Scraper for scraping and coating glass paste on GPP chip

Abstract

The utility model relates to the technical field of scrapers used in the chip manufacturing process, in particular to a scraper for scraping and coating glass paste on a GPP chip, which comprises a base, a stepping motor, a vacuum chuck, a support, a reciprocating motion mechanism and a scraper assembly, the stepping motor is fixedly installed on the base, an output shaft of the stepping motor is fixedly connected with the vacuum chuck, and the vacuum chuck is fixedly connected with the support. The support is fixedly installed on the base, the reciprocating motion mechanism is fixedly installed on the support and arranged on the side portion of the vacuum suction cup, the scraper assembly is installed on the reciprocating motion mechanism and arranged above the vacuum suction cup, and the stepping motor can achieve accurate position and speed control. The rotation angle can be quantitatively controlled when the vacuum chuck is driven to rotate; the reciprocating motion mechanism drives the scraper assembly to do reciprocating motion and is matched with the vacuum suction cup, reciprocating blade coating can be achieved, blade coating is conducted again after the scraper assembly rotates by a certain angle, manual blade coating is avoided, manpower is saved, and meanwhile blade coating flatness and uniformity are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of scrapers used in a chip manufacturing process, in particular to a scraper for scraping glass slurry on a GPP chip. Background Art

[0002] As a basic electronic component, chips have been widely used in various fields. In recent years, glass passivated (GPP) chips have been widely recognized by the electronics industry for their reliable stability. This GPP chip uses a photoresist mask and a V-groove or mechanically scratches a V-groove table before the silicon diffusion sheet is metallized. Then, glass powder is applied to the junction surface for table passivation. There are three main methods for coating glass: electrophoresis, spin coating, and medical scalpel method. The medical scalpel method is currently the most widely used method. This method is simple and does not require any complex equipment, but the disadvantage is that it is completely dependent on manual labor, which is not only labor-intensive, but also has poor uniformity in film thickness, and the blade is also prone to damage the surface structure of the silicon wafer. Summary of the invention

[0003] In order to overcome the technical problem that the medical scalpel method completely relies on manual labor, the utility model provides a scraper for scraping glass slurry on a GPP chip.

[0004] The utility model provides a scraper for scraping glass slurry on a GPP chip, which adopts the following technical solution:

[0005] A scraper for scraping glass slurry on a GPP chip comprises a base, a stepper motor, a vacuum suction cup, a bracket, a reciprocating motion mechanism and a scraper assembly, wherein the stepper motor is fixedly mounted on the upper part of the base, the output shaft of the stepper motor is fixedly connected to the vacuum suction cup, the bracket is fixedly mounted on the upper part of the base, the reciprocating motion mechanism is fixedly mounted on the bracket, the reciprocating motion mechanism is arranged on the side of the vacuum suction cup, the scraper assembly is mounted on the reciprocating motion mechanism, and the scraper assembly is arranged above the vacuum suction cup.

[0006] By adopting the above technical scheme, the output shaft of the stepper motor is fixedly connected to the bottom of the vacuum suction cup, so that the stepper motor can drive the vacuum suction cup to rotate. In addition, the stepper motor can realize precise position control and speed control, so as to realize quantitative control of the rotation angle of the vacuum suction cup; the scraper assembly is installed on the reciprocating motion mechanism, so that the scraper assembly can realize reciprocating motion under the drive of the reciprocating motion mechanism, that is, complete the scraping of the glass slurry, and cooperate with the vacuum suction cup driven by the stepper motor to realize scraping twice along the diagonal direction of the chip, and then scrape twice after rotating a certain angle, thereby avoiding manual operation, saving manpower and improving the smoothness and uniformity of the scraping.

[0007] Preferably, the reciprocating motion mechanism includes a driving assembly, a slide rail and a slider, the driving assembly is fixedly mounted on the side of the bracket, the driving assembly drives the connected slider, the slide rail is fixedly mounted on the bracket, and the slider is slidably mounted in the slide rail.

[0008] Preferably, the driving assembly includes a driving motor, a turntable and a connecting rod, the driving motor is fixedly mounted on a base, the turntable is fixedly connected to an output shaft of the driving motor, a protrusion is provided on the turntable, the protrusion is eccentrically arranged to the turntable, the connecting rod is slidably connected to the protrusion, one end of the connecting rod is rotatably mounted on a bracket, and the other end is rotatably connected to a slider.

[0009] Preferably, a slide groove is provided on the connecting rod, the slide groove is matched with the protrusion, and the protrusion is slidably installed in the slide groove.

[0010] By adopting the above technical solution, the output shaft of the driving motor is fixedly connected to the turntable, that is, the driving motor drives the turntable to rotate. There is an eccentrically arranged protrusion on the turntable, that is, the rotation of the turntable drives the protrusion to rotate around the center of the turntable. The protrusion is slidably installed in the sliding groove of the connecting rod, so that the rotation of the protrusion around the center of the turntable drives the connecting rod to move, and finally the connecting rod drives the slider to slide in the slide rail.

[0011] Preferably, the scraper assembly comprises a scraper and a sleeve, the sleeve is fixedly connected to the slider, and the scraper is rotatably connected to the sleeve.

[0012] Preferably, a slot is provided in the sleeve, and the cross-section of the slot is fan-shaped.

[0013] Preferably, a clamping block is provided on the rotating shaft of the scraper, and the clamping block can be rotatably installed inside the clamping slot, and the clamping block is adapted to the clamping slot.

[0014] By adopting the above technical solution, a fan-shaped slot is opened in the sleeve, and a block matched with the slot is arranged on the rotating shaft of the scraper. When the scraper is driven by the slider to slide on the chip to scrape the glass slurry, the block is stuck on one side of the slot sector, that is, the position of the scraper is controlled to ensure the uniform thickness of the scraped glass slurry; when the slider moves to the end of the slide rail, the scraper disengages from the vacuum suction cup and naturally droops under the action of gravity, the slider starts to move in the opposite direction, and the block on the scraper rotates in the slot and is stuck on the other side of the slot sector, so that the reciprocating scraping of the glass slurry can be realized.

[0015] Preferably, the stepper motor is configured to rotate a quarter of a turn for each reciprocating stroke of the slider.

[0016] By adopting the above technical solution, by setting the stepping motor to rotate a quarter of a circle every time the slider slides a reciprocating stroke, automatic reversal of the chip scraping glass slurry can be achieved, thereby better ensuring the smoothness and uniformity of the scraping.

[0017] In summary, the utility model has the following beneficial effects:

[0018] 1. The utility model discloses a scraper for scraping glass paste on a GPP chip. The output shaft of a stepper motor is fixedly connected to the bottom of a vacuum suction cup, so that the stepper motor can drive the vacuum suction cup to rotate. In addition, the stepper motor can realize precise position control and speed control, so as to realize quantitative control of the rotation angle of the vacuum suction cup. The scraper assembly is installed on a reciprocating motion mechanism, so that the scraper assembly can realize reciprocating motion under the drive of the reciprocating motion mechanism, that is, complete the scraping of the glass paste, and cooperate with the vacuum suction cup driven by the stepper motor, so as to realize the process requirement of reciprocating scraping of the chip and scraping again after rotating a certain angle, thereby avoiding manual operation, saving manpower and improving the smoothness and uniformity of the scraping.

[0019] 2. The utility model is a scraper for scraping glass paste on GPP chips. The output shaft of the driving motor is fixedly connected to the turntable, that is, the driving motor drives the turntable to rotate. There is an eccentrically arranged protrusion on the turntable, that is, the rotation of the turntable drives the protrusion to rotate around the center of the turntable. The protrusion is slidably installed in the sliding groove of the connecting rod, so that the rotation of the protrusion around the center of the turntable drives the connecting rod to move, and finally the connecting rod drives the slider to slide in the slide rail.

[0020] 3. The utility model provides a scraper for applying glass paste to a GPP chip. A fan-shaped slot is provided in a sleeve, and a block matched with the slot is arranged on the rotating shaft of the scraper. When the scraper is driven by a slider to slide on the chip to apply the glass paste, the block is stuck on one side of the fan-shaped slot, that is, the position of the scraper is controlled to ensure that the thickness of the applied glass paste is uniform. When the slider moves to the end of the slide rail, the scraper is disengaged from the vacuum suction cup and naturally droops under the action of gravity. The slider starts to move in the opposite direction, and the block on the scraper rotates in the slot and is stuck on the other side of the fan-shaped slot, thereby realizing reciprocating scraping of the glass paste.

[0021] 4. The utility model provides a scraper for scraping glass paste on a GPP chip. By setting the stepping motor to rotate a quarter of a circle every time the slider slides a reciprocating stroke, the scraping of the chip with the glass paste can be automatically reversed, thereby better ensuring the smoothness and uniformity of the scraping. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a side view of a scraper for scraping glass paste on a GPP chip according to the utility model;

[0023] Figure 2 It is a three-dimensional schematic diagram of a scraper for scraping glass paste on a GPP chip according to the utility model;

[0024] Figure 3This is a schematic diagram of a sleeve of a scraper for scraping glass paste on a GPP chip according to the utility model;

[0025] Figure 4 The utility model is a schematic diagram of a scraper for scraping glass paste on a GPP chip.

[0026] Explanation of the accompanying drawings: 1. base; 2. stepper motor; 3. vacuum suction cup; 4. bracket; 5. reciprocating motion mechanism; 51. drive assembly; 511. drive motor; 512. turntable; 5121. bump; 513. connecting rod; 5131. slide groove; 52. slide rail; 53. slider; 6. scraper assembly; 61. scraper; 611. block; 62. sleeve; 621. slot. DETAILED DESCRIPTION

[0027] The following is combined with Figure 1-Figure 4 The utility model is described in further detail.

[0028] This embodiment discloses a scraper for scraping glass paste on a GPP chip. Figure 1-Figure 2 , including a base 1, a stepper motor 2, a vacuum suction cup 3, a bracket 4, a reciprocating motion mechanism 5 and a scraper assembly 6. The stepper motor 2 is fixedly installed on the upper part of the base 1. The output shaft of the stepper motor 2 is fixedly connected to the vacuum suction cup 3. The stepper motor 2 can realize precise position control and speed control, thereby realizing quantitative control of the rotation angle of the vacuum suction cup 3. One end of the bracket 4 is fixedly installed on the base 1. The reciprocating motion mechanism 5 includes a driving component 51, a slide rail 52 and a slider 53. The driving component 51 is fixedly installed on the side of the bracket 4. The driving component 51 drives the connected slider 53. The slide rail 52 is fixedly installed on the upper part of the bracket 4. The slide The block 53 is slidably installed in the slide rail 52, and the stepper motor 2 is configured to rotate a quarter of a turn for each reciprocating stroke of the slider 53. The length of the vacuum suction cup 3 in the direction of the slide rail 52 is smaller than the length of the slide rail 52. The scraper assembly 6 is fixedly connected to the slider 53. The scraper assembly 6 is arranged above the vacuum suction cup 3. The scraper assembly 6 can realize reciprocating motion driven by the slider 53 to complete the scraping of the glass slurry, and cooperate with the vacuum suction cup 3 driven by the stepper motor 2, so as to achieve the process requirements of scraping twice along the diagonal direction of the chip, rotating 90° and then scraping twice, thereby avoiding manual operation, saving manpower and improving precision.

[0029] Among them, Figure 1-Figure 2As shown, the driving assembly 51 includes a driving motor 511, a turntable 512 and a connecting rod 513. The driving motor 511 is fixedly arranged on the base 1, and the turntable 512 is coaxially fixed with the output shaft of the driving motor 511. A protrusion 5121 is arranged on the turntable 512, and the protrusion 5121 is eccentrically arranged with the turntable 512, that is, the rotation of the turntable 512 drives the protrusion 5121 to rotate around the center of the turntable 512. A sliding groove 5131 is provided on the connecting rod 513, and the sliding groove 5131 is adapted to the protrusion 5121. The protrusion 5121 is slidably installed in the sliding groove 5131. One end of the connecting rod 513 is rotatably installed on the bracket 4, and the other end is rotatably connected to the slider 53. The protrusion 5121 rotates around the center of the turntable 512 to drive the connecting rod 513 to move, and finally the connecting rod 513 drives the slider 53 to slide in the slide rail 52, so that the scraper assembly 6 realizes reciprocating motion under the drive of the slider 53 to complete the scraping of the glass slurry.

[0030] Among them, Figure 1-Figure 4 As shown, the scraper assembly 6 includes a scraper 61 and a sleeve 62, the sleeve 62 is fixedly connected to the slider 53, the scraper 61 is rotatably connected to the sleeve 62, a slot 621 is provided in the sleeve 62, the cross section of the slot 621 is fan-shaped, a block 611 is provided on the rotating shaft of the scraper 61, the block 611 can be rotatably installed in the slot 621, the block 611 is adapted to the slot 621, when the scraper 61 is driven by the slider 53 to slide on the chip to scrape the coated glass When applying glass slurry, the block 611 is stuck on one side of the fan-shaped slot 621, that is, the position of the scraper 61 is controlled to ensure that the thickness of the glass slurry is even; when the slider 53 moves to the end of the slide rail 52, the scraper 61 is disengaged from the vacuum suction cup 3 and naturally droops under the action of gravity, the slider 53 starts to move in the reverse direction, and the block 611 on the scraper 61 rotates in the slot 621 and is stuck on the other side of the fan-shaped slot 621, so that the reciprocating scraping of the glass slurry can be realized.

[0031] The working principle of this embodiment is as follows: the chip to be coated with glass paste is placed on the vacuum suction cup 3 and fixed firmly, the glass paste is dripped on the chip to be coated with glass paste, the driving motor 511 and the stepping motor 2 are started, the driving motor 511 drives the turntable 512 to rotate, and then the protrusion 5121 rotates around the center of the turntable 512, and then drives the connecting rod 513 to move, and finally the connecting rod 513 drives the slider 53 to slide in the slide rail 52, so that the scraper 61 realizes reciprocating motion under the drive of the slider 53. When the scraper 61 is driven by the slider 53 to slide on the chip to scrape the glass paste, the clamping block 611 is arranged on one side of the fan-shaped clamping groove 621, that is, the position of the scraper 61 is stabilized to ensure the coating of the glass paste. The thickness is uniform; when the slider 53 moves to the end of the slide rail 52, since the length of the vacuum suction cup 3 in the direction of the slide rail 52 is smaller than the length of the slide rail 52, the scraper 61 is detached from the vacuum suction cup 3 and naturally droops under the action of gravity, and the block 611 on the scraper 61 is in the middle position of the slot 621; as the slider 53 moves in the opposite direction, the block 611 on the scraper 61 rotates in the slot 621 and is arranged on the other side of the fan-shaped slot 621, so that the reciprocating scraping of the glass slurry can be achieved; when the slider 53 slides a reciprocating stroke, the stepper motor 2 rotates a quarter of a turn, that is, the scraper 61 can scrape along the chip twice, and then rotate the chip 90° and scrape it twice again, so as to ensure that the glass slurry is scraped flat and uniform.

[0032] The above description is only a preferred embodiment of the present invention and does not constitute any other form of limitation to the present invention. Any technician familiar with the profession may use the technical contents disclosed above to change or modify them into equivalent embodiments with equivalent changes for application in other fields. However, any simple modification or equivalent change made to the above embodiments based on the technical essence of the present invention without departing from the technical solution of the present invention still falls within the protection scope of the technical solution of the present invention.

Claims

1. A scraper for scraping glass paste on GPP chips, characterized by: The invention comprises a base (1), a stepping motor (2), a vacuum suction cup (3), a bracket (4), a reciprocating motion mechanism (5) and a scraper assembly (6), wherein the stepping motor (2) is fixedly mounted on the upper part of the base (1), the output shaft of the stepping motor (2) is fixedly connected to the vacuum suction cup (3), the bracket (4) is fixedly mounted on the upper part of the base (1), the reciprocating motion mechanism (5) is fixedly mounted on the bracket (4), the reciprocating motion mechanism (5) is arranged on the side of the vacuum suction cup (3), the scraper assembly (6) is mounted on the reciprocating motion mechanism (5), and the scraper assembly (6) is arranged above the vacuum suction cup (3).

2. The scraper for coating glass slurry on a GPP chip according to claim 1, characterized in that: The reciprocating mechanism (5) comprises a driving assembly (51), a slide rail (52) and a slider (53); the driving assembly (51) is fixedly mounted on a side of the bracket (4); the driving assembly (51) drives the slider (53); the slide rail (52) is fixedly mounted on the bracket (4); and the slider (53) is slidably mounted in the slide rail (52).

3. The scraper for coating glass slurry on a GPP chip according to claim 2, characterized in that: The driving assembly (51) comprises a driving motor (511), a rotating disk (512) and a connecting rod (513); the driving motor (511) is fixedly mounted on a base (1); the rotating disk (512) is fixedly connected to an output shaft of the driving motor (511); a protrusion (5121) is arranged on the rotating disk (512); the protrusion (5121) is eccentrically arranged with respect to the rotating disk (512); the connecting rod (513) is slidably connected to the protrusion (5121); one end of the connecting rod (513) is rotatably mounted on a bracket (4); and the other end is rotatably connected to a slider (53).

4. The scraper for coating glass slurry on a GPP chip according to claim 3, characterized in that: The connecting rod (513) is provided with a sliding groove (5131), the sliding groove (5131) is adapted to the protrusion (5121), and the protrusion (5121) is slidably mounted in the sliding groove (5131).

5. The scraper for coating glass slurry on a GPP chip according to claim 2, characterized in that: The scraper assembly (6) comprises a scraper (61) and a sleeve (62); the sleeve (62) is fixedly connected to the slider (53); and the scraper (61) is rotatably connected to the sleeve (62).

6. The scraper for coating glass slurry on a GPP chip according to claim 5, characterized in that: A clamping groove (621) is provided in the sleeve (62), and the cross section of the clamping groove (621) is fan-shaped.

7. The scraper for coating glass slurry on a GPP chip according to claim 6, characterized in that: A clamping block (611) is provided on the rotating shaft of the scraper (61), and the clamping block (611) is rotatably mounted inside the clamping slot (621), and the clamping block (611) is adapted to fit the clamping slot (621).

8. The scraper for coating glass slurry on a GPP chip according to claim 2, characterized in that: The stepper motor (2) is configured so that the slider (53) rotates a quarter of a turn for each reciprocating stroke.

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