Hydrogen sensor based on hollow silicon nanowire structure
By using hollow silicon nanowire structures and hydrogen-sensitive materials in hydrogen sensors, the problem of poor sensitivity of solid nanowire hydrogen sensors is solved, and higher detection sensitivity and better sensor performance are achieved.
Patent Information
- Application Number
- CN202421274087.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-05
- Publication Date
- 2025-05-06
- Estimated Expiration
- 2034-06-05
AI Technical Summary
The detection sensitivity of hydrogen sensor based on solid nanowires is poor.
A hydrogen sensor based on hollow silicon nanowire structure is adopted. By providing multiple hollow nanowires on the substrate and covering hydrogen-sensitive material, one end of the hollow nanowire is opened to increase the specific surface area and increase the contact area with hydrogen.
The detection sensitivity of hydrogen sensors is significantly improved by 65 times, and the selectivity, long-term stability and durability of the sensor are improved.
Smart Images
Figure CN222838026U_ABST
Abstract
Description
[Technical field]
[0001] The utility model belongs to the technical field of hydrogen sensors, and in particular relates to a hydrogen sensor based on a hollow silicon nanowire structure. [Background technology]
[0002] A hydrogen sensor is a device used to detect hydrogen concentration. Common working principles include: based on the adsorption effect of hydrogen on sensitive materials such as metal oxides such as zinc oxide and titanium oxide or metal semiconductors such as tungsten oxide, or based on the adsorption reaction of palladium or palladium alloy nanostructures with hydrogen, causing changes in resistivity or other electrical properties, thereby achieving hydrogen concentration detection. For hydrogen sensors based on nanostructures, the high surface area to volume ratio of the nanostructured materials is a key factor affecting the performance of hydrogen sensors.
[0003] Solid nanowire-based hydrogen sensors have stable sensing performance and usually rely on the adsorption on the material surface, but are limited by their structure and have poor detection sensitivity. [Utility Model Content]
[0004] The utility model aims to provide a hydrogen sensor based on a hollow silicon nanowire structure to solve the problem of poor detection sensitivity of the current hydrogen sensor based on solid nanowires.
[0005] A hydrogen sensor based on a hollow silicon nanowire structure comprises a substrate on which a plurality of hollow nanowires for increasing the specific surface area are arranged, the surface of the hollow nanowires is covered with a hydrogen-sensitive material for adsorbing hydrogen, and the hollow nanowires are connected to electrodes for outputting electrical signals through the hydrogen-sensitive material, so that the hydrogen sensor can detect the concentration of hydrogen.
[0006] As described above, in the hydrogen sensor based on the hollow silicon nanowire structure, one end of the hollow nanowire is an open end, and the open end is connected to the electrode.
[0007] In the above-mentioned hydrogen sensor based on the hollow silicon nanowire structure, the hydrogen sensitive material covers the outer surface of the hollow nanowire and covers the inner surface of the hollow nanowire through the open end.
[0008] As described above, in the hydrogen sensor based on the hollow silicon nanowire structure, the hydrogen sensitive material also covers the contact surface between the hollow nanowire and the substrate.
[0009] In the above-mentioned hydrogen sensor based on the hollow silicon nanowire structure, the substrate and the hollow nanowire are an integrated structure.
[0010] As described above, in the hydrogen sensor based on the hollow silicon nanowire structure, the hollow nanowire is in a vertical state relative to the substrate.
[0011] As described above, in the hydrogen sensor based on the hollow silicon nanowire structure, the hollow nanowires are arranged in an orderly manner on the substrate.
[0012] In the above-mentioned hydrogen sensor based on the hollow silicon nanowire structure, the substrate material and the hollow nanowire material are the same material.
[0013] In the above-mentioned hydrogen sensor based on the hollow silicon nanowire structure, the substrate material and the hollow nanowire material are single crystal silicon materials.
[0014] In the above-mentioned hollow silicon nanowire structure-based hydrogen sensor, the electrode material is a metal material.
[0015] The utility model proposes a hydrogen sensor based on a hollow silicon nanowire structure. First, a plurality of hollow nanowires are provided on a substrate to increase the specific surface area of the nanostructure and improve the hydrogen adsorption capacity of the hydrogen-sensitive material; second, one end of the hollow nanowire is open to further increase the specific surface area of the nanostructure, so that the hydrogen-sensitive material can cover the outer surface of the hollow nanowire and completely cover the inner surface of the hollow nanowire, thereby expanding the contact area with hydrogen and providing more surface adsorption sites, thereby improving the detection sensitivity of the sensor; the hollow nanowire with a high specific surface area helps to distinguish different gas molecules, thereby improving the selectivity of the sensor to a specific gas, helps to reduce the volume change of the material caused by gas adsorption, thereby improving the long-term stability and durability of the sensor, and also helps to better conduct heat or heat insulation; in addition, the nanowire is a one-dimensional nanostructure with good electrical conductivity and chemical activity, and can also be used as an electrode material. Second, the substrate and the hollow nanowires are an integrated structure, which can reduce the need for external connection and assembly, thereby improving the mechanical stability of the sensor, improving the integration of the sensor, and reducing production costs; secondly, the materials of both are single-crystal silicon materials. Single-crystal silicon materials have extremely high purity, which can reduce the impact of impurities on sensor performance. Its crystal structure is highly uniform, which can improve the stability and reliability of the sensor and make it suitable for a variety of environmental conditions. It has good electrical conductivity and thermoelectric properties, and can be used as both a semiconductor material and a thermoelectric material. Compared with materials such as polycrystalline silicon and amorphous silicon, single-crystal silicon materials can provide higher detection sensitivity.
[0016] The utility model is based on a hollow silicon nanowire structure hydrogen sensor, which has a unique hollow nanowire structure. Compared with a solid nanowire structure, it has a higher specific surface area and provides more adsorption sites, thereby improving the sensor's ability to adsorb hydrogen and enhancing the sensor's detection sensitivity. The utility model solves the problem of poor sensitivity of the current solid nanowire hydrogen sensor.
Brief Description of the Drawings
[0017] Figure 1 This is a schematic diagram of the structure of a hydrogen sensor based on a hollow silicon nanowire structure according to an embodiment of the utility model;
[0018] Figure 2 This is a schematic diagram of the structure of a hydrogen sensor based on a solid silicon nanowire structure according to a comparative example of the utility model;
[0019] Figure 3 It is a schematic diagram of the test results of the hydrogen sensor of the comparative example and the embodiment of the utility model. [Specific implementation method]
[0020] The following is a combination of the embodiments and the attached Figure 1-3 The specific technical solution of the utility model is described.
[0021] Example:
[0022] A hydrogen sensor based on a hollow silicon nanowire structure comprises a substrate 1, on which a plurality of hollow nanowires 2 for increasing the specific surface area are arranged, and the surfaces of the hollow nanowires 2 are covered with a hydrogen-sensitive material for adsorbing hydrogen. The hollow nanowires 2 are connected to an electrode 3 for outputting an electrical signal through the hydrogen-sensitive material, so that the hydrogen sensor can detect the concentration of hydrogen.
[0023] Furthermore, one end of the hollow nanowire 2 is an open end, and the open end is connected to the electrode 3 .
[0024] Furthermore, the hydrogen-sensitive material covers the outer surface of the hollow nanowire 2, and covers the inner surface of the hollow nanowire 2 through the open end. The hydrogen-sensitive material passes through the open end of the hollow nanowire, so that it can cover the outer surface of the hollow nanowire and completely cover the inner surface of the hollow nanowire, which can further increase the specific surface area of the nanostructure, expand the contact area with hydrogen, and provide more surface active sites, thereby improving the sensitivity of the sensor. In addition, the nanowire is a one-dimensional nanostructure with good electrical conductivity and chemical activity.
[0025] Furthermore, the hydrogen-sensitive material also covers the contact surface between the hollow nanowire 2 and the substrate 1. The hydrogen-sensitive material covers both the inner and outer surfaces of the hollow nanowire, the contact surface between the hollow nanowire and the substrate, and the surface of the substrate, which can enhance the adhesion between the hollow nanowire and the substrate, improve the integrity and mechanical stability of the structure, and also help integrate additional sensing functions to better optimize sensor performance.
[0026] Furthermore, the hydrogen-sensitive material may be palladium, titanium dioxide, tungsten trioxide, etc. The thickness of the hydrogen-sensitive material will affect the response of the sensor and should be set according to the actual situation. If the thickness is too thick, the sensor response will be low or even no response. In this embodiment, the hydrogen-sensitive material is palladium, and its thickness is 10 nanometers.
[0027] Furthermore, the substrate 1 and the hollow nanowires 2 are an integrated structure, which can reduce the need for external connection and assembly, thereby improving the mechanical stability of the sensor, improving the integration of the sensor, and reducing production costs.
[0028] Furthermore, the hollow nanowires 2 are in a vertical state relative to the substrate 1. Compared with the nanowires and the substrate being in a horizontal state, the nanowires are arranged vertically on the substrate, which can provide a larger surface area.
[0029] Furthermore, the hollow nanowires 2 are arranged in an orderly manner on the substrate 1. The ordered array of nanowires has regular spacing and directions, which can improve the performance and consistency of the sensor.
[0030] Furthermore, the substrate 1 material and the hollow nanowire 2 material are the same material.
[0031] Furthermore, the substrate 1 material and the hollow nanowire 2 material are single crystal silicon material. Single crystal silicon material has extremely high purity, which can reduce the impact of impurities on sensor performance. Its crystal structure has high uniformity, which can improve the stability and reliability of the sensor to be applicable to a variety of environmental conditions. It has good electrical conductivity and thermoelectric properties, and can be used as both a semiconductor material and a thermoelectric material. Compared with materials such as polycrystalline silicon and amorphous silicon, single crystal silicon material can provide higher detection sensitivity.
[0032] Furthermore, the electrode 3 is made of a metal material. The metal material may be copper, gold, silver, platinum, palladium, etc. In this embodiment, the metal material is silver.
[0033] Furthermore, the electrodes 3 are disposed at both ends of the hollow nanowire 2, and the electrodes play a conductive role in the sensor, thereby realizing hydrogen concentration detection.
[0034] This embodiment is based on a hollow silicon nanowire structure hydrogen sensor as shown in the attached Figure 1 As shown, the hydrogen sensor includes a substrate 1, a hollow nanowire 2 with inner and outer surfaces covered with a hydrogen-sensitive material, and an electrode 3.
[0035] Comparative Example:
[0036] The difference between the comparative hydrogen sensor and the example hydrogen sensor is that the silicon nanowire structure is a solid structure. Figure 2 shown.
[0037] The hydrogen sensors of the above embodiment and comparative example were used to perform hydrogen sensing response tests under the condition of a hydrogen concentration of 1%. The test data are shown in the attached figure. Figure 3 As shown, the blue line in the figure is the data of the embodiment, and the black line in the figure is the data of the comparative example. The detection sensitivity of the hollow silicon nanowire hydrogen sensor in this embodiment is significantly improved by 65 times compared with the solid silicon nanowire hydrogen sensor in the comparative example.
[0038] The utility model is based on a hollow silicon nanowire structure hydrogen sensor, which has a unique hollow nanowire structure. Compared with a solid nanowire structure, it has a higher specific surface area and provides more adsorption sites, thereby improving the sensor's ability to adsorb hydrogen and enhancing the sensor's detection sensitivity. The utility model solves the problem of poor sensitivity of the current solid nanowire hydrogen sensor.
[0039] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A hydrogen sensor based on a hollow silicon nanowire structure, comprising a substrate (1), characterized in that: The substrate (1) is provided with a plurality of hollow nanowires (2) for increasing the specific surface area; the surface of the hollow nanowires (2) is covered with a hydrogen-sensitive material for adsorbing hydrogen; the hollow nanowires (2) are connected to electrodes (3) for outputting electrical signals via the hydrogen-sensitive material, so that the hydrogen sensor can detect the concentration of hydrogen.
2. The hydrogen sensor based on the hollow silicon nanowire structure according to claim 1, characterized in that: One end of the hollow nanowire (2) is an open end, and the open end is connected to the electrode (3).
3. The hydrogen sensor based on the hollow silicon nanowire structure according to claim 2, characterized in that: The hydrogen-sensitive material covers the outer surface of the hollow nanowire (2), and covers the inner surface of the hollow nanowire (2) through the open end.
4. The hydrogen sensor based on the hollow silicon nanowire structure according to claim 3, characterized in that: The hydrogen-sensitive material also covers the contact surface between the hollow nanowire (2) and the substrate (1).
5. The hydrogen sensor based on the hollow silicon nanowire structure according to claim 1, characterized in that: The substrate (1) and the hollow nanowire (2) are an integrated structure.
6. The hydrogen sensor based on the hollow silicon nanowire structure according to claim 5, characterized in that: The hollow nanowire (2) is in a vertical state relative to the substrate (1).
7. The hydrogen sensor based on the hollow silicon nanowire structure according to claim 6, characterized in that: The hollow nanowires (2) are arranged in an orderly manner on the substrate (1).
8. The hydrogen sensor based on the hollow silicon nanowire structure according to claim 5, characterized in that: The substrate (1) material and the hollow nanowire (2) material are the same material.
9. The hydrogen sensor based on the hollow silicon nanowire structure according to claim 8, characterized in that: The substrate (1) material and the hollow nanowire (2) material are single crystal silicon materials.
10. The hydrogen sensor based on the hollow silicon nanowire structure according to claim 1, characterized in that: The electrode (3) is made of metal material.