Hydroelectric end and magnetron sputtering equipment

Abstract

The utility model provides a hydroelectric end and magnetron sputtering equipment, the hydroelectric end comprises a first connecting piece and a second connecting piece, the first connecting piece is used for being electrically connected with a wire, the first connecting piece is provided with a first channel, and the first channel is used for communicating with a cooling pipeline; the second connecting piece is provided with a second channel extending in the horizontal direction, the second connecting piece is connected with the first connecting piece, and the second channel is communicated with the first channel; the second connecting piece is configured to be installed in the vacuum cavity and connected with the collimator, and the second channel is configured to be distributed around the collimator. The magnetron sputtering equipment comprises an equipment body, a collimator, an insulation structure and the hydroelectric end, the equipment body is provided with a vacuum cavity, the collimator is located in the vacuum cavity, the insulation structure abuts against the equipment body, and the hydroelectric end abuts against the insulation structure. According to the hydroelectric end, the power supply and cooling structure is simplified, disassembly, assembly and maintenance of the collimator are facilitated, the maintenance time of the magnetron sputtering equipment can be shortened, and the working efficiency is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a hydroelectric terminal and a magnetron sputtering device. Background Art

[0002] The collimator can correct the trajectory of the coated atoms. However, the coated atoms will adhere to the collimator after passing through part of the collimator, which requires the collimator to be regularly disassembled, cleaned and maintained to prevent the coated atoms attached to the collimator from falling off and contaminating the coating environment, ensuring the normal operation of the coating operation. The problem is that the collimator needs to be used in conjunction with the power supply circuit and cooling water circuit. The power supply circuit is relatively complex, and the cooling water circuit is very close to the collimator. When disassembling the collimator, it is affected by the power supply circuit and cooling water circuit, making it difficult to disassemble and assemble the collimator. Utility Model Content

[0003] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a hydroelectric terminal, which is convenient for disassembly, assembly and cleaning of the collimator.

[0004] The present application also proposes a magnetron sputtering device having the above-mentioned hydroelectric terminal.

[0005] According to the first aspect of the present application, the hydropower terminal includes a first connecting member and a second connecting member;

[0006] A first connecting member, used for electrically connecting to the wire, the first connecting member is provided with a first channel, and the first channel is used for connecting to the cooling pipeline;

[0007] A second connecting member is provided with a second channel extending in a horizontal direction, the second connecting member is connected to the first connecting member, and the second channel is communicated with the first channel;

[0008] The second connecting member is configured to be installed in the vacuum chamber and connected to the collimator to supply power to the second connecting member, and the second channel is configured to be distributed around the collimator to cool the collimator.

[0009] The hydroelectric terminal according to the embodiment of the present application has at least the following beneficial effects: the first connecting member is used to electrically connect to the wire, the second connecting member is used to be installed in the vacuum chamber and connected to the collimator, power is supplied to the collimator through the first connecting member and the second connecting member, and the power supply circuit is simplified; the first channel is used to connect to the cooling pipe, and the second pipe is connected to the first pipe, and the second channel is also configured to be distributed around the collimator for cooling the collimator, thereby, the first connecting member and the second connecting member can be used to power and cool the collimator, and during disassembly and maintenance, the position of the hydroelectric terminal remains fixed, and the collimator only needs to be separated from the second connecting member to be cleaned and maintained. Compared with the use of a more complicated power supply circuit and cooling water channel to connect the collimator, the use of the hydroelectric terminal in the present application makes it easier to disassemble, assemble and clean the collimator.

[0010] According to some embodiments of the present application, the hydropower terminal further includes an insulating shell, and the insulating shell is sleeved on the first connecting member.

[0011] The magnetron sputtering device according to the second aspect of the present application includes a device body, a collimator, an insulating structure and a hydropower terminal in any of the above embodiments.

[0012] The main body of the device is provided with a vacuum chamber;

[0013] The collimator is located in the vacuum chamber;

[0014] The insulating structure abuts against the device body;

[0015] The hydropower terminal includes a first connecting member and a second connecting member. Along the vertical direction, at least one of the first connecting member and the second connecting member abuts against the insulating structure, and the insulating structure is used to support the first connecting member and / or the second connecting member.

[0016] The magnetron sputtering device according to the embodiment of the present application has at least the following beneficial effects: by installing a water and electricity terminal, the collimator can be easily disassembled, thereby improving the disassembly and assembly efficiency, thereby shortening the maintenance time of the magnetron sputtering device, which is beneficial to improving the working efficiency of the magnetron sputtering device.

[0017] According to some embodiments of the present application, the insulating structure includes a first insulating member and a second insulating member. In the horizontal direction, the first insulating member abuts the second insulating member. In the vertical direction, the first connecting member abuts the first insulating member, and the second connecting member abuts the second insulating member.

[0018] According to some embodiments of the present application, along the horizontal direction, the shortest distance between the collimator and the device body is a1, the shortest distance between the second connecting member and the device body is a2, 2mm≤a1, 2mm≤a2, and a1≤4mm and / or a2≤4mm.

[0019] According to some embodiments of the present application, the second insulating member is provided with a protrusion, and along the horizontal direction, the protrusion is located on a side of the second connecting member close to the device body.

[0020] According to some embodiments of the present application, along the horizontal direction, the distance between the second connecting member and the protruding portion is b, and 0.5 mm ≤ b ≤ 1 mm.

[0021] According to some embodiments of the present application, the collimator is provided with a mounting groove, the second connecting member is located in the mounting groove, and the second connecting member abuts the collimator in the horizontal direction and / or the second connecting member abuts the collimator in the vertical direction.

[0022] According to some embodiments of the present application, the device body includes at least two mounting parts, each mounting part together encloses a vacuum chamber, the collimator, the insulating structure and the water and electricity terminal are all connected to the same mounting part, and the adjacent mounting parts are detachably connected.

[0023] According to some embodiments of the present application, the device body also includes a magnetron device and a substrate stage, which are respectively connected to different mounting parts, and the magnetron device is located above the collimator, and the substrate stage is located below the collimator.

[0024] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The present application is further described below with reference to the accompanying drawings and embodiments, wherein:

[0026] Figure 1 This is a schematic diagram of the installation of the hydropower terminal and the collimator in the embodiment of the present application;

[0027] Figure 2 for Figure 1 Sectional view at AA in the middle;

[0028] Figure 3 for Figure 2 A local enlarged schematic diagram of the middle A;

[0029] Figure 4 is a schematic diagram of the structure of the substrate;

[0030] Figure 5 This is a schematic diagram of the structure of a magnetron sputtering device according to an embodiment of the present application;

[0031] Figure 6 for Figure 5 A partial enlarged schematic diagram of point B in the middle;

[0032] Figure 7 for Figure 5 A partial enlarged schematic diagram of point C in the middle;

[0033] Figure 8 for Figure 6 A partial enlarged schematic diagram of point D in the middle;

[0034] Fig. 9 for Figure 6 A partial enlarged schematic diagram of point E in the middle.

[0035] Reference numerals: water and electricity terminal 100, first connecting member 110, first channel 111, second connecting member 120, second channel 121, insulating shell 130;

[0036] Magnetron sputtering equipment 200, equipment body 210, mounting member 211, first mounting member 2111, second mounting member 2112, third mounting member 2113, vacuum chamber 212, collimator 220, mounting groove 221, insulating structure 230, first insulating member 231, second insulating member 232, protrusion 2321, magnetron device 240, substrate stage 250;

[0037] Substrate 300 and deep hole 310 . DETAILED DESCRIPTION

[0038] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0039] In the description of the present application, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0040] In the description of this application, "several" means more than one, "more" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0041] In the description of this application, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this application based on the specific content of the technical solution.

[0042] In the description of the present application, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0043] The following is an introduction to the embodiments of the present application in conjunction with the accompanying drawings:

[0044] refer to Figures 1 to 5 The embodiment of the present application provides a magnetron sputtering device 200 for coating a substrate 300. The magnetron sputtering device 200 includes a device body 210, a collimator 220, an insulating structure 230 and a hydroelectric terminal 100. The device body 210 is provided with a vacuum chamber 212. The magnetron sputtering operation is performed in the vacuum chamber 212. The vacuum chamber 212 is used to connect a vacuum pump to maintain the vacuum environment in the vacuum chamber 212. The collimator 220 is located in the vacuum chamber 212. The insulating structure 230 is in contact with the device body 210. The hydroelectric terminal 100 is electrically connected to the collimator 220. The hydroelectric terminal 100 is fitted with the collimator 220 to provide power supply and cooling for the collimator 220. Thus, the hydroelectric terminal 100 integrates a power supply circuit and a cooling water circuit. The collimator 220 can be disassembled and maintained by simply separating the collimator 220 from the hydroelectric terminal 100. The disassembly and assembly of the collimator 220 is more convenient.

[0045] refer to Figures 1 to 5 In some embodiments, the hydropower terminal 100 includes a first connector 110 and a second connector 120. At least a portion of the first connector 110 is exposed to the atmosphere and is used to be electrically connected to the wire. The second connector 120 is connected to the first connector 110. The second connector 120 is installed in the vacuum chamber 212 and is connected to the collimator 220. The first connector 110 and the second connector 120 are used for conducting electricity to supply power to the collimator 220 to ensure the normal operation of the collimator 220. Compared with the method of supplying power only through wires, the more complicated power supply circuit in the vacuum chamber 212 is simplified.

[0046] Among them, a first channel 111 may be further provided on the first connecting member 110, and a second channel 121 may be further provided on the second connecting member 120. The first channel 111 is connected to the second channel 121, and the first channel 111 is used to connect to a cooling pipe. A coolant flows in the cooling pipe. The coolant is injected into the first channel 111 by the cooling pipe, and then injected into the second channel 121 by the first channel 111. The second channel 121 is distributed around the collimator 220. The coolant in the second channel 121 can take away the heat emitted by the collimator 220 when flowing in the second channel 121, thereby providing cooling for the collimator 220, effectively alleviating the deformation of the collimator 220 due to thermal expansion, and ensuring the normal operation of the collimator 220.

[0047] Therefore, the hydropower terminal 100 integrates the power supply circuit and the cooling water circuit on the first connecting member 110 and the second connecting member 120, which simplifies the power supply circuit and the cooling water circuit connected to the collimator 220. When disassembling, the collimator 220 can be detached by simply removing the collimator 220 from the second connecting member 120, thereby facilitating the maintenance of the collimator 220.

[0048] It should be noted that when disassembling the collimator 220, the power supply circuit and the cooling water circuit connected to the collimator 220 need to be removed before the collimator 220 can be taken out of the vacuum chamber 212 for cleaning and maintenance. To ensure the cooling effect, the cooling water circuit needs to be set close to the collimator 220. The water-power terminal 100 of the present application integrates the power supply circuit and the cooling water circuit, and provides a second connecting member 120 to be connected to the collimator 220. After the second connecting member 120 is connected to the collimator 220, it keeps in contact with the collimator 220, which is convenient for better heat transfer and also helps to shorten the power supply path. The collimator 220 only needs to be disconnected from the second connecting member 120 to achieve the separation of the power supply circuit and the cooling water circuit of the collimator 220 at the same time, thereby solving the problem that the complexity of the power supply circuit and the cooling water circuit makes it inconvenient to disassemble and assemble the collimator 220.

[0049] refer to Figures 3 to 5 In some embodiments, the first connector 110 is electrically connected to the wire and is charged, which has poor safety. In addition, the first connector 110 is installed on the device body 210, which will cause the device body 210 to be charged. Based on the existing charged problem, the water and electricity terminal 100 also includes an insulating shell 130. The insulating shell 130 is mounted on the first connector 110, especially the part of the first connector 110 located in the atmospheric environment, to prevent the user from contacting the charged part of the first connector 110 and causing electric shock. The insulating shell 130 is also used to separate the first connector 110 from the device body 210 to prevent the device body 210 from being charged, thereby improving safety.

[0050] refer to Figures 4 to 7 According to the magnetron sputtering device 200 of the second embodiment of the present application, the hydropower terminal 100 includes a first connecting member 110 and a second connecting member 120. Along the vertical direction, at least one of the first connecting member 110 and the second connecting member 120 abuts against the insulating structure 230. The insulating structure 230 is used to support the first connecting member 110 and / or the second connecting member 120, that is, the first connecting member 110 and / or the second connecting member 120 are indirectly installed on the equipment body 210 through the insulating structure 230. The insulating structure 230 limits the first connecting member 110 and / or the second connecting member 120 from being electrically connected to the equipment body 210, thereby maintaining the equipment body 210 in an unpowered state, further ensuring the safety of the user.

[0051] It should be noted that the second connecting member 120 is provided with a second channel 121 , and the second channel 121 is also provided with a liquid outlet for the coolant to flow out after absorbing heat, thereby realizing the circulation of the coolant.

[0052] refer to Figures 5 to 7 In other embodiments, a mounting hole for mounting the first connecting member 110 is opened on the device body 210, the second connecting member 120 is located in the vacuum chamber 212, the first connecting member 110 is passed through the mounting hole, one end of the first connecting member 110 is located in the vacuum chamber 212, and the other end is located in the atmospheric environment. The insulating structure 230 is made of a deformable material. When carrying the first connecting member 110 and / or the second connecting member 120, the insulating structure 230 can also provide a sealing effect to improve the sealing of the vacuum chamber 212.

[0053] refer to Figure 7 In some embodiments, the insulating structure 230 includes a first insulating member 231 and a second insulating member 232. In the horizontal direction, the first insulating member 231 abuts against the second insulating member 232. In the vertical direction, the first connecting member 110 abuts against the first insulating member 231, and the second connecting member 120 abuts against the second insulating member 232. Compared with the insulating structure 230 which is an integral structure, the insulating structure 230 is split into the first insulating member 231 and the second insulating member 232, which facilitates the disassembly and installation of the hydropower terminal 100.

[0054] refer to Figures 5 to 7 In other embodiments, the first insulating member 231 is made of a softer insulating material such as rubber and plastic, and the second insulating member 232 is made of a relatively harder material such as ceramic and glass, that is, the second insulating member 232 has a greater hardness than the first insulating member 231. In the horizontal direction, the first connecting member 110 is inserted into the mounting hole on the device body 210. The first insulating member 231 abuts against the first connecting member 110 to carry the first connecting member 110, and the first insulating member 231 can be deformed to seal the gap between the first connecting member 110 and the hole wall of the mounting hole. The second insulating member 232 abuts against the second connecting member 120, and the second connecting member 120 is connected to the collimator 220. The second insulating member 232 can provide a relatively stable support for the second connecting member 120, thereby improving the stability of the installation of the collimator 220.

[0055] refer to Figures 5 to 9In some embodiments, the collimator 220 and the second connecting member 120 are both located in the vacuum chamber 212. Compared with the atmospheric environment, in a vacuum environment, a smaller gap between the two conductive structures can prevent arc conduction. The collimator 220 and the second connecting member 120 are both charged during operation. In the horizontal direction, the shortest distance between the collimator 220 and the device body 210 is a1, and the shortest distance between the second connecting member 120 and the device body 210 is a2. 2mm≤a1, 2mm≤a2, and a1≤4mm and / or a2≤4mm. By limiting the shortest distance between the collimator 220 and the second connecting member 120 relative to the device body 210, the occurrence of arc conduction is effectively limited, ensuring that the device body 210 is not charged during operation, which is beneficial to protecting the safety of users.

[0056] It should be noted that a1 and / or a2 can also take any value in any interval of 2mm to 2.5mm, 2.5mm to 3mm, 3mm to 3.5mm and 3.5mm to 4mm. For example, a1 and / or a2 can be any value of 2.5mm, 3mm, 3.5mm. Limiting the values ​​of a1 and / or a2 effectively avoids the device body 210 from being charged and facilitates installation, making the magnetron sputtering device 200 more compact as a whole.

[0057] refer to Figure 5 and Figure 6 In some embodiments, the second connector 120 and the collimator 220 will generate heat and expand after being energized. The expanded second connector 120 or the collimator 220 will shorten the distance between the second connector 120 or the collimator 220 and the device body 210. When the distance between the second connector 120 or the collimator 220 and the device body 210 is too close, arc conduction will occur to make the device body 210 conductive. Therefore, on the basis of the second connector 120 and the collimator 220 maintaining a certain distance from the device body 210, the second insulating member 232 is further provided with a protrusion 2321. In the horizontal direction, the protrusion 2321 is located on the side of the second connector 120 close to the device body 210. When the second connector 120 is energized and expands, it will resist the protrusion 2321. The protrusion 2321 limits the shortest distance between the second connector 120 and the device body 210, further avoiding electrical conduction between the second connector 120 and the device body 210.

[0058] Specifically, along the horizontal direction, the second connecting member 120 abuts against the collimator 220 to limit the expansion of the collimator 220 along the horizontal direction. The protrusion 2321 is located on the side of the second connecting member 120 away from the collimator 220 to limit the expansion of the second connecting member 120 along the horizontal direction, thereby ensuring that the device body 210 is electrically insulated relative to the second connecting member 120 and the collimator 220.

[0059] It should be noted that, compared with completely covering the edges of the collimator 220 and the second connector 120 with insulating materials, electrical insulation is achieved by limiting the value of a and providing the protrusion 2321, which saves insulating materials and helps reduce electrical insulation costs.

[0060] refer to Figures 5 to 7 In other embodiments, the insulating structure 230 includes two second insulating members 232, each of which is provided with a protrusion 2321, the second connecting member 120 abuts against one of the second insulating members 232, and the protrusion 2321 is located on the side of the second connecting member 120 close to the device body 210 along the horizontal direction, the collimator 220 abuts against the other second insulating member 232, and the protrusion 2321 is located on the side of the collimator 220 close to the device body 210 along the horizontal direction, and when the second connecting member 120 and the collimator 220 are energized and expand, the two protrusions 2321 respectively limit the second connecting member 120 and the collimator 220 from contacting the device body 210, thereby ensuring that the device body 210 is in a non-powered state.

[0061] refer to Figures 5 to 9 In some embodiments, the uniformity of the expansion deformation of the second connector 120 when it is powered on is poor. If the second connector 120 expands locally to a large extent, local warping is likely to occur, affecting the installation stability of the second connector 120. In the horizontal direction, the distance between the second connector 120 and the raised portion 2321 is b, and 0.5mm≤b≤1mm. The preset distance b provides a buffer space for the expansion of the second connector 120, which is beneficial to ensuring the installation stability of the second connector 120. In addition, the preset distance b between the second connector 120 and the raised portion 2321 also facilitates the coordinated installation of the second connector 120 and the second insulating member 232.

[0062] Specifically, the collimator 220 is easily affected by tiny mechanical vibrations or displacements, and the second connecting member 120 is used to be directly connected to the collimator 220. The installation stability of the second connecting member 120 directly affects the stability of the collimator 220. Therefore, by presetting the distance b, it is convenient for the installation of the second connecting member 120 and can provide a buffer when the second connecting member 120 expands when powered on, effectively reducing the vibration and displacement of the second connecting member 120 caused by thermal expansion, thereby ensuring the stability of the second connecting member 120.

[0063] It should be noted that the value of b should not be too small. If it is too small, it will cause inconvenience in the installation between the second connecting member 120 and the second insulating member 232, and insufficient buffer distance will cause large local warping when the second connecting member 120 expands, thereby affecting the stability of the collimator 220. The value of b should not be too large. The space of the vacuum chamber 212 is limited. If it is too large, it will lead to a waste of installation space. Moreover, if the value of b is too large, it will be difficult to limit the expansion of the second connecting member 120 in the horizontal direction, affecting the installation stability of the second connecting member 120.

[0064] refer to Figure 7 In some embodiments, the collimator 220 is provided with a mounting groove 221, and the second connecting member 120 is located in the mounting groove 221. In the horizontal direction, the second connecting member 120 abuts against the collimator 220, mainly for limiting the movement of the collimator 220 in the horizontal direction, and can also play a role in limiting the expansion of the collimator 220 in the horizontal direction, and / or, in the vertical direction, the second connecting member 120 abuts against the collimator 220, mainly for supporting the collimator 220 to fix the collimator 220.

[0065] It should be noted that the second connecting member 120 may also only abut the collimator 220 in the horizontal direction, mainly used to limit the movement of the collimator 220 along the horizontal direction, and support the collimator 220. Compared with the support along the vertical direction, the bearing force is smaller. The second connecting member 120 may also only abut the collimator 220 in the vertical direction, mainly used to support the collimator 220.

[0066] refer to Figures 5 to 7 In some embodiments, the device body 210 includes at least two mounting parts 211, and each mounting part 211 together encloses a vacuum chamber 212. The collimator 220, the insulating structure 230 and the hydropower terminal 100 are all connected to the same mounting part. The adjacent mounting parts are detachably connected. Multiple mounting parts constitute the device body 210. When disassembling and maintaining, since the collimator 220 has a large volume, the mounting part connected to the collimator 220 can be separated from other mounting parts, thereby facilitating the disassembly of the collimator 220.

[0067] refer to Figures 5 to 7 In some embodiments, the device body 210 also includes a magnetron 240 and a substrate stage 250, which are respectively connected to different mounting parts, and the magnetron 240 is located above the collimator 220, and the substrate stage 250 is located below the collimator 220. A target material is installed on the magnetron 240, and a substrate 300 is carried on the substrate stage 250. The coating atoms and ions on the target material can be removed by bombarding the target. The coating atoms and ions are screened by the collimator 220 before contacting the substrate 300, which is beneficial to ensuring the coating quality.

[0068] Specifically, the equipment body 210 includes a first mounting member 2111, a second mounting member 2112 and a third mounting member 2113 which are stacked. The first mounting member 2111 is located above the second mounting member 2112, and the third mounting member 2113 is located below the second mounting member 2112. The magnetron 240 and the target material are mounted on the first mounting member 2111, the collimator 220 and the hydropower terminal 100 are mounted on the second mounting member 2112, and the substrate stage 250 is mounted on the third mounting member 2113. The first mounting member 2111 and the second mounting member 2112 are detachably connected, and the second mounting member 2112 and the third mounting member 2113 are detachably connected, which facilitates the disassembly and assembly of the collimator 220, the hydropower terminal 100, the magnetron 240 and the substrate stage 250.

[0069] The embodiments of the present application are described in detail above in conjunction with the accompanying drawings, but the present application is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the present application. In addition, the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

Claims

1. A hydropower terminal, characterized in that: include: A first connector, used for electrically connecting to the wire, wherein the first connector is provided with a first channel, and the first channel is used for connecting to the cooling pipeline; A second connecting member, provided with a second channel extending in a horizontal direction, the second connecting member is connected to the first connecting member, and the second channel is communicated with the first channel; The second connecting member is configured to be installed in the vacuum chamber and connected to the collimator to supply power to the second connecting member, and the second channel is configured to be distributed around the collimator to cool the collimator.

2. The hydropower terminal according to claim 1, characterized in that: The water and electricity terminal also includes an insulating shell, and the insulating shell is sleeved on the first connecting member.

3. A magnetron sputtering device, characterized in that: include: The device body is provided with a vacuum chamber; A collimator, located in the vacuum chamber; An insulating structure abutting against the device body; The hydropower terminal according to any one of claims 1 to 2 comprises a first connecting member and a second connecting member, and along the vertical direction, at least one of the first connecting member and the second connecting member abuts against the insulating structure, and the insulating structure is used to support the first connecting member and / or the second connecting member.

4. The magnetron sputtering device according to claim 3, characterized in that: The insulating structure includes a first insulating member and a second insulating member. Along the horizontal direction, the first insulating member abuts against the second insulating member. Along the vertical direction, the first connecting member abuts against the first insulating member, and the second connecting member abuts against the second insulating member.

5. The magnetron sputtering device according to claim 4, characterized in that: Along the horizontal direction, the shortest distance between the collimator and the device body is a1, the shortest distance between the second connecting member and the device body is a2, 2mm≤a1, 2mm≤a2, and a1≤4mm and / or a2≤4mm.

6. The magnetron sputtering device according to claim 4, characterized in that: The second insulating member is provided with a protrusion, and the protrusion is located on a side of the second connecting member close to the device body.

7. The magnetron sputtering device according to claim 6, characterized in that: Along the horizontal direction, the distance between the second connecting member and the protruding portion is b, and 0.5 mm ≤ b ≤ 1 mm.

8. The magnetron sputtering device according to claim 3, characterized in that: The collimator is provided with a mounting groove, the second connecting member is located in the mounting groove, and the second connecting member abuts against the collimator along the horizontal direction and / or along the vertical direction.

9. The magnetron sputtering device according to claim 3, characterized in that: The equipment body comprises at least two mounting parts, each of which together encloses the vacuum chamber, the collimator, the insulating structure and the water and electricity terminal are all connected to the same mounting part, and two adjacent mounting parts are detachably connected.

10. The magnetron sputtering device according to claim 9, characterized in that: The device body also includes a magnetron device and a substrate stage, wherein the magnetron device and the substrate stage are respectively connected to different mounting parts, and the magnetron device is located above the collimator, and the substrate stage is located below the collimator.

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