Feeding device of silicon wafer cleaning machine

Abstract

The utility model discloses a feeding device of a silicon wafer cleaning machine, and relates to the technical field of silicon wafer cleaning. Comprising a conveying structure, and the conveying structure is used for conveying silicon wafers; the silicon wafer containing structure is arranged on the conveying structure and used for containing silicon wafers; the feeding structure is arranged on one side of the conveying structure and used for conveying the silicon wafers in the silicon wafer containing structure into the cleaning machine. According to the feeding structure, the containing frames can be automatically processed, manual intervention is reduced, the production efficiency is improved, meanwhile, the labor intensity of operators is relieved, the feeding structure can be adjusted according to requirements to adapt to the containing frames of different specifications and sizes, the flexibility and usability of a production line are improved, and due to conveying of the feeding structure, the production efficiency is improved. Continuous production operation can be achieved, and the stability and continuity of a production line are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer cleaning, in particular to a feeding device for a silicon wafer cleaning machine. Background Art

[0002] Silicon wafers are the main material for making solar panels. The existing silicon wafer production process is as follows: after the wire cutting machine completes the cutting of the silicon wafers, they are first debonded by a debonding machine. The debonded silicon wafers are then separated by a wafer inserting machine and inserted into a basket one by one. The inserted basket needs to be moved in the loading device so that the basket with the silicon wafers moves to the loading position, and then the basket with the silicon wafers is transported into a cleaning machine by a mechanical gripper. The silicon wafers are cleaned by the cleaning machine to obtain neat silicon wafers.

[0003] For example, in a silicon wafer cleaning agent feeding device with patent publication number CN220844509U, when both contact switches are turned on, it means that the flower basket is in place, and when one contact switch is turned on, it means that the flower basket is not in place. The flower basket is transported by the conveying assembly, and the limit plate buffers the contact with the flower basket through springs and buffer pads to avoid damage to the silicon wafers in the flower basket caused by hard contact. After the flower basket touches the limit plate, the flower basket begins to adjust its state under the conveying thrust of the conveying assembly, so that the flower basket and the two limit plates are in contact. The limit plate presses the contact switch through the sliding rod and the top plate, and the two contact switches are turned on. The flower basket is in place, and the electric push rod pushes the flower basket through the push plate, so that the flower basket is located in the middle position of the conveying assembly, and the silicon wafers are fed through the flower basket through the mechanical gripper assembly, thereby effectively avoiding the mechanical gripper assembly from pressing the flower basket, thereby effectively protecting the flower basket and the silicon wafers.

[0004] The electric push rod of the above-mentioned equipment pushes the flower basket through the push plate, so that the flower basket is located in the middle position of the conveying assembly. However, the conveying assembly is generally long. During the conveying process, if the flower basket is offset from the initial position, the flower basket will directly deviate to one side during the conveying process, so that the electric push rod and the push plate are different to make the flower basket located in the middle position of the conveying assembly. Therefore, the present application proposes a silicon wafer cleaning agent feeding device to solve the above-mentioned problem. Utility Model Content

[0005] The purpose of the utility model is to provide a feeding device for a silicon wafer cleaning machine to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a feeding device for a silicon wafer cleaning machine, comprising a conveying structure, wherein the conveying structure is used to convey silicon wafers;

[0007] A silicon wafer holding structure, arranged on the conveying structure, for holding silicon wafers;

[0008] A loading structure, arranged on one side of the conveying structure, is used to convey the silicon wafers in the silicon wafer holding structure to the cleaning machine;

[0009] The conveying structure includes a fixed frame, a supporting leg is installed at the bottom of the fixed frame, a conveying roller is rotatably arranged between the inner walls of the fixed frame, a conveyor belt is arranged between the outer walls of the conveying roller, and fixed plates are arranged on the outer walls of both sides of the fixed frame, a motor is installed on the outside of the fixed frame, and the output end of the motor passes through the inner side of one end of the fixed frame and is connected to the transmission roller.

[0010] Furthermore, the silicon wafer holding structure includes a fixed block, which is an L-shaped structure and is fixedly connected to the conveyor belt, and a support plate is installed on the top of the fixed block.

[0011] Furthermore, an electric telescopic rod is installed on the inner side of the support plate, a clamping plate is installed on the telescopic end of the electric telescopic rod, and a containing frame is movably arranged between the inner sides of the fixed blocks, and the containing frame is in contact with the clamping plate.

[0012] Furthermore, partitions are provided on the inner walls of both sides of the containing frame, integrally formed hooks are installed on the tops of both sides of the containing frame, and through holes are opened around the containing frame.

[0013] Furthermore, the feeding structure includes a support frame, which is connected to the top of the fixed plate, and a threaded rod and a guide rod are respectively arranged between the inner sides of the support frame, and the outer walls of the guide rod and the threaded rod are both provided with moving blocks.

[0014] Furthermore, a connecting frame is installed at the bottom end of the moving block. The connecting frame is a U-shaped structure. A screw rod is rotatably arranged between the inner walls of the connecting frame. A threaded block is threadedly arranged on the outer wall of the screw rod. An electric lifting rod is installed at the bottom end of the threaded block. A loading hook is installed at the lifting end of the electric lifting rod. The loading hook is adapted to the hook.

[0015] Furthermore, a connecting plate is installed on the outer side of one end of the support frame, the connecting plate is an L-shaped structure, a telescopic rod is installed on the inner side of one end of the connecting plate, a spring is provided on the outer wall of the telescopic rod, a trigger is provided at one end of the spring and the telescopic end of the telescopic rod, and the trigger is in contact with the containing frame.

[0016] Compared with the prior art, the beneficial effects of the utility model are:

[0017] The loading device of the silicon wafer cleaning machine can ensure that it maintains a stable position during the transportation process through the setting of the silicon wafer holding structure, avoiding the impact of deviation or shaking on the silicon wafer transportation. The partitions in the holding frame can prevent the silicon wafers from colliding or being damaged, thereby ensuring their quality and integrity.

[0018] At the same time, the feeding structure can realize the automatic processing of the holding frames, reduce manual intervention, improve production efficiency, and also reduce the labor intensity of operators. The feeding structure can be adjusted according to needs to adapt to holding frames of different specifications and sizes, thereby improving the flexibility and usability of the production line. The transportation of the feeding structure can realize continuous and uninterrupted production operations, thereby improving the stability and continuity of the production line. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is the overall axial side schematic diagram of the utility model;

[0020] Figure 2 It is a schematic side view of the whole of the utility model;

[0021] Figure 3 It is a schematic diagram of the feeding structure of the utility model;

[0022] Figure 4 This is a schematic diagram of the silicon wafer holding structure of the utility model.

[0023] In the figure: 1. fixed frame; 101. supporting leg; 102. conveyor belt; 103. fixed plate; 104. motor; 2. silicon wafer holding structure; 201. fixed block; 202. supporting plate; 204. electric telescopic rod; 205. partition; 206. hook; 3. feeding structure; 301. supporting frame; 302. threaded rod; 303. connecting plate; 304. telescopic rod; 305. spring; 306. trigger; 307. guide rod; 308. moving block; 309. connecting frame; 310. screw rod; 311. threaded block; 312. electric lifting rod; 313. feeding hook. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] The loading device of the silicon wafer cleaning machine is a device used to transport the silicon wafer frame to the cleaning machine. It is mainly used in the silicon wafer production process in the semiconductor industry. The device needs to be used in environments such as production workshops or laboratories. It needs power supply and compressed air support during operation. The device needs to be placed on a flat and stable ground and needs to be in a dry, dust-free, and vibration-free environment to ensure the accuracy of transportation and the safety of silicon wafers. The device needs to be used in conjunction with the silicon wafer cleaning machine and needs to be adjusted and optimized according to the needs of the production line to ensure the accuracy and stability of transportation. Operators need to receive professional training, master operating skills and safety knowledge, and operate in accordance with the instruction manual and safety specifications. During use, it is necessary to pay attention to the position and direction of the silicon wafer frame to avoid damage to the silicon wafer or misoperation leading to accidents. During use, it is necessary to pay attention to the safety of the silicon wafer and the safety of the operator. The silicon wafer frame needs to be fixed in place to prevent the silicon wafer from being damaged by collision or friction. Operators need to comply with safety regulations and wear personal protective equipment such as protective glasses and gloves to avoid scratches, cutting, and other injuries to the silicon wafer.

[0026] like Figure 1-Figure 4 As shown, the utility model provides a technical solution: a feeding device for a silicon wafer cleaning machine, comprising a conveying structure, the conveying structure is used to convey the silicon wafer;

[0027] The silicon wafer holding structure 2 is arranged on the conveying structure and is used to hold the silicon wafer;

[0028] The loading structure 3 is arranged on one side of the conveying structure and is used to convey the silicon wafers in the silicon wafer holding structure 2 to the cleaning machine;

[0029] The conveying structure includes a fixed frame 1, a supporting leg 101 is installed at the bottom end of the fixed frame 1, a conveying roller is rotatably arranged between the inner walls of the fixed frame 1, a conveying belt 102 is arranged between the outer walls of the conveying roller, and fixed plates 103 are arranged on the outer walls of both sides of the fixed frame 1, a motor 104 is installed on the outer side of the fixed frame 1, and the output end of the motor 104 passes through the inner side of one end of the fixed frame 1 and is connected to the transmission roller.

[0030] The silicon wafer holding structure 2 includes a fixed block 201 . The fixed block 201 is an L-shaped structure. The fixed block 201 is fixedly connected to the conveyor belt 102 . A support plate 202 is installed on the top of the fixed block 201 .

[0031] An electric telescopic rod 204 is installed inside the support plate 202, and a clamping plate is installed at the telescopic end of the electric telescopic rod 204. A containing frame is movably arranged between the inner sides of the fixed block 201, and the containing frame is in contact with the clamping plate.

[0032] The inner walls of both sides of the containing frame are provided with partitions 205, the tops of both sides of the containing frame are installed with integrally formed hooks 206, and through holes are opened around the containing frame.

[0033] The feeding structure 3 includes a support frame 301, which is connected to the top of the fixed plate 103. A threaded rod 302 and a guide rod 307 are respectively arranged between the inner sides of the support frame 301, and a moving block 308 is arranged on the outer walls of the guide rod 307 and the threaded rod 302.

[0034] A connecting frame 309 is installed at the bottom end of the moving block 308. The connecting frame 309 is a U-shaped structure. A screw rod 310 is rotatably arranged between the inner walls of the connecting frame 309. A threaded block 311 is threadedly arranged on the outer wall of the screw rod 310. An electric lifting rod 312 is installed at the bottom end of the threaded block 311. A loading hook 313 is installed at the lifting end of the electric lifting rod 312. The loading hook 313 is adapted to the hook 206.

[0035] A connecting plate 303 is installed on the outer side of one end of the support frame 301, and the connecting plate 303 is an L-shaped structure. A telescopic rod 304 is installed on the inner side of one end of the connecting plate 303. A spring 305 is provided on the outer wall of the telescopic rod 304. A trigger 306 is provided at one end of the spring 305 and the telescopic end of the telescopic rod 304, and the trigger 306 is in contact with the containing frame.

[0036] It should be noted that the entire external device is connected to the control system of the peripheral device. When in use, the silicon wafers are first placed in the holding frame. The partition 205 in the holding frame separates the silicon wafers to prevent the silicon wafers from shaking and colliding during transportation and causing damage to the silicon wafers. Then the holding frame is placed between the fixed blocks 201 on the conveyor belt 102. Since the support plate 202 set on the fixed block 201 is equipped with an electric telescopic rod 204, the holding frame can be fixed again. Then the conveying roller is driven by the motor 104 to rotate, and the transmission roller will drive the conveyor belt 102 to rotate, thereby transporting the silicon wafers in the holding frame. When the holding frame touches the trigger 306, the trigger 306 will pause the conveyor belt 102 through the control system, and then the threaded rod 302 is driven by the motor 104 to rotate, and the threaded rod 302 will drive the moving The connecting frame 309 connected to the block 308 moves, and the feeding hook 313 is connected with the screw rod 310 and the threaded block 311 through the electric lifting rod 312, so that the feeding hook 313 can be adjusted, and the hook 206 on the containing frame is hung with the feeding hook 313, and then the electric telescopic rod 204 releases the containing frame, and the electric lifting rod 312 will drive the containing frame to rise, and move it on the screw rod 310 to the cleaning machine through the threaded block 311, which can realize the automatic processing of the containing frame, reduce manual intervention, improve production efficiency, and also reduce the labor intensity of operators. The feeding structure 3 can be adjusted according to needs to adapt to containing frames of different specifications and sizes, thereby improving the flexibility and usability of the production line. The transportation of the feeding structure 3 can realize continuous and uninterrupted production operations, thereby improving the stability and continuity of the production line.

[0037] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is limited by the attached embodiments and their equivalents.

Claims

1. A feeding device for a silicon wafer cleaning machine, comprising a conveying structure, characterized in that: The conveying structure is used to convey silicon wafers; A silicon wafer holding structure (2), arranged on the conveying structure, and used for holding silicon wafers; A loading structure (3) is arranged on one side of the conveying structure and is used to convey the silicon wafers in the silicon wafer holding structure (2) to the cleaning machine; The conveying structure comprises a fixed frame (1), a supporting leg (101) is installed at the bottom end of the fixed frame (1), a conveying roller is rotatably arranged between the inner walls of the fixed frame (1), a conveying belt (102) is arranged between the outer walls of the conveying roller, and a fixing plate (103) is arranged on the outer walls of both sides of the fixed frame (1), a motor (104) is installed on the outer side of the fixed frame (1), and the output end of the motor (104) passes through the inner side of one end of the fixed frame (1) and is connected to the transmission roller.

2. The feeding device of a silicon wafer cleaning machine according to claim 1, characterized in that: The silicon wafer holding structure (2) comprises a fixed block (201), the fixed block (201) is an L-shaped structure, the fixed block (201) is fixedly connected to the conveyor belt (102), and a support plate (202) is installed on the top of the fixed block (201).

3. The feeding device of a silicon wafer cleaning machine according to claim 2, characterized in that: An electric telescopic rod (204) is installed inside the support plate (202), a clamping plate is installed at the telescopic end of the electric telescopic rod (204), and a containing frame is movably arranged between the inner sides of the fixed block (201), and the containing frame is in contact with the clamping plate.

4. A silicon wafer cleaning machine feeding device according to claim 3, characterized in that: The inner walls of both sides of the containing frame are provided with partitions (205), the tops of both sides of the containing frame are installed with integrally formed hooks (206), and through holes are opened around the containing frame.

5. The feeding device of a silicon wafer cleaning machine according to claim 1, characterized in that: The feeding structure (3) comprises a support frame (301), the support frame (301) is connected to the top end of the fixed plate (103), a threaded rod (302) and a guide rod (307) are respectively arranged between the inner sides of the support frame (301), and a moving block (308) is arranged on the outer walls of the guide rod (307) and the threaded rod (302).

6. A silicon wafer cleaning machine feeding device according to claim 5, characterized in that: A connecting frame (309) is installed at the bottom end of the moving block (308), and the connecting frame (309) is a U-shaped structure. A screw rod (310) is rotatably arranged between the inner walls of the connecting frame (309), and a threaded block (311) is threadedly arranged on the outer wall of the screw rod (310). An electric lifting rod (312) is installed at the bottom end of the threaded block (311), and a feeding hook (313) is installed at the lifting end of the electric lifting rod (312), and the feeding hook (313) is adapted to the hook (206).

7. The feeding device of a silicon wafer cleaning machine according to claim 5, characterized in that: A connecting plate (303) is installed on the outer side of one end of the support frame (301), and the connecting plate (303) is an L-shaped structure. A telescopic rod (304) is installed on the inner side of one end of the connecting plate (303), and a spring (305) is arranged on the outer wall of the telescopic rod (304). A trigger (306) is arranged at one end of the spring (305) and the telescopic end of the telescopic rod (304), and the trigger (306) is in contact with the containing frame.

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