Quartz boat control device

Abstract

The utility model belongs to the technical field of quartz boats, and particularly relates to a quartz boat management and control device which comprises a main track, an auxiliary track is arranged on one side of the main track in parallel, remote control transport vehicles run on the main track and the auxiliary track at intervals, and a quartz boat is arranged on the top of each remote control transport vehicle through a fixing table. Mounting tables are arranged at the ends of the main track and the auxiliary track at intervals, a rotating plate is rotationally arranged at the top of each mounting table, turning tracks aligned with the main track and the auxiliary track are arranged at the tops of the two rotating plates correspondingly, and driving assemblies for driving the two turning tracks to turn at the same time are arranged on the mounting tables. According to the utility model, when a silicon wafer loaded on a quartz boat needs to be disassembled, the direction of the turning track is adjusted through the driving assembly, and after the remote control transport vehicle is moved from the main track to the auxiliary track, the silicon wafer above the remote control transport vehicle can be independently disassembled, and meanwhile, the normal running of the remote control transport vehicle on the main track is not influenced.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz boats, in particular to a quartz boat control device. Background Art

[0002] In modern semiconductor manufacturing, silicon wafer loading and unloading platforms are one of the key equipment on the production line. In normal operation mode, these platforms usually adopt a standardized loading and unloading mode, that is, a batch of silicon wafers are vertically inserted into quartz boats and transported through the equipment for subsequent process processing.

[0003] However, when some silicon wafers have problems, they need to be taken out of the quartz boat and the transportation equipment needs to be paused. During this process, the remaining silicon wafers to be transported will be affected, causing the remaining silicon wafers to exceed the control time. Therefore, it is necessary to develop a quartz boat control device. Utility Model Content

[0004] The purpose of this section is to summarize some aspects of the embodiments of the utility model and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the abstract of the specification and the name of the utility model of this application to avoid blurring the purpose of this section, the abstract of the specification and the name of the utility model, and such simplifications or omissions cannot be used to limit the scope of the utility model.

[0005] In order to solve the above technical problems, according to one aspect of the present invention, the present invention provides the following technical solutions:

[0006] A quartz boat control device comprises: a main track, a secondary track is arranged in parallel on one side of the main track, remote-controlled transport vehicles are running on the main track and the secondary track at intervals, a quartz boat is arranged on the top of the remote-controlled transport vehicle through a fixed platform, mounting platforms are arranged at gaps at the ends of the main track and the secondary track, a rotating plate is rotatably arranged on the top of each mounting platform, and a turning track aligned with the main track and the secondary track is respectively arranged on the top of the two turning plates, a driving component for driving the two turning tracks to turn at the same time is arranged on the mounting platform, and the two groups of the turning tracks are driven by the driving component to rotate ninety degrees and then align with each other, and the remote-controlled transport vehicle on the main track passes through the turning track and the driving component so as to travel to the secondary track.

[0007] As a preferred solution of a quartz boat control device described in the utility model, fixing frames are arranged at equal intervals at the bottom of the main track and the auxiliary track, a base is arranged at the bottom of each fixing frame, and a mounting hole is opened at the end of the base.

[0008] As a preferred solution of a quartz boat control device described in the utility model, the quartz boat is detachably mounted on the top of a fixed platform, vertical positioning legs are arranged around the bottom of the quartz boat, and positioning holes are opened around the top of the fixed platform for the lower ends of the positioning legs to fit and insert.

[0009] As a preferred solution of a quartz boat control device described in the utility model, a socket is opened in the middle of the side wall of each positioning leg, a transverse mounting groove is opened around the top of the fixed platform near the positioning hole, a transverse sliding rod is slidingly arranged between the outer wall of the fixed platform and the inner wall of the mounting groove, a movable plate is arranged at one end of the sliding rod located in the inner cavity of the mounting groove, and a plug rod for inserting into the socket is protruded from one side of the movable plate close to the positioning leg.

[0010] As a preferred solution of a quartz boat control device described in the utility model, a transverse spring is arranged on the side of the movable plate away from the insertion rod, the other side of the spring is fixed on the inner wall of the mounting groove, the shaft gap of the sliding rod passes through the inner side of the spring, and a connecting plate is commonly arranged at the ends of the two sliding rods on the same left and right sides away from the movable plate, and a handle is arranged on the other side wall of the connecting plate.

[0011] As a preferred solution of a quartz boat control device described in the utility model, wherein: a vertical rotating column is rotatably provided through the center of the upper and lower walls of each of the mounting platforms through a bearing sleeve, the upper end of the rotating column is fixed at the center of the bottom wall of the rotating plate, and a truncated table is provided at the lower end of the rotating column, and the driving assembly includes worm gear teeth arranged on the outside of the truncated table, and two support frames are arranged on the outside of each of the mounting platforms, and a driving rod is rotatably provided between the two support frames, and a worm that meshes with the worm gear teeth is arranged on the rod body of the driving rod, and a forward and reverse reduction motor is fixedly provided on the side wall of the support frame, and the output end of the forward and reverse reduction motor rotates and passes through the side wall of the support frame and is connected to the end of the driving rod through a coupling.

[0012] As a preferred solution of a quartz boat control device described in the utility model, wherein: a support wheel is arranged at the bottom of each of the truncated cones through a support column, and a plurality of the support wheels are arranged at equal intervals around the center of the truncated cone.

[0013] Compared with the prior art, the beneficial effect of the utility model is as follows: when the silicon wafers loaded on the quartz boat need to be disassembled, the remote-controlled transport vehicle is moved to the front turning track, and after the forward and reverse reduction motors are started, the driving rod is driven to rotate ninety degrees, and the truncated table is slowly rotated through the worm and worm gear teeth, so that the rotating column drives the turning plate and the turning track to turn, thereby adjusting the direction of the turning track, and then the remote-controlled transport vehicle is moved to the rear turning track, and the forward and reverse reduction motors are started again, and the driving rod is driven to rotate ninety degrees in the opposite direction, so that the rear turning track is aligned with the secondary track, and after the remote-controlled transport vehicle is moved to the secondary track again, the silicon wafers above it can be disassembled separately, and at the same time, it will not affect the normal driving of the remote-controlled transport vehicle on the main track. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the technical solution of the implementation of the utility model, the utility model will be described in detail below in combination with the drawings and detailed implementation. Obviously, the drawings described below are only some implementations of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor. Among them:

[0015] Figure 1 It is a structural schematic diagram of the utility model;

[0016] Figure 2 It is a structural schematic diagram of the utility model remote control transport vehicle moving to the turning track after turning;

[0017] Figure 3 This is a schematic diagram of the structure of the installation platform of the utility model when viewed from the side and its installation components;

[0018] Figure 4 It is a structural schematic diagram of the components such as the rotating plate, rotating column and round table of the utility model;

[0019] Figure 5 It is a structural schematic diagram of the utility model after the quartz boat and the fixing platform are separated and the cross section of the fixing platform.

[0020] In the figure: main track 100, fixing frame 110, base 120, fixing hole 130, auxiliary track 200, remote control transport vehicle 300, fixing platform 310, quartz boat 320, positioning leg 321, plug hole 322, positioning hole 323, mounting groove 330, slide bar 340, movable plate 350, plug rod 351, spring 360, connecting plate 370, handle 380, mounting platform 400, rotating plate 410, change direction track 420, rotating column 430, round table 440, support column 441, support wheel 442, worm gear teeth 450, support frame 460, drive rod 470, worm 480, forward and reverse reduction motor 490, DETAILED DESCRIPTION

[0021] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are described in detail below with reference to the accompanying drawings.

[0022] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific implementation methods disclosed below.

[0023] Secondly, the present invention is described in detail with reference to the schematic diagram. When describing the implementation of the present invention, for the sake of convenience, the cross-sectional diagram showing the device structure will not be partially enlarged according to the general proportion, and the schematic diagram is only an example, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.

[0024] In order to make the purpose, technical solution and advantages of the present invention more clear, the implementation mode of the present invention will be further described in detail below with reference to the accompanying drawings.

[0025] See also Figure 1-Figure 5 , shows a schematic diagram of the structure of a quartz boat control device of the utility model, please refer to Figure 1-Figure 5 , a quartz boat control device is introduced in detail.

[0026] A quartz boat control device comprises: a main track 100, a sub-track 200 is arranged in parallel on one side of the main track 100, a remote control transport vehicle 300 is arranged on the main track 100 and the sub-track 200 at intervals, a quartz boat 320 is arranged on the top of the remote control transport vehicle 300 through a fixed platform 310, and a mounting platform 400 is arranged at the end of the main track 100 and the sub-track 200. The gap is small and only needs to be rotated by a rotating plate 410 and a turning track 420. The wheel diameter of the remote control transport vehicle 300 is much larger than the distance of the gap, which will not hinder the remote control The transport vehicle 300 travels onto the turning track 420. A turning plate 410 is rotatably provided on the top of each mounting platform 400. The tops of the two turning plates 410 are respectively provided with turning tracks 420 that are aligned with the main track 100 and the secondary track 200. A driving assembly that simultaneously drives the two turning tracks 420 to turn is provided on the mounting platform 400. The two groups of turning tracks 420 are driven by the driving assembly to rotate ninety degrees and then align with each other. The remote-controlled transport vehicle 300 on the main track 100 passes through the turning track 420 and the driving assembly to allow it to travel to the secondary track 200.

[0027] Furthermore, fixing frames 110 are arranged at equal intervals at the bottom of the main track 100 and the auxiliary track 200, and a base 120 is arranged at the bottom of each fixing frame 110. A mounting hole is opened at the end of the base 120, and the main track 100 and the auxiliary track 200 can be conveniently fixed and installed in the desired place by screws, bolts, etc. adapted to the mounting holes.

[0028] Furthermore, the quartz boat 320 is detachably mounted on the top of the fixed platform 310, and vertical positioning legs 321 are arranged around the bottom of the quartz boat 320. Positioning holes 323 for the lower ends of the positioning legs 321 to fit and insert are opened around the top of the fixed platform 310, and a plug hole 322 is opened in the middle of the side wall of each positioning leg 321. Horizontal mounting grooves 330 are opened around the top of the fixed platform 310 near the positioning holes 323. A horizontal sliding rod 340 is slidably penetrated between the outer wall of the fixed platform 310 and the inner wall of the mounting groove 330. A movable plate 350 is arranged at one end of the sliding rod 340 located in the inner cavity of the mounting groove 330. A plug rod 351 for inserting into the plug hole 322 is protruded from one side of the movable plate 350 close to the positioning leg 321. A transverse spring 360 is provided on the side away from the insertion rod 351, and the other side of the spring 360 is fixed on the inner wall of the mounting groove 330. The shaft gap of the sliding rod 340 passes through the inner side of the spring 360. The ends of the two sliding rods 340 on the same side are away from the movable plate 350 and are provided with a connecting plate 370. The other side wall of the connecting plate 370 is provided with a handle 380. When the quartz boat 320 needs to be installed on the fixed platform 310 or needs to be replaced after being damaged after long-term use, the handles 380 on both sides can be pulled to drive the sliding rod 340 and the movable plate 350 to move, so that the spring 360 is compressed, and the insertion rod 351 is pulled out of the current jack 322 hole, and then the quartz boat 320 is disassembled from the top of the fixed platform 310 in the vertical direction, which is convenient for replacement. Similarly, it is also convenient to install the quartz boat 320.

[0029] Furthermore, a vertical rotating column 430 is provided at the center of the upper and lower walls of each mounting platform 400 through a bearing sleeve for rotation, the upper end of the rotating column 430 is fixed at the center of the bottom wall of the rotating plate 410, and a round table 440 is provided at the lower end of the rotating column 430. The driving assembly includes a worm gear 450 provided on the outer side of the round table 440. Two supporting frames 460 are provided on the outer side of each mounting platform 400, and a driving rod 470 is rotatably provided between the two supporting frames 460. A gear is provided on the rod body of the driving rod 470. The worm 480 is combined with the worm gear teeth 450, and the side wall of the support frame 460 is fixedly provided with a forward and reverse reduction motor 490. The output end of the forward and reverse reduction motor 490 rotates and penetrates the side wall of the support frame 460, and is connected to the end of the driving rod 470 through a coupling. After the forward and reverse reduction motor 490 is started, the driving rod 470 is driven to rotate, and the truncated table 440 is slowly rotated through the worm 480 and the worm gear teeth 450. At this time, the rotating column 430 drives the rotating plate 410 and the changing track 420 to turn, thereby adjusting the direction of the changing track 420.

[0030] Furthermore, a support wheel 442 is provided at the bottom of each of the truncated tables 440 through a support column 441, and a plurality of the support wheels 442 are arranged at equal intervals around the center of the truncated table 440. When the truncated table 440 rotates, the support column 441 and the support wheel 442 are driven to rotate simultaneously, and the roller surface of the support wheel 442 rolls on the ground. The support column 441 is provided to support the truncated table 440, thereby improving its stability during rotation.

[0031] During specific use, when the silicon wafers loaded on the quartz boat 320 need to be disassembled, the remote-controlled transport vehicle 300 is moved to the front turning track 420, and the forward and reverse reduction motor 490 is started to drive the driving rod 470 to rotate ninety degrees. The truncated table 440 is slowly rotated through the worm 480 and the worm gear teeth 450, so that the rotating column 430 drives the rotating plate 410 and the turning track 420 to turn, thereby adjusting the direction of the turning track 420, and then the remote-controlled transport vehicle 300 is moved to the rear turning track 420, and the forward and reverse reduction motor 490 is started again to drive the driving rod 470 to rotate ninety degrees in the opposite direction, so that the rear turning track 420 is aligned with the secondary track 200. After the remote-controlled transport vehicle 300 is moved to the secondary track 200, the silicon wafers above it can be disassembled separately, and at the same time, it will not affect the normal driving of the remote-controlled transport vehicle 300 on the main track 100.

[0032] Although the present invention has been described above with reference to the embodiments, various modifications may be made thereto and parts thereof may be replaced with equivalents without departing from the scope of the present invention. In particular, as long as there is no structural conflict, the various features in the embodiments disclosed in the present invention may be used in combination with each other in any manner, and the fact that these combinations are not exhaustively described in this specification is only for the sake of omitting space and saving resources. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A quartz boat control device, characterized in that: include: A main track (100), a secondary track (200) is arranged in parallel on one side of the main track (100), remote-controlled transport vehicles (300) are arranged on the main track (100) and the secondary track (200) at intervals, a quartz boat (320) is arranged on the top of the remote-controlled transport vehicle (300) via a fixed platform (310), mounting platforms (400) are arranged at intervals at the ends of the main track (100) and the secondary track (200), and a rotating plate (410) is rotatably arranged on the top of each mounting platform (400) ), the tops of the two rotating plates (410) are respectively provided with turning tracks (420) aligned with the main track (100) and the auxiliary track (200), and the mounting platform (400) is provided with a driving assembly for driving the two turning tracks (420) to turn simultaneously, and the two sets of the turning tracks (420) are driven by the driving assembly to rotate ninety degrees and then align with each other, and the remote-controlled transport vehicle (300) on the main track (100) passes through the turning tracks (420) and the driving assembly so as to travel to the auxiliary track (200).

2. A quartz boat control device according to claim 1, characterized in that: Fixed frames (110) are arranged at equal intervals at the bottom of the main track (100) and the auxiliary track (200), and a base (120) is arranged at the bottom of each fixed frame (110), and a mounting hole is opened at the end of the base (120).

3. A quartz boat control device according to claim 1, characterized in that: The quartz boat (320) is detachably mounted on the top of the fixing platform (310); vertical positioning legs (321) are arranged around the bottom of the quartz boat (320); and positioning holes (323) are opened around the top of the fixing platform (310) for the lower ends of the positioning legs (321) to fit and insert.

4. A quartz boat control device according to claim 3, characterized in that: A plug hole (322) is opened in the middle of the side wall of each positioning leg (321), and a transverse installation groove (330) is opened around the top of the fixing platform (310) near the positioning hole (323). A transverse sliding rod (340) is slidably penetrated between the outer wall of the fixing platform (310) and the inner wall of the installation groove (330), and a movable plate (350) is arranged at one end of the sliding rod (340) located in the inner cavity of the installation groove (330), and an insertion rod (351) for inserting into the plug hole (322) is protruded from one side of the movable plate (350) close to the positioning leg (321).

5. A quartz boat control device according to claim 4, characterized in that: A transverse spring (360) is arranged on one side of the movable plate (350) away from the insertion rod (351), and the other side of the spring (360) is fixed on the inner wall of the mounting groove (330). The shaft gap of the sliding rod (340) passes through the inner side of the spring (360), and the ends of the two sliding rods (340) on the same left and right sides away from the movable plate (350) are jointly provided with a connecting plate (370), and the other side wall of the connecting plate (370) is provided with a handle (380).

6. A quartz boat control device according to claim 1, characterized in that: A vertical rotating column (430) is rotatably provided at the center of the upper and lower walls of each mounting platform (400) through a bearing sleeve, the upper end of the rotating column (430) is fixed at the center of the bottom wall of the rotating plate (410), a round table (440) is provided at the lower end of the rotating column (430), the driving component comprises worm gear teeth (450) arranged on the outside of the round table (440), two support frames (460) are provided on the outside of each mounting platform (400), a driving rod (470) is rotatably provided between the two support frames (460), a worm (480) meshing with the worm gear teeth (450) is provided on the rod body of the driving rod (470), a forward and reverse reduction motor (490) is fixedly provided on the side wall of the support frame (460), the output end of the forward and reverse reduction motor (490) rotates through the side wall of the support frame (460) and is connected to the end of the driving rod (470) through a coupling.

7. A quartz boat control device according to claim 6, characterized in that: A support wheel (442) is provided at the bottom of each truncated table (440) via a support column (441), and a plurality of support wheels (442) are arranged at equal intervals around the center of the truncated table (440).

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