Graphite boat process point dismounting equipment

Abstract

The utility model discloses graphite boat process point dismounting equipment, which relates to the technical field of graphite boat card repair and comprises mounting mechanisms arranged on two sides of a graphite boat process point; the mounting mechanism comprises a mounting assembly, one end of which is fixedly connected with the other end of the connecting arm assembly; the conversion assembly is arranged on the mounting assembly and is connected with the mounting assembly; one end of the connecting arm assembly is connected with the mounting assembly; one end of the handle assembly is fixedly connected with the other end of the connecting arm assembly. Through the arrangement of the conversion assembly, during work, a worker twists the other end of a threaded short rod, so that the end, inserted into a buckle pipe, of the threaded short rod is rotated out along threads of the inner wall of the buckle pipe and protrudes out of a first clamping plate, and the device is converted into a device for installing a graphite boat process point; therefore, the dismounting and the mounting can be combined into one device.

Description

Technical Field

[0001] The utility model relates to the technical field of graphite boat card repair, in particular to a graphite boat process point disassembly device. Background Art

[0002] Graphite boat is a graphite mold. The graphite mold is made of artificial graphite through mechanical processing. It is a carrier. Graphite boat is used as a carrier for anti-reflection coating of solar cells. The uncoated silicon wafers are placed on the card points of the graphite boat. A fixed number of silicon wafers can be placed on each boat. Then, the graphite boat is placed in the PECVD vacuum coating equipment and the PECVD technology is used for discharge coating to form an anti-reflection film of silicon nitride. For new graphite boats, in order to ensure the uniformity and stability of film formation, saturation treatment is required before the first use. The saturation treatment technology of graphite boat is to cover the inner wall surface of the graphite boat with silicon nitride film so that the inner wall is in a silicon nitride state. This will make the inner wall surface of the graphite boat consistent, and make the silicon nitride deposition rate everywhere tend to be consistent, so that the silicon nitride film is evenly deposited on the surface of the silicon wafer.

[0003] The graphite boat card points are plugged into the graphite boat sheet. Over time, the lowest card point is easily damaged and broken and needs to be replaced. The current solution is to remove the boat sheet and then install the card point. If the boat sheet is in the middle of the graphite boat, the time and manpower spent on disassembly are relatively high, and the work efficiency is relatively low, so improvement is urgently needed. Utility Model Content

[0004] In view of the deficiencies in the prior art, the purpose of the utility model is to provide a graphite boat process point disassembly equipment, aiming to solve the above technical problems.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A graphite boat process point disassembly device, comprising:

[0007] The installation mechanism is arranged on both sides of the graphite boat process point;

[0008] The mounting mechanism comprises:

[0009] An installation assembly, one end of which is fixedly connected to the other end of the connecting arm assembly;

[0010] A conversion component is disposed on the mounting component and connected to the mounting component;

[0011] A connecting arm assembly, one end of which is connected to the mounting assembly;

[0012] One end of the handle assembly is fixedly connected to the other end of the connecting arm assembly.

[0013] Preferably, the mounting assembly comprises:

[0014] A first clamping plate is located at one side of the graphite boat process point, and one end of the first clamping plate is fixedly connected to one end of the connecting arm assembly. A first fixing hole is provided on the first clamping plate, and a first fixing groove is provided in the first fixing hole;

[0015] The second clamping plate is located at the other side of the graphite boat process point, one end of which is fixedly connected to one end of the connecting arm assembly, and a second fixing hole is opened on the second clamping plate.

[0016] Preferably, the conversion component comprises:

[0017] A buckle tube, the outer wall of which is buckled in the first fixing groove and fixedly connected to the first clamping plate, and the outer wall of the buckle tube is provided with a buckle block;

[0018] The threaded short rod is inserted into the buckle tube, and one end of the rod is threadedly connected to the inner wall of the buckle tube.

[0019] Preferably, the conversion component comprises:

[0020] A buckle tube, the outer wall of which is buckled in the first fixing groove and fixedly connected to the first clamping plate, and the outer wall of the buckle tube is provided with a buckle block;

[0021] The threaded short rod is inserted into the buckle tube, and one end of the rod is threadedly connected to the inner wall of the buckle tube.

[0022] Preferably, the cross connector comprises:

[0023] A first connecting plate, one end of which is rotatably connected to the second clamping arm, and a first rotating hole is formed on the first connecting plate;

[0024] A first sliding rod, one end of which is inserted into the first sliding groove and slidably connected to the first sliding groove, and the other end of which is fixedly connected to the other end of the first connecting rod;

[0025] A second connecting plate, one end of which is rotatably connected to the first clamping arm, and a second rotating hole is formed on the second connecting plate;

[0026] A second sliding rod, one end of which is inserted into the second sliding groove and slidably connected to the second sliding groove, and the other end of which is fixedly connected to the other end of the second connecting rod;

[0027] One end of the first rotating shaft passes through the first rotating hole and is inserted into the second rotating hole, and the first rotating shaft is rotatably connected to the first connecting plate and the second connecting plate.

[0028] Preferably, the handle assembly comprises:

[0029] A second rotating shaft, one end of which is fixedly connected to the other end of the first clamping arm;

[0030] A first handle, wherein a third rotating hole, a fourth rotating hole and a third sliding groove are formed at one end of the first handle, and one end of the first handle is sleeved on the second rotating shaft through the third rotating hole and is rotatably connected to the first clamping arm;

[0031] A third rotating shaft, one end of which is inserted into the third sliding groove and fixedly connected to the other end of the second clamping arm, and the third rotating shaft is slidably connected to the third sliding groove;

[0032] One end of the fourth rotating shaft is fixedly connected to the other end of the second clamping arm.

[0033] Preferably, the handle assembly further comprises:

[0034] a second handle, wherein a fifth rotation hole, a sixth rotation hole and a fourth slide groove are formed at one end of the second handle, and one end of the second handle is sleeved on the fourth rotation shaft through the fifth rotation hole and is rotationally connected to the second clamping arm;

[0035] A fifth rotating shaft, one end of which is inserted into the fourth sliding groove and fixedly connected to the other end of the first clamping arm, and the fifth rotating shaft is slidably connected to the fourth sliding groove;

[0036] A sixth rotating shaft, one end of which is inserted into the sixth rotating hole through the fourth rotating hole and is rotatably connected to the first handle and the second handle;

[0037] The first spring has one end fixedly connected to the other end of the first handle, and the other end fixedly connected to the other end of the second handle.

[0038] In summary, due to the adoption of the above technical solution, the beneficial effects of the utility model are:

[0039] By providing a conversion assembly, during work, the staff twists the other end of the threaded short rod, so that the end of the threaded short rod inserted in the snap tube is turned out along the inner wall thread of the snap tube and protrudes the first clamping plate, so that the device is converted into a device for installing the process point of the graphite boat, and then the disassembly and installation can be combined into one device, thereby greatly improving the work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0041] Figure 1 A three-dimensional structural schematic diagram of a graphite boat process point disassembly equipment is shown.

[0042] Figure 2 A partial structural schematic diagram of the mounting mechanism and the connecting arm assembly is shown.

[0043] Figure 3 A partial structural schematic diagram of a handle assembly is shown.

[0044] Figure 4 Shows Figure 2 A schematic diagram of the enlarged local structure at point A in the middle.

[0045] Legend:

[0046] 1. First clamping plate; 2. First fixing hole; 3. First fixing groove; 4. Second clamping plate; 5. Second fixing hole; 6. Buckle tube; 7. Snap-in block; 8. Threaded short rod; 9. First clamping arm; 10. First slide groove; 11. Second clamping arm; 12. Second slide groove; 13. First connecting plate; 14. First rotating hole; 15. First sliding rod; 16. Second connecting plate; 17. Second sliding rod; 18. Second rotating hole; 19. First rotating axis; 20. Second rotating axis; 21. First handle; 22. Third rotating axis; 23. Fourth rotating axis; 24. Second handle; 25. Fifth rotating axis; 26. Sixth rotating axis; 27. First spring; 28. Third rotating hole; 29. ​​Fourth rotating hole; 30. Third slide groove; 31. Fifth rotating hole; 32. Sixth rotating hole; 33. Fourth slide groove. DETAILED DESCRIPTION

[0047] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0048] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0049] It should be noted that when a component is referred to as being "fixed to" another component, it may be directly on the other component or there may also be a component centered. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may also be a component centered. When a component is considered to be "set on" another component, it may be directly set on the other component or there may also be a component centered. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0050] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0051] like Figures 1 to 4 As shown, an embodiment of the utility model provides a graphite boat process point disassembly device, comprising:

[0052] The installation mechanism is arranged on both sides of the graphite boat process point;

[0053] A connecting arm assembly, one end of which is connected to the mounting assembly;

[0054] One end of the handle assembly is fixedly connected to the other end of the connecting arm assembly.

[0055] In an embodiment of the utility model, a staff member holds the handle assembly with his hands to perform an expansion movement, thereby driving the connecting arm assembly to perform a clamping action, so that the installation mechanism is clamped on both sides of the graphite boat process point, thereby facilitating the user to dismantle the graphite boat process point. The narrow and long connecting arm assembly can help dismantle the graphite boat process point and improve work efficiency.

[0056] like Figures 1 to 4 As shown, the mounting mechanism comprises:

[0057] An installation assembly, one end of which is fixedly connected to the other end of the connecting arm assembly;

[0058] The conversion component is arranged on the installation component and connected with the installation component.

[0059] In the embodiment of the utility model, the staff can install the graphite boat process point by installing the assembly. At the same time, in order to improve the work efficiency, the staff can transform the installation assembly into the conversion assembly by rotating the conversion assembly without changing the equipment, thereby disassembling the graphite boat process point, which is convenient for users to use.

[0060] like Figures 1 to 4 As shown, the installation component includes:

[0061] A first clamping plate 1 is located at one side of the graphite boat process point, and one end of the first clamping plate 1 is fixedly connected to one end of the connecting arm assembly. A first fixing hole 2 is provided on the first clamping plate 1, and a first fixing groove 3 is provided in the first fixing hole 2;

[0062] The second clamping plate 4 is located at the other side of the graphite boat process point, and one end of the second clamping plate 4 is fixedly connected to one end of the connecting arm assembly. A second fixing hole 5 is opened on the second clamping plate 4.

[0063] In the embodiment of the utility model, the first fixing hole 2 and the second fixing hole 5 form a concentric circle structure, so that the position of the graphite boat process point can be fixed, which is convenient for subsequent assembly or disassembly. At the same time, the first clamping plate 1 and the second clamping plate 4 are fixed together with the connecting arm assembly by bolts, which can prevent the graphite boat process point from falling off from the device during installation, and facilitate replacement after the first clamping plate 1 or the second clamping plate 4 is damaged, thereby reducing waste.

[0064] like Figures 1 to 4 As shown, the conversion component includes:

[0065] A clip tube 6, the outer wall of which is clipped into the first fixing groove 3 and fixedly connected to the first clamping plate 1, and a clip block 7 is provided on the outer wall of the clip tube 6;

[0066] The threaded short rod 8 is inserted into the buckle tube 6 , and one end of the short rod is threadedly connected to the inner wall of the buckle tube 6 .

[0067] In the embodiment of the utility model, during work, the staff twists the other end of the threaded short rod 8, so that the end of the threaded short rod 8 inserted in the snap tube 6 is turned out along the inner wall thread of the snap tube 6 and protrudes from the first clamping plate 1, so that the device is converted into a device for installing the process point of the graphite boat, thereby being able to combine disassembly and installation into one device.

[0068] like Figures 1 to 4 As shown, the connecting arm assembly includes:

[0069] A first clamping arm 9, one end of which is fixedly connected to one end of the first clamping plate 1, and the other end of the first clamping arm 9 is provided with a first sliding groove 10;

[0070] A second clamping arm 11, one end of which is fixedly connected to one end of the second clamping plate 4, and the other end of the second clamping arm 11 is provided with a second sliding groove 12;

[0071] Cross connecting piece, the first clamping arm 9 is connected to the second clamping arm 11 through the cross connecting piece.

[0072] In the embodiment of the utility model, during use, the first clamping arm 9 and the second clamping arm 11 can perform a clamping operation through the action of the cross connector. During the clamping process, one end of the cross connector is inserted into the first slide groove 10 and the second slide groove 12, so that one end of the cross connector can slide on the first clamping arm 9 and the second clamping arm 11, and the other end can be rotatably connected to the first clamping arm 9 and the second clamping arm 11, which can ensure that the clamping angle can be achieved and the stability of the clamping can be ensured.

[0073] like Figures 1 to 4 As shown, the cross connector includes:

[0074] A first connecting plate 13, one end of which is rotatably connected to the second clamping arm 11, and a first rotating hole 14 is formed on the first connecting plate 13;

[0075] A first sliding rod 15, one end of which is inserted into the first sliding groove 10 and slidably connected to the first sliding groove 10, and the other end of which is fixedly connected to the other end of the first connecting rod;

[0076] A second connecting plate 16, one end of which is rotatably connected to the first clamping arm 9, and a second rotating hole 18 is formed on the second connecting plate 16;

[0077] A second sliding rod 17, one end of which is inserted into the second sliding groove 12 and slidably connected to the second sliding groove 12, and the other end of which is fixedly connected to the other end of the second connecting rod;

[0078] One end of the first rotating shaft 19 passes through the first rotating hole 14 and is inserted into the second rotating hole 18 , and the first rotating shaft 19 is rotatably connected to the first connecting plate 13 and the second connecting plate 16 .

[0079] In the embodiment of the utility model, the first rotating hole 14 and the second rotating hole 18 are both opened at the center position of the first connecting plate 13 and the second connecting plate 16; one end of the first connecting plate 13 and the second connecting plate 16 are rotatably connected with the first clamping arm 9 and the second clamping arm 11 by bolts; during operation, the first connecting plate 13 and the second connecting plate 16 are rotated by the first rotating shaft 19, thereby driving the angle between the first connecting plate 13 and the second connecting plate 16 to change, thereby driving the first clamping arm 9 and the second clamping arm 11 to perform a clamping operation, and at the same time, the first connecting plate 13 and the second connecting plate 16 can prevent the first connecting plate 13 and the second connecting plate 16 from falling off through the first sliding rod 15 and the second sliding rod 17, and can also help provide moving space when the angle between the first connecting plate 13 and the second connecting plate 16 changes.

[0080] like Figures 1 to 4 As shown, the handle assembly includes:

[0081] A second rotating shaft 20, one end of which is fixedly connected to the other end of the first clamping arm 9;

[0082] A first handle 21, wherein a third rotating hole 28, a fourth rotating hole 29 and a third sliding groove 30 are formed at one end of the first handle 21, and one end of the first handle 21 is sleeved on the second rotating shaft 20 through the third rotating hole 28 and is rotatably connected to the first clamping arm 9;

[0083] A third rotating shaft 22, one end of which is inserted into the third sliding groove 30 and fixedly connected to the other end of the second clamping arm 11, and the third rotating shaft 22 is slidably connected to the third sliding groove 30;

[0084] A fourth rotating shaft 23, one end of which is fixedly connected to the other end of the second clamping arm 11;

[0085] A second handle 24, wherein a fifth rotation hole 31, a sixth rotation hole 32 and a fourth slide groove 33 are formed at one end of the second handle 24, and one end of the second handle 24 is sleeved on the fourth rotation shaft 23 through the fifth rotation hole 31 and is rotationally connected to the second clamping arm 11;

[0086] A fifth rotating shaft 25, one end of which is inserted into the fourth sliding groove 33 and fixedly connected to the other end of the first clamping arm 9, and the fifth rotating shaft 25 is slidably connected to the fourth sliding groove 33;

[0087] The sixth rotating shaft 26 has one end inserted into the sixth rotating hole 32 through the fourth rotating hole 29 and is rotatably connected to the first handle 21 and the second handle 24;

[0088] One end of the first spring 27 is fixedly connected to the other end of the first handle 21 , and the other end of the first spring 27 is fixedly connected to the other end of the second handle 24 .

[0089] In the embodiment of the utility model, the staff presses the first handle 21 and the second handle 24 to make the first handle 21 and the second handle 24 rotate around the sixth rotation axis 26, so that the first handle 21 and the second handle 24 can drive the first clamping arm 9 and the second clamping arm 11 to expand at one end and close at the other end, thereby providing clamping force for the graphite boat process point, thereby being convenient for users to use. At the same time, under the action of the first spring 27, the first handle 21 and the second handle 24 can drive the first clamping arm 9 and the second clamping arm 11 to quickly detach from the graphite boat process point, thereby reducing damage to the graphite boat process point.

[0090] The above description of the embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A graphite boat process point disassembly equipment, characterized in that: include: The installation mechanism is arranged on both sides of the graphite boat process point; The mounting mechanism comprises: An installation assembly, one end of which is fixedly connected to the other end of the connecting arm assembly; A conversion component is disposed on the mounting component and connected to the mounting component; A connecting arm assembly, one end of which is connected to the mounting assembly; One end of the handle assembly is fixedly connected to the other end of the connecting arm assembly.

2. The graphite boat process point disassembly equipment according to claim 1 is characterized in that: The installation assembly includes: A first clamping plate (1) is located on one side of the graphite boat process point, one end of which is fixedly connected to one end of the connecting arm assembly, a first fixing hole (2) is provided on the first clamping plate (1), and a first fixing groove (3) is provided in the first fixing hole (2); The second clamping plate (4) is located on the other side of the graphite boat process point, one end of which is fixedly connected to one end of the connecting arm assembly, and a second fixing hole (5) is provided on the second clamping plate (4).

3. The graphite boat process point disassembly equipment according to claim 2 is characterized in that: The conversion component includes: A snap-on tube (6), the outer wall of which is snap-fitted into the first fixing groove (3) and fixedly connected to the first clamping plate (1), and the outer wall of the snap-on tube (6) is provided with a snap-fit ​​block (7); The threaded short rod (8) is inserted into the buckle tube (6), and one end of the short rod is threadedly connected to the inner wall of the buckle tube (6).

4. The graphite boat process point disassembly equipment according to claim 3 is characterized in that: The connecting arm assembly comprises: A first clamping arm (9), one end of which is fixedly connected to one end of the first clamping plate (1), and the other end of the first clamping arm (9) is provided with a first sliding groove (10); A second clamping arm (11), one end of which is fixedly connected to one end of the second clamping plate (4), and the other end of the second clamping arm (11) is provided with a second sliding groove (12); A cross connecting piece, wherein the first clamping arm (9) is connected to the second clamping arm (11) via the cross connecting piece.

5. The graphite boat process point disassembly equipment according to claim 4 is characterized in that: The cross connector comprises: A first connecting plate (13), one end of which is rotatably connected to the second clamping arm (11), and a first rotating hole (14) is formed on the first connecting plate (13); A first sliding rod (15), one end of which is inserted into the first sliding groove (10) and slidably connected to the first sliding groove (10), and the other end of which is fixedly connected to the other end of the first connecting rod; A second connecting plate (16), one end of which is rotatably connected to the first clamping arm (9), and a second rotating hole (18) is formed on the second connecting plate (16); A second sliding rod (17), one end of which is inserted into the second sliding groove (12) and slidably connected to the second sliding groove (12), and the other end of which is fixedly connected to the other end of the second connecting rod; One end of the first rotating shaft (19) passes through the first rotating hole (14) and is inserted into the second rotating hole (18), and the first rotating shaft (19) is rotatably connected to the first connecting plate (13) and the second connecting plate (16).

6. The graphite boat process point disassembly equipment according to claim 5, characterized in that: The handle assembly comprises: A second rotating shaft (20), one end of which is fixedly connected to the other end of the first clamping arm (9); A first handle (21), wherein one end of the first handle (21) is provided with a third rotating hole (28), a fourth rotating hole (29) and a third sliding groove (30), and one end of the first handle (21) is sleeved on the second rotating shaft 2 (0) through the third rotating hole (28) and is rotatably connected to the first clamping arm (9); A third rotating shaft (22), one end of which is inserted into the third sliding groove (30) and fixedly connected to the other end of the second clamping arm (11), and the third rotating shaft (22) is slidably connected to the third sliding groove (30); One end of the fourth rotating shaft (23) is fixedly connected to the other end of the second clamping arm (11).

7. The graphite boat process point disassembly equipment according to claim 6, characterized in that: The handle assembly further comprises: A second handle (24), wherein a fifth rotating hole (31), a sixth rotating hole (32) and a fourth sliding groove (33) are formed at one end of the second handle (24), and one end of the second handle (24) is sleeved on the fourth rotating shaft (23) through the fifth rotating hole (31) and is rotatably connected to the second clamping arm (11); A fifth rotating shaft (25), one end of which is inserted into the fourth sliding groove (33) and fixedly connected to the other end of the first clamping arm (9), and the fifth rotating shaft (25) is slidably connected to the fourth sliding groove (33); A sixth rotating shaft (26), one end of which is inserted into the sixth rotating hole (32) through the fourth rotating hole (29), and is rotatably connected to the first handle (21) and the second handle (24); The first spring (27) has one end fixedly connected to the other end of the first handle (21), and the other end fixedly connected to the other end of the second handle (24).

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