High-strength crucible and evaporation source

Abstract

The utility model discloses a high strength crucible and vapor plating source, the interior of crucible body is provided with the accommodation chamber that is used for placing the material to be plated, the accommodation chamber is provided with the first coating and the second coating that is arranged between the first coating and the crucible body, the first coating is the pyrolytic graphite coating, the second coating is the pyrolytic graphite coating, and the third coating is the pyrolytic graphite coating. The second coating is a boron nitride coating or a pyrolytic boron nitride coating, and the pyrolytic graphite coating is arranged, so that the anti-shearing capability of the crucible can be effectively improved, and the condition that a material to be plated is separated from the bottom and scrapped does not occur under the condition that the material to be plated is left in the crucible; secondly, the pyrolytic graphite coating can also improve the liquid metal corrosion resistance of the crucible; the second coating can enhance the erosion resistance of the crucible to molten aluminum, so that the service life of the crucible is prolonged; the first coating and the second coating are arranged in the crucible, so that the tensile strength of the crucible can be remarkably improved, the tensile strength of the crucible is larger than or equal to 20 Pa, the tensile force generated when the liquid to-be-plated material is solidified can be resisted, and then the crucible is prevented from being broken.

Description

Technical Field

[0001] The utility model relates to the technical field of evaporation, and more specifically to a high-strength crucible and an evaporation source. Background Art

[0002] The evaporation process has been widely used in the production of liquid crystal display components, semiconductor components and solar cell components. The device currently used for evaporation is a crucible to heat the material to be plated. In order to evenly coat the material to be plated used in the production process on the substrate, the substrate is generally placed above the crucible nozzle, and the material to be plated in the crucible is heated by a heating wire. The material to be plated begins to melt when heated, forming vapor, which is evenly attached to the substrate to obtain a high-quality film layer.

[0003] However, current crucibles often break during use, which seriously affects production efficiency and increases production costs. Utility Model Content

[0004] In order to overcome the deficiencies of the prior art, the utility model provides a high-strength crucible and an evaporation source to solve the problem that the crucible is prone to breakage during use.

[0005] The technical solution of the utility model is as follows: a high-strength crucible, comprising a crucible body, wherein the crucible body is provided with a containing cavity for placing a material to be plated, wherein the containing cavity is provided with a first coating and a second coating provided between the first coating and the crucible body, wherein the first coating is a pyrolytic graphite coating, and the second coating is a boron nitride coating or a pyrolytic boron nitride coating.

[0006] Furthermore, the total thickness of the first coating layer and the second coating layer is 1.5 mm.

[0007] Furthermore, the pyrolytic boron nitride coating is coated on the surface of the crucible body by chemical vapor deposition.

[0008] Furthermore, the boron nitride coating is formed on the surface of the crucible body by hot pressing and sintering boron nitride powder.

[0009] Furthermore, the crucible body is made of ceramic.

[0010] In addition, the utility model also provides an evaporation source, including the above-mentioned crucible, a heating plate and a plurality of evaporation units arranged on the heating plate, each of the evaporation units is provided with a plurality of independent assembly grooves, and the crucibles are arranged in the assembly grooves one by one.

[0011] Furthermore, the plurality of evaporation monomers are arranged in a straight line.

[0012] Furthermore, a long strip-shaped groove is provided on the heating plate, and limiting protrusions are provided at the front and rear ends of the groove. A locking protrusion is provided on the side wall of the evaporation monomer, and at least a part of the evaporation monomer is located in the groove, and the lower end surface of the locking protrusion is in contact with the upper end surface of the limiting protrusion.

[0013] Furthermore, each of the evaporation monomers is provided with a first inclined surface on both sides, and two adjacent evaporation monomers are overlapped with each other through the first inclined surface, and second inclined surfaces are provided at both ends of the groove, and the second inclined surface overlaps with the first inclined surface of the adjacent evaporation monomer.

[0014] Further, the inclination angle of the first inclined surface is equal to the inclination angle of the second inclined surface.

[0015] The utility model according to the above scheme has the following beneficial effects:

[0016] (1) The utility model provides a high-strength crucible, comprising a crucible body, wherein a receiving cavity for placing a material to be plated is arranged inside the crucible body, a first coating and a second coating arranged between the first coating and the crucible body are arranged in the receiving cavity, the first coating is a pyrolytic graphite coating, and the second coating is a boron nitride coating or a pyrolytic boron nitride coating, wherein by arranging the pyrolytic graphite coating, the shear resistance of the crucible can be effectively improved, so that when there is material to be plated remaining in the crucible, the crucible will not fall off and become scrapped; secondly, the pyrolytic graphite coating can also improve the crucible's ability to resist liquid metal corrosion; the second coating can enhance the crucible's ability to resist corrosion by aluminum liquid, thereby improving the service life of the crucible; and further, arranging the first coating and the second coating in the crucible can significantly improve the tensile strength of the crucible, so that the tensile strength of the crucible is greater than or equal to 20Pa, thereby being able to resist the tensile force generated when the liquid material to be plated solidifies, thereby avoiding the crucible from breaking.

[0017] (2) The utility model provides a high-strength crucible, in which the total thickness of the first coating and the second coating is 1.5 mm, which not only makes the crucible have good shear resistance and aluminum liquid corrosion resistance, but also can reduce the influence of the first coating and the second coating on heat transfer during the evaporation process, thereby ensuring that the evaporation efficiency of the material to be plated in the crucible meets the requirements and improves production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 This is a schematic structural diagram of a high-strength crucible in an embodiment of the utility model;

[0020] Figure 2 It is a schematic diagram of the three-dimensional structure of an evaporation source in an embodiment of the utility model;

[0021] Figure 3 This is a schematic diagram of the structural decomposition of an evaporation source in an embodiment of the utility model;

[0022] Figure 4 It is a top view of an evaporation source in an embodiment of the utility model.

[0023] In the figure, 1, crucible body; 11, accommodating cavity; 2, first coating; 3, second coating; 4, heating plate; 41, groove; 42, limiting protrusion; 43, second inclined surface; 5, evaporation monomer; 51, assembly groove; 52, clamping protrusion; 53, first inclined surface. DETAILED DESCRIPTION

[0024] The following detailed description and drawings of the embodiments of the present invention are used to illustrate the principle of the present invention, but cannot be used to limit the scope of the present invention, that is, the present invention is not limited to the embodiments described.

[0025] In order to better understand the present invention, the present invention is further described below in conjunction with the accompanying drawings and embodiments:

[0026] See also Figure 1 As shown, a high-strength crucible provided by an embodiment of the utility model includes a crucible body 1, a containing cavity 11 for placing a material to be plated is arranged inside the crucible body 1, a first coating 2 and a second coating 3 arranged between the first coating 2 and the crucible body 1 are arranged in the containing cavity 11, the first coating 2 is a pyrolytic graphite coating, and the second coating 3 is a boron nitride coating or a pyrolytic boron nitride coating.

[0027] During the evaporation process, metal residues may remain in the crucible. These metal residues will generate shear forces when subjected to external forces or temperature changes, causing the bottom of the crucible to fall off, resulting in the risk of scrapping. In this embodiment, by arranging a pyrolytic graphite coating in the accommodating chamber 11, the shear resistance of the crucible is significantly improved, and the structural stability of the crucible can be effectively enhanced, so that it can remain intact even when it contains metal residues, avoiding the occurrence of bottom-off and scrapping. Secondly, the pyrolytic graphite coating can also enhance the crucible's corrosion resistance to liquid metal. During the evaporation process, if the liquid metal contacts the inner wall of the crucible, it is easy for the metal to penetrate into the crucible, destroying its structure and affecting the evaporation effect. The pyrolytic graphite coating has excellent corrosion resistance, which can effectively resist the corrosion of liquid metal, protect the integrity of the crucible and extend the service life of the crucible.

[0028] In the evaporation process, aluminum liquid often corrodes the crucible due to its active chemical properties, which often shortens the service life of the crucible, increases production costs and replacement frequency. In this embodiment, a boron nitride coating or a pyrolytic boron nitride coating is added between the first coating 2 and the crucible body 1, which significantly enhances the crucible's ability to resist erosion by aluminum liquid, thereby effectively extending the service life of the crucible, helping to improve production efficiency and reduce maintenance costs. It is worth mentioning that since the boron nitride coating or the pyrolytic boron nitride coating has excellent thermal conductivity and a small thermal expansion coefficient, it can help ensure uniform heating of the crucible during the heating process and ensure the uniformity of the coating of the crucible during the evaporation process; it can also ensure that the crucible can maintain a stable size and shape at high temperatures, reducing the risk of deformation and rupture.

[0029] The inventors have found that a potential disadvantage of the pyrolytic graphite coating is that when the thickness is set too thick, the evaporation efficiency of the crucible will be reduced, and the evaporation efficiency is a key indicator to measure the evaporation speed of the material to be plated from the crucible during the evaporation process, which directly affects the quality and speed of the coating. Due to its specific physical and chemical properties, the pyrolytic graphite coating will hinder the transfer of heat and the evaporation of materials to a certain extent, thereby reducing the evaporation efficiency.

[0030] Based on this, the inventor proposed a solution, that is, the total thickness of the first coating 2 and the second coating 3 is set to 1.5 mm, wherein the thickness of the first coating 2 can be greater than or equal to the thickness of the second coating 3, that is, when the thickness of the first coating 2 is maintained at less than 1.5 mm, it can not only make the crucible have good shear resistance and resistance to aluminum liquid corrosion, but also greatly reduce the influence of the first coating 2 on heat transfer and material evaporation, thereby ensuring that the evaporation efficiency of the crucible meets the requirements.

[0031] Preferably, the pyrolytic boron nitride coating is coated on the surface of the crucible body 1 by chemical vapor deposition; the boron nitride coating is formed on the surface of the crucible body 1 by hot pressing and sintering boron nitride powder.

[0032] Preferably, the crucible body 1 is made of ceramic. Specifically, ceramic materials can withstand extremely high temperatures without deformation or melting. The crucible body 1 is made of ceramic materials, so that the crucible body 1 can maintain stability and reliability during processes such as high-temperature smelting, evaporation and sintering. Secondly, ceramic materials have good chemical stability, thereby ensuring that the crucible body 1 can resist the erosion of various chemical substances and is not easy to react chemically with the material to be plated, thereby ensuring the purity and quality of the coating process. In addition, it can also ensure that the crucible body 1 has the ability to withstand certain physical impacts and vibration resistance, so that the crucible body 1 can maintain a stable working state, improving production efficiency and safety; it can also ensure that the crucible body 1 is not prone to significant deformation at high temperatures, ensuring the stability of the evaporation process.

[0033] In addition, the utility model also provides a vapor deposition source, see Figure 2 to Figure 4 As shown, the evaporation source includes the above-mentioned crucible, a heating plate 4, and a plurality of evaporation units 5 arranged on the heating plate 4. Each evaporation unit 5 is provided with a plurality of independent assembly slots 51, and the crucibles are arranged one by one in the assembly slots 51. This design provides a stable and independent space for the placement of the crucibles, ensuring that each crucible can be evenly and fully heated during the evaporation process, avoiding the problem of uneven evaporation of the material to be plated or low evaporation efficiency due to mutual interference between the crucibles.

[0034] Preferably, multiple evaporation monomers 5 are arranged in a straight line. Specifically, such a design helps to achieve uniform heating and temperature control. Since the evaporation monomers 5 are arranged neatly, the heating plate 4 can evenly distribute heat, ensuring that each evaporation monomer 5 and the crucible inside it can obtain similar heating conditions, which helps to maintain the stability and consistency of the evaporation rate. In addition, the arrangement of multiple evaporation monomers 5 in a straight line is also convenient for operation and monitoring. The operator can easily place, remove and monitor the evaporation process of the crucible along the straight line arrangement order; this design simplifies the operation process, improves work efficiency, and reduces the possibility of operational errors.

[0035] Preferably, the heating plate 4 is provided with a long groove 41, and the front and rear ends of the groove 41 are provided with a limiting convex portion 42. The side wall of the evaporation monomer 5 is provided with a clamping protrusion 52. At least a part of the evaporation monomer 5 is located in the groove 41, and the lower end surface of the clamping protrusion 52 is in contact with the upper end surface of the limiting convex portion 42. Specifically, the limiting convex portion 42 plays a fixing and limiting role. When the evaporation monomer 5 is placed in the groove 41, the clamping protrusion 52 on its side wall is in contact with the upper end surface of the limiting convex portion 42, which not only ensures the installation stability of the evaporation monomer 5 on the heating plate 4, but also prevents the risk of the evaporation monomer 5 slipping or tilting in the front and rear directions during operation.

[0036] Preferably, a first inclined surface 53 is provided on both sides of each evaporation monomer 5, and two adjacent evaporation monomers 5 overlap each other through the first inclined surface 53. Specifically, this overlapping method helps to increase the contact area between the evaporation monomers 5, thereby improving the installation firmness between the evaporation monomers 5; at the same time, the design of the first inclined surface 53 also makes the assembly between the evaporation monomers 5 easier, reducing the difficulty and error of assembly. Secondly, a second inclined surface 43 is provided on both ends of the groove 41, and the second inclined surface 43 overlaps with the first inclined surface 53 of the adjacent evaporation monomer 5, so that the evaporation monomer 5 can be stably placed in the groove 41, and it is not easy to shake or shift. It is worth mentioning that such a design also helps to achieve the continuity and efficiency of the evaporation process. Since the evaporation monomers 5 overlap each other through the first inclined surface 53, they can form a tight evaporation array, which helps to achieve the continuity and stability of the evaporation process, and avoids the problem of heat loss and uneven evaporation caused by excessive gaps between the evaporation monomers 5.

[0037] Preferably, the inclination angle of the first inclined surface 53 is equal to the inclination angle of the second inclined surface 43. Specifically, since the first inclined surface 53 and the second inclined surface 43 can overlap, the evaporation monomer 5 can be firmly fixed on the heating plate 4 and is not prone to shaking or shifting, which not only helps to maintain the continuity and stability of the evaporation process, but also can reduce the heat loss and uneven evaporation caused by the movement of the monomer.

[0038] The indicated orientation or position relationship is based on the orientation or position relationship shown in the drawings, or the orientation or position relationship in which the product of the application is usually placed when used, or the orientation or position relationship commonly understood by technical personnel in this field, or the orientation or position relationship in which the product of the application is usually placed when used. It is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0039] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to the utility model.

[0040] The above is an exemplary description of the utility model patent in conjunction with the accompanying drawings. It is obvious that the implementation of the utility model patent is not limited to the above-mentioned method. As long as various improvements are made by adopting the method concept and technical solution of the utility model patent, or the concept and technical solution of the utility model patent are directly applied to other occasions without improvement, they are all within the protection scope of the utility model.

Claims

1. A high-strength crucible, characterized in that: include: A crucible body (1), wherein a receiving cavity (11) for placing a material to be plated is arranged inside the crucible body (1), a first coating (2) and a second coating (3) arranged between the first coating (2) and the crucible body (1) are arranged inside the receiving cavity (11), the first coating (2) is a pyrolytic graphite coating, and the second coating (3) is a boron nitride coating or a pyrolytic boron nitride coating.

2. A high-strength crucible according to claim 1, characterized in that: The total thickness of the first coating layer (2) and the second coating layer (3) is 1.5 mm.

3. A high-strength crucible according to any one of claims 1 to 2, characterized in that: The pyrolytic boron nitride coating is coated on the surface of the crucible body (1) by chemical vapor deposition.

4. A high-strength crucible according to any one of claims 1 to 2, characterized in that: The boron nitride coating is formed on the surface of the crucible body (1) by hot pressing and sintering boron nitride powder.

5. A high-strength crucible according to any one of claims 1 to 2, characterized in that: The crucible body (1) is made of ceramic.

6. A vapor deposition source, characterized in that: It comprises the crucible according to any one of claims 1 to 5, a heating plate (4) and a plurality of evaporation units (5) arranged on the heating plate (4), each of the evaporation units (5) being provided with a plurality of mutually independent assembly grooves (51), and the crucibles being arranged in the assembly grooves (51) in a one-to-one correspondence.

7. The evaporation source according to claim 6, characterized in that: The plurality of vapor deposition units (5) are arranged in a straight line.

8. An evaporation source according to claim 6 or 7, characterized in that: The heating plate (4) is provided with a long strip-shaped groove (41), and the front and rear ends of the groove (41) are provided with limiting convex parts (42). The side wall of the vapor deposition monomer (5) is provided with a locking convex part (52), and at least a part of the vapor deposition monomer (5) is located in the groove (41), and the lower end surface of the locking convex part (52) is in contact with the upper end surface of the limiting convex part (42).

9. The evaporation source according to claim 8, characterized in that: Both sides of each of the vapor deposition monomers (5) are provided with first inclined surfaces (53), and two adjacent vapor deposition monomers (5) overlap each other through the first inclined surfaces (53), and both left and right ends of the groove (41) are provided with second inclined surfaces (43), and the second inclined surfaces (43) overlap the first inclined surfaces (53) of the vapor deposition monomers (5) adjacent thereto.

10. The evaporation source according to claim 9, characterized in that: The inclination angle of the first inclined surface (53) is equal to the inclination angle of the second inclined surface (43).

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