Assembly for supporting MOCVD (Metal Organic Chemical Vapor Deposition) outer ring heating wire

Through the split assembly design and the limiting plate limit groove fixing structure, the problems of high cost, complex processes and high temperature deformation of existing support components are solved, and the effects of reducing production costs, improving processing efficiency and extending service life are achieved.

CN222839833UActive Publication Date: 2025-05-06JIANGSU SHIWEI SEMICON TECH CO LTD
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Patent Information

Application Number
CN202421736443.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-07-22
Publication Date
2025-05-06
Estimated Expiration
2034-07-22

AI Technical Summary

Technical Problem

When used, existing support components have high material costs, complex processes, long-term use of electric spark wire cutting and high temperature deformation and fracture, resulting in frequent replacement and reduced production capacity.

Method used

The split assembly design includes top support, bottom fixing column, side pressure plate and fixing screws. The heating wire is fixed and supported through the limiting plate and limiting groove to reduce heat conduction and improve stability.

Benefits of technology

It reduces production costs and processing complexity, improves processing efficiency and replacement efficiency, extends service life, and improves equipment production capacity and stability.

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Abstract

The utility model discloses an assembly for supporting an MOCVD outer ring heating wire, which comprises a top support, a bottom fixing column, a side edge pressing plate and a fixing screw, the top support comprises a support table, the support table is connected with a limiting plate in an integral forming mode, and the bottom of the support table is fixedly connected with a mounting plate; the bottom fixing column is mounted at the bottom of the top support, and the side wall of the upper end of the bottom fixing column abuts against the side wall of the mounting plate when the bottom fixing column is mounted; and the side edge pressing plate is mounted on the side wall of one side, far away from the mounting plate, of the upper end of the bottom fixing column in a crimping manner. The supporting assembly provided by the utility model is assembled in a split manner, so that the production cost is reduced, and the processing efficiency is effectively improved due to split processing; meanwhile, the top support is convenient to replace after being damaged; and the top support and the bottom fixing column are connected through the molybdenum screws, so that deformation damage of the fixing column due to high-temperature conduction is reduced, and the service life is prolonged.
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Description

Technical Field

[0001] The utility model belongs to the technical field of heating wire support, and in particular relates to a component for supporting an MOCVD outer ring heating wire. Background Art

[0002] The MOCVD equipment is a light-emitting diode production equipment. During the production process of the equipment, the graphite disk rotates at high speed, and the gas is blown vertically to the substrate on the graphite disk for chemical deposition. The reacted gas is discharged through the gas collecting ring on the outer ring of the graphite disk.

[0003] In order to achieve the heating treatment of the graphite disk, a heating wire needs to be set at the bottom of the graphite disk. In order to ensure the effect and safety of the heating wire during use, a support assembly is set to support the heating wire. However, the existing support assembly has the following problems:

[0004] The support assembly processed by the existing technology is an integrated part, with high material cost, complex process, and long time for wire EDM. At the same time, due to the high temperature of the outer ring heating wire, the upper end of the support column is in contact with the heating wire, which is prone to deformation and fracture, and requires frequent replacement, which reduces production capacity.

[0005] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to a person skilled in the art. Utility Model Content

[0006] The utility model aims to provide a component for supporting an MOCVD outer ring heating wire, which can solve the problems existing in the existing supporting components during use.

[0007] In order to achieve the above purpose, the technical solution provided by a specific embodiment of the utility model is as follows:

[0008] A component for supporting an outer ring heating wire of a MOCVD device, comprising:

[0009] The top support includes a support platform. When in use, the top support is a component that contacts the outer ring heating wire, so the outer ring heating wire is supported by the top support. The support platform is connected to a limiting plate in an integrally formed manner, and the outer ring heating wire can be fixed by the limiting plate to ensure the stability of the outer ring heating wire when supporting. The bottom of the support platform is fixedly connected to a mounting plate, and the mounting plate is used to install the components.

[0010] The bottom fixing column is installed at the bottom of the top support so as to support the top support through the bottom fixing column to ensure the stability of the top support when in use. When the bottom fixing column is installed, the side wall of the upper end abuts against the side wall of the mounting plate, and the top support and the bottom fixing column are connected together through the mounting plate.

[0011] The side pressure plate is installed on the side wall of the upper end of the bottom fixing column away from the mounting plate in a crimping manner. The stability of the connection between the top support and the bottom fixing column is ensured by crimping the side pressure plate.

[0012] The fixing screws are used to fix the top support, the bottom fixing column and the side pressure plate, so that the top support, the bottom fixing column and the side pressure plate are fixed together by the fixing screws to ensure a firm connection between the three.

[0013] In one or more embodiments of the utility model, a plurality of limit plates are provided, and limit grooves for installing the heating wire are formed between the plurality of limit plates. The outer ring heating wire is installed through the limit grooves formed between the limit plates, so that the top support can stably support the outer ring heating wire. At the same time, the limit grooves also have the function of preventing the outer ring heating wire from collapsing and deforming outward.

[0014] In one or more embodiments of the present invention, a connecting plate is fixedly connected to the bottom of the support platform, and the mounting plate is fixedly connected to the connecting plate.

[0015] In one or more embodiments of the present invention, the mounting plate is an L-plate, and a pair of first threaded holes are provided on the wall plate of the mounting plate away from the connecting plate, so that the top support can be connected to other components through the first threaded holes.

[0016] In one or more embodiments of the utility model, a pair of second threaded holes are provided at the upper edge of the bottom fixing column, and the top support and the bottom fixing column are conveniently installed together through the second threaded holes. A plurality of mounting holes are provided on the lower end wall plate of the bottom fixing column, and the bottom fixing column is installed and fixed through the mounting holes to ensure the stability of the bottom fixing column, thereby making the top support stable during use.

[0017] In one or more embodiments of the present invention, a pair of third threaded holes are provided on the side pressure plate, and an oval hole is provided at the upper ends of the pair of third threaded holes.

[0018] In one or more embodiments of the present invention, a pair of fixing screws are provided, and each of the pair of fixing screws includes a screw rod and a screw head.

[0019] In one or more embodiments of the utility model, the screw head is threadedly connected to the third threaded hole, the first threaded hole and the second threaded hole in sequence, so that under the action of the screw head, the top support, the bottom fixing column and the side pressure plate are fixed together through the third threaded hole, the first threaded hole and the second threaded hole. The screw rod is placed in the oval hole, so that the fixing screw is stable after installation.

[0020] In one or more embodiments of the present invention, the top support, the bottom fixing column and the side pressure plate are all made of TZM alloy.

[0021] In one or more embodiments of the present invention, the fixing screw is made of molybdenum.

[0022] Compared with the prior art, the support assembly provided by the utility model adopts split assembly, which reduces production costs, and the split processing effectively improves processing efficiency; at the same time, it makes it easy to replace the top support after it is damaged; the top support and the bottom fixed column are connected by molybdenum screws, which reduces the deformation damage of the fixed column due to high temperature conduction and increases the service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 A three-dimensional component supporting an MOCVD outer ring heating wire in an embodiment of the utility model Figure 1 ;

[0025] Figure 2 A three-dimensional component supporting an MOCVD outer ring heating wire in an embodiment of the utility model Figure 2 ;

[0026] Figure 3 It is an exploded view of a component supporting an MOCVD outer ring heating wire in one embodiment of the utility model.

[0027] Description of main reference numerals:

[0028] 1-top support, 11-support platform, 12-limiting plate, 13-connecting plate, 14-mounting plate, 15-first threaded hole, 2-bottom fixing column, 21-second threaded hole, 22-mounting hole, 3-side pressure plate, 31-third threaded hole, 32-oval hole, 4-fixing screw, 41-screw, 42-screw head. DETAILED DESCRIPTION

[0029] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0030] like Figure 1 to Figure 3 As shown, a component for supporting an MOCVD outer ring heating wire in an embodiment of the utility model includes a top support 1, a bottom fixing column 2, a side pressure plate 3 and a fixing screw 4.

[0031] like Figure 1 to Figure 3 As shown, the top support 1 includes a support platform 11. When in use, the top support 1 is a component for contacting the outer ring heating wire, so the outer ring heating wire is supported by the top support 1. The support platform 11 is connected to a limiting plate 12 in an integrally formed manner, and the outer ring heating wire can be fixed by the limiting plate 12 to ensure the stability of the outer ring heating wire when supporting. The bottom of the support platform 11 is fixedly connected to a mounting plate 14, which is used to install components.

[0032] like Figure 2 and Figure 3 As shown, a plurality of limit plates 12 are provided, and a limit groove for installing the heating wire is formed between the plurality of limit plates 12. The outer ring heating wire is installed through the limit groove formed between the limit plates 12, so that the top support 1 can stably support the outer ring heating wire. At the same time, the limit groove also has the function of preventing the outer ring heating wire from collapsing and deforming outward.

[0033] like Figure 3 As shown, a connecting plate 13 is fixedly connected to the bottom of the support platform 11 , and a mounting plate 14 is fixedly connected to the connecting plate 13 .

[0034] like Figure 3 As shown, the mounting plate 14 is an L-plate, and a pair of first threaded holes 15 are provided on the wall plate of the mounting plate 14 away from the connecting plate 13, through which the top support 1 can be connected to other components.

[0035] like Figure 1 to Figure 3 As shown, the bottom fixing column 2 is installed at the bottom of the top support 1, so that the top support 1 is supported by the bottom fixing column 2 to ensure the stability of the top support 1 when in use. When the bottom fixing column 2 is installed, the side wall of the upper end abuts against the side wall of the mounting plate 14, and the top support 1 and the bottom fixing column 2 are connected together through the mounting plate 14.

[0036] like Figure 3 As shown, a pair of second threaded holes 21 are provided at the upper edge of the bottom fixing column 2, and the top support 1 and the bottom fixing column 2 are conveniently installed together through the second threaded holes 21. A plurality of mounting holes 22 are provided on the lower end wall plate of the bottom fixing column 2, and the bottom fixing column 2 is installed and fixed on the machine equipment through the mounting holes 22 to ensure the stability of the bottom fixing column 2, so that the top support 1 is stable when in use.

[0037] like Figure 1 to Figure 3 As shown, the side pressure plate 3 is installed on the side wall of the upper end of the bottom fixing column 2 away from the mounting plate 14 in a crimping manner. The crimping of the side pressure plate 3 ensures the stability of the connection between the top support 1 and the bottom fixing column 2.

[0038] like Figure 3 As shown, a pair of third threaded holes 31 are formed on the side pressure plate 3 , and an oval hole 32 is formed at the upper end of the pair of third threaded holes 31 .

[0039] like Figure 1 to Figure 3 As shown, the fixing screws 4 are used to fix the top support 1, the bottom fixing column 2 and the side pressure plate 3, so that the top support 1, the bottom fixing column 2 and the side pressure plate 3 are fixed together by the fixing screws 4 to ensure that the three are firmly connected.

[0040] like Figure 1 to Figure 3 As shown, a pair of fixing screws 4 is provided, and each of the pair of fixing screws 4 includes a screw rod 41 and a screw head 42 .

[0041] like Figure 3 As shown, the screw head 42 is threadedly connected to the third threaded hole 31, the first threaded hole 15 and the second threaded hole 21 in sequence, so that under the action of the screw head 42, the top support 1, the bottom fixing column 2 and the side pressure plate 3 are fixed together through the third threaded hole 31, the first threaded hole 15 and the second threaded hole 21. The screw rod 41 is placed in the oval hole 32, so that the fixing screw 4 is stable after installation.

[0042] Preferably, the top support 1, the bottom fixing column 2 and the side pressure plate 3 are all made of TZM alloy, and the fixing screw 4 is made of molybdenum.

[0043] Working principle: The MOCVD outer ring heating wire support assembly provided in the present application is composed of a top support 1, a bottom fixing column 2, a side pressure plate 3 and a fixing screw 4; the top support 1 and the bottom fixing column 2 are connected and fixed through the side pressure plate 3 by the fixing screw 4; the main function of the top support 1 is to fix the outer ring heating wire and prevent collapse and deformation outward expansion; the function of the bottom fixing column 2 is to connect the machine equipment and fix the top support 1, and the connection is made through the fixing screw 4, which can reduce heat conduction and increase the service life of the parts;

[0044] The support assembly adopts split assembly, which reduces the production cost, and the split processing can effectively improve the processing efficiency; at the same time, the top support 1 is in contact with the heating wire and is easily damaged during use, so when replacing it, only the top support 1 needs to be replaced, which reduces the cost of using the support assembly;

[0045] At the same time, compared with an integrated component, the present application provides a large modification space, and provides more avoidance space for the outer ring heating wire that is frequently used and may deform, thereby ensuring the normal production of the equipment and effectively improving production capacity.

[0046] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0047] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A component for supporting an outer ring heating wire of a MOCVD, characterized in that: include: The top support comprises a support platform, to which a limiting plate is connected in an integral manner, and a mounting plate is fixedly connected to the bottom of the support platform; A bottom fixing column, the bottom fixing column is installed at the bottom of the top support, and the bottom fixing column is abutted against the side wall of the mounting plate through the side wall of the upper end when installed; A side pressure plate, which is installed on the side wall of the upper end of the bottom fixing column away from the mounting plate in a crimping manner; The fixing screws are used to fix the top support, the bottom fixing column and the side pressure plate.

2. The component for supporting MOCVD outer ring heating wire according to claim 1, characterized in that: A plurality of the limiting plates are provided, and limiting grooves for installing the heating wire are formed between the plurality of limiting plates.

3. The component for supporting MOCVD outer ring heating wire according to claim 1, characterized in that: A connecting plate is fixedly connected to the bottom of the support platform, and the mounting plate is fixedly connected to the connecting plate.

4. The component for supporting MOCVD outer ring heating wire according to claim 1, characterized in that: The installation plate is an L-plate, and a pair of first threaded holes are provided on a wall plate of the installation plate away from the connecting plate.

5. The component for supporting MOCVD outer ring heating wire according to claim 4, characterized in that: A pair of second threaded holes are provided at the upper edge of the bottom fixing column, and a plurality of mounting holes are provided on the lower wall plate of the bottom fixing column.

6. The component for supporting the outer ring heating wire of MOCVD according to claim 5, characterized in that: A pair of third threaded holes is provided on the side pressure plate, and an oval hole is provided at the upper ends of the pair of third threaded holes.

7. The component for supporting the MOCVD outer ring heating wire according to claim 6, characterized in that: A pair of fixing screws is provided, and each of the pair of fixing screws comprises a screw rod and a screw head.

8. The component for supporting the MOCVD outer ring heating wire according to claim 7, characterized in that: The screw head is threadedly connected in the third threaded hole, the first threaded hole and the second threaded hole in sequence, and the screw rod is placed in the oval hole.

9. The component for supporting MOCVD outer ring heating wire according to claim 1, characterized in that: The top support, bottom fixing column and side pressure plate are all made of TZM alloy.

10. The component for supporting MOCVD outer ring heating wire according to claim 1, characterized in that: The fixing screw is made of molybdenum.