so that the circular disk 4 body is rotated according to actual needs, so that the fan-shaped window 2 is consistent with the functional area 5, so as to facilitate the operator to operate according to the actual needs. According to actual needs, you can independently choose the effects of the side panels' maintenance, observation, sealing and other functions. In actual applications, the functional area 5 may be further enriched according to the usage scenarios, with good functional expansibility, which effectively improves the applicable scope of the side panels. The observation area 52 is a translucent window that runs through the circular plate 4 body, and the sealing area 53 is a circular plate 4 body sealing cover and fan-shaped window 2 setting. The maintenance area 51 opening setting is combined with the fan-shaped window 2 to facilitate the operator's arm to extend into the interior to perform maintenance operations on the machine. The observation area 52 can facilitate the operator to observe the operating status on site when the equipment is running. The sealing area 53 can effectively seal the fan-shaped window 2 to prevent the spread of harmful substances inside the equipment while preventing the operator's body parts from entering the interior of the equipment when the equipment is running. The outer wall of the machine side panel 1 is slidably provided with a sound insulation sealing plate 6 covering the fan-shaped window 2. The sound insulation sealing plate 6 is a fan-shaped internal filling sound insulation material setting. The outer wall of the coating machine side panel 1 is fixedly provided with a slide rail 61 matching the sound insulation sealing plate 6. The sound insulation sealing plate 6 slides along the slide rail 61 and can independently select the relative position with the fan-shaped window 2. When the noise of the equipment operation is too loud, the sound insulation sealing plate 6 is started to cover the fan-shaped window 2 to further isolate the noise and reduce the physical harm to the operator. The slide rail 61 includes an upper rail 611 and a lower rail 612. The upper rail 611 and the lower rail 612 are arranged along the length direction of the arc side of the fan-shaped window 2. The outer wall of the coating machine side panel 1 is fixedly provided with a first limit plate 62 and a second limit plate 63. The first limit plate 62 fits the fan-shaped window 2 The side is set, and the second limit plate 63 is set along the arc edge trajectory of the fan-shaped window 2 away from the fan-shaped window 2. The first limit plate 62 combined with the second limit plate 63 can effectively limit the sliding range of the sound insulation sealing plate 6 to prevent derailment. When the sound insulation sealing plate 6 hits the first limit plate 62, it completely covers the fan-shaped window 2. When the sound insulation sealing plate 6 hits the second limit plate 63, the fan-shaped window 2 can be completely opened. The upper rail 611 is penetrated by a movable latch 64 that penetrates the sound insulation sealing plate 6. The outer wall of the sound insulation sealing plate 6 is fixedly provided with a gripping handle 65. The movable latch 64 can lock the sound insulation sealing plate 6, which is convenient for controlling the combination state of the sound insulation sealing plate 6 and the sliding rail 61 according to actual needs. The setting of the gripping handle 65 is convenient for the operator to grip and control the sound insulation sealing plate 6, which is convenient for force control.

[0030] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0031] Finally, it should be noted that the above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A side plate for a coating machine chamber, comprising a coating machine side plate (1), characterized in that: The coating machine side panel (1) is provided with a fan-shaped window (2) that can be opened and closed. The coating machine side panel (1) is provided with a rotating shaft (3) that can be engaged and rotated. A circular disk (4) that covers the fan-shaped window (2) is fixedly provided at one end of the rotating shaft (3) close to the inner wall of the coating machine. The circular disk (4) is provided with a plurality of fan-shaped functional areas (5). The shapes of the functional areas (5) match the fan-shaped window (2). The functional areas (5) include an inspection area (51), an observation area (52), and a sealing area (53). A servo motor (54) connected to the rotating shaft (3) is fixedly provided on the outer wall of the coating machine side panel (1). The servo motor (54) is externally connected to a control system.

2. The side plate for a coating machine chamber according to claim 1, characterized in that: The inspection area (51) is an opening that penetrates the body of the circular disk (4).

3. The side plate for a coating machine chamber according to claim 2, characterized in that: The observation area (52) is a semi-transparent window that penetrates the body of the circular disk (4).

4. The side plate for a coating machine chamber according to claim 3, characterized in that: The sealing area (53) is a circular disk (4) that seals and covers the fan-shaped window (2).

5. The side plate for a coating machine chamber according to claim 4, characterized in that: The outer wall of the coating machine side panel (1) is slidably provided with a sound insulation sealing plate (6) covering the fan-shaped window (2); the sound insulation sealing plate (6) is fan-shaped and filled with sound insulation material; the outer wall of the coating machine side panel (1) is fixedly provided with a slide rail (61) matching the sound insulation sealing plate (6).

6. The side plate for a coating machine chamber according to claim 5, characterized in that: The slide rail (61) comprises an upper rail (611) and a lower rail (612), and the upper rail (611) and the lower rail (612) are arranged along the length direction of the arc edge of the fan-shaped window (2). The outer wall of the side panel (1) of the coating machine is fixedly provided with a first limit plate (62) and a second limit plate (63), and the first limit plate (62) is arranged in contact with the side edge of the fan-shaped window (2), and the second limit plate (63) is arranged along the arc edge track of the fan-shaped window (2) away from the fan-shaped window (2).

7. The side plate for a coating machine chamber according to claim 6, characterized in that: The upper rail (611) is provided with a movable latch (64) penetrating into the sound insulation sealing plate (6), and the outer wall of the sound insulation sealing plate (6) is fixedly provided with a gripping handle (65).

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