Silicon wafer edge detection combined light source
By designing a silicon wafer edge detection combination light source containing multiple adjustment components, the problem that existing light sources cannot flexibly adjust the light surface and angle is solved, and high flexibility of lighting on the silicon wafer is achieved, which significantly improves the applicability of detection.
Patent Information
- Application Number
- CN202420962552.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-06
- Publication Date
- 2025-05-06
- Estimated Expiration
- 2034-05-06
AI Technical Summary
The existing silicon wafer edge detection combination light source cannot flexibly adjust the lighting surface and lighting angle, resulting in poor detection flexibility.
A combined light source including a detection table, an LED lamp plate, an elevator adjustment assembly, a displacement adjustment assembly, a rotation assembly and a light angle adjustment assembly are designed. Through the use of these components, the LED lamp plate can achieve vertical lifting, horizontal reciprocating movement, forward and reverse rotation, and vertical surface inclination angle adjustment.
It effectively improves the flexibility of LED lamp boards, realizes convenient adjustment of the light surface of the silicon wafer, and significantly improves the flexibility and applicability of detection.
Smart Images
Figure CN222838008U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon chip detection, in particular to a silicon chip edge detection combined light source. Background Art
[0002] Silicon wafer edge detection refers to the use of devices such as cameras or sensors to detect the edges of silicon wafers to determine information such as the position, shape, and quality of the edges. During detection, in order to ensure the camera's shooting quality, it is necessary to "light up" the silicon wafer by setting a light source.
[0003] Although the conventional combined light sources currently used for silicon wafer edge detection can provide illumination and supplement light brightness, they are still unable to adjust the illumination surface and illumination angle of the silicon wafer well, and have poor flexibility, which requires further improvement.
[0004] Therefore, it is necessary to invent a silicon chip edge detection combined light source. Utility Model Content
[0005] To this end, the utility model provides a silicon chip edge detection combined light source to solve the problems raised in the above background technology.
[0006] In order to achieve the above-mentioned purpose, the utility model provides the following technical solutions: a silicon wafer edge detection combined light source, including a detection platform and an LED light board, a lifting adjustment component is arranged on one side of the top of the detection platform, and a rotating component for switching the illumination surface of the LED light board is connected to the lifting adjustment component through a displacement adjustment component, and the LED light board is installed on the rotating component through a light angle adjustment component.
[0007] Preferably, the lifting and adjusting assembly includes a mounting base plate, the end of the mounting base plate is horizontally fixed to one side of the top of the detection platform, an electric push rod 1 is vertically fixed to the top of the mounting base plate, and a mounting top plate is horizontally fixed to the top of the electric push rod 1.
[0008] Preferably, the displacement adjustment assembly includes a laterally arranged mobile base, the top of the mobile base is fixed to the lower surface of the mounting top plate, a servo motor is fixed to the end of the mobile base, an output shaft of the servo motor passes laterally through the end of the mobile base, and a screw is fixed to the output shaft of the servo motor, and a threaded sleeve is threadedly connected to the surface of the screw.
[0009] Preferably, a limiting sliding piece is vertically fixed at the bottom of the threaded sleeve, a strip-shaped limiting hole is horizontally opened at the bottom of the movable base, the bottom end of the limiting sliding piece vertically passes through the strip-shaped limiting hole, and the surface of the limiting sliding piece is in contact with the wall of the strip-shaped limiting hole, and a movable plate is fixed at the bottom end of the limiting sliding piece.
[0010] Preferably, the rotating assembly includes a motor box, the top of the motor box is fixed to the bottom of the movable plate, a servo motor 2 is fixed to the bottom of the inner wall of the motor box, the output shaft of the servo motor 2 vertically passes through the bottom of the motor box, and a rotating plate is fixed to the bottom end of the output shaft of the servo motor 2.
[0011] Preferably, the illumination angle adjustment assembly includes two electric push rods, and the two ends of the electric push rods are rotatably connected to one end of the bottom of the movable plate.
[0012] Preferably, the light angle adjustment assembly also includes a connecting plate, the top end of the connecting plate is rotatably connected to the other end of the bottom of the movable plate, the end of the connecting plate away from the electric push rod 2 is provided with a receiving groove, the LED light board is fixedly installed in the receiving groove, the end of the connecting plate close to the electric push rod 2 is provided with a limiting slide groove, a sliding block is slidably connected in the limiting slide groove, and the output shaft of the electric push rod 2 is rotatably connected to the end of the sliding block.
[0013] The beneficial effects of the utility model are as follows: through the coordinated use of the detection table, LED light board, lifting adjustment component, displacement adjustment component, rotation component and illumination angle adjustment component, the LED light board can have the functions of vertical lifting, horizontal reciprocating movement, forward and reverse rotation and adjustable vertical inclination angle, thereby effectively improving the flexibility of the LED light board, realizing convenient adjustment of the illumination surface and illumination angle of the silicon wafer, greatly improving the practicality, and being suitable for promotion. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 A structural cross-sectional view provided by the utility model;
[0015] Figure 2 for Figure 1 A magnified view of the structure at A;
[0016] Figure 3 The front view of the structure provided by the utility model;
[0017] Figure 4 This is a structural effect diagram of the lighting surface of the switching LED light panel provided by the utility model.
[0018] In the figure: 1. Test table; 2. LED light board; 3. Mounting bottom plate; 4. Electric push rod 1; 5. Mounting top plate; 6. Moving base; 7. Servo motor 1; 8. Screw; 9. Threaded sleeve; 10. Limit sliding piece; 11. Strip limit hole; 12. Moving plate; 13. Motor box; 14. Servo motor 2; 15. Rotating plate; 16. Electric push rod 2; 17. Connecting plate; 18. Receiving groove; 19. Limit sliding groove; 20. Sliding block. DETAILED DESCRIPTION
[0019] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.
[0020] Please refer to the attached Figure 1-4 The utility model provides a silicon wafer edge detection combined light source, including a detection platform 1 and an LED light board 2. The LED light board is a well-known technology for those skilled in the art, and will not be described in detail. A lifting adjustment component is provided on one side of the top of the detection platform 1. A rotating component for switching the illumination surface of the LED light board 2 is connected to the lifting adjustment component through a displacement adjustment component. The LED light board 2 is installed on the rotating component through a light angle adjustment component.
[0021] The lifting and adjusting assembly includes a mounting base plate 3, the end of which is horizontally fixed to one side of the top of the test bench 1, and an electric push rod 4 is vertically fixed to the top of the mounting base plate 3. It should be noted that the electric push rod is an electric drive device that converts the rotational motion of the motor into the linear reciprocating motion of the push rod. A mounting top plate 5 is horizontally fixed to the top of the electric push rod 4. Specifically, when the electric push rod 4 is running, the mounting top plate 5 can be driven to rise and fall, thereby driving the LED light board 2 to perform height adjustment operations;
[0022] The displacement adjustment component includes a horizontally arranged mobile base 6, the top of the mobile base 6 is fixed to the lower surface of the mounting top plate 5, a servo motor 7 is fixed to the end of the mobile base 6, the output shaft of the servo motor 7 horizontally passes through the end of the mobile base 6, and the output shaft of the servo motor 7 is fixed to a screw rod 8, the surface of the screw rod 8 is threadedly connected with a threaded sleeve 9, and a limited sliding piece 10 is vertically fixed to the bottom of the threaded sleeve 9, and a strip-shaped limiting hole 11 is horizontally opened at the bottom of the mobile base 6, and the bottom end of the limiting sliding piece 10 vertically passes through the strip-shaped limiting hole 11, and the surface of the limiting sliding piece 10 is in contact with the wall of the strip-shaped limiting hole 11, and a moving plate 12 is fixed to the bottom end of the limiting sliding piece 10. Specifically, under the common limiting action of the limiting sliding piece 10 and the strip-shaped limiting hole 11, when the servo motor 17 drives the screw rod 8 to rotate forward and reversely, the threaded sleeve 9 threadedly connected to the surface of the screw rod 8 can move horizontally and linearly, thereby driving the moving plate 12 to move horizontally and linearly synchronously through the limiting sliding piece 10, and thus driving the LED light board 2 to move horizontally and reciprocatingly;
[0023] The rotating assembly includes a motor box 13, the top of the motor box 13 is fixed to the bottom of the moving plate 12, a servo motor 14 is fixed to the bottom of the inner wall of the motor box 13, the output shaft of the servo motor 14 vertically passes through the bottom of the motor box 13, and a rotating plate 15 is fixed to the bottom of the output shaft of the servo motor 14. Specifically, when the servo motor 14 is running, it can drive the rotating plate 15 to rotate 180 degrees in the positive and negative directions on the horizontal plane, thereby controlling the LED light board 2 to rotate 180 degrees in the positive and negative directions on the horizontal plane;
[0024] The light angle adjustment component includes an electric push rod 16, the end of which is rotatably connected to one end of the bottom of the moving plate 15. The light angle adjustment component also includes a connecting plate 17, the top of which is rotatably connected to the other end of the bottom of the moving plate 15, and the end of the connecting plate 17 away from the electric push rod 16 is provided with a receiving groove 18, the LED light board 2 is fixedly installed in the receiving groove 18, and the LED light board 2 is preferably fixed in the receiving groove 18 by bonding. A limiting slide groove 19 is provided at one end of the connecting plate 17 close to the electric push rod 16, and a sliding block 20 is slidably connected in the limiting slide groove 19. The output shaft of the electric push rod 16 is rotatably connected to the end of the sliding block 20. Specifically, when the electric push rod 16 is running, it can drive the sliding block 20 to slide up and down in the limiting slide groove 19, so that the top end rotates on the vertical plane of the connecting plate 17 at the bottom of the rotating plate 15 to rotate and adjust, thereby driving the LED light board 2 to rotate and adjust synchronously on the vertical plane, thereby realizing the function of adjustable vertical inclination angle of the LED light board 2.
[0025] It should be noted that the utility model is electrically connected to an external main controller and 220V AC power, and the main controller can be a prior art device that controls switches and the like.
[0026] The use process of the utility model is as follows: the technicians in this field first control the LED light board 2 to rise and fall to a suitable height through the electric push rod 14 according to the actual size of the silicon wafer to be detected by the edge, and then turn on the servo motor 17 to control the LED light board 2 to move horizontally to one side of the silicon wafer, and control the LED light board 2 to tilt and rotate on the vertical plane to a suitable lighting angle (such as 100°). Figure 1 As shown), to realize the light supplement function of the silicon wafer, and then the technicians in this field control the LED light board 2 to move to the other side of the silicon wafer through the servo motor 1 7, and control the LED light board 2 to rotate 180 degrees (as shown) through the servo motor 2 14. Figure 4 As shown), the function of adjusting the illuminated surface is realized. In summary, the utility model enables the LED light board 2 to have the functions of vertical lifting, horizontal reciprocating movement, forward and reverse rotation, and adjustable vertical inclination angle, thereby effectively improving the flexibility of the LED light board 2 and realizing convenient adjustment of the illuminated surface and illumination angle of the silicon wafer.
[0027] The above is only a preferred embodiment of the utility model. Any person skilled in the art can modify the utility model by using the above technical solution or modify it into an equivalent technical solution. Therefore, any simple modification or equivalent replacement based on the technical solution of the utility model shall fall within the scope of protection claimed by the utility model.
Claims
1. A silicon wafer edge detection combined light source, comprising a detection platform (1) and an LED light board (2), characterized in that: A lifting adjustment component is provided on one side of the top of the detection platform (1); a rotating component for switching the illumination surface of the LED light panel (2) is connected to the lifting adjustment component via a displacement adjustment component; and the LED light panel (2) is mounted on the rotating component via a lighting angle adjustment component.
2. The silicon wafer edge detection combined light source according to claim 1, characterized in that: The lifting and adjusting assembly comprises a mounting base plate (3), the end of which is horizontally fixed to one side of the top of the detection platform (1), an electric push rod (4) is vertically fixed to the top of the mounting base plate (3), and a mounting top plate (5) is horizontally fixed to the top of the electric push rod (4).
3. The silicon wafer edge detection combined light source according to claim 2, characterized in that: The displacement adjustment component comprises a transversely arranged moving base (6), the top of the moving base (6) is fixed to the lower surface of the mounting top plate (5), a servo motor (7) is fixed to the end of the moving base (6), an output shaft of the servo motor (7) transversely passes through the end of the moving base (6), and a screw rod (8) is fixed to the output shaft of the servo motor (7), and a threaded sleeve (9) is threadedly connected to the surface of the screw rod (8).
4. The silicon wafer edge detection combined light source according to claim 3, characterized in that: A limiting sliding piece (10) is vertically fixed at the bottom of the threaded sleeve (9); a strip-shaped limiting hole (11) is horizontally opened at the bottom of the movable base (6); the bottom end of the limiting sliding piece (10) vertically passes through the strip-shaped limiting hole (11), and the surface of the limiting sliding piece (10) is in contact with the hole wall of the strip-shaped limiting hole (11); and a movable plate (12) is fixed at the bottom end of the limiting sliding piece (10).
5. The silicon wafer edge detection combined light source according to claim 4, characterized in that: The rotating assembly comprises a motor box (13), the top of the motor box (13) is fixed to the bottom of the moving plate (12), a servo motor 2 (14) is fixed to the bottom of the inner wall of the motor box (13), an output shaft of the servo motor 2 (14) vertically passes through the bottom of the motor box (13), and a rotating plate (15) is fixed to the bottom end of the output shaft of the servo motor 2 (14).
6. The silicon wafer edge detection combined light source according to claim 5, characterized in that: The illumination angle adjustment component comprises a second electric push rod (16), the end of which is rotatably connected to one end of the bottom of the rotating plate (15).
7. The silicon wafer edge detection combined light source according to claim 6, characterized in that: The illumination angle adjustment assembly also includes a connecting plate (17), the top end of the connecting plate (17) is rotatably connected to the other end of the bottom of the rotating plate (15), the end of the connecting plate (17) away from the second electric push rod (16) is provided with a receiving groove (18), the LED light board (2) is fixedly installed in the receiving groove (18), the end of the connecting plate (17) close to the second electric push rod (16) is provided with a limiting slide groove (19), a sliding block (20) is slidably connected in the limiting slide groove (19), and the output shaft of the second electric push rod (16) is rotatably connected to the end of the sliding block (20), and the output shaft of the second electric push rod (16) is rotatably connected to the end of the sliding block (20).