Flat vacuum through device

Abstract

The utility model provides a flat vacuum through device, which comprises an adhesive layer with insulating property; the plurality of cables are adhered and fixed on the adhesive layer and are distributed at intervals, insulating sleeves of the cables positioned on the adhesive layer are removed, cable cores are exposed and are fixed with the adhesive layer, the insulating sleeves of the cable parts except the cable parts positioned outside the adhesive layer are reserved, and the cable core parts positioned on the adhesive layer protrude out of one side surface of the adhesive layer; the packaging layer wraps the outer sides of the adhesive layer and the wire core; the first sealing layer is arranged on the side, where the wire cores protrude, of the packaging layer, and a plane-shaped attaching face is formed on the side, away from the packaging layer, of the first sealing layer. According to the flat vacuum through device, the sealing piece of the vacuum cavity is tightly attached to the attaching face of the first sealing layer, a gap is prevented from being generated between the flat vacuum through device and the sealing piece, installation and sealing of the flat vacuum through device are achieved, the air tightness of the vacuum through device is improved, and the vacuum leakage rate is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum through-holes, in particular to a flat vacuum through-hole. Background Art

[0002] A vacuum feedthrough or feedthrough is a connector installed on a vacuum chamber to connect cables inside and outside the chamber. Its function is to form a cable connection channel inside and outside the vacuum chamber while ensuring airtightness. Commonly used feedthroughs include electrical conductive feedthroughs and optical fiber feedthroughs.

[0003] Existing flat vacuum through-holes are usually composed of two layers of insulation plates or films sandwiching the middle cable. The cables are fixed between the insulation plates by adhesive so that the cables are arranged at intervals, and bumps are formed on the surface of the insulation plates or films. When the flat vacuum through-hole is installed in a vacuum chamber, the uneven surface is prone to produce gaps and affect the sealing effect.

[0004] In view of this, it is necessary to propose a flat vacuum through-hole to solve the above problems. Utility Model Content

[0005] The utility model aims to provide a flat vacuum through-hole, which is used to improve the problem that when the existing flat vacuum through-hole is installed in a vacuum chamber, gaps are easily generated, thereby affecting the sealing effect.

[0006] The utility model provides a flat vacuum through-hole, comprising:

[0007] An adhesive layer having insulating properties;

[0008] A plurality of cables are adhered and fixed on the adhesive layer and are spaced apart. The insulating sleeves of the cables on the adhesive layer are removed to expose the wire cores and are fixed to the adhesive layer. The insulating sleeves of the cable portions outside the adhesive layer are retained. The wire core portions on the adhesive layer protrude from one side of the adhesive layer.

[0009] An encapsulation layer, wrapped around the adhesive layer and the outer side of the wire core;

[0010] The first sealing layer is arranged on one side of the core protrusion on the packaging layer, and a planar bonding surface is formed on the side of the first sealing layer away from the packaging layer.

[0011] In a possible embodiment, the first sealing layer is fixed to one side of the wire core protrusion on the packaging layer by adhesive; or,

[0012] The first sealing layer is a flexible adhesive and is formed on one side of the wire core protrusion on the packaging layer by coating.

[0013] In a possible embodiment, in the case where the first sealing layer is fixed by adhesion, the material of the first sealing layer may be fluororubber, silicone or polyimide; or,

[0014] The first sealing layer includes a plurality of sub-sealing layer portions, and two adjacent sub-sealing layer portions are bonded and fixed by the adhesive.

[0015] In a possible embodiment, the adhesive includes at least one of epoxy, phenolic, polyester, polyurethane, silicone, polyethylene, polypropylene, polyvinyl chloride, polyester (PET), polyamide (PA), polyurethane (PU) or polyolefin (PO).

[0016] In a possible embodiment, the flexible adhesive includes at least one of fluororubber, silicone, polyimide, and epoxy resin.

[0017] In a possible embodiment, the thickness of the first sealing layer is in the range of 0.01 mm to 0.2 mm; and / or,

[0018] H1≥D-H2-H3, wherein H1 is the thickness of the first sealing layer, D is the diameter of the wire core, H2 is the thickness of the encapsulation layer, and H3 is the thickness of the adhesive layer.

[0019] In a possible embodiment, the flat vacuum via further includes a second sealing layer disposed on the packaging layer, and the second sealing layer and the first sealing layer are respectively located on two opposite sides of the packaging layer.

[0020] In a possible embodiment, when the flat vacuum through-hole is installed on the vacuum chamber, the sealing member of the vacuum chamber is tightly attached to the bonding surface of the first sealing layer to achieve installation sealing of the flat vacuum through-hole;

[0021] The width of the first sealing layer is greater than the width of the sealing member, and the difference between the width of the first sealing layer and the width of the sealing member is in the range of 1 mm to 50 mm.

[0022] In a possible embodiment, the material of the encapsulation layer may be polyester, polyamide, polyurethane, polyolefin or polyvinyl fluoride; or,

[0023] The thickness of the packaging layer is in the range of 0.01 mm to 0.1 mm.

[0024] In a possible embodiment, the material of the adhesive layer includes at least one of silicone, polyester, acrylate, polyamide, and epoxy.

[0025] The beneficial effect of the flat vacuum vial provided by the utility model is that: by arranging a first sealing layer on one side of the wire core protrusion on the packaging layer, the cable protrusion of the flat vacuum vial is filled by the first sealing layer, and a planar fitting surface is formed on the side of the first sealing layer away from the packaging layer. The flat vacuum vial is installed on a vacuum chamber, and the sealing component of the vacuum chamber is tightly attached to the fitting surface of the first sealing layer, avoiding the generation of a gap between the flat vacuum vial and the sealing component, so as to realize the installation sealing of the flat vacuum vial, improve the airtightness of the vacuum vial, and reduce the vacuum leakage rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the flat vacuum through-hole of the utility model in the first embodiment.

[0027] Figure 2 Schematic diagram of the flat vacuum through-hole of the utility model in the second embodiment.

[0028] Figure 3 FIG. 1 is a schematic diagram of a flat vacuum through-hole of the utility model in a third embodiment.

[0029] Figure 4 It is a schematic diagram of the adhesive layer and the cable in the flat vacuum through-hole of the utility model.

[0030] Figure 5 This is a cross-sectional view of the flat vacuum through-hole of the utility model installed in a vacuum chamber.

[0031] Figure 6 This is a bottom view of the flat vacuum through-hole of the utility model pressed under the sealing member.

[0032] Explanation of the reference numerals: 100, vacuum vial; 110, adhesive layer; 120, cable; 121, wire core; 130, packaging layer; 140, first sealing layer; 141, bonding surface; 142, sub-sealing layer portion; 150, adhesive; 160, second sealing layer; 200, vacuum chamber; 210, chamber cover; 220, base; 230, seal. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution in the embodiments of the utility model will be described clearly and completely below. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0034] In view of the problems existing in the prior art, the embodiment of the utility model provides a flat vacuum through-hole, see Figure 1 The flat vacuum through-hole 100 comprises: an adhesive layer 110, a plurality of cables 120, an encapsulation layer 130 and a first sealing layer 140. The adhesive layer 110 is insulating. A plurality of cables 120 are adhered and fixed on the adhesive layer 110 and are spaced apart. The insulating sleeves of the cables 120 located on the adhesive layer 110 are removed and the cores 121 are exposed and fixed to the adhesive layer 110. The insulating sleeves of the cables 120 located outside the adhesive layer 110 are retained. The cores 121 located on the adhesive layer 110 protrude from one side of the adhesive layer 110. The encapsulation layer 130 is wrapped around the outside of the adhesive layer 110 and the cores 121. The first sealing layer 140 is arranged on the side of the encapsulation layer 130 where the cores 121 protrude. A planar fitting surface 141 is formed on the side of the first sealing layer 140 away from the encapsulation layer 130.

[0035] In this embodiment, the first sealing layer 140 covers the packaging layer 130, and the raised side of the wire core 121 is filled and leveled to form a flat fitting surface 141. This design effectively eliminates the sealing risk caused by the raised wire core 121, makes the contact between the through-hole and the sealing member 230 on the vacuum chamber 200 closer, avoids the problem of a gap between the through-hole and the sealing member 230 caused by the raised cable 120, significantly improves the airtightness of the vacuum through-hole 100, and effectively solves the problem of vacuum leakage.

[0036] Figure 5 This is a cross-sectional view of the flat vacuum through-hole of the utility model installed in a vacuum chamber. Figure 6 This is a bottom view of the flat vacuum through-hole of the utility model pressed under the seal, see Figure 1 , Figure 5 as well as Figure 6 The flat vacuum through-hole 100 is installed on the vacuum chamber 200. The vacuum chamber 200 includes a base 220 and a chamber cover 210 installed on the base 220. The chamber cover 210 is provided with a groove corresponding to the base 220 for installing the seal 230. The flat vacuum through-hole 100 is placed on the base 220 and pressed against the fitting surface 141 of the first sealing layer 140 through the seal 230 to achieve the installation and sealing of the flat vacuum through-hole 100. The first sealing layer 140 is flexible, and the seal 230 is also flexible. The first sealing layer 140 and the seal 230 can be tightly attached to each other under the action of external force to achieve more effective sealing. Specifically, the seal 230 is a sealing ring.

[0037] Figure 1 FIG. 1 is a schematic diagram of a flat vacuum through-hole of the utility model in a first embodiment, see Figure 1In the first embodiment, the first sealing layer 140 is adhered and fixed to the side of the protrusion of the wire core 121 on the encapsulation layer 130 by the adhesive 150. The main function of the first sealing layer 140 is to fill the uneven surface of the encapsulation layer 130 caused by the protrusion of the wire core 121. Through the adhesion and fixation of the adhesive 150, the first sealing layer 140 can be tightly attached to the protrusion of the wire core 121 and the surrounding encapsulation layer 130 to form a continuous and smooth sealing surface, eliminating potential air leakage gaps and significantly enhancing the sealing effect of the vacuum through-hole 100. In addition, the adhesive 150 can penetrate and fill the gap between the encapsulation layer 130 and the first sealing layer 140, avoiding the generation of additional gaps between the encapsulation layer 130 and the first sealing layer 140 to affect the airtightness.

[0038] In a specific embodiment, in view of the situation where the first sealing layer 140 is adhered and fixed, the material of the first sealing layer 140 can be fluororubber, silicone or polyimide. Fluororubber has excellent elasticity and resilience, and can fit tightly with the seal 230 to form an effective sealing barrier. Fluororubber has extremely high resistance to a variety of chemical media (such as acids, alkalis, organic solvents, etc.). Fluororubber can maintain stable physical and chemical properties at high temperatures and is not easy to age, deform or fail. Silicone can maintain stable performance in an extremely wide temperature range. Silicone has good electrical insulation properties and can maintain a stable insulation effect in an electrical environment to ensure the electrical safety of the through-hole. Polyimide has excellent mechanical properties such as high strength, high modulus, and high toughness, and can withstand greater mechanical stress and impact. Polyimide is resistant to high temperatures and also has a certain resistance to a variety of chemical media.

[0039] Figure 2 FIG. 1 is a schematic diagram of a flat vacuum through-hole of the utility model in a second embodiment, see Figure 2 In the second embodiment, the first sealing layer 140 includes a plurality of sub-sealing layer portions 142, and two adjacent sub-sealing layer portions 142 are adhered and fixed by an adhesive 150. Since the surface of the encapsulation layer 130 is uneven at the protruding position of the core 121, a thicker sealing layer may not be able to fully fit with the encapsulation layer 130 and produce gaps. The first sealing layer 140 is composed of a plurality of thinner sub-sealing layer portions 142. The thinner sub-sealing layer portion 142 has higher flexibility and bendability, and can more easily adapt to surfaces with complex shapes such as the protrusions of the core 121, ensuring that the sub-sealing layer portion 142 and the protruding portion of the encapsulation layer 130 can fit tightly, reducing the generation of gaps, thereby improving air tightness.

[0040] In some possible embodiments, the adhesive 150 includes at least one of epoxy, phenolic, polyester, polyurethane, silicone, polyethylene, polypropylene, polyvinyl chloride, polyester (PET), polyamide (PA), polyurethane (PU) or polyolefin (PO).

[0041] Figure 3 FIG. 1 is a schematic diagram of a flat vacuum through-hole of the utility model in a third embodiment, see Figure 3 In the third embodiment, the first sealing layer 140 is a flexible adhesive and is formed on the side of the protrusion of the core 121 on the encapsulation layer 130 by coating. The flexible adhesive usually has good fluidity, can be easily coated on the encapsulation layer 130, and can be quickly cured to form the first sealing layer 140. When the preset height is reached, the first sealing layer 140 of the required thickness can be flexibly produced as needed by flattening with a scraper or a pressing plate, which is simple to operate and easy to process and produce. Compared with the aforementioned solution, there is no need to additionally customize the material of the first sealing layer 140 of the preset thickness, and the risk of additional gaps caused by sticking the first sealing layer 140 is also avoided.

[0042] In some possible embodiments, the flexible adhesive includes at least one of fluororubber, silicone, polyimide, and epoxy resin.

[0043] In a specific embodiment, the thickness of the first sealing layer 140 is in the range of 0.01 mm to 0.2 mm; and / or, H1 ≥ D-H2-H3, wherein H1 is the thickness of the first sealing layer 140, D is the diameter of the wire core 121, H2 is the thickness of the encapsulation layer 130, and H3 is the thickness of the adhesive layer 110. It can be understood that the first sealing layer 140 completely covers the portion of the wire core 121 protruding outside the encapsulation layer 130 and the adhesive layer 110. Since the first sealing layer 140 is flexible, under the impact of external force, the flexible first sealing layer 140 can be deformed to play a role in buffering and shock absorption, thereby effectively protecting the wire core 121 and the encapsulation layer 130.

[0044] In one embodiment, see Figure 3 and Figure 5The flat vacuum through-hole 100 further includes a second sealing layer 160 disposed on the encapsulation layer 130, and the second sealing layer 160 and the first sealing layer 140 are respectively located on opposite sides of the encapsulation layer 130. The material of the second sealing layer 160 is the same as that of the first sealing layer 140. The flat vacuum through-hole 100 is placed on the base 220, and the second sealing layer 160 is attached to the base 220. Since the second sealing layer 160 is flexible, the second sealing layer 160 and the base 220 can be closely attached to ensure air tightness. The first sealing layer 140 and the second sealing layer 160 are closely attached to the chamber cover 210 and the base 220, respectively, to form a double sealing effect on the upper and lower sides, thereby improving the air tightness of the through-hole. The first sealing layer 140 and the second sealing layer 160 are respectively located on the upper and lower sides of the flat vacuum through-hole 100, and as a buffer layer, they can effectively absorb and disperse the impact and vibration from the external environment, and protect the internal wire core 121, packaging layer 130, and adhesive layer 110 from the upper and lower sides, thereby preventing the wire core 121, packaging layer 130, and adhesive layer 110 from being damaged due to external impact and vibration.

[0045] In one embodiment, see 5 and Figure 6 When the flat vacuum through-hole 100 is installed on the vacuum chamber 200, the seal 230 of the vacuum chamber 200 is tightly attached to the fitting surface 141 of the first sealing layer 140 to achieve installation sealing of the flat vacuum through-hole 100. The width of the first sealing layer 140 is greater than the width of the seal 230, and the difference between the width of the first sealing layer 140 and the width of the seal 230 is in the range of 1mm-50mm. Since the seal 230 and the first sealing layer 140 are both made of flexible materials and are flat, when subjected to external impact or vibration, the seal 230 and the first sealing layer 140 undergo elastic deformation, ensuring that the seal 230 and the first sealing layer 140 are always tightly attached to each other, so as to ensure that the through-hole always has good airtightness. Since the width of the first sealing layer 140 is greater than that of the sealing member 230, when the vacuum through-hole 100 is installed between the chamber cover 210 and the base 220, the first sealing layer 140 can be installed more easily, ensuring that the sealing member 230 is in full contact with the first sealing layer 140, thereby avoiding gaps caused by misaligned installation positions.

[0046] In some possible embodiments, the material of the encapsulation layer 130 may be polyester, polyamide, polyurethane, polyolefin or polyvinyl fluoride.

[0047] In a specific embodiment, the thickness of the packaging layer 130 is in the range of 0.01 mm-0.1 mm.

[0048] In some possible embodiments, the material of the adhesive layer 110 includes at least one of silicone, polyester, acrylate, polyamide, and epoxy.

[0049] In some specific embodiments, see Figure 1 The encapsulation layer 130 is a pair and is respectively arranged on two opposite sides of the adhesive layer 110 to cover each other, or the encapsulation layer 130 is arranged around the adhesive layer 110 to wrap the adhesive layer 110 and the wire core 121 .

[0050] In one embodiment, the diameter of the cable 120 is in the range of 0.05 mm to 0.3 mm.

[0051] The technical effects of the flat vacuum through-hole of the utility model are explained in detail below.

[0052] 1. The protrusion of the cable 120 of the vacuum via 100 is filled by the first sealing layer 140. When the vacuum via 100 is installed in the vacuum chamber 200, the bonding surface 141 on the first sealing layer 140 is closely attached to the sealing member 230 of the vacuum chamber 200, thereby reducing the possibility of the sealing member 230 pressing on the vacuum via 100 to generate a gap, improving the airtightness of the vacuum via 100, and reducing the vacuum leakage rate.

[0053] 2. The first sealing layer 140 can be fixed by the adhesive 150 or formed by coating with a flexible adhesive to ensure the sealing effect and manufacturing convenience.

[0054] 3. Precisely control the thickness of the first sealing layer 140 and consider the thickness relationship between the core 121, the encapsulation layer 130 and the adhesive layer 110 to ensure that the first sealing layer 140 can fill the protrusions of the core 121 to form a flat surface. In addition, the first sealing layer 140 and the second sealing layer 160 play a protective role on the core 121, the encapsulation layer 130 and the adhesive layer 110.

[0055] 4. The use of an insulating adhesive layer 110 ensures the electrical isolation of the cable 120 during the fixing process, prevents short circuit or leakage of current through the adhesive layer 110, and thus improves the electrical safety and reliability of the entire through-hole. The insulating sleeve is removed from the adhesive layer 110 and the wire cores 121 are directly fixed, which reduces the physical spacing between the wire cores 121. Because the insulating sleeve itself occupies a certain space, after removal, the wire cores 121 can be arranged more closely on the adhesive layer 110, thereby increasing the density of the cable 120 per unit area, which is conducive to installing more cables 120 in a limited space.

[0056] Although the embodiments of the utility model are described in detail above, it is obvious to those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes are within the scope and spirit of the utility model described in the claims. Moreover, the utility model described herein may have other embodiments and may be implemented or realized in a variety of ways. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with ordinary skills in the field to which the utility model belongs. The words "including" and the like used herein mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

Claims

1. A flat vacuum through-hole, characterized in that: include: An adhesive layer having insulating properties; A plurality of cables are adhered and fixed on the adhesive layer and are spaced apart. The insulating sleeves of the cables on the adhesive layer are removed to expose the wire cores and are fixed to the adhesive layer. The insulating sleeves of the cable portions outside the adhesive layer are retained. The wire core portions on the adhesive layer protrude from one side of the adhesive layer. An encapsulation layer, wrapped around the adhesive layer and the outer side of the wire core; The first sealing layer is arranged on one side of the core protrusion on the packaging layer, and a planar bonding surface is formed on the side of the first sealing layer away from the packaging layer.

2. The flat vacuum feedthrough according to claim 1, characterized in that: The first sealing layer is fixed to one side of the wire core protrusion on the packaging layer by adhesive; or, The first sealing layer is a flexible adhesive and is formed on one side of the wire core protrusion on the packaging layer by coating.

3. The flat vacuum feedthrough according to claim 2, characterized in that: In the case where the first sealing layer is fixed by adhesion, the material of the first sealing layer may be fluororubber, silicone or polyimide; or, The first sealing layer includes a plurality of sub-sealing layer portions, and two adjacent sub-sealing layer portions are bonded and fixed by the adhesive.

4. The flat vacuum feedthrough according to claim 2, characterized in that: The adhesive includes at least one of epoxy, phenolic, polyester, polyurethane, silicone, polyethylene, polypropylene, polyvinyl chloride, polyesters, polyamides, polyurethanes, and polyolefins.

5. The flat vacuum feedthrough according to claim 2, characterized in that: The flexible adhesive includes at least one of fluororubber, silicone, polyimide and epoxy resin.

6. The flat vacuum feedthrough according to claim 1, characterized in that: The thickness of the first sealing layer is in the range of 0.01 mm to 0.2 mm; and / or, H1≥D-H2-H3, wherein H1 is the thickness of the first sealing layer, D is the diameter of the wire core, H2 is the thickness of the encapsulation layer, and H3 is the thickness of the adhesive layer.

7. The flat vacuum feedthrough according to claim 1, characterized in that: It also includes a second sealing layer disposed on the packaging layer, wherein the second sealing layer and the first sealing layer are respectively located on two opposite sides of the packaging layer.

8. The flat vacuum feedthrough according to any one of claims 1 to 7, characterized in that: When the flat vacuum through-hole is installed on the vacuum chamber, the sealing member of the vacuum chamber is tightly attached to the bonding surface of the first sealing layer to achieve installation sealing of the flat vacuum through-hole; The width of the first sealing layer is greater than the width of the sealing member, and the difference between the width of the first sealing layer and the width of the sealing member is in the range of 1 mm to 50 mm.

9. The flat vacuum feedthrough according to any one of claims 1 to 7, characterized in that: The material of the encapsulation layer can be polyester, polyamide, polyurethane, polyolefin or polyvinyl fluoride; or, The thickness of the packaging layer is in the range of 0.01 mm to 0.1 mm.

10. The flat vacuum feedthrough according to any one of claims 1 to 7, characterized in that: The material of the adhesive layer includes at least one of silicone, polyester, acrylate, polyamide, and epoxy.

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