Cover ring

Abstract

A cover ring placed in a vacuum cavity comprises an annular plate and an annular groove body. The annular plate is provided with a first surface, a second surface opposite to the first surface and an opening. An opening extends from the first surface to the second surface. The annular groove body is fixedly arranged on the second surface and comprises an inner annular wall, an outer annular wall and a plurality of limiting pieces. The inner ring wall surrounds the opening, and the outer ring wall surrounds the opening and the inner ring wall. An annular groove is formed between the inner ring wall and the outer ring wall. And the plurality of limiting pieces are fixedly arranged in the annular groove. Each limiting piece comprises a pair of limiting blocks which are connected with the inner ring wall and the outer ring wall respectively, and each limiting block is provided with an inclined face. In the same limiting piece, the slopes of the pair of limiting blocks face each other, and a limiting groove is formed between the slopes which face each other. The width of the limiting groove is gradually increased from the second surface to the direction away from the annular plate. The limiting piece can reduce or avoid deviation of the cover ring, and therefore the situation that electric arcs happen to the cover ring is reduced or prevented.

Description

Technical Field

[0001] The present disclosure relates to a vacuum process equipment, and more particularly to a cover ring placed in a vacuum chamber. Background Art

[0002] General vacuum equipment, such as a vacuum coating machine for sputtering, has a vacuum chamber, and a carrier for carrying objects (such as wafers) and a cover ring and a lower shielding cover arranged around the carrier are usually provided in the vacuum chamber. When the vacuum equipment performs a vacuum process, such as sputtering, the carrier will rise to support the cover ring, thereby separating the cover ring from the lower shielding cover to ensure that the cover ring and the lower shielding cover are electrically insulated from each other.

[0003] After the vacuum process is completed, the carrier will be lowered to put the cover ring back on the lower shielding cover, wherein the cover ring usually has a groove that can accommodate the upper edge of the lower shielding cover so that the cover ring is in the correct center position. However, the lower shielding cover will deform and wear out due to long-term use, resulting in the cover ring being put back on the lower shielding cover. The allowable safe distance between the cover ring and the lower shielding cover becomes smaller, resulting in the cover ring and the lower shielding cover being too close when the vacuum equipment is performing the vacuum process. The distance between the cover ring and the lower shielding cover is too close, causing an arc, or even a short circuit between the cover ring and the lower shielding cover, which causes product abnormalities. Utility Model Content

[0004] Therefore, the present disclosure provides a cover ring placed in a vacuum chamber, wherein the limiter in the cover ring is used to reduce or prevent the cover ring from deflecting, thereby reducing or preventing arcing between the cover ring and the lower shielding cover.

[0005] The present disclosure proposes a cover ring placed in a vacuum chamber. The cover body includes an annular plate and an annular groove body. The annular plate has a first surface, a second surface opposite to the first surface, and an opening, wherein the opening extends from the first surface to the second surface. The annular groove body is fixed on the second surface and includes an inner annular wall, an outer annular wall, and a plurality of limit members. The inner annular wall surrounds the opening, and the outer annular wall surrounds the opening and the inner annular wall, wherein an annular groove is formed between the inner annular wall and the outer annular wall. A plurality of limit members are fixed in the annular groove, wherein each limit member includes a pair of limit blocks, respectively connected to the inner annular wall and the outer annular wall, and each limit block has an inclined surface, wherein in the same limit member, the inclined surfaces of a pair of limit blocks face each other, and a limit groove is formed between the inclined surfaces facing each other, and the width of the limit groove increases from the second surface toward a direction away from the annular plate.

[0006] According to an embodiment of the present disclosure, in the cover ring, the plurality of limiting members are distributed at equal angles.

[0007] According to an embodiment of the present disclosure, in the cover ring, the inclined surface is a plane.

[0008] According to an embodiment of the present disclosure, in the cover ring, the annular plate is a stainless steel plate, and the annular groove body is a stainless steel groove body.

[0009] According to an embodiment of the present disclosure, in the cover ring, the first surface, the second surface and the opening are arranged in concentric circles.

[0010] According to an embodiment of the present disclosure, in the cover ring, an angle is formed between the outer ring wall and the first surface, and the angle is an acute angle.

[0011] According to an embodiment of the present disclosure, in the cover ring, the first surface has an outer edge, and the outer ring wall has an outer wall surface, the outer wall surface extends from the outer edge, and the outer ring wall does not protrude from the outer edge.

[0012] According to one embodiment of the present disclosure, the above-mentioned cover ring, wherein the inner ring wall has a first annular end face, and the outer ring wall has a second annular end face, wherein the first annular end face and the second annular end face are both arranged relative to the second surface, there is a distance between the first annular end face and the second surface, and the outer ring wall protrudes from the first annular end face.

[0013] According to an embodiment of the present disclosure, in the cover ring, the limiting groove has a depth, and the depth is less than or equal to half of the distance.

[0014] According to an embodiment of the present disclosure, in the cover ring, the number of the plurality of limiting members is at least two and is more than three. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] When read together with the accompanying drawings, various aspects of the present disclosure can be better understood from the following detailed description. It should be noted that, in accordance with standard specifications in the industry, the following various features are not drawn to scale. In fact, the size of various features can be arbitrarily increased or reduced for clarity of discussion.

[0016] Figure 1A is a bottom view of a cover ring according to an embodiment of the present disclosure;

[0017] Figure 1B is an enlarged three-dimensional schematic diagram of a cover ring according to an embodiment of the present disclosure;

[0018] Figure 1C is an enlarged three-dimensional schematic diagram of an annular groove according to an embodiment of the present disclosure;

[0019] Figure 2 is a schematic cross-sectional view of a cover ring according to an embodiment of the present disclosure;

[0020] Figure 3 is an enlarged schematic cross-sectional view of a cover ring according to an embodiment of the present disclosure;

[0021] Figure 4 FIG. 1 is a cross-sectional schematic diagram illustrating an embodiment of a cover ring according to an embodiment of the present disclosure.

[0022]

Explanation of symbols

[0023] 100: Cover ring

[0024] 102: Ring plate

[0025] 104: Annular tank

[0026] 1041: Inner ring wall

[0027] 1042: Outer ring wall

[0028] 1043: First inner wall surface

[0029] 1044: Second inner wall surface

[0030] 106: Annular groove

[0031] 112: Limiting piece

[0032] 1122: Limit block

[0033] 1123: Limiting groove

[0034] 1124: Incline

[0035] 114: Ring opening

[0036] 200: First surface

[0037] 210: Second surface

[0038] 211: first annular end surface

[0039] 212: Second annular end surface

[0040] 220: Angle

[0041] 240: First Distance

[0042] 400: Loading platform

[0043] 410: Lower shield

[0044] 4101: Inner edge support structure

[0045] 4102: Outer edge support structure

[0046] 420:Silicon Wafer

[0047] BB:Boundary DETAILED DESCRIPTION

[0048] The following is a detailed discussion of the embodiments of the present disclosure. However, it should be understood that the embodiments provide many applicable concepts that can be implemented in a variety of specific contexts. The embodiments discussed and disclosed are for illustration only and are not intended to limit the scope of the present disclosure. The terms "first", "second", etc. used herein do not specifically refer to order or sequence, but are only used to distinguish components or operations described in the same technical terms.

[0049] For ease of description, the present disclosure may use spatially relative terms such as "below," "beneath," "lower," "above," "upper," and the like to describe the relationship of one component or feature to another component or feature shown in the figures. Spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The instrument may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used in the present disclosure should be interpreted accordingly.

[0050] At least one embodiment of the present disclosure provides a cover ring for use in a vacuum chamber, which can be disposed on a lower shielding cover, wherein the cover ring has a groove capable of accommodating an upper edge of the lower shielding cover. After the vacuum process is completed, the cover ring is placed back on the lower shielding cover so that the upper edge of the lower shielding cover is inserted into the groove of the cover ring, wherein the cover ring of at least one embodiment of the present disclosure has a stopper disposed in the groove, and the stopper can reduce or avoid the offset between the cover ring and the lower shielding cover, thereby reducing or preventing the occurrence of an arc between the cover ring and the lower shielding cover.

[0051] Figure 1A is a bottom view of a cover ring 100 according to at least one embodiment of the present disclosure. Figure 1B yes Figure 1A See Figure 1A and Figure 1B The cover ring 100 includes an annular plate 102 and an annular groove body 104, and the annular groove body 104 includes an inner annular wall 1041, an outer annular wall 1042, and a stopper 112 formed between the inner annular wall 1041 and the outer annular wall 1042. The outer annular wall 1042 and the inner annular wall 1041 surround the annular opening 114, wherein the outer annular wall 1042 surrounds the inner annular wall 1041, and the outer annular wall 1042, the inner annular wall 1041 and the annular opening 114 can be arranged in concentric circles. An annular groove 106 is formed between the inner annular wall 1041 and the outer annular wall 1042, and the stopper 112 is fixed in the annular groove 106 and is distributed at equal angles.

[0052] The cover ring 100 can be applied to a variety of vacuum equipment, such as a vacuum coating machine such as a sputtering machine and an evaporation machine, or a dry etching machine. The annular plate 102 includes an annular opening 114, and the annular opening 114 can expose the object ( Figure 1ANot shown), to perform a vacuum process on the object, such as coating or dry etching, wherein the aforementioned object is, for example, a silicon wafer or a sapphire substrate.

[0053] Figure 1C is an enlarged three-dimensional schematic diagram of the annular groove 106 according to at least one embodiment of the present disclosure. Figure 1C The limiting member 112 is fixed in the annular groove 106, wherein the limiting member 112 includes a pair of limiting blocks 1122 connected to each other, and the limiting blocks 1122 are respectively connected to the inner annular wall 1041 and the outer annular wall 1042. Each limiting block 1122 has an inclined surface 1124 extending from the inner annular wall 1041 or the outer annular wall 1042. These inclined surfaces 1124 are opposite to each other and can be planes, and the inclined surfaces 1124 are spaced apart by a distance to form a limiting groove 1123. Through the limiting groove 1123 and the inclined surface 1124, the limiting member 112 can effectively reduce or prevent the displacement of the cover ring 100.

[0054] Please refer to Figure 2 and Figure 3 , Figure 2 It is along Figure 1A A schematic cross-sectional view of the BB boundary, and Figure 3 yes Figure 2 A magnified view of a cross-sectional schematic diagram, where Figure 2 The annular plate 102 has a first surface 200 and a second surface 210. The second surface 210 is disposed opposite to the first surface 200, and Figure 2 The annular opening 114 in the annular plate 102 extends from the first surface 200 to the second surface 210. In addition, the annular groove 104 on the annular plate 102 is fixedly disposed on the second surface 210 and includes an inner annular wall 1041 and an outer annular wall 1042, wherein the stopper 112 is also fixedly disposed on the second surface 210. The inner annular wall 1041 and the outer annular wall 1042 respectively have a first annular end face 211 and a second annular end face 212, wherein the first annular end face 211 and the second annular end face 212 are both disposed opposite to the second surface 210.

[0055] Please continue to refer to Figure 2 and Figure 3 In some embodiments, the first surface 200 and the outer annular wall 1042 may have an angle 220, and the angle 220 is an acute angle. The outer annular wall 1042 may protrude from the first annular end surface 211, wherein the outer annular wall 1042 does not protrude from the outer edge extending from the first surface 200. Please refer to Figure 1A , the annular groove 106 in the annular groove body 104 needs to be provided with at least two stoppers 112. Figure 1A For example, the number of the stoppers 112 included in the annular groove body 104 may be more than three. In this way, the deviation of the cover ring 100 can be reduced or prevented. It should be noted that this is not intended to be restrictive, that is, Figure 2 and Figure 3 The number of the limiting members 112 is not limited.

[0056] Please refer to Figure 3 , Figure 3 draw Figure 1A , Figure 2 The annular plate 102, the annular groove body 104, the outer annular wall 1042, the inner annular wall 1041 and the stopper 112 are arranged on the second surface 210, wherein there is a first distance 240 between the first annular end surface 211 of the inner annular wall 1041 and the second surface 210. The depth of the stopper groove 1123 in the stopper 112 can be less than or equal to half of the first distance 240. In this way, not only can the displacement of the cover ring 100 be reduced or avoided, but also the particles generated by friction can be reduced, so as to increase the product yield and improve the vacuum degree of the vacuum chamber.

[0057] Please continue to refer to Figure 3 and Figure 4 . In some embodiments, the outer annular wall 1042 has a first inner wall surface 1043, and the inner annular wall 1041 has a second inner wall surface 1044. There is a distance between the first inner wall surface 1043 and the second inner wall surface 1044, and this distance is equal to the width of the annular groove 106. Since the limiting groove 1123 can accommodate other components for supporting the cover ring 100, the limiting groove 1123 needs to have a certain width, wherein the maximum width of the limiting groove 1123 is less than or equal to the width of the annular groove 106, and the minimum width of the limiting groove 1123 is less than the width of the annular groove 106, but at least the width of other components supporting the cover ring 100, such as the lower shielding cover 410, so as to maintain a certain distance between the cover ring 100 and the lower shielding cover 410, thereby reducing or avoiding the occurrence of arcs.

[0058] Please refer to Figure 4 , wherein the lower shielding cover 410 is a double-wall structure, that is, the lower shielding cover 410 includes an inner edge support structure 4101 and an outer edge support structure 4102 arranged in concentric circles, wherein the outer edge support structure 4102 is connected to the bottom of the inner edge support structure 4101. The outer edge support structure 4102 surrounds the inner edge support structure 4101, and the height of the outer edge support structure 4102 is greater than that of the inner edge support structure 4101.

[0059] The lower shielding cover 410 can be arranged in a vacuum chamber, wherein the carrier 400 is located in the middle of the lower shielding cover 410 and is surrounded by an inner edge support structure 4101, and the carrier 400 and the inner edge support structure 4101 do not contact each other, thereby forming a gap. The carrier 400 is used to carry an object, such as a silicon wafer 420 or a sapphire substrate, and the cover ring 100 is arranged on the carrier 400, and the annular groove 106 in the cover ring 100 is arranged on the inner edge support structure 4101, so that the cover ring stably shields the gap between the carrier 400 and the lower shielding cover 410, and when the carrier 400 is on standby, the annular groove 106 maintains contact with the inner edge support structure 4101. After the cover ring 100 is arranged, the silicon wafer 420 is finally placed on the carrier 400.

[0060] Please continue to refer to Figure 4 In some embodiments, at the beginning of a vacuum process, such as a sputtering process, the carrier 400 may rise a certain distance and push open the cover ring 100, wherein the annular groove 106 is separated from the inner edge support structure 4101 to be electrically insulated from the lower shielding cover 410. At the end of the process, the carrier 400 is lowered and the cover ring 100 is lowered to its original position to contact the lower shielding cover 410. In the process, a vacuum chamber may be generally used, wherein the annular plate 102 in the cover ring 100 may be a stainless steel plate or other materials suitable for use in a vacuum chamber, and the annular groove body 104 in the cover ring 100 may be a stainless steel groove body or other materials suitable for use in a vacuum chamber, so as to facilitate the process.

[0061] Please continue to refer to Figure 4 In some embodiments, when the carrier 400 descends, the cover ring 100 can contact the lower shielding cover 410 without deviation through the inclined surface 1124 of the stopper 112 and the stopper 1122 in the annular groove 106, and the inclined surface 1124 in the stopper 112 will not contact the lower shielding cover 410 completely, so as to reduce particles generated by friction between the cover ring 100 and the lower shielding cover 410 when the carrier 400 moves. In addition, the carrier 400 may include a heater and an electrostatic chuck (E-chuck), etc., and may be changed according to process purposes or instrument design requirements.

[0062] It can be seen from the above-mentioned implementation that one advantage of the present disclosure is that the limit member 112 arranged in the annular groove 106 in the cover ring 100 is used to prevent the cover ring 100 from being offset and not completely separated from the lower shielding cover 410 due to installation actuation deviation when the carrier 400 is actuated during the process, thereby preventing the generation of an arc.

[0063] Although the present disclosure has been disclosed as above by way of example, it is not intended to limit the present disclosure. Anyone with ordinary knowledge in this technical field can easily use the present disclosure as a basis for designing or modifying other processes and structures to achieve the same purpose and / or achieve the same advantages of the embodiments introduced in the present disclosure. Anyone with ordinary knowledge in this technical field should also understand that various changes, substitutions, and modifications may be made to the present disclosure without violating the spirit and scope of the present disclosure.

Claims

1. A cover ring, suitable for being placed in a vacuum chamber, characterized in that: The cover ring comprises: An annular plate having a first surface, a second surface opposite to the first surface, and an opening, wherein the opening extends from the first surface to the second surface; An annular groove body is fixedly disposed on the second surface and comprises: an inner annular wall surrounding the opening; an outer annular wall surrounding the opening and the inner annular wall, wherein an annular groove is formed between the inner annular wall and the outer annular wall; and A plurality of limiting members are fixedly disposed in the annular groove, wherein each of the limiting members comprises: A pair of limit blocks are respectively connected to the inner ring wall and the outer ring wall, and each of the limit blocks has an inclined surface, wherein in the same limit member, the multiple inclined surfaces of the pair of limit blocks face each other, and a limit groove is formed between the multiple inclined surfaces facing each other, and the width of the limit groove increases from the second surface toward the direction away from the annular plate.

2. The cover ring according to claim 1, characterized in that The plurality of limiting members are distributed at equal angles.

3. The cover ring according to claim 1, characterized in that The inclined surface is a plane.

4. The cover ring according to claim 1, characterized in that The annular plate is a stainless steel plate, and the annular trough body is a stainless steel trough body.

5. The cover ring according to claim 1, characterized in that The first surface, the second surface and the opening are arranged in concentric circles.

6. The cover ring according to claim 1, characterized in that There is an included angle between the outer ring wall and the first surface, and the included angle is an acute angle.

7. The cover ring according to claim 1, characterized in that The first surface has an outer edge, and the outer ring wall has an outer wall surface, the outer wall surface extends from the outer edge, and the outer ring wall does not protrude from the outer edge.

8. The cover ring according to claim 1, characterized in that The inner annular wall has a first annular end face, and the outer annular wall has a second annular end face, wherein the first annular end face and the second annular end face are both arranged relative to the second surface, there is a distance between the first annular end face and the second surface, and the outer annular wall protrudes from the first annular end face.

9. The cover ring according to claim 8, characterized in that The limiting groove has a depth, and the depth is less than or equal to half of the distance.

10. The cover ring according to claim 1, characterized in that The number of the plurality of limit members is at least two and is more than three.

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