Purification and impurity removal device for polycrystalline silicon production

Abstract

The utility model relates to the field of polycrystalline silicon production equipment, and discloses a purification and impurity removal device for polycrystalline silicon production, the purification and impurity removal device comprises a heat preservation box and a charging barrel arranged in the heat preservation box, the charging barrel is fixedly installed on the inner wall of the bottom of the heat preservation box, the top of the charging barrel is of an opening structure, and an annular heater is fixedly installed on the outer side wall of the charging barrel; a hydraulic cylinder is fixedly installed at the top of the heat preservation box, the output shaft end of the hydraulic cylinder extends into the heat preservation box and is fixedly provided with a cover plate, the bottom of the cover plate makes contact with the top of the charging barrel, and the cover plate is provided with a material overturning mechanism used for overturning the molten polycrystalline silicon. Compared with the prior art, the device has the following advantages and effects that when the polycrystalline silicon material is heated and melted, the polycrystalline silicon material can be turned over comprehensively, melting of the polycrystalline silicon material is accelerated, it is guaranteed that the polycrystalline silicon material is heated uniformly, and the quality and efficiency of purification and impurity removal are improved.

Description

Technical Field

[0001] The present application relates to the technical field of polysilicon production equipment, and in particular to a purification and impurity removal device for polysilicon production. Background Art

[0002] Polycrystalline silicon is a form of elemental silicon. When molten elemental silicon solidifies under supercooling conditions, silicon atoms are arranged in a diamond lattice to form many crystal nuclei. If these crystal nuclei grow into grains with different crystal plane orientations, these grains will combine and crystallize into polycrystalline silicon. Polycrystalline silicon has semiconductor properties and is an extremely important and excellent semiconductor material. When producing polycrystalline silicon, a purification and impurity removal process is required.

[0003] In the related art, when purifying and removing impurities from polycrystalline silicon, a common method is to heat the polycrystalline silicon to above the melting point and then slowly cool it so that the impurity elements diffuse into the liquid phase to form SiO2, and then remove the waste to make single crystal silicon, thereby achieving the purpose of purification. However, when removing impurities from the polycrystalline silicon and heating and melting the polycrystalline silicon material, it often happens that when the polycrystalline silicon is half melted, the solid will float on the melt because its density is lower than that of the melt, making it difficult for the remaining solid to contact the heat generated by the heater, thereby greatly reducing the heating effect of the remaining solid, causing uneven heating, reducing the rate of the melting reaction, and further affecting the efficiency and quality of impurity removal and purification. Therefore, we propose a purification and impurity removal device for polycrystalline silicon production to solve the above problems. Utility Model Content

[0004] The purpose of the present application is to provide a purification and impurity removal device for polysilicon production, which has the effect of fully turning the polysilicon material over when the polysilicon material is heated and melted, accelerating the melting of the polysilicon material, ensuring that the polysilicon material is heated evenly, and improving the quality and efficiency of purification and impurity removal.

[0005] The above technical purpose of the present application is achieved through the following technical solutions: a purification and impurity removal device for polysilicon production, comprising an insulation box and a barrel arranged inside the insulation box, the barrel is fixedly mounted on the bottom inner wall of the insulation box, the top of the barrel is an open structure, an annular heater is fixedly mounted on the outer wall of the barrel, a hydraulic cylinder is fixedly mounted on the top of the insulation box, the output shaft end of the hydraulic cylinder extends into the insulation box and is fixedly mounted with a cover plate, the bottom of the cover plate is in contact with the top of the barrel, and a turning mechanism for turning the molten polysilicon is arranged on the cover plate.

[0006] The present application is further configured as follows: the diameter of the cover plate is larger than the outer diameter of the barrel.

[0007] The present application is further configured as follows: the material turning mechanism includes a hollow vertical shaft, a connecting seat, two stirring shafts, multiple material turning rods, a motor, an active bevel gear and a driven bevel gear. The hollow vertical shaft is rotatably mounted on the top center part of the cover plate, the bottom end of the hollow vertical shaft extends into the barrel, the connecting seat is fixedly mounted on the bottom end of the hollow vertical shaft, the two stirring shafts are rotatably mounted on both sides of the connecting seat, multiple material turning rods are fixedly mounted on the two stirring shafts and are evenly distributed, the motor is fixedly mounted on the top of the cover plate, the active bevel gear is fixedly mounted on the output shaft end of the motor, the driven bevel gear is fixedly sleeved on the top end of the hollow vertical shaft, and the active bevel gear and the driven bevel gear are meshed.

[0008] The further configuration of the present application is as follows: the material turning mechanism also includes two first transmission bevel gears, a transmission vertical shaft, a second transmission bevel gear and a third transmission bevel gear. A cavity is opened in the connecting seat, and the ends of the two stirring shafts close to each other extend into the cavity. The two first transmission bevel gears are respectively fixedly installed on the ends of the two stirring shafts close to each other, the transmission vertical shaft is rotatably installed in the hollow vertical shaft, the bottom end of the transmission vertical shaft extends into the cavity, the second transmission bevel gear is fixedly installed on the bottom end of the transmission vertical shaft, the two first transmission bevel gears are meshed with the second transmission bevel gear, the top end of the transmission vertical shaft extends outside the hollow vertical shaft, the third transmission bevel gear is fixedly installed on the top end of the transmission vertical shaft, and the third transmission bevel gear is meshed with the active bevel gear.

[0009] The present application is further configured as follows: a protective cover is fixedly installed on the top of the cover plate, and the motor, the active bevel gear, the driven bevel gear and the third transmission bevel gear are all located inside the protective cover.

[0010] The present application is further configured as follows: the front side of the insulated box is an open structure, and a box door is rotatably mounted on the front side wall of the insulated box.

[0011] The present application includes at least one of the following beneficial technical effects:

[0012] 1. The present application uses an electric hydraulic cylinder to control the vertical lifting of the cover box turning mechanism, and uses the cover to seal the top of the barrel. During the turning process of the molten polysilicon in the barrel, the polysilicon solution is prevented from splashing out of the barrel.

[0013] 2. The present application utilizes a turning mechanism composed of a hollow vertical shaft, a connecting seat, two stirring shafts, multiple turning rods, a motor, an active bevel gear, a driven bevel gear, two first transmission bevel gears, a transmission vertical shaft, a second transmission bevel gear and a third transmission bevel gear. It can stir and turn the molten polysilicon material through the coordinated action of horizontal stirring and turning and vertical stirring and turning, so that the polysilicon material can be heated evenly inside the barrel, the melting speed of the polysilicon material can be accelerated, and the quality and efficiency of purification and impurity removal can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0015] Figure 1 It is a schematic diagram of the three-dimensional structure of this embodiment.

[0016] Figure 2 It is a schematic diagram of the main cross-sectional structure of this embodiment.

[0017] Figure 3 yes Figure 2 Schematic diagram of the enlarged structure of part A.

[0018] Figure 4 It is a partial three-dimensional structural diagram of the material turning mechanism.

[0019] In the figure, 1. insulation box; 2. box door; 3. barrel; 4. annular heater; 5. hydraulic cylinder; 6. cover plate; 7. hollow vertical shaft; 8. connecting seat; 9. stirring shaft; 10. turning rod; 11. motor; 12. driving bevel gear; 13. driven bevel gear; 14. first transmission bevel gear; 15. transmission vertical shaft; 16. second transmission bevel gear; 17. third transmission bevel gear; 18. protective cover. DETAILED DESCRIPTION

[0020] The technical solution of the present application will be clearly and completely described below in conjunction with specific embodiments. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments of the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present application.

[0021] See also Figure 1 , Figure 2 , Figure 3 and Figure 4The present application provides a purification and impurity removal device for polysilicon production, comprising an insulation box 1 and a barrel 3 arranged inside the insulation box 1. The front side of the insulation box 1 is an open structure, and a box door 2 is rotatably installed on the front side wall of the insulation box 1. The barrel 3 is fixedly installed on the bottom inner wall of the insulation box 1. The top of the barrel 3 is an open structure. The barrel 3 is used to contain polysilicon materials. An annular heater 4 is fixedly installed on the outer side wall of the barrel 3. The annular heater 4 is used to heat and melt the polysilicon materials contained in the barrel 3. A hydraulic cylinder 5 is fixedly installed on the top of the insulation box 1. The output shaft end of the hydraulic cylinder 5 extends into the insulation box 1 and is fixedly installed with a cover plate 6. The hydraulic cylinder 5 is used to control the lifting and lowering of the cover plate 6. The bottom of the cover plate 6 contacts the top of the barrel 3. The cover plate 6 is used to seal the top of the barrel 3, wherein:

[0022] The cover plate 6 is provided with a turning mechanism for turning the molten polysilicon, and the turning mechanism includes a hollow vertical shaft 7, a connecting seat 8, two stirring shafts 9, a plurality of turning rods 10, a motor 11, an active bevel gear 12, a driven bevel gear 13, two first transmission bevel gears 14, a transmission vertical shaft 15, a second transmission bevel gear 16 and a third transmission bevel gear 17. The hollow vertical shaft 7 is rotatably mounted on the top center of the cover plate 6, and the bottom end of the hollow vertical shaft 7 extends into the barrel 3. The connecting seat 8 is fixedly mounted on the bottom end of the hollow vertical shaft 7. The two stirring shafts 9 are divided into The two stirring shafts 9 are fixedly mounted on the two sides of the connecting seat 8, and a plurality of turning rods 10 are fixedly mounted on the two stirring shafts 9 and are evenly distributed. The motor 11 is fixedly mounted on the top of the cover plate 6. The active bevel gear 12 is fixedly mounted on the output shaft end of the motor 11. The driven bevel gear 13 is fixedly sleeved on the top of the hollow vertical shaft 7. The active bevel gear 12 and the driven bevel gear 13 are meshed. The motor 11 is used to control the rotation of the active bevel gear 12. The meshing transmission effect of the active bevel gear 12 and the driven bevel gear 13 can be used to control the hollow vertical shaft 7, the connecting seat 8, and the two stirring shafts 9. The mixing shaft 9 and the plurality of turning rods 10 can rotate to stir and turn the molten polysilicon horizontally. A cavity is provided in the connecting seat 8. The ends of the two stirring shafts 9 close to each other extend into the cavity. The two first transmission bevel gears 14 are respectively fixedly mounted on the ends of the two stirring shafts 9 close to each other. The transmission vertical shaft 15 is rotatably mounted in the hollow vertical shaft 7. The bottom end of the transmission vertical shaft 15 extends into the cavity. The second transmission bevel gear 16 is fixedly mounted on the bottom end of the transmission vertical shaft 15. The two first transmission bevel gears 14 are connected to the second transmission bevel gear 16 is meshed, the top end of the transmission vertical shaft 15 extends to the outside of the hollow vertical shaft 7, the third transmission bevel gear 17 is fixedly installed on the top end of the transmission vertical shaft 15, the third transmission bevel gear 17 is meshed with the active bevel gear 12, and the meshing transmission of the active bevel gear 12 and the third transmission bevel gear 17 can be used to control the rotation of the transmission vertical shaft 15. The meshing transmission of the two first transmission bevel gears 14 and the second transmission bevel gear 16 can be used to control the rotation of the two stirring shafts 9 and the multiple turning rods 10, so that the molten polysilicon can be vertically stirred and turned.

[0023] In this embodiment, the diameter of the cover plate 6 is larger than the outer diameter of the barrel 3 , so as to ensure that the top of the barrel 3 is fully covered.

[0024] In this embodiment, a protective cover 18 is fixedly installed on the top of the cover plate 6, and the motor 11, the active bevel gear 12, the driven bevel gear 13 and the third transmission bevel gear 17 are all located in the protective cover 18. The protective cover 18 can be used to isolate and protect the motor 11, the active bevel gear 12, the driven bevel gear 13 and the third transmission bevel gear 17.

[0025] In this embodiment, it should be noted that the annular heater 4, hydraulic cylinder 5 and motor 11 can all be purchased on the market or customized in the factory, and their line connection method and control method are mature technologies in this field, so they will not be repeated in the specification.

[0026] Through the above structure, the purification and impurity removal device for polysilicon production provided by the present application can, when the polysilicon material is heated and melted, be able to fully turn the polysilicon material over, speed up the melting of the polysilicon material, ensure that the polysilicon material is heated evenly, and improve the quality and efficiency of purification and impurity removal. During the specific operation, open the box door 2, put the polysilicon material into the barrel 3, close the box door 2, start the annular heater 4 to heat and melt the polysilicon material. When the polysilicon material is melted, the hydraulic cylinder 5 is controlled to extend so that the cover plate 6 is vertically lowered until it contacts the top of the barrel 3. At this time, the lower half of the hollow vertical shaft 7, the connecting seat 8, the two stirring shafts 9 and the multiple turning rods 10 are all located in the barrel 3. Then the motor 11 is started to run, and the motor 11 drives the active bevel gear 12 to rotate. At this time, the meshing transmission effect of the active bevel gear 12 and the driven bevel gear 13 can be used to control the hollow vertical shaft 7, the connecting seat 8, By rotating the two stirring shafts 9 and the plurality of turning rods 10, the molten polysilicon can be horizontally stirred and turned. At this time, the meshing transmission of the active bevel gear 12 and the third transmission bevel gear 17 can be used to control the rotation of the transmission vertical shaft 15. By utilizing the meshing transmission of the two first transmission bevel gears 14 and the second transmission bevel gear 16, the two stirring shafts 9 and the plurality of turning rods 10 can be controlled to rotate, so that the molten polysilicon can be vertically stirred and turned. Through the coordinated action of horizontal stirring and turning and vertical stirring and turning, the polysilicon material can be heated evenly inside the barrel 3, and the melting speed of the polysilicon material can be accelerated. After the polysilicon material is melted, the annular heater 4 is turned off, the motor 11 is stopped, and the hydraulic cylinder 5 is controlled to shrink and reset, so that the cover plate 6 can be controlled to rise and return to its position, and the turning mechanism is moved out of the barrel 3. After the polysilicon material is slowly cooled, the box door 2 is opened to take out and remove the waste, thus completing the purification and impurity removal operation.

Claims

1. A purification and impurity removal device for polysilicon production, characterized in that: The invention comprises an insulation box (1) and a barrel (3) arranged inside the insulation box (1), wherein the barrel (3) is fixedly mounted on the bottom inner wall of the insulation box (1), the top of the barrel (3) is an open structure, an annular heater (4) is fixedly mounted on the outer wall of the barrel (3), a hydraulic cylinder (5) is fixedly mounted on the top of the insulation box (1), the output shaft end of the hydraulic cylinder (5) extends into the insulation box (1) and is fixedly mounted with a cover plate (6), the bottom of the cover plate (6) is in contact with the top of the barrel (3), and a turning mechanism for turning molten polysilicon is arranged on the cover plate (6).

2. The purification and impurity removal device for polysilicon production according to claim 1, characterized in that: The diameter of the cover plate (6) is greater than the outer diameter of the barrel (3).

3. The purification and impurity removal device for polysilicon production according to claim 1, characterized in that: The material turning mechanism comprises a hollow vertical shaft (7), a connecting seat (8), two stirring shafts (9), a plurality of material turning rods (10), a motor (11), an active bevel gear (12) and a driven bevel gear (13); the hollow vertical shaft (7) is rotatably mounted on the top center portion of the cover plate (6); the bottom end of the hollow vertical shaft (7) extends into the barrel (3); the connecting seat (8) is fixedly mounted on the bottom end of the hollow vertical shaft (7); the two stirring shafts (9) are rotatably mounted on both sides of the connecting seat (8); a plurality of material turning rods (10) are fixedly mounted on the two stirring shafts (9) and are evenly distributed; the motor (11) is fixedly mounted on the top of the cover plate (6); the active bevel gear (12) is fixedly mounted on the output shaft end of the motor (11); the driven bevel gear (13) is fixedly sleeved on the top end of the hollow vertical shaft (7); the active bevel gear (12) and the driven bevel gear (13) are meshed.

4. The purification and impurity removal device for polysilicon production according to claim 3, characterized in that: The material turning mechanism further comprises two first transmission bevel gears (14), a transmission vertical shaft (15), a second transmission bevel gear (16) and a third transmission bevel gear (17). A cavity is provided in the connecting seat (8). The ends of the two stirring shafts (9) close to each other extend into the cavity. The two first transmission bevel gears (14) are respectively fixedly mounted on the ends of the two stirring shafts (9) close to each other. The transmission vertical shaft (15) is rotatably mounted in the hollow vertical shaft (7). The bottom end of the transmission vertical shaft (15) extends into the cavity. The second transmission bevel gear (16) is fixedly mounted on the bottom end of the transmission vertical shaft (15). The two first transmission bevel gears (14) are meshed with the second transmission bevel gear (16). The top end of the transmission vertical shaft (15) extends outside the hollow vertical shaft (7). The third transmission bevel gear (17) is fixedly mounted on the top end of the transmission vertical shaft (15). The third transmission bevel gear (17) meshes with the active bevel gear (12).

5. The purification and impurity removal device for polysilicon production according to claim 3, characterized in that: A protective cover (18) is fixedly mounted on the top of the cover plate (6); the motor (11), the active bevel gear (12), the driven bevel gear (13) and the third transmission bevel gear (17) are all located inside the protective cover (18).

6. The purification and impurity removal device for polysilicon production according to claim 1, characterized in that: The front side of the thermal insulation box (1) is an open structure, and a box door (2) is rotatably mounted on the front side wall of the thermal insulation box (1).

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