Outside air treatment system with waste heat recovery

By designing an external gas treatment system with waste heat recovery and using the waste heat discharged from the incineration equipment for heat recovery, the problem of high energy consumption of external air conditioners in the semiconductor manufacturing process is solved, and the effect of energy saving and carbon reduction and energy consumption is achieved.

CN222837063UActive Publication Date: 2025-05-06DESICCANT TECH CORP +1
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Patent Information

Application Number
CN202421493420.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Priority Date
2024-05-10
Filing Date
2024-06-27
Publication Date
2025-05-06
Estimated Expiration
2034-06-27

AI Technical Summary

Technical Problem

During semiconductor manufacturing, the high energy consumption problem of external air conditioning boxes leads to an increase in energy consumption and carbon emissions, and a solution that can effectively reduce energy consumption is needed.

Method used

An external gas treatment system with waste heat recovery is designed. The waste heat discharged from the incineration equipment is provided to the dehumidification wheel of the external gas treatment system. The waste heat is recovered by a heat exchanger and used for the dehumidification process, and then transported to the required place through the air duct to reduce the load of the external air conditioner box.

Benefits of technology

It has achieved heat recovery applications and energy conservation and carbon reduction, reduced energy expenditure, and increased overall practicality and environmental benefits.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The utility model provides an external gas treatment system with a waste heat recovery function, which mainly adopts the combined design of external gas, an external gas air conditioning box, an air pipe, an external gas treatment system and incineration equipment, so that waste heat discharged by the incineration equipment can be supplied to a dehumidification rotating wheel of the external gas treatment system for use, and latent heat of the external gas is removed; and then the air is conveyed to a required place through the air pipe. Therefore, the load of the external air air conditioning box can be greatly reduced, and meanwhile, the air conditioning box has the effects of heat recovery and application, energy conservation and carbon reduction, and can also achieve the effect of reducing energy cost.
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Description

Technical Field

[0001] The utility model relates to an external air treatment system with waste heat recovery, and in particular to a system with heat recovery application and energy saving and carbon reduction efficiency, so that it is suitable for places or factories related to the semiconductor field, electronic technology field, biotechnology field, food processing field, precision instrument manufacturing field, etc. Background Art

[0002] Semiconductor manufacturing requires four major exhaust systems, including acid exhaust, alkali exhaust, volatile organic exhaust, and general exhaust. Therefore, a large amount of outside air must be added to meet the exhaust needs.

[0003] The semiconductor industry's factory system's outdoor air conditioning unit (MAU) is an energy-consuming but necessary device. The energy consumption of an outdoor air conditioning unit in an advanced process plant may be as high as 10,000 refrigeration tons.

[0004] In recent years, in order to achieve the goal of energy conservation and carbon reduction, the semiconductor industry has actively sought improvement solutions for high-energy-consuming equipment or facilities in the factory to reduce energy consumption. Among them, the main equipment to be improved is the outdoor air conditioning unit (MAU).

[0005] Therefore, in view of the above-mentioned deficiencies, the applicant of the present utility model hopes to propose an external air treatment system with waste heat recovery that has the functions of heat recovery application and energy saving and carbon reduction, so that users can easily operate and assemble it. The applicant has devoted himself to research and design to provide user convenience, which is the motivation for the applicant of the present utility model to develop the utility model. Utility Model Content

[0006] One aspect of the utility model provides an outside air processing system with waste heat recovery, characterized in that it comprises: an outside air (Outside Air), the outside air (Outside Air) contains at least one gas or a combination; an outside air conditioning box (MAU), the outside air conditioning box (MAU) is for the outside air (Outside Air) to enter; an air duct, the air duct is connected to the outside air conditioning box;

[0007] An outside air treatment system, which is connected to the air duct and is provided with a dehumidification wheel, a first heat exchanger, a second heat exchanger and a water tank. The dehumidification wheel has a treatment area and a regeneration area. The treatment area performs dehumidification adsorption. The first heat exchanger is connected to the regeneration area and provides a heat source to the regeneration area for desorption. The water tank is connected to the first heat exchanger and the second heat exchanger. The water tank outputs water to transfer the heat of the second heat exchanger to the first heat exchanger through the water in the water tank. And an incineration device, which discharges a combustion exhaust gas having a temperature and passing through the second heat exchanger.

[0008] The main purpose of the utility model is to provide an outside air treatment system with waste heat recovery, which is mainly through the combined design of an outside air (Outside Air), an outside air conditioning unit (MAU), an air duct, an outside air treatment system and an incineration device, so that the waste heat discharged by the incineration device can be provided to the dehumidification wheel of the outside air treatment system to remove the latent heat of the outside air (Outside Air), and then transported to the required place through the air duct. Therefore, the load of the outside air conditioning unit (MAU) can be greatly reduced. At the same time, it has the efficiency of heat recovery application and energy saving and carbon reduction, and can also achieve the effect of reducing energy costs, thereby increasing the overall practicality.

[0009] According to an embodiment of the present invention, the combustion exhaust gas is further transported to a chimney.

[0010] According to an embodiment of the present invention, the water tank is further connected to a pump to push the water in the water tank.

[0011] According to an embodiment of the utility model, the water tank is further provided with a water valve, and the water valve controls the water entering the water tank.

[0012] According to an embodiment of the present invention, the first heat exchanger further allows a gas to enter for heat exchange.

[0013] According to an embodiment of the present invention, the dehumidification wheel is further provided with a bypass device for bypassing the dehumidification wheel.

[0014] According to an embodiment of the utility model, the bypass device is further any one of a pipeline and a layer plate. Another purpose of the utility model is to provide an external air treatment system with waste heat recovery, wherein the external air treatment system is provided with a box body, and the dehumidification wheel is arranged in the box body, and the dehumidification wheel has a treatment area and a regeneration area, wherein the front group of the dehumidification wheel is provided with at least one first filter device, at least one first temperature device, at least one water washing device and at least one second temperature device, so that the external air (Outside Air) can first pass through the above-mentioned equipment for dust removal, filtration and control of its temperature and humidity, and then be transported to the treatment area of ​​the dehumidification wheel for dehumidification and adsorption, and a fan is provided in the box body, and the fan is arranged at any one of the front and rear positions of the dehumidification wheel, so as to be able to push and pull the external air (Outside Air) to move forward, so that it has the efficiency of generating fresh air with constant temperature and humidity, thereby increasing the overall usability. According to an embodiment of the present invention, the first temperature device is further any one or a combination of a precooling coil, a precooler, a preheating coil, and a preheater.

[0015] According to an embodiment of the present invention, the second temperature device is further any one or a combination of a recooling coil, a recooler, a reheating coil, and a reheater.

[0016] According to an embodiment of the utility model, at least one second filter device is further provided in the box body, and the at least one second filter device is located at the rear section of the box body.

[0017] According to an embodiment of the utility model, the outdoor air conditioning box is further provided with a box body, in which at least one first filter device, at least one first temperature device, at least one water washing device, at least one second temperature device and at least one second filter device are assembled.

[0018] According to an embodiment of the present invention, the first temperature device is further any one or a combination of a precooling coil, a precooler, a preheating coil, and a preheater.

[0019] According to an embodiment of the present invention, the second temperature device is further any one or a combination of a recooling coil, a recooler, a reheating coil, and a reheater.

[0020] According to an embodiment of the present invention, the incineration equipment is further any one of a direct-fired incinerator, a catalytic incinerator or a thermal storage incinerator.

[0021] According to an embodiment of the present invention, the incineration equipment is further assembled with either a double-rotor volatile organic gas treatment system or a single-rotor volatile organic gas treatment system.

[0022] Another object of the utility model is to provide an external air treatment system with waste heat recovery, which is connected to at least one clean room, at least one ward, at least one food processing area, at least one semiconductor process plant, and at least one electronic process plant through the air duct system, so as to provide the above-mentioned places with the need to supplement a large amount of external air, and drive the air flow circulation in the above-mentioned places to take away dust and heat, achieve the required cleanliness and ventilation volume, and achieve the purpose of replacing the original air, thereby increasing the overall operability.

[0023] In order to further understand the characteristics, features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. The drawings are only provided for reference and explanation and are not intended to limit the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 Schematic diagram of the main structure of the external air processing system of the embodiment.

[0025] Figure 2 2 is a schematic diagram of the structure of an external air processing system according to another embodiment.

[0026] In the above drawings, the meanings of the reference numerals are as follows:

[0027] 10. Outside Air;

[0028] 20. Outdoor air conditioning unit (MAU);

[0029] 21. Box body;

[0030] 211. External air enters the mouth;

[0031] 22. The first filter device;

[0032] 23. First temperature equipment;

[0033] 231, pre-cooling coil;

[0034] 232, preheating coil;

[0035] 233. Precooler;

[0036] 234. Preheater;

[0037] 24. Water washing equipment;

[0038] 25. Second temperature equipment;

[0039] 251, re-cooling coil;

[0040] 252. Reheat coil;

[0041] 253, recooler;

[0042] 254. Reheater;

[0043] 26. Second filter device;

[0044] 27. Fan;

[0045] 30. Air duct;

[0046] 31. Clean room;

[0047] 40. External air treatment system;

[0048] 41. Box body;

[0049] 411. External air enters the mouth;

[0050] 42. The first filter device;

[0051] 43. First temperature device;

[0052] 431, pre-cooling coil;

[0053] 432, preheating coil;

[0054] 433. Precooler;

[0055] 434, preheater;

[0056] 44. Water washing equipment;

[0057] 45. Second temperature equipment;

[0058] 451, re-cooling coil;

[0059] 453, recooler;

[0060] 46. ​​Second filter device;

[0061] 47. Fan;

[0062] 51. Dehumidification wheel;

[0063] 511. Processing area;

[0064] 512, regeneration zone;

[0065] 52. A first heat exchanger;

[0066] 53. A second heat exchanger;

[0067] 54. Water tank;

[0068] 541, water valve;

[0069] 55. Pump;

[0070] 60. Incineration equipment;

[0071] 61. Combustion exhaust;

[0072] 62. Heat exchanger;

[0073] 70. Chimney;

[0074] 80. Bypass equipment. DETAILED DESCRIPTION

[0075] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0076] See also Figure 1~Figure 2 , is a schematic diagram of an embodiment of the utility model. The best implementation of the external air treatment system with waste heat recovery of the utility model is suitable for places or factories related to the semiconductor field, electronic technology field, biotechnology field, food processing field, precision instrument manufacturing field, etc., mainly with heat recovery application and energy saving and carbon reduction efficiency.

[0077] The outside air treatment system with waste heat recovery of the present invention is mainly designed by combining an outside air (Outside Air) 10, an outside air conditioning unit (MAU) 20, an air duct 30, an outside air treatment system 40 and an incineration device 60 (such as Figure 1 and Figure 2 As shown), wherein the outside air (Outside Air) 10 contains at least one gas or combination, mainly a mixture of 78.1% nitrogen, 21% oxygen, 0.9% argon and other impurities, and the outside air (Outside Air) 10 is commonly known as air. In addition, the incineration equipment 60 is any one of a direct-fired incinerator (TO), a catalytic incinerator (not shown) or a regenerative thermal incinerator (RTO) (not shown). When the incineration equipment 60 is a direct-fired incinerator (TO), the direct-fired incinerator (TO) is provided with any one of two heat exchangers 62, three heat exchangers 62 or four heat exchangers 62, and the incineration equipment 60 is combined with any one of a double-rotor volatile organic gas (VOC) treatment system (not shown) or a single-rotor volatile organic gas (VOC) treatment system (not shown), and the incineration equipment 60 discharges a combustion exhaust gas 61 (such as Figure 1 and Figure 2 As shown in FIG. 1 ), the combustion exhaust gas 61 has a temperature that is more than 150° C.

[0078] The MAU 20 is provided with a housing 21, wherein the housing 21 has an outside air inlet 211, and the housing 21 is provided with at least one first filter device 22, at least one first temperature device 23, at least one washing device 24, at least one second temperature device 25, and at least one second filter device 26 (such as Figure 1 and Figure 2 As shown), wherein the at least one first filter device 22 is any one or a combination of a primary filter (Pre Filter) or a medium filter (Medium efficiency filter), and the primary filter (Pre Filter) is mostly in plate form, suitable for primary filtration, mainly used to filter dust particles above 5μm, and the material is mainly non-woven fabric, nylon mesh, activated carbon filter material, and metal mesh. In addition, the medium filter (Medium efficiency filter) is mostly in bag form, widely used in medium filtration, mainly used to filter dust particles above 1-5um, and the material is mainly synthetic fiber and non-woven fabric. In addition, the at least one first temperature device 23 is any one or a combination of a precooling coil 231 and a preheating coil 232 (such as Figure 2 As shown in FIG. 1 , the precooling coil 231 is fed with either cooling water or ice water to cool the hot air in the outside air 10 into liquid, thereby effectively reducing the air temperature. The preheating coil 232 is fed with either hot water or steam to transfer heat energy to the outside air 10 to increase its temperature. In addition, the at least one first temperature device 23 may also be any one or a combination of a precooler 233 and a preheater 234 (such as Figure 1 As shown), the precooler 233 is any one of a shell and tube cooler, a fin tube cooler or a plate heat exchanger cooler, and the preheater 234 is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater.

[0079] In addition, the at least one water washing device 24 is a washing humidifier, which is mainly composed of at least one pressure pump, at least one nozzle, at least one water supply valve, at least one drain valve, and at least one pipeline (not shown). When the outside air 10 passes through the washing humidifier, water molecules will fully absorb the heat in the air and vaporize and evaporate, so that the humidity of the outside air 10 increases to form humidified air. In addition, the at least one second temperature device 25 is any one or a combination of a re-cooling coil 251 and a re-heating coil 252 (such as Figure 2As shown in FIG. 1 ), the above-mentioned recooling coil 251 is supplied with either cooling water or ice water to cool the hot air in the outside air 10 into liquid, thereby effectively reducing the air temperature. The above-mentioned reheating coil 252 is supplied with either hot water or steam to transfer heat energy to the outside air 10 to increase its temperature. In addition, the at least one second temperature device 25 can also be any one or a combination of the recooler 253 and the reheater 254 (such as Figure 1 As shown in the figure, the recooler 253 is any one of a shell and tube cooler, a fin tube cooler or a plate heat exchanger cooler, and the reheater 254 is any one of an electric heater, a gas heater, a heat medium oil heater, and a hot water heater. The at least one second filter device 26 is any one or a combination of a high efficiency filter (High Efficiency Particulate Air Filter, HEPA) or an ultra low penetration filter (Ultra Low Penetration Air Filter, ULPA), and the high efficiency filter (High Efficiency Particulate Air Filter, HEPA) is suitable for terminal filtration, and the efficiency for 0.1 micron and 0.3 micron is 99.998%, and the removal efficiency of particles with a diameter of 0.3 micron (1 / 200 of the diameter of a hair) can reach more than 99.7%. It is the most effective filtering medium for pollutants such as smoke, dust and bacteria, and the material is mainly ultra-fine glass fiber paper or composite filter paper. The Ultra Low Penetration Air Filter (ULPA) is mainly used to remove particles larger than 0.12µm (120 nanometers). The filtration effect is about DOP99.995% or more, and the material is mainly special ultra-fine glass fiber paper.

[0080] The housing 21 of the MAU 20 is provided with a fan 27, which is arranged in front of the at least one second filter device 26 (such as Figure 1 and Figure 2 As shown in FIG. 1 ), the main function is to provide power so that the outside air 10 can be processed by the at least one first filter device 22, the at least one first temperature device 23, the at least one water washing device 24, the at least one second temperature device 25 and the at least one second filter device 26 in sequence to ensure the efficient operation of the outside air conditioning unit (MAU) 10. In addition, the outside air conditioning unit (MAU) 10 is connected to the air duct 30 so that the gas sent out by the outside air conditioning unit (MAU) 20 can be transported to the desired place (such as Figure 1 and Figure 2As shown), the air duct 30 is connected to any one of at least one clean room 31, at least one ward (not shown), at least one food processing area (not shown), at least one semiconductor process plant (not shown), and at least one electronic process plant (not shown), so as to provide the above-mentioned places with a large amount of the outside air (Outside Air) 10 required to be supplemented, and drive the air circulation in the above-mentioned places to take away dust and heat, achieve the required cleanliness and ventilation volume, and achieve the purpose of replacing the original air.

[0081] In addition, the air duct 30 of the utility model can be connected to an external air processing system 40 (such as Figure 1 and Figure 2 As shown in FIG. 1 ), the air duct 30 has a double outside air processing gas, or a single outside air processing gas. The outside air processing system 40 is provided with a box 41, and the box 41 is provided with an outside air inlet 411 for the outside air 10 to enter, and the outside air processing system 40 is connected to the air duct 30, so that the gas sent out by the outside air processing system 40 is transported to a desired place (such as a room) through the air duct 30. Figure 1 and Figure 2 As shown), the air duct 30 is connected to any one of at least one clean room 31, at least one ward (not shown), at least one food processing area (not shown), at least one semiconductor process plant (not shown), and at least one electronic process plant (not shown).

[0082] The external air processing system 40 includes a dehumidification wheel 51, a first heat exchanger 52, a second heat exchanger 53 and a water tank 54 (such as Figure 1 and Figure 2 As shown), the dehumidification wheel 51 is arranged in the box body 41, and the dehumidification wheel 51 is a special paper wheel with a honeycomb shape carrying a desiccant. Since the honeycomb aperture is only 1.5 mm, 1m 3 The moisture absorption area of ​​the wheel paper core is up to 3000m 2 . The air flows through the honeycomb pores in a boundary laminar flow state, and the wet exchange effect is good, so the dehumidification capacity is relatively strong. The dehumidification wheel 51 has a treatment area 511 and a regeneration area 512. The first heat exchanger 52 is connected to the regeneration area 512 and provides a heat source to the regeneration area 512 for desorption. The first heat exchanger 52 allows a gas to enter, and the gas is either the outside air 10 or the gas treated by the treatment area (not shown) for heat exchange. The water tank 54 is connected to the first heat exchanger 52 and the second heat exchanger 53 (such as Figure 1 and Figure 2As shown in FIG. 1 , the water tank 54 outputs water, wherein the water is any one of filtered water, tap water, cooling water, and ice water, so that the heat of the second heat exchanger 53 is transferred to the first heat exchanger 52 through the water in the water tank 54, wherein the water tank 54 is connected to a pump 55 to push the water in the water tank 54, and the water tank 54 is provided with a water valve 541, and the water valve 541 controls the water entering the water tank 54, so that the water tank 54 has the effect of replenishing the water source. The first heat exchanger 52 and the second heat exchanger 53 are liquid-to-gas heat exchangers.

[0083] In addition, the incineration equipment 60 discharges a combustion exhaust gas 61, the combustion exhaust gas 61 has a temperature of more than 150° C., and the combustion exhaust gas 61 passes through the second heat exchanger 53 (such as Figure 1 and Figure 2 As shown in FIG. 5 ), the water in the second heat exchanger 53 and the gas are heat exchanged, so that the water in the water tank 54 can transfer heat to the first heat exchanger 52 for use, and the water in the first heat exchanger 52 and the gas are heat exchanged again to transport the gas with the heat source to the regeneration zone 512, so that the regeneration zone 512 can be thermally desorbed, and the gas after thermal desorption is discharged to the outside, which is either the sky or the chimney 70. The combustion exhaust gas 61 that has undergone heat exchange in the second heat exchanger 53 is transported to a chimney 70 for discharge.

[0084] In addition, the front group of the dehumidification wheel 51 is provided with at least one first filter device 42, at least one first temperature device 43, at least one water washing device 44 and at least one second temperature device 45, and the above-mentioned devices are arranged in the box body 41, wherein the at least one first filter device 42 is any one or a combination of a primary filter (Pre Filter) or a medium filter (Medium efficiency filter), and the primary filter (Pre Filter) is mostly in the form of a plate, suitable for primary filtration, mainly used for filtering dust particles above 5μm, and the material is mainly non-woven fabric, nylon mesh, activated carbon filter material, and metal mesh. In addition, the medium filter (Medium efficiency filter) is mostly in the form of a bag, which is widely used in intermediate filtration, mainly used for filtering dust particles above 1-5um, and the material is mainly synthetic fiber and non-woven fabric. In addition, the at least one first temperature device 43 is any one or a combination of a pre-cooling coil 431 and a pre-heating coil 432 (such as Figure 2As shown in FIG. 1 , the precooling coil 431 is fed with either cooling water or ice water to cool the hot air in the outside air 10 into liquid, thereby effectively reducing the air temperature. The preheating coil 432 is fed with either hot water or steam to transfer heat energy to the outside air 10 to increase its temperature. In addition, the at least one first temperature device 43 may also be any one or a combination of a precooler 433 and a preheater 434 (such as Figure 1 As shown), the precooler 433 is any one of a shell and tube cooler, a fin tube cooler or a plate heat exchanger cooler, and the preheater 434 is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater.

[0085] In addition, the at least one water washing device 44 is a washing humidifier, which is mainly composed of at least one pressure pump, at least one nozzle, at least one water supply valve, at least one drain valve, and at least one pipeline (not shown). When the outside air 10 passes through the washing humidifier, water molecules will fully absorb the heat in the air and vaporize and evaporate, so that the humidity of the outside air 10 increases to form humidified air. In addition, the at least one second temperature device 45 is any one or a combination of a re-cooling coil 451 and a reheating coil (not shown). Figure 2 As shown in the figure), the above-mentioned re-cooling coil 451 is supplied with either cooling water or ice water to cool the hot air in the outside air 10 into liquid, thereby effectively reducing the air temperature. And the above-mentioned reheating coil (not shown) is supplied with either hot water or steam to transfer heat energy to the outside air 10 to increase its temperature. In addition, the at least one second temperature device 45 can also be any one or a combination of the recooler 453 and the reheater (not shown) (such as Figure 1 As shown), the recooler 453 is any one of a shell and tube cooler, a fin-tube cooler or a plate heat exchanger cooler, and the reheater (not shown) is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater.

[0086] The outside air 10 treated by the at least one first filter device 42, the at least one first temperature device 43, the at least one water washing device 44 and the at least one second temperature device 45 is sent to the treatment area 511 of the dehumidification wheel 51 for dehumidification adsorption (such as Figure 1 and Figure 2As shown in the figure, 3 / 4 of the area of ​​the dehumidification wheel 51 is the processing area 511. When the outside air 10 to be processed passes through the processing area 511, the moisture in the outside air 10 is absorbed by the desiccant attached to the special fiber to become low-humidity dry air, and is blown out from the other end of the processing area 511, so that the absolute humidity of the outside air 10 after passing through the at least one washing device 44 can be adjusted to meet the requirements through condensation dehumidification.

[0087] The first heat exchanger 52 provides a heat source to the regeneration zone 512 (such as Figure 1 and Figure 2 As shown in FIG. 5 ), the temperature of the heat source exceeds 100°C and enters the remaining 1 / 4 of the dehumidification wheel 51, that is, the regeneration zone 512, in the opposite direction. The heat source slowly enters the regeneration zone 512 to increase the temperature of the desiccant attached to the special fiber, so that the moisture contained in the desiccant attached to the special fiber is vaporized and taken out of the desiccant wheel 51, so that the desiccant attached to the special fiber can restore the moisture absorption function, that is, the desiccant is regenerated. In addition, when the desiccant wheel 51 rotates slowly, the desiccant attached to the special fiber of the desiccant wheel 51 undergoes moisture absorption and regeneration processes simultaneously, so the desiccant wheel 51 can ensure continuous and stable output of dry air.

[0088] In addition, at least one second filter device 46 is disposed in the box 41 of the external air treatment system 40. The at least one second filter device 46 is located at the rear section of the box 41 (eg Figure 1 and Figure 2As shown in the figure, the outside air 10 after dehumidification and adsorption in the treatment area 511 of the dehumidification wheel 51 enters the at least one second filter device 46 for filtration, and the at least one second filter device 46 is any one or a combination of a high-level filter (High Efficiency Particulate Air Filter, HEPA) or an ultra-low penetration filter (Ultra Low Penetration Air Filter, ULPA), and the high-level filter (High Efficiency Particulate Air Filter, HEPA) is suitable for terminal filtration, and its efficiency for 0.1 micron and 0.3 micron is 99.998%, and the removal efficiency of particles with a diameter of 0.3 micron (1 / 200 of the diameter of a hair) or more can reach more than 99.7%. It is the most effective filtering medium for pollutants such as smoke, dust and bacteria, and its material is mainly ultra-fine glass fiber paper or composite filter paper. The Ultra Low Penetration Air Filter (ULPA) is mainly used to remove particles larger than 0.12µm (120 nanometers). The filtration effect is about DOP99.995% or more, and the material is mainly special ultra-fine glass fiber paper.

[0089] In addition, a fan 47 is disposed in the housing 41 of the external air treatment system 40. The fan 47 is disposed in front of the dehumidification wheel 51 (eg, Figure 2 As shown), the dehumidification wheel 51 (as shown Figure 1 Any one of the places shown in the figure is mainly used to provide power to push and pull the outside air 10, so that the outside air 10 can be processed by the at least one first filter device 42, the at least one first temperature device 43, the at least one water washing device 44 and the at least one second temperature device 45 in sequence (dust is removed, filtered and its temperature and humidity are controlled by the above-mentioned devices), or is processed by the at least one first filter device 42, the at least one first temperature device 43, the at least one water washing device 44, the at least one second temperature device 45 and the dehumidification wheel 51 in sequence (dust is removed, filtered and its temperature and humidity are controlled by the above-mentioned devices, and then transported to the processing area 511 of the dehumidification wheel 51 for dehumidification and adsorption), so as to have the effect of generating fresh air with constant temperature and humidity.

[0090] In addition, the external air processing system 40 is connected to the air duct 30 so that the gas sent out by the external air processing system 40 can be transported to a desired place (such as Figure 1 and Figure 2As shown), the air duct 30 is connected to any one of at least one clean room 31, at least one ward (not shown), at least one food processing area (not shown), at least one semiconductor process plant (not shown), and at least one electronic process plant (not shown), so as to provide the above-mentioned places with a large amount of the outside air (OutsideAir) 10 required to be supplemented, and drive the air flow circulation in the above-mentioned places to take away dust and heat, achieve the required cleanliness and ventilation volume, and achieve the purpose of replacing the original air.

[0091] In addition, the dehumidification wheel 51 of the present invention is additionally provided with a bypass device 80 (such as Figure 2 As shown), the bypass device 80 is any one of a pipeline and a layer plate, and the pipeline is mainly connected to the front and rear ends of the processing area 511 of the dehumidification wheel 51 by a bypass pipeline provided on the outside of the box body 41 or a bypass pipeline provided on the inside of the box body 41, and a control valve is provided for switching. The layer plate is mainly provided with a bypass layer plate (not shown) in the box body 41. When necessary, the bypass layer plate will cover the processing area 511 of the dehumidification wheel 51 to form a gas channel for processing the outside air 10 that passes through the at least one first filter device 42, the at least one first temperature device 43, the at least one water washing device 44 and the at least one second temperature device 45 in sequence. The outside air 10 can bypass the dehumidification wheel 51, mainly when the dehumidification wheel 51 fails, the dehumidification wheel 51 is adsorbed saturated or other force majeure factors occur, in order to avoid the outside air treatment system 40 from being unable to operate, a bypass facility for changing the direction of the airflow is designed.

[0092] Therefore, the utility model mainly adopts a combination design of an outside air 10, an outside air conditioning unit (MAU) 20, an air duct 30, an outside air treatment system 40 and an incineration device 60, so that the waste heat discharged by the incineration device 60 can be provided to the dehumidification wheel 51 of the outside air treatment system 40 to remove the latent heat of the outside air 10, and then transported to the required place through the air duct 30. Therefore, the load of the outside air conditioning unit (MAU) 20 can be greatly reduced, and at the same time, it has the efficiency of heat recovery application and energy saving and carbon reduction, and can also achieve the effect of reducing energy costs, thereby increasing the overall practicality.

[0093] The embodiments of the present invention are described above. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present invention. Although the embodiments are described above separately, this does not mean that the measures in the various embodiments cannot be used in combination to advantage. The scope of the present invention is defined by the attached claims and their equivalents. Without departing from the scope of the present invention, a person skilled in the art may make a variety of substitutions and modifications, which should all fall within the scope of the present invention.

Claims

1. An external air treatment system with waste heat recovery, characterized in that: include: an external air, the external air comprising at least one gas or a combination of gases; an outside air conditioning box, the outside air conditioning box is used for the outside air to enter; an air duct connected to the outside air conditioning box; an external air processing system, the external air processing system is for the external air to enter, the external air processing system is connected to the air duct, the external air processing system is provided with a dehumidification wheel, a first heat exchanger, a second heat exchanger and a water tank, the dehumidification wheel has a processing area and a regeneration area, the processing area performs dehumidification adsorption, the first heat exchanger is connected to the regeneration area and provides a heat source to the regeneration area for desorption, the water tank is connected to the first heat exchanger and the second heat exchanger, the water tank outputs water, so as to transfer the heat of the second heat exchanger to the first heat exchanger through the water in the water tank; and An incineration device discharges a combustion exhaust gas having a temperature, and the combustion exhaust gas passes through the second heat exchanger.

2. The external air treatment system with waste heat recovery according to claim 1, characterized in that: The combustion exhaust gas is further transported to a chimney.

3. The external air treatment system with waste heat recovery according to claim 1, characterized in that: The water tank is further connected to a pump to push the water in the water tank.

4. The external air treatment system with waste heat recovery according to claim 1, characterized in that: The water tank is further provided with a water valve, which controls the water entering the water tank.

5. The external air treatment system with waste heat recovery according to claim 1, characterized in that: The first heat exchanger further allows a gas to enter for heat exchange.

6. The external air treatment system with waste heat recovery according to claim 1, characterized in that: The air duct is further connected to any one of at least one clean room, at least one hospital ward, at least one food processing area, at least one semiconductor process plant area, and at least one electronic process plant area.

7. The external air treatment system with waste heat recovery according to claim 1, characterized in that: The dehumidification wheel is further provided with a bypass device for bypassing the dehumidification wheel.

8. The external air treatment system with waste heat recovery according to claim 7, characterized in that: The bypass device is further any one of a pipeline and a layer plate.

9. The external air treatment system with waste heat recovery according to claim 1, characterized in that: The external air processing system is further provided with a box body, and the dehumidification wheel is arranged in the box body.

10. The external air treatment system with waste heat recovery according to claim 9, characterized in that: The dehumidification wheel forward group is provided with at least one first filter device, at least one first temperature device, at least one water washing device and at least one second temperature device.

11. The external air treatment system with waste heat recovery according to claim 10, characterized in that: The first temperature device is further any one or a combination of a precooling coil, a precooler, a preheating coil, and a preheater.

12. The external air treatment system with waste heat recovery according to claim 10, characterized in that: The second temperature device is further any one or a combination of a recooling coil, a recooler, a reheating coil, and a reheater.

13. The external air treatment system with waste heat recovery according to claim 9, characterized in that: The box body is further provided with a fan, which is arranged at any one of the front and rear positions of the dehumidification wheel.

14. The external air treatment system with waste heat recovery according to claim 9, characterized in that: The box body is further provided with at least one second filter device, and the at least one second filter device is located at the rear section of the box body.

15. The external air treatment system with waste heat recovery according to claim 1, characterized in that: The external air conditioning box is further provided with a box body, in which at least one first filter device, at least one first temperature device, at least one water washing device, at least one second temperature device and at least one second filter device are assembled.

16. The external air treatment system with waste heat recovery according to claim 15, characterized in that: A fan is further provided in the box.

17. The external air treatment system with waste heat recovery according to claim 15, characterized in that: The first temperature device is further any one or a combination of a precooling coil, a precooler, a preheating coil, and a preheater.

18. The external air treatment system with waste heat recovery according to claim 15, characterized in that: The second temperature device is further any one or a combination of a recooling coil, a recooler, a reheating coil, and a reheater.

19. The external air treatment system with waste heat recovery according to claim 1, characterized in that: The incineration equipment is further any one of a direct-fired incinerator, a catalytic incinerator or a thermal storage incinerator.

20. The external air treatment system with waste heat recovery according to claim 1, characterized in that: The incineration equipment is further combined with either a double-rotor volatile organic gas treatment system or a single-rotor volatile organic gas treatment system.