Electronic-grade silane liquid storage tank

Abstract

The utility model relates to an electronic-grade silane liquid storage tank which comprises a tank body, a refrigeration jacket is arranged outside the tank body, the top of the tank body is connected with a feeding pipe, the refrigeration jacket is provided with a refrigerant inlet and a refrigerant outlet, the refrigerant outlet is connected with a refrigerant discharging pipe, and the refrigerant discharging pipe is connected with an electronic-grade silane liquid storage tank. And the refrigerant discharging pipe is provided with a coil pipe section which is spirally wound outside the feeding pipe. The electronic-grade silane liquid storage tank is simple in structure, safe and reliable, a condenser at the top of the tank is omitted, and dangerous accidents caused by overpressure of liquid silane in the tank when the condenser is in mechanical failure are avoided; gaseous silane is precooled, and thermal shock to the wall of the storage tank is reduced; and non-condensable gas impurities in the storage tank can be discharged by controlling the evaporation capacity of the liquid silane in the storage tank.

Description

Technical Field

[0001] The utility model relates to the field of silane storage tanks, in particular to an electronic-grade silane liquid storage tank. Background Art

[0002] At present, the industrial storage of silane mainly uses a condenser to condense silane into liquid through heat exchange, and then passes it into an insulated storage tank for storage. This method requires a separate tank top condenser to continuously exchange heat to achieve a cold and hot balance. If the condenser fails, it is very easy to cause the liquid silane to evaporate rapidly, causing the risk of overpressure accidents. Insulated storage tanks usually rely on setting up interlayers, evacuating the interlayers, and filling them with pearlescent sand to achieve insulation.

[0003] The electronic grade silane storage tank will be filled with nitrogen when it is transported to the site after machining to minimize the pollution entering the tank during transportation. After installation, the nitrogen needs to be pumped out. If it is not completely pumped out, it will easily affect the quality of the electronic grade silane. When silane enters the storage tank, it may also carry some non-condensable gas into the storage tank, causing quality problems such as degradation. Utility Model Content

[0004] In view of this, the purpose of the utility model is to provide a simple, safe and reliable electronic-grade silane liquid storage tank, which reduces the tank top condenser, avoids dangerous accidents caused by overpressure of liquid silane in the tank when the condenser mechanically fails, realizes pre-cooling of gaseous silane, and reduces thermal shock to the tank wall.

[0005] The utility model is implemented by the following scheme: an electronic grade silane liquid storage tank, comprising a tank body, a refrigeration jacket is arranged on the outside of the tank body, a feed pipe is connected to the top of the tank body, the refrigeration jacket is provided with a refrigerant inlet and a refrigerant outlet, the refrigerant outlet is connected to a refrigerant discharge pipe, and the refrigerant discharge pipe has a coil section spirally wound on the outside of the feed pipe.

[0006] Furthermore, the refrigeration jacket and the outside of the coil section are both provided with a heat insulation layer.

[0007] Furthermore, a pressure relief port is provided on the top of the tank body, and a discharge port and supporting feet are provided on the bottom of the tank body.

[0008] Furthermore, the discharge end of the refrigerant discharge pipe is connected to the inlet end of a compressor, and the outlet end of the compressor is connected to the refrigerant inlet of the refrigeration jacket via a refrigerant return pipe. The refrigerant inlet is located on one side of the tank body, and the refrigerant outlet is located at the top of the tank body near the feed pipe.

[0009] Compared with the prior art, the utility model has the following beneficial effects: the electronic-grade silane liquid storage tank of the utility model has a simple structure, is safe and reliable, reduces the tank top condenser, and avoids dangerous accidents caused by overpressure of liquid silane in the tank when the condenser mechanically fails; realizes precooling of gaseous silane and reduces thermal shock to the tank wall; and by controlling the evaporation amount of liquid silane in the tank, non-condensable gas impurities inside the tank can be discharged.

[0010] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below through specific embodiments and related drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 This is a cross-sectional view of an electronic-grade silane liquid storage tank according to an embodiment of the utility model;

[0012] Explanation of the numbers in the figure: 1-tank body, 2-refrigeration jacket, 3-feed pipe, 4-refrigerant inlet, 5-refrigerant outlet, 6-refrigerant discharge pipe, 7-coil section, 8-insulation layer, 9-pressure relief port, 10-discharge port. DETAILED DESCRIPTION

[0013] It should be noted that the following detailed descriptions are exemplary and are intended to provide further explanation of the present application. Unless otherwise specified, all technical and scientific terms used herein have the same meanings as those commonly understood by those skilled in the art to which the present application belongs.

[0014] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0015] like Figure 1As shown, an electronic-grade silane liquid storage tank comprises a tank body 1, a refrigeration jacket 2 is provided on the outside of the tank body 1, a feed pipe 3 is connected to the top of the tank body 1, the refrigeration jacket 2 is provided with a refrigerant inlet 4 and a refrigerant outlet 5, the refrigerant outlet is connected to a refrigerant discharge pipe 6, and the refrigerant discharge pipe 6 has a coil section 7 spirally wound on the outside of the feed pipe. The electronic-grade silane liquid storage tank of the utility model reduces the tank top condenser, avoiding the dangerous accident of overpressure of liquid silane in the tank when the condenser mechanical failure occurs; a refrigeration jacket is added to the outside of the storage tank, and a cold source is provided by a refrigerant, and the refrigerant can be propylene, ethylene, liquid nitrogen, etc. At the same time, the residual cold capacity of the refrigerant outlet is used to form a coil at the feed pipe to pre-cool the gaseous silane; by controlling the evaporation amount of the liquid silane in the storage tank, the non-condensable gas impurities inside the storage tank can be discharged.

[0016] In this embodiment, the refrigeration jacket and the outside of the coil section are both provided with a heat insulation layer 8.

[0017] In this embodiment, a pressure relief port 9 is provided on the top of the tank body, and the liquid silane can be partially vaporized by adjusting the refrigerant temperature to -30 to -35°C, and the non-condensable gas impurities are discharged through the pressure relief port to the flare or tail gas treatment tower for treatment. After the test is qualified, the refrigerant temperature is adjusted back, and the silane continues to condense, thereby achieving the impurity removal operation. A discharge port 10 and a support foot are provided at the bottom of the tank body.

[0018] In this embodiment, the discharge end of the refrigerant discharge pipe is connected to the inlet end of a compressor (not shown in the figure), and the outlet end of the compressor is connected to the refrigerant inlet of the refrigeration jacket through a refrigerant return pipe. The refrigerant inlet is located on one side of the tank body, and the refrigerant outlet is located at the top of the tank body near the feed pipe.

[0019] Valves are installed on the feed pipe, refrigerant discharge pipe and refrigerant return pipe. If the equipment fails, the feed pipe can be cut off, and gaseous silane will no longer be fed. At the same time, the refrigerant circulation will be cut off, and the refrigerant will remain in the jacket to continuously provide a cold source and reduce the evaporation of silane.

[0020] The use process of the electronic grade silane liquid storage tank:

[0021] 1. When the storage tank is in use, the refrigerant first enters the refrigeration jacket to lower the overall temperature of the storage tank and stabilize the temperature at -35 to -45°C. When the temperature reaches the requirement, open the feed tank;

[0022] 2. The gaseous silane is pre-cooled in the pre-cooling section, and the refrigerant exchanges heat with the gaseous silane. The vaporized refrigerant enters the compressor through the refrigerant discharge pipe for recycling. The silane cooled in the pre-cooling section can reduce the thermal shock to the tank wall.

[0023] 3. The pre-cooled silane enters the storage tank and exchanges heat with the refrigerant again in the storage tank. At this time, the silane is completely condensed into liquid for storage;

[0024] 4. If the components in the tank fail to meet the test requirements, the refrigerant temperature can be adjusted to -30 to -35°C to partially vaporize the liquid silane, and the non-condensable gas impurities can be discharged through the pressure relief port to the flare or tail gas treatment tower for treatment. After the test is qualified, the refrigerant temperature can be adjusted back, and the silane can continue to condense to achieve the impurity removal operation;

[0025] 5. When liquid silane is needed, it is discharged from the pipe at the bottom of the tank to the process equipment area.

[0026] Unless otherwise stated, any technical solution disclosed in the above utility model, if it discloses a numerical range, then the disclosed numerical range is a preferred numerical range. Any technician in the field should understand that the preferred numerical range is only a numerical value with a more obvious technical effect or representative value among many feasible numerical values. Since there are too many numerical values ​​to be exhaustive, the utility model discloses only some numerical values ​​to illustrate the technical solution of the utility model, and the numerical values ​​listed above should not constitute a limitation on the scope of protection of the utility model.

[0027] If the present invention discloses or involves components or structures that are fixedly connected to each other, then, unless otherwise stated, the fixed connection can be understood as: a detachable fixed connection (for example, connection using bolts or screws), and can also be understood as: a non-detachable fixed connection (for example, riveting, welding). Of course, the mutual fixed connection can also be replaced by an integrated structure (for example, manufactured by one-piece molding using a casting process) (except when it is obviously impossible to use an one-piece molding process).

[0028] In addition, unless otherwise stated, the terms used to indicate positional relationships or shapes in any of the technical solutions disclosed in the above utility model include states or shapes that are approximate, similar or close thereto.

[0029] Any component provided by the utility model can be assembled from multiple separate components, or can be a separate component manufactured by an integrated forming process.

[0030] The above is only the preferred embodiment of the utility model, and does not limit the utility model in other forms. Any technician familiar with the profession may use the technical content disclosed above to change or modify it into an equivalent embodiment with equivalent changes. However, any simple modification, equivalent change and modification made to the above embodiment based on the technical essence of the utility model without departing from the technical solution of the utility model still belongs to the protection scope of the technical solution of the utility model.

Claims

1. An electronic grade silane liquid storage tank, characterized in that: It comprises a tank body, a refrigeration jacket is arranged outside the tank body, a feed pipe is connected to the top of the tank body, the refrigeration jacket is provided with a refrigerant inlet and a refrigerant outlet, the refrigerant outlet is connected to a refrigerant discharge pipe, and the refrigerant discharge pipe has a coil section spirally wound outside the feed pipe.

2. The electronic grade silane liquid storage tank according to claim 1, characterized in that: The refrigeration jacket and the coil section are both provided with a heat insulation layer outside.

3. The electronic grade silane liquid storage tank according to claim 1, characterized in that: The top of the tank body is provided with a pressure relief port, and the bottom of the tank body is provided with a discharge port and supporting feet.

4. The electronic grade silane liquid storage tank according to claim 1, characterized in that: The discharge end of the refrigerant discharge pipe is connected to the inlet end of a compressor, and the outlet end of the compressor is connected to the refrigerant inlet of the refrigeration jacket through a refrigerant return pipe. The refrigerant inlet is located on one side of the tank body, and the refrigerant outlet is located on the top of the tank body near the feed pipe.

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