Tray type arm

Abstract

The utility model discloses a tray type arm, and relates to the technical field of semiconductor manufacturing. A rotating seat; a first motor; a guide seat; a connecting assembly; the clamping device comprises a fixing part, and the fixing part is fixedly connected with the connecting assembly; the first clamping part is arranged to be in a circular arc shape, and the first clamping part protrudes out of the fixing part; the thickness of the bearing part is the same as that of the fixing part, the width of the bearing part is smaller than that of the first clamping part, and a long-strip-shaped open groove is formed in the right end of the bearing part; the second clamping part is arranged at the right end of the bearing part, the second clamping part is arranged to be in an arc shape, the thickness of the second clamping part is the same as that of the first clamping part, and the guide seat and the connecting assembly are arranged to drive the clamping device to move stably; the first clamping part and the second clamping part are arranged on the clamping device and protrude out of the fixing part, so that the wafer can be stably placed in the bearing part, the problem that the wafer is easy to break in the taking and placing process is solved, and the wafer is not easy to break in the taking and placing process.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a tray-type arm. Background Art

[0002] With the development of the semiconductor industry, wafer manufacturing has become the core of the modern electronics industry. During the chip manufacturing process, the surface of the wafer is often coated with a layer of adhesive material, such as photoresist or a film used to protect the surface of the wafer. However, in the subsequent process steps, these adhesive materials must be completely removed to ensure the quality and performance of the chip. Therefore, wafer degumming has become an indispensable part of semiconductor manufacturing.

[0003] In the existing degumming process, vacuum suction is usually used. This can be done normally for silicon wafers of normal thickness, such as 625 microns. However, with the continuous advancement of integrated circuit miniaturization and manufacturing technology, the thickness of silicon wafers or compound wafers is getting thinner and thinner. As a result, the disadvantages of vacuum wafer removal are also revealed. When taking wafers out of the wafer box and placing them in the wafer box, the vacuum release cannot be eliminated instantly, causing the wafer to be taken out of the wafer box. Even thinner wafers will be broken into pieces when they are instantly sucked by the vacuum.

[0004] Therefore, we need a tray-type arm to solve the problem of wafers being easily broken during the process of taking and placing, so that the wafers will not be easily broken during the process of taking and placing. Utility Model Content

[0005] The purpose of the present application is to solve the problem that wafers are easily broken during the process of taking and placing. In order to solve the above problem, the present application provides a tray-type arm, which can prevent wafers from being easily broken during the process of taking and placing.

[0006] To achieve the above-mentioned purpose, the embodiment of the present application adopts the following technical solutions: a base; a rotating seat, the rotating seat is arranged in the middle of the base, and the rotating seat is movably connected to the base; a first motor, the first motor connects the base and the rotating seat; a guide seat, the guide seat is arranged at the upper end of the rotating seat, and the guide seat is fixedly connected to the rotating seat; a connecting assembly, the connecting assembly is arranged at the upper end of the rotating seat, and the connecting assembly is movably connected to the guide seat; a clamper, the clamper is fixedly connected to the connecting assembly, and the clamper includes: a fixing part, the fixing part is fixedly connected to the connecting assembly; a first clamping part, the first clamping part is arranged at the right end of the fixing part, the first clamping part is arranged in an arc shape, and the first clamping part protrudes from the fixing part; a receiving part, the receiving part is arranged at the right end of the first clamping part, the thickness of the receiving part is the same as that of the fixing part, the width of the receiving part is smaller than that of the first clamping part, and a long strip groove is arranged at the right end of the receiving part; a second clamping part, the second clamping part is arranged at the right end of the receiving part, the second clamping part is arranged in an arc shape, the second clamping part and the first clamping part are arranged concentrically, and the second clamping part has the same thickness as the first clamping part.

[0007] In the above technical scheme, the embodiment of the present application achieves this by: setting a guide seat, the connecting assembly drives the clamp to move stably, the clamp is provided with a first clamping part and a second clamping part and protrudes from the fixed part so that the wafer can be stably placed in the receiving part, thereby solving the problem that the wafer is easily broken during the process of taking and placing, and preventing the wafer from being easily broken during the process of taking and placing.

[0008] Further, according to an embodiment of the present application, the connection component includes:

[0009] A lifting part, which is arranged in the guide seat and is movably connected to the guide seat;

[0010] A connecting rod assembly is movably connected to the lifting part.

[0011] Further, according to an embodiment of the present application, the connecting rod assembly includes:

[0012] A first connecting rod, the first connecting rod is arranged at the upper end of the lifting part, and the first connecting rod is movably connected to the lifting part;

[0013] The second connecting rod is arranged at the upper end of the first connecting rod and is movably connected with the first connecting rod.

[0014] Further, according to an embodiment of the present application, one end of the first connecting rod is coaxially connected to the lifting part, and the other end of the first connecting rod is coaxially connected to the second connecting rod.

[0015] Further, according to an embodiment of the present application, the second connecting rod is fixedly connected to the fixing portion.

[0016] Further, according to an embodiment of the present application, a groove is provided at the upper end of the fixing portion.

[0017] Further, according to an embodiment of the present application, the sensor is arranged in a groove at the upper end of the fixing part.

[0018] Further, according to an embodiment of the present application, the center points of the arcs of the first clamping portion and the second clamping portion are located at the midpoint of the receiving portion.

[0019] Further, according to an embodiment of the present application, the left end of the receiving portion is configured to be fan-shaped.

[0020] Compared with the prior art, the present application has the following beneficial effects: the present application sets a guide seat, and the connecting assembly drives the clamp to move stably. The clamp is provided with a first clamping part and a second clamping part and protrudes from the fixed part, so that the wafer can be stably placed in the receiving part, thereby solving the problem that the wafer is easily broken during the process of taking and placing, and can prevent the wafer from being easily broken during the process of taking and placing. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The present application is further described below in conjunction with the accompanying drawings and embodiments.

[0022] Figure 1 It is an axonometric view of a tray-type arm.

[0023] Figure 2 It is a front view motion diagram of a tray type arm.

[0024] Figure 3 It is a top view motion diagram of a tray-type arm.

[0025] Figure 4 is a top view of the improved clamp.

[0026] Figure 5 yes Figure 4 "AA" section view of the.

[0027] Figure 6 It is a top view of the improved receiving portion.

[0028] Figure 7 This is the improved axonometric drawing of the connecting part.

[0029] In the attached figure

[0030] 1. Base 2. Rotating seat 3. First motor

[0031] 4. Guide seat 5. Connecting assembly 51. Lifting unit

[0032] 52, connecting rod assembly 521, first connecting rod 522, second connecting rod

[0033] 6. Clamp 61, fixing portion 62, first clamping portion

[0034] 63, stabilizing part 64, movable part 65, receiving part

[0035] 651, limiting portion 652, auxiliary claw 66, second clamping portion

[0036] 7. Sensor 8. Wafer 91. First position

[0037] 92, second position 93, third position 94, fourth position DETAILED DESCRIPTION

[0038] In order to make the purpose and technical solution of the utility model clearly and completely described, and the advantages more clearly understood, the embodiments of the utility model are further described in detail in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are part of the embodiments of the utility model, not all of the embodiments, and are only used to explain the embodiments of the utility model, and are not used to limit the embodiments of the utility model. All other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0039] In the description of the present utility model, it should be noted that the terms "center", "middle", "upper", "lower", "left", "right", "inner", "outer", "top", "bottom", "side", "vertical", "horizontal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "one", "first", "second", "third", "fourth", "fifth", "sixth" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0040] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0041] For the purpose of simplicity and illustration, the principles of the embodiments are described primarily by reference to examples. In the following description, many specific details are presented to provide a thorough understanding of the embodiments. However, it is apparent that, for those of ordinary skill in the art, these embodiments may not be limited to these specific details in practice. In some instances, known methods and apparatus are not described in detail to avoid making these embodiments unnecessarily difficult to understand. In addition, all embodiments may be used in combination with each other.

[0042] Embodiment 1: Figure 1-3 As shown, a tray type arm comprises:

[0043] A base 1; a rotating base 2, which is arranged in the middle of the base 1 and is movably connected to the base 1; a first motor 3, which connects the base 1 and the rotating base 2 to provide support for the entire structure and ensure the stability and reliability of the clamp 6 system. The rotating base 2 allows the clamp 6 to rotate in the horizontal direction, so that the direction of the clamped wafer 8 can be adjusted to meet different work requirements.

[0044] The guide seat 4 is arranged at the upper end of the rotating seat 2, and the guide seat 4 is fixedly connected to the rotating seat 2; the connecting component 5 is arranged at the upper end of the rotating seat 2, and the connecting component 5 is movably connected to the guide seat 4. The guide seat 4 can assist the connecting component 5 to rise or fall, and help the clamper 6 to lift the wafer 8 upward and separate from the wafer 8 box, and the guide seat 4 can make the connecting component 5 move stably, and there will be no large displacement to cause fragments when taking and placing the wafer 8.

[0045] The clamp 6 is fixedly connected to the connecting assembly 5. The clamp 6 comprises: a fixing portion 61, and the fixing portion 61 is fixedly connected to the connecting assembly 5;

[0046] The first clamping portion 62 is arranged at the right end of the fixing portion 61, the first clamping portion 62 is arranged in an arc shape, and the first clamping portion 62 protrudes from the fixing portion 61; the receiving portion 65, the receiving portion 65 is arranged at the right end of the first clamping portion 62, the thickness of the receiving portion 65 is the same as that of the fixing portion 61, the width of the receiving portion 65 is smaller than that of the first clamping portion 62, and a long strip groove is arranged at the right end of the receiving portion 65; the second clamping portion 66 is arranged at the right end of the receiving portion 65, the second clamping portion 66 is arranged in an arc shape, the second clamping portion 66 and the first clamping portion 62 are arranged concentrically, and the second clamping portion 66 and the first clamping portion 62 have the same thickness. The arc sizes of the first clamping portion 62 and the second clamping portion 66 are the same and match the outer diameter of the wafer 8. The sizes of the first clamping portion 62 and the second clamping portion 66 match the outer diameter of the wafer 8, ensuring that the clamp 6 can tightly fix the wafer 8 and prevent the wafer 8 from shaking or sliding during the clamping process, thereby ensuring the stability and safety of the clamping. A long strip groove is provided on the right end of the receiving portion 65 so that the clamp 6 will not be blocked by the support member supporting the wafer 8 when it extends into the bottom of the wafer 8, and the receiving portion 65 can smoothly reach the middle of the wafer 8, so that the first clamping portion 62 and the second clamping portion 66 can smoothly clamp the wafer 8.

[0047] The rotating seat 2 drives the guide seat 4 to rotate to the second position 92, the guide seat 4 drives the connecting component 5 to move upward to the third position 93, the connecting component 5 drives the clamp 6 to move forward to the fourth position 94, the first clamping part 62 and the second clamping part 66 clamp the wafer 8 and place it on the upper end of the receiving part 65, the connecting component 5, the guide seat 4 and the rotating seat 2 are reset to the first position 91 in turn to take out the wafer 8, by setting the guide seat 4, the connecting component 5 drives the clamp 6 to move stably, the clamp 6 is provided with the first clamping part 62 and the second clamping part 66 and protrudes from the fixed part 61, so that the wafer 8 can be stably placed in the receiving part 65, so as to solve the problem that the wafer 8 is easily broken during the process of taking and placing, and the wafer 8 is not easily broken during the process of taking and placing.

[0048] The connecting assembly 5 includes: a lifting part 51, which is arranged in the guide seat 4, and the lifting part 51 is movably connected to the guide seat 4; a connecting rod assembly 52, which is movably connected to the lifting part 51, and the guide seat 4 can assist the lifting part 51 to rise or fall, and help the clamper 6 lift the wafer 8 upward and separate it from the wafer 8 box, and the guide seat 4 can make the lifting part 51 move stably, and there will be no large displacement to cause fragments when taking and placing the wafer 8.

[0049] The connecting rod assembly 52 includes: a first connecting rod 521, which is arranged at the upper end of the lifting part 51 and is movably connected to the lifting part 51; a second connecting rod 522, which is arranged at the upper end of the first connecting rod 521 and is movably connected to the first connecting rod 521. This connection method allows the second connecting rod 522 to move with the movement of the first connecting rod 521, ensuring that the movement of the lifting part 51 can be carried out smoothly. One end of the first connecting rod 521 is coaxially connected to the lifting part 51, and the other end of the first connecting rod 521 is coaxially connected to the second connecting rod 522. Through the coaxial connection, it is ensured that the first connecting rod 521 is on the movement axis of the lifting part 51, thereby achieving consistency and accuracy of movement, and will not cause errors when clamping the wafer 8.

[0050] The second connecting rod 522 is fixedly connected to the fixing part 61. A groove is provided at the upper end of the fixing part 61. The sensor 7 is arranged in the groove at the upper end of the fixing part 61. The sensor 7 is arranged in the groove, and a height of about 0.5 mm is left at the top of the groove to prevent the wafer 8 and the sensor 7 from being too close to each other, resulting in incorrect sensing.

[0051] The center point of the arc of the first clamping part 62 and the second clamping part 66 is located at the midpoint of the receiving part 65, and the left end of the receiving part 65 is set to be fan-shaped, which ensures that the pressure exerted by the arc shape of the clamping part on the wafer 8 is evenly distributed. The center point of the arc is located at the midpoint of the receiving part 65, so that the first clamping part 62 and the second clamping part 66 can evenly apply pressure to the center of the wafer 8 to prevent the wafer 8 from being twisted or damaged. By designing the left end of the receiving part 65 to be fan-shaped, the clamper 6 can more easily enter and align the edge of the wafer 8 when clamping the wafer 8, which helps to reduce the contact resistance between the clamper 6 and the wafer 8, and increase the area supporting the wafer 8 to protect the surface of the wafer 8 from scratches or damage.

[0052] Embodiment 2: Figure 4-5 As shown, based on the first embodiment, the present embodiment further improves the clamp 6, including:

[0053] The first contact assembly, the first contact pieces are provided with a plurality of them on the first clamping portion 62 and the second clamping portion 66, the first contact assembly includes: a stabilizing portion 63, the stabilizing portion 63 is provided at the left end of the first clamping portion 62, the left end of the stabilizing portion 63 is provided as a first semicircle, the right end of the stabilizing portion 63 is provided as a second semicircle, and the diameter of the first semicircle is greater than that of the second semicircle.

[0054] The movable part 64 is movably connected to the second semicircle of the stabilizing part 63. The diameter of the left end of the movable part 64 is smaller than that of the first semicircle. The right end of the movable part 64 is set to an arc shape. When the movable part 64 moves, it will be limited by the first semicircle and will not be displaced by too much angle. A plurality of first contact members are set so that the first clamping part 62 and the second clamping part 66 can fine-tune the angle through the movable part 64 when contacting the wafer 8, and adaptively adjust the contact area of ​​the wafer 8, especially for the flat edge part of the wafer 8, a more comprehensive contact clamping can be performed to prevent the first clamping part 62 and the second clamping part 66 from being unable to uniformly clamp the wafer 8 due to the existence of the flat edge of the wafer 8 when the wafer 8 is moving, resulting in dislocation of the wafer 8 and resulting in fragments, which can better prevent the wafer 8 from being fragmented.

[0055] Embodiment 3: Figure 6-7 As shown, based on the first embodiment, the present embodiment further improves the receiving portion 65, and the receiving portion 65 includes:

[0056] The limiting portion 651 is arranged on the lower end surface of the receiving portion 65, and the limiting portion 651 is arranged in a semicircular protrusion shape.

[0057] The auxiliary clamping claw 652 is arranged on the lower end surface of the receiving portion 65 , the upper end of the auxiliary clamping claw 652 is the same shape as the second clamping portion 66 , and the right end of the auxiliary clamping claw 652 is located at the right end of the limiting portion 651 .

[0058] The limiting portion 651 and the auxiliary claw 652 are provided as a pair and are symmetrically arranged on the lower end surface of the receiving portion 65 .

[0059] By setting the auxiliary claw 652, when the first clamping part 62 and the second clamping part 66 clamp the wafer 8, the auxiliary claw 652 rotates outward. A pair of auxiliary claws 652 clamp the left and right ends of the wafer 8, which can better stabilize the wafer 8 and prevent the wafer 8 from being displaced during movement and hitting other parts to cause fragments. By setting the limiting part 651 and the limiting part 651 being a semicircular protrusion, the auxiliary claw 652 needs to pass through the limiting part 651 when rotating outward, and the auxiliary claw 652 expands one end downward to prevent the auxiliary claw 652 from scraping the wafer 8 during rotation to cause fragments. After the auxiliary claw 652 completes the rotation, it passes through the limiting part 651, and the auxiliary claw 652 resets upward again to complete the left and right clamping of the wafer 8.

[0060] Since there is a raised positioning piece in the box to support the wafer 8, in the initial state, the auxiliary clamping claw 652 is located at the lower end surface of the receiving part 65 and overlaps with the receiving part 65. In this way, when the clamp 6 extends under the wafer 8, the auxiliary clamping claw 652 will not be blocked by the positioning piece supporting the wafer 8, so that the wafer is not easily broken when taken out.

[0061] Embodiment 4: Figure 1-7 As shown, based on embodiments 1-3, this embodiment further provides a method for using a tray-type arm, including:

[0062] The first motor 3 is started, and the rotating seat 2 drives the guide seat 4 to rotate to the second position 92;

[0063] The guide seat 4 drives the lifting portion 51 to move upward to the third position 93;

[0064] The first connecting rod 521 and the second connecting rod 522 drive the clamp 6 to move forward to the fourth position 94;

[0065] When the sensor 7 senses that the center of the receiving portion 65 is located at the center of the wafer 8, the guide seat 4 drives the connecting assembly 5 to move upward, and at the same time, the movable portion 64 of the first clamping portion 62 and the movable portion 64 of the second clamping portion 66 clamp the wafer 8 and place it on the upper end of the receiving portion 65, and at the same time, the auxiliary claw 652 rotates outward through the limiting portion 651 to reach the specified position, clamping the left and right ends of the wafer 8;

[0066] The connecting assembly 5 , the guide seat 4 and the rotating seat 2 are reset to the first position 91 in sequence to take out the wafer 8 .

[0067] Although the above describes the illustrative specific implementation methods of the present application so that technicians in this technical field can understand the present application, the present application is not limited to the scope of the specific implementation methods. For ordinary technicians in this technical field, as long as various changes are within the spirit and scope of the present application defined and determined by the attached claims, all application creations using the concept of the present application are protected.

Claims

1. A tray type arm, characterized in that: include: Base; A rotating seat, which is arranged in the middle of the base and is movably connected to the base; A first motor, wherein the first motor connects the base and the rotating base; A guide seat, the guide seat is arranged at the upper end of the rotating seat, and the guide seat is fixedly connected to the rotating seat; A connecting assembly, the connecting assembly is arranged at the upper end of the rotating seat, and the connecting assembly is movably connected to the guide seat; A holder, the holder is fixedly connected to the connecting assembly, and the holder comprises: A fixing portion, the fixing portion being fixedly connected to the connecting assembly; A first clamping portion, the first clamping portion is arranged at the right end of the fixing portion, the first clamping portion is arranged in an arc shape, and the first clamping portion protrudes from the fixing portion; A receiving portion, the receiving portion is arranged at the right end of the first clamping portion, the receiving portion has the same thickness as the fixing portion, the receiving portion has a smaller width than the first clamping portion, and a long strip groove is arranged at the right end of the receiving portion; The second clamping part is arranged at the right end of the receiving part, the second clamping part is arranged in an arc shape, the second clamping part and the first clamping part are arranged concentrically, and the second clamping part and the first clamping part have the same thickness.

2. A tray-type arm according to claim 1, characterized in that: The connection component comprises: A lifting part, the lifting part is arranged in the guide seat, and the lifting part is movably connected to the guide seat; A connecting rod assembly is movably connected to the lifting part.

3. A tray-type arm according to claim 2, characterized in that: The connecting rod assembly comprises: A first connecting rod, the first connecting rod is arranged at the upper end of the lifting part, and the first connecting rod is movably connected to the lifting part; The second connecting rod is arranged at the upper end of the first connecting rod, and the second connecting rod is movably connected to the first connecting rod.

4. A tray-type arm according to claim 3, characterized in that: One end of the first connecting rod is coaxially connected to the lifting part, and the other end of the first connecting rod is coaxially connected to the second connecting rod.

5. A tray-type arm according to claim 3, characterized in that: The second connecting rod is fixedly connected to the fixing portion.

6. A tray-type arm according to claim 1, characterized in that: The upper end of the fixing portion is provided with a groove.

7. A tray-type arm according to claim 6, characterized in that: A sensor is arranged in a groove at the upper end of the fixing portion.

8. The tray-type arm according to claim 1, characterized in that: The center points of the arcs of the first clamping portion and the second clamping portion are located at the midpoint of the receiving portion.

9. The tray-type arm according to claim 1, characterized in that: The left end of the receiving portion is arranged in a fan shape.

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