Sputtering coating device

Abstract

The sputter coating device comprises a bottom plate, a coating box is fixedly arranged on the bottom plate, one side of the coating box is provided with an opening, a box door is hinged to the opening face of the coating box through hinges, the box door and the coating box form a closed coating space, an argon assembly is arranged on one side of the coating box, and a vacuum assembly is arranged on the other side of the coating box. A gas inlet and a vacuum tube are arranged at the top of the coating box, the gas inlet is connected with an argon assembly, the vacuum tube is connected with a vacuum assembly, and a sputtering assembly is arranged in the coating box. A high vacuum environment is created for the coating space through the vacuum assembly, pollution gas in the coating space is removed through the argon assembly, and therefore the coating quality is improved.

Description

Technical Field

[0001] The present application relates to the field of coating device technology, and in particular to a sputtering coating device. Background Art

[0002] Sputtering is a commonly used surface coating technology used to form a uniform and dense film layer on the surface of various materials. It can provide materials with properties such as hardness, wear resistance, and corrosion resistance, and improve the surface quality and function of the material. The basic principle of sputtering is to place the target material (usually a metal or alloy) on a target in a sputtering chamber in a vacuum environment, and evaporate or peel off the atoms or ions on the surface of the target material by heating or arc discharge. These evaporated or peeled atoms or ions will form plasma in the vacuum chamber. Under the action of plasma, atoms or ions move at high speed and are deposited on the surface of the material to be coated to form a thin film layer.

[0003] In the related technology, a Chinese utility model patent with authorization number CN212451613U discloses a magnetron sputtering coating device, including a frame, a coating box is arranged at the upper end of the frame, a coating cavity is arranged inside the coating box, a fixed seat is arranged at the top end of the coating cavity, a magnetron target head is arranged at the lower end of the fixed seat, a receiving plate is arranged at the bottom end of the coating cavity, and a sputtering target table is arranged at the upper end of the receiving plate.

[0004] Regarding the above-mentioned related technologies, although the equipment has been vacuum treated to a certain extent, the vacuum degree is not high, and there are other polluting gases in the vacuum environment, which affects the quality of the coating. Utility Model Content

[0005] In order to increase the vacuum degree and improve the quality of coating, the present application provides a sputtering coating device.

[0006] A sputtering coating device provided in the present application adopts the following technical solution:

[0007] A sputtering coating device comprises a base plate, on which a coating box is fixedly arranged, one side of the coating box is opened, the opening surface of the coating box is hingedly connected to a box door, the box door and the coating box constitute a closed coating space, one side of the coating box is provided with an argon gas component, the other side of the coating box is provided with a vacuum component, the top of the coating box is provided with an air inlet and a vacuum tube, the air inlet is connected to the argon gas component, the vacuum tube is connected to the vacuum component, and a sputtering component is provided inside the coating box.

[0008] By adopting the above technical solution, the coating box and the box door form a sealed coating space. The gas in the coating space is extracted from the vacuum tube through a vacuum pump to create a high vacuum environment. Argon gas is then introduced through the air inlet to remove residual pollutant gas in the coating space, maintain the coating space environment stable, and improve the vacuum environment of the coating space, thereby improving the quality of the coating.

[0009] Optionally, the argon gas assembly includes an argon box, a connecting pipe, a gas supply pipe and a filter component, one side of the filter component is connected to the coating box, the filter component is fixed on the base plate, the other side of the filter component is connected to one end of the connecting pipe, the other end of the connecting pipe is connected to the argon box, the argon box is fixed on the base plate, one side of the argon box is connected to one end of the gas supply pipe, the other end of the gas supply pipe passes through the air inlet, and one end of the gas supply pipe passing through the air inlet is connected to the gas outlet hood.

[0010] By adopting the above technical solution, argon gas is injected into the inner cavity of the coating box to remove polluted gases in the inner cavity of the coating box, improve the sputtering coating environment, thereby improving the coating quality, and at the same time recycle the argon gas to reduce the waste of resources.

[0011] Optionally, the filtering component includes a filter box, a three-layer filter screen and a recovery pipe. The filter box is fixed on the bottom plate, one side of the filter box is connected to one end of the recovery pipe, the other end of the recovery pipe passes through the outer wall of one side of the coating box and extends into the inner cavity of the coating box. The inner cavity of the filter box is fixed with three layers of filter screens, and the four sides of the three-layer filter screen frame are respectively fixedly connected to the inner wall of the filter box.

[0012] By adopting the above technical solution, argon gas can be recycled and used. The recycled argon gas passes through a filter box with three layers of filter screens to improve the purity of the argon gas and prevent impure argon gas from affecting subsequent use.

[0013] Optionally, the vacuum assembly includes an exhaust pipe and a vacuum pump, one end of the exhaust pipe is connected to the vacuum tube, and the other end of the exhaust pipe is connected to the vacuum pump, and the vacuum pump is fixed on the bottom plate.

[0014] By adopting the above technical solution, the gas in the coating box is extracted through a vacuum pump, so that a vacuum environment is formed in the coating box to improve the coating quality.

[0015] Optionally, the sputtering assembly includes a fixed rod, a target material and a cathode, wherein both ends of the fixed rod are respectively fixedly connected to both sides of the inner cavity of the coating box, the fixed rod is connected to the target material, the fixed rod passes through the inside of the target material, and a cathode is provided on the top of the target material.

[0016] By adopting the above technical solution, argon ions are accelerated to fly toward the cathode target under the action of the electric field and bombard the target surface with high energy, causing the target material to be sputtered. Among the sputtered particles, neutral target atoms or molecules are deposited on the gravure to be coated to form a thin film.

[0017] Optionally, two fixing grooves are provided on both sides of the inner cavity of the coating box, both ends of the fixing rod are respectively fixedly connected in the fixing grooves, and a compression spring is provided at one end of the fixing rod.

[0018] By adopting the above technical solution, the target material is fixed by a fixing rod in the coating box, and a compression spring is arranged at one end of the fixing rod. When the fixing rod is installed in the fixing groove, one end of the fixing rod with the compression spring is first fixed in the fixing groove of the inner wall of the coating box and compressed, so that the other end of the fixing rod is conveniently placed in another fixing groove. At this time, the compression spring is restored, so that both ends of the fixing rod are firmly fixed in the two fixing grooves.

[0019] Optionally, a pressure gauge is fixedly provided on the top of the coating box, and a detection end of the pressure gauge passes through the top surface of the coating box and extends into the inner cavity of the coating box.

[0020] By adopting the above technical solution, a pressure gauge is added in the coating box to detect the vacuum degree in the coating box and to determine the usage time of the vacuum pump.

[0021] Optionally, a sputtering target is fixedly provided at the bottom of the inner cavity of the coating box.

[0022] By adopting the above technical solution, the sputtering target table is used to place the intaglio print to be coated.

[0023] Optionally, a plurality of first magnets are fixedly disposed on an outer frame of the opening surface of the coating box, and the opening surface of the coating box is connected to a box door.

[0024] By adopting the above technical solution, a first magnet is provided on the outer frame of the opening surface of the coating box, which is used to cooperate with the second magnet on the box door to seal the coating box and the box door to form a sealed environment.

[0025] Optionally, a plurality of second magnets are fixedly mounted on an outer frame of a side of the box door close to the coating box, a sealing ring is provided at the connection between the box door and the coating box, and a handle is provided on a side of the box door away from the coating box.

[0026] By adopting the above technical solution, the second magnet provided on the box door is used to cooperate with the first magnet on the outer frame of the coating box to seal the coating box and the box door to form a sealed environment. A sealing ring is provided at the connection between the box door and the coating box to increase the sealing of the coating box and the box door. A handle is provided on one side of the box door to facilitate the operator to open and close the box door.

[0027] In summary, the present application includes at least one of the following beneficial technical effects:

[0028] 1. Before sputtering coating, the coating box and the box door form a sealed coating space. The gas in the coating space is extracted from the vacuum tube through a vacuum pump to create a high vacuum environment. Then argon gas is introduced through the air inlet to remove the residual polluted gas in the coating space and keep the coating space environment stable, thereby improving the vacuum environment of the coating space and improving the quality of the coating;

[0029] 2. Argon is a non-renewable gas. After coating, the argon is filtered, recycled and reused to reduce the waste of resources;

[0030] 3. The box door and the coating box are connected by magnetic attraction, and a sealing ring is added at the connection to further enhance the vacuum and the quality of coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 The present invention is a schematic diagram of the overall structure of a sputtering coating device.

[0032] Figure 2 It is a cross-sectional view of a sputtering coating device.

[0033] Figure 3 The present invention is a partial structural schematic diagram of a sputtering coating device.

[0034] Explanation of the reference numerals: 1. bottom plate; 2. coating box; 21. first magnet; 22. air inlet; 23. air outlet hood; 24. recovery port; 25. barometer; 26. vacuum tube; 27. fixing groove; 3. box door; 31. second magnet; 32. sealing ring; 33. handle; 4. argon assembly; 41. argon box; 42. connecting pipe; 43. gas pipe; 44. filter component; 441. filter box; 442. three-layer filter screen; 443. recovery pipe; 5. sputtering assembly; 51. fixing rod; 511. compression spring; 52. target material; 53. cathode; 6. sputtering target platform; 7. vacuum assembly; 71. vacuum pump; 72. exhaust pipe. DETAILED DESCRIPTION

[0035] The following is combined with Figure 1-3 This application is described in further detail.

[0036] The embodiment of the present application discloses a sputtering coating device.

[0037] Reference Figure 1A sputtering coating device includes a base plate 1, on which a coating box 2 is fixedly arranged, one side of the coating box 2 is opened, and a box door 3 is hingedly connected to the opening surface of the coating box 2, and the box door 3 and the coating box 2 constitute a closed coating space, and an air inlet 22 and a vacuum tube 26 are arranged on the top of the coating box 2, an argon gas component 4 is arranged on one side of the coating box 2, and a vacuum component 7 is arranged on the other side of the coating box 2, the air inlet 22 is connected to the argon gas component 4, and the argon gas component 4 provides argon gas for the coating space to remove polluted gas, the vacuum tube 26 is connected to the vacuum component 7, and the vacuum component 7 extracts the gas in the coating space to create a high vacuum environment, and a sputtering component 5 is arranged inside the coating box 2, and the sputtering component 5 performs sputtering coating on the gravure in the high vacuum environment.

[0038] Reference Figure 2 The argon assembly 4 includes an argon box 41, a connecting pipe 42, a gas pipe 43 and a filter component 44. One side of the filter component 44 is connected to the coating box 2. The filter component 44 is fixed on the bottom plate 1. The filter component 44 extracts the argon gas in the coating box 2 for filtering and recovery. The other side of the filter component 44 is connected to one end of the connecting pipe 42. The other end of the connecting pipe 42 is connected to the argon box 41. The argon box 41 is fixed on the bottom plate 1. One side of the argon box 41 is connected to one end of the gas pipe 43. The other end of the gas pipe 43 passes through the air inlet 22. One end of the gas pipe 43 passing through the air inlet 22 is connected to the gas outlet hood 23. The argon box 41 is connected to the coating box 2 through the gas pipe 43, and then releases the argon gas into the coating box 2 through the gas outlet hood 23. The filter component 44 includes a filter box 441, a three-layer filter screen 442 and a recovery pipe 443. The filter box 441 is fixed on the bottom plate 1, and one side of the filter box 441 is connected to one end of the recovery pipe 443, and the other end of the recovery pipe 443 passes through the outer wall of one side of the coating box 2 and extends into the inner cavity of the coating box 2. The argon gas in the coating box 2 is recovered into the filter box 441 through the recovery pipe 443. The inner cavity of the filter box 441 is fixed with three layers of filter screens 442. The three layers of filter screens 442 are respectively titanium rod filter screens, HEPA filter screens and activated carbon filter screens. The four sides of the frame of the three layers of filter screens 442 are fixedly connected to the inner wall of the filter box 441 respectively. The recovered argon gas passes through the titanium rod filter screen to filter the corrosive media in the gas once, and then passes through the HEPA filter screen to filter the fine particles in the gas for a second time. Finally, the toxic impurities in the gas are filtered three times through the activated carbon filter screen, which effectively improves the purity of the argon recovery and purification.

[0039] Reference Figure 2The vacuum assembly 7 includes an exhaust pipe 72 and a vacuum pump 71. One end of the exhaust pipe 72 is connected to the vacuum tube 26, and the other end of the exhaust pipe 72 is connected to the vacuum pump 71. The exhaust pipe 72 is connected to the inner cavity of the coating box 2. The vacuum pump 71 is fixed on the bottom plate 1. Start the vacuum pump 71, and the air in the coating box 2 is extracted through the exhaust pipe 72 to form a high vacuum environment in the coating box 2. A pressure gauge 25 is provided on the top of the coating box 2. The detection end of the pressure gauge 25 passes through the top surface of the coating box 2 and extends into the inner cavity of the coating box 2. During the operation of the vacuum pump 71, the pressure gauge 25 detects the air pressure in the coating box 2 in real time. When the preset air pressure value is reached, the vacuum pump 71 is turned off.

[0040] Reference Figure 2 The sputtering assembly 5 includes a fixed rod 51, a target material 52 and a cathode 53. The two ends of the fixed rod 51 are respectively fixedly connected to the two sides of the inner cavity of the coating box 2. Two fixed grooves 27 are provided on both sides of the inner cavity of the coating box 2. The two ends of the fixed rod 51 are respectively fixedly connected in the fixed grooves 27. A compression spring 511 is provided at one end of the fixed rod 51. The fixed rod 51 is connected to the target material 52. The fixed rod 51 passes through the inside of the target material 52. The target material 52 is sleeved on the fixed rod 51. A cathode 53 is provided on the top of the target material 52. A sputtering target table 6 is fixedly provided at the bottom of the inner cavity of the coating box 2. The intaglio painting to be coated is placed on the sputtering target table 6.

[0041] The sputtering assembly 5 is an existing device. An electric field is generated between the cathode 53 on the target material 52 and the sputtering target stage 6. Then, the electrons fly toward the gravure on the sputtering target stage 6 under the action of the electric field, and collide with argon atoms during the flight, so that the argon atoms are ionized, and argon positive ions and new electrons are generated. The new electrons will continue to be transferred to the gravure, and the argon ions are accelerated to fly toward the target material 52 under the action of the electric field, and bombard the surface of the target material 52 with high energy, so that the target material 52 is sputtered. During sputtering, neutral target atoms or molecules are deposited on the surface of the gravure to form a thin film, thereby completing the coating process;

[0042] When installing the fixing rod 51, one end of the fixing rod 51 equipped with the compression spring 511 is first embedded in a fixing groove 27 to squeeze the compression spring 511. At this time, the length of the fixing rod 51 is shortened, and the other end of the fixing rod 51 is aligned with the other fixing groove 27. Then, the squeezed compression spring 511 is released. At this time, the length of the fixing rod 51 is restored, and the other end of the fixing rod 51 is also embedded in the other fixing groove 27. The two ends of the fixing rod 51 are respectively fixed in the two fixing grooves 27 at the same time, and the fixed installation of the fixing rod 51 is completed.

[0043] Reference Figure 3A plurality of first magnets 21 are provided on the outer frame of the opening surface of the coating box 2, and the opening surface of the coating box 2 is connected to the box door 3. A plurality of second magnets 31 are fixedly provided on the outer frame of the box door 3 close to the coating box 2. The first magnets 21 and the second magnets 31 attract each other, so that the box door 3 and the coating box 2 are tightly connected. A sealing ring 32 is provided at the connection between the box door 3 and the coating box 2, and the second magnet 31 is wrapped by the sealing ring 32. When the box door 3 and the coating box 2 are tightly closed, a coating space is formed. The sealing ring 32 makes the coating space more airtight. A handle 33 is provided on the side of the box door 3 away from the coating box 2. The handle 33 is provided for the convenience of the operator to open and close the box door 3.

[0044] The implementation principle of a sputtering coating device in the embodiment of the present application is:

[0045] A sputtering coating device, before sputtering coating, open the box door 3, put the gravure painting to be coated on the sputtering target 6, cover the box door 3, so that the box door 3 and the coating box 2 form a closed coating chamber, then start the vacuum pump 71, extract the air in the coating chamber, create a high vacuum environment, and observe the air pressure in the coating chamber in real time through the barometer 25. When the air pressure in the coating chamber reaches a predetermined pressure, turn off the vacuum pump 71, and at this time, the argon box 41 delivers argon gas to the coating box 2 through the air inlet 22. The argon gas will remove the residual polluted gas in the coating box 2 and maintain the environment in the coating box 2. The sputtering assembly 5 starts coating. Argon ions are accelerated to fly toward the target material 52 under the action of the electric field, and bombard the surface of the target material 52 with high energy, so that the target material 52 is sputtered. Among the sputtered particles, neutral target atoms or molecules are deposited on the gravure to be coated to form a thin film. After the coating is completed, the argon gas in the coating chamber enters the filter box 441 through the recovery port 24. The three-layer filter screen 442 in the filter box 441 filters the argon gas. The filtered argon gas enters the argon box 41 for reuse. The box door 3 is opened, and the coated gravure is taken out for subsequent cleaning and processing.

[0046] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A sputtering coating device, characterized in that: The invention comprises a bottom plate (1), on which a coating box (2) is fixedly provided, one side of the coating box (2) is provided with an opening, the opening surface of the coating box (2) is hingedly connected to a box door (3), the box door (3) and the coating box (2) form a closed coating space, one side of the coating box (2) is provided with an argon gas component (4), the other side of the coating box (2) is provided with a vacuum component (7), the top of the coating box (2) is provided with an air inlet (22) and a vacuum tube (26), the air inlet (22) is connected to the argon gas component (4), the vacuum tube (26) is connected to the vacuum component (7), and a sputtering component (5) is provided inside the coating box (2).

2. A sputtering coating device according to claim 1, characterized in that: The argon assembly (4) comprises an argon box (41), a connecting pipe (42), a gas supply pipe (43) and a filter component (44), one side of the filter component (44) is connected to the coating box (2), the filter component (44) is fixedly mounted on the bottom plate (1), the other side of the filter component (44) is connected to one end of the connecting pipe (42), the other end of the connecting pipe (42) is connected to the argon box (41), the argon box (41) is fixedly mounted on the bottom plate (1), one side of the argon box (41) is connected to one end of the gas supply pipe (43), the other end of the gas supply pipe (43) passes through the gas inlet (22), and one end of the gas supply pipe (43) passing through the gas inlet (22) is connected to the gas outlet hood (23).

3. A sputtering coating device according to claim 2, characterized in that: The filter component (44) comprises a filter box (441), a three-layer filter screen (442) and a recovery pipe (443); the filter box (441) is fixedly mounted on the bottom plate (1); one side of the filter box (441) is connected to one end of the recovery pipe (443); the other end of the recovery pipe (443) passes through an outer wall of one side of the coating box (2) and extends into the inner cavity of the coating box (2); a three-layer filter screen (442) is fixedly mounted in the inner cavity of the filter box (441); the four sides of the frame of the three-layer filter screen (442) are respectively fixedly connected to the inner wall of the filter box (441).

4. A sputtering coating device according to claim 1, characterized in that: The vacuum assembly (7) comprises an exhaust pipe (72) and a vacuum pump (71); one end of the exhaust pipe (72) is connected to the vacuum pipe (26); the other end of the exhaust pipe (72) is connected to the vacuum pump (71); and the vacuum pump (71) is fixedly mounted on the bottom plate (1).

5. The sputtering coating device according to claim 1, characterized in that: The sputtering assembly (5) comprises a fixed rod (51), a target material (52) and a cathode (53); two ends of the fixed rod (51) are respectively fixedly connected to two sides of the inner cavity of the coating box (2); the fixed rod (51) is connected to the target material (52); the fixed rod (51) passes through the inside of the target material (52); and a cathode (53) is provided on the top of the target material (52).

6. A sputtering coating device according to claim 5, characterized in that: Two fixing grooves (27) are provided on both sides of the inner cavity of the coating box (2), and both ends of the fixing rod (51) are respectively fixedly connected in the fixing grooves (27), and a compression spring (511) is provided at one end of the fixing rod (51).

7. A sputtering coating device according to claim 6, characterized in that: A pressure gauge (25) is fixedly arranged on the top of the coating box (2); a detection end of the pressure gauge (25) penetrates the top surface of the coating box (2) and extends into the inner cavity of the coating box (2).

8. The sputtering coating device according to claim 7, characterized in that: A sputtering target platform (6) is fixedly arranged at the bottom of the inner cavity of the coating box (2).

9. The sputtering coating device according to claim 8, characterized in that: A plurality of first magnets (21) are fixedly arranged on the outer frame of the opening surface of the coating box (2), and the opening surface of the coating box (2) is connected to the box door (3).

10. The sputtering coating device according to claim 9, characterized in that: A plurality of second magnets (31) are fixedly mounted on an outer frame of a side of the box door (3) close to the coating box (2), a sealing ring (32) is provided at the connection between the box door (3) and the coating box (2), and a handle (33) is provided on a side of the box door (3) away from the coating box (2).

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