Anti-adhesion assembly of evaporation source

Abstract

The utility model discloses an anti-adhesion assembly of an evaporation source, and relates to the technical field of coating equipment. Comprising an evaporation source body and an anti-adhesion mechanism, the anti-adhesion mechanism is arranged in the evaporation source body and used for treating steam close to the inner wall of the evaporation source body and reducing steam adhesion to the inner wall of the evaporation source body, and the anti-adhesion mechanism comprises a mounting cavity. Through the arrangement of the anti-attachment mechanism, steam in the equipment can be well controlled when the equipment is used, contact between the steam and an object lower than the steam is reduced, when water drops are attached to the surface of the heating metal cylinder, the water drops can be quickly atomized, steam is formed again, and the water drops are prevented from entering the heating metal cylinder. And it is ensured that the situation that the coating effect is poor due to the fact that the equipment is affected by water drops can be reduced when the equipment is used, the influence on coating raw materials is reduced, the use limitation of the equipment is reduced, and the practicability and applicability of the equipment are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, in particular to an anti-adhesion component of an evaporation source. Background Art

[0002] Vacuum coating technology occupies an increasingly important position in the fields of new materials, new energy, metallurgy, chemical industry, aerospace, etc.

[0003] When using vacuum coating technology, a saturated vapor pressure environment mode is adopted to coat the coating raw materials. Since steam is used to adjust the pressure environment to achieve different coating effects, the steam therein will condense when encountering a lower temperature during use, resulting in water droplets inside the evaporation source, affecting the normal coating of the equipment, affecting the finished quality of the coating material and the use effect of the equipment, resulting in certain limitations in the use of the equipment, and the practicability and applicability of the equipment are low. Therefore, the utility model proposes a new solution. Utility Model Content

[0004] The purpose of the utility model is to provide an anti-adhesion component of an evaporation source to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solution: an anti-adhesion component of an evaporation source, comprising:

[0006] Evaporation source body;

[0007] The anti-adhesion mechanism is arranged inside the evaporation source body and is used to process the steam close to the inner wall of the evaporation source body to reduce the steam from adhering to the inner wall of the evaporation source body;

[0008] The anti-adhesion mechanism includes:

[0009] The installation cavity is arranged near the middle of the inner wall of the evaporation source body, the interior of the installation cavity is connected with the interior of the evaporation source body, a heating metal cylinder is arranged between the interior of the installation cavity and the interior of the evaporation source body, a heating coil is arranged on the outer surface of the heating metal cylinder, and the heating coil is installed inside the installation cavity.

[0010] Preferably, a mounting seat and an pore seat are provided near the top and bottom ends of the evaporation source body, the bottom end of the mounting seat and the evaporation source body are fixedly connected, the top end of the pore seat and the evaporation source body are movably connected, a placement plate is provided at the top end of the mounting seat, a limiting member is provided between the placement plate and the mounting seat, and the limiting member is used to ensure the installation stability of the placement plate.

[0011] Preferably, the limiting member includes:

[0012] A plurality of positioning pins and positioning holes are provided, each positioning pin and positioning hole are matched with each other, the top end of each positioning pin is fixedly connected to the bottom end of the placement plate, and each positioning hole is opened at the top end of the mounting seat.

[0013] Preferably, the arc-shaped surface of the mounting seat is provided with a plurality of through-holes penetrating the interior, and each through-hole is used to connect the top of the mounting seat with the interior of the evaporation source body.

[0014] Preferably, the top of the pore seat is provided with a plurality of communicating pores penetrating the bottom, each communicating pore is connected to each other, and a locking adjustment mechanism is provided at the top of the pore seat, which is used for quickly pressing and connecting the pore seat and the evaporation source.

[0015] Preferably, the locking adjustment member comprises:

[0016] A threaded barrel and a connecting threaded groove, wherein the connecting threaded groove is arranged on the inner wall of the evaporation source body near the bottom end, the outer surface of the threaded barrel is screwed to the inner wall of the threaded groove, a plurality of pads are fixedly connected to the top end of the threaded barrel, the top end of each pad is movably connected to the bottom end of the pore seat, a hexagonal rotating block is fixedly connected to the bottom end of the outer surface of the threaded barrel, and the bottom end of the hexagonal rotating block is communicated with the inside of the threaded barrel.

[0017] Compared with the prior art, the beneficial effects of the utility model are:

[0018] The anti-adhesion component of the evaporation source, through the anti-adhesion mechanism, can achieve good control of the steam inside the device when the device is in use, reduce the contact between the steam and objects below itself, and when water droplets adhere to the surface of the heated metal cylinder, they can be quickly atomized to form steam again, ensuring that the device can reduce the occurrence of poor coating effect caused by the influence of water droplets on the device when in use, reduce the impact on the coating raw materials, reduce the use limitations of the device, and increase the practicality and applicability of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0020] Figure 2 It is a schematic diagram of the bottom cross-sectional structure of the utility model;

[0021] Figure 3 This is a schematic diagram of the top cross-section explosion structure of the utility model;

[0022] Figure 4 It is a schematic diagram of the top structure of the utility model.

[0023] In the figure: 1. Evaporation source body; 2. Mounting seat; 3. Positioning hole; 4. Positioning pin; 5. Placement plate; 6. Mounting cavity; 7. Heating metal cylinder; 8. Heating coil; 9. Connecting thread groove; 10. Threaded cylinder; 11. Air hole seat; 12. Connecting air hole; 13. Pad; 14. Hexagonal rotating block; 15. Through air hole. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] Vacuum coating technology and equipment are playing an increasingly important role in modern new materials, new energy, metallurgy, chemical industry, aerospace and other fields. Vacuum transmission coating technology and equipment adopts a saturated vapor pressure environment mode, and will use evaporation source anti-adhesion components. It adopts a saturated gas group (including target material) step-by-step graded diversion mode, and uniformly passes through the pores at equal pressure (similar to passing through a sieve, ensuring that the molecular particles passing through are uniform, at equal speed and at the same pressure) to ensure the uniformity of coating. The rate is about ten times higher than that of traditional sputtering. It also innovatively adopts independently designed vacuum high-temperature large-size ceramic heater technology. According to different processes, the coating process can be rearranged by simply replacing the cavity cover. The equipment of this project can also replace the coating raw materials according to customer needs. It can plate organic, inorganic, and even metal materials. It has a wide range of applications. The evaporation source plugging and unblocking device provided by the utility model is specially used to reduce the occurrence of steam adhering to the inner wall of the evaporation source to form water droplets when the equipment is in use.

[0026] like Figure 1 - Figure 4 As shown, the utility model provides a technical solution: an anti-adhesion component of an evaporation source, comprising:

[0027] An evaporation source body 1 and an anti-adhesion mechanism are provided inside the evaporation source body 1 and are used to process the steam near the inner wall of the evaporation source body 1 to reduce the steam adhering to the inner wall of the evaporation source body 1. The anti-adhesion mechanism includes an installation cavity 6, which is arranged near the middle of the inner wall of the evaporation source body 1. The interior of the installation cavity 6 is connected to the interior of the evaporation source body 1. A heating metal cylinder 7 is provided between the interior of the installation cavity 6 and the interior of the evaporation source body 1. A heating coil 8 is provided on the outer surface of the heating metal cylinder 7, and the heating coil 8 is installed inside the installation cavity 6.

[0028] It should be noted that, through the setting of this structure, the device can reduce the occurrence of water vapor adhering to the inside of the evaporation source body 1 to form water droplets when in use, ensure that the device can reduce the occurrence of poor coating effect caused by the influence of water droplets during coating when in use, ensure the coating effect and coating quality of the device during operation, increase the practicality, applicability and convenience of the device, and the device is in use. The heating metal cylinder 7 is provided to contact the steam, and after the water vapor contacts the heating metal cylinder 7, it is affected by the heating coil 8 to act on the heating metal cylinder 7, reducing the occurrence of water vapor adhering to the inner wall of the heating metal cylinder 7 to form water droplets, ensuring that the device can reduce the occurrence of water vapor adhering to the water droplets affecting the coating when in use.

[0029] like Figure 2 - Figure 4 As shown, a mounting seat 2 and an air hole seat 11 are provided near the top and bottom ends of the evaporation source body 1. The bottom end of the mounting seat 2 and the evaporation source body 1 are fixedly connected, and the top end of the air hole seat 11 and the evaporation source body 1 are movably connected. A placement plate 5 is provided at the top end of the mounting seat 2, and a limiting member is provided between the placement plate 5 and the mounting seat 2. The limiting member is used to ensure the installation stability of the placement plate 5. The limiting member includes a plurality of positioning pins 4 and positioning holes 3, each positioning pin 4 is adapted to the positioning hole 3, the top end of each positioning pin 4 is fixedly connected to the bottom end of the placement plate 5, and each positioning hole 3 is opened at the top end of the mounting seat 2. A plurality of through air holes 15 penetrating the interior are opened on the arc-shaped surface of the mounting seat 2, and each through air hole 15 is used to connect the top end of the mounting seat 2 and the inside of the evaporation source body 1.

[0030] It should be noted that, through the setting of this structure, the coating material can be stably installed when the device is in use, so that the material can achieve a good operating effect during the coating process. The positioning pins 4 and positioning holes 3 are set to ensure that the placement plate 5 and the mounting seat 2 can be well fixed and connected when the device is in use, thereby ensuring the use effect of the device. The multiple through air holes 15 are set to ensure that the steam at the top can be quickly and evenly discharged downward when the device is in use, thereby increasing the practicality and applicability of the device.

[0031] like Figure 2 - Figure 3As shown, a plurality of communicating air holes 12 penetrating the bottom end are provided at the top of the pore seat 11, and each communicating air hole 12 is connected to each other. A locking adjustment mechanism is provided at the top of the pore seat 11, and the locking adjustment mechanism is used for quickly pressing and connecting the pore seat 11 and the evaporation source. The locking adjustment member includes a threaded barrel 10 and a connecting thread groove 9. The connecting thread groove 9 is provided on the inner wall of the evaporation source body 1 near the bottom end, and the outer surface of the threaded barrel 10 is screwed to the inner wall of the thread groove. A plurality of pads 13 are fixedly connected to the top of the threaded barrel 10, and the top end of each pad 13 is movably connected to the bottom end of the pore seat 11. A hexagonal rotating block 14 is fixedly connected to the bottom end of the outer surface of the threaded barrel 10, and the bottom end of the hexagonal rotating block 14 is connected to the inside of the threaded barrel 10.

[0032] It should be noted that, through the setting of this structure, the equipment can discharge the exhaust gas evenly, which is convenient for the pressurized coating of the equipment. Through the hexagonal rotating block 14, the screw-on barrel can be quickly rotated during use, so that the screw-on barrel can act on the pad 13. The pore seat 11 can be well connected through the pad 13 to ensure the installation stability of the pore seat 11, which increases the practicality and applicability of the equipment. The threaded barrel 10 can be used to quickly adjust the installation firmness of the pore seat 11 during use, and the pore seat 11 can be conveniently removed when the inside of the evaporation source body 1 needs to be cleaned during subsequent use, which is convenient for cleaning and maintenance inside the equipment and increases the convenience of the equipment.

[0033] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is limited by the attached embodiments and their equivalents.

Claims

1. An anti-adhesion component for an evaporation source, characterized in that: include: Evaporation source body (1); An anti-adhesion mechanism, the anti-adhesion mechanism being arranged inside the evaporation source body (1) and being used to process steam close to the inner wall of the evaporation source body (1) to reduce the amount of steam adhering to the inner wall of the evaporation source body (1); The anti-adhesion mechanism includes: The installation cavity (6) is provided near the middle of the inner wall of the evaporation source body (1); the interior of the installation cavity (6) and the interior of the evaporation source body (1) are connected; a heating metal cylinder (7) is provided between the interior of the installation cavity (6) and the interior of the evaporation source body (1); a heating coil (8) is provided on the outer surface of the heating metal cylinder (7); and the heating coil (8) is installed inside the installation cavity (6).

2. The anti-adhesion assembly of an evaporation source according to claim 1, characterized in that: A mounting seat (2) and an air hole seat (11) are arranged near the top and bottom ends of the evaporation source body (1); the bottom end of the mounting seat (2) and the evaporation source body (1) are fixedly connected; the top end of the air hole seat (11) and the evaporation source body (1) are movably connected; a placement plate (5) is arranged at the top end of the mounting seat (2); a limiting member is arranged between the placement plate (5) and the mounting seat (2); the limiting member is used to ensure the installation stability of the placement plate (5).

3. The anti-adhesion assembly of an evaporation source according to claim 2, characterized in that: The limiting member comprises: A plurality of positioning pins (4) and positioning holes (3), each positioning pin (4) and positioning hole (3) are matched with each other, the top end of each positioning pin (4) is fixedly connected to the bottom end of the placement plate (5), and each positioning hole (3) is opened at the top end of the mounting seat (2).

4. The anti-adhesion assembly of an evaporation source according to claim 2, characterized in that: The arc-shaped surface of the mounting seat (2) is provided with a plurality of through-holes (15) penetrating the interior, and each through-hole (15) is used to connect the top of the mounting seat (2) and the interior of the evaporation source body (1).

5. The anti-adhesion assembly of an evaporation source according to claim 2, characterized in that: The top of the pore seat (11) is provided with a plurality of communicating pores (12) penetrating the bottom, each communicating pore (12) is connected to each other, and a locking adjustment mechanism is provided at the top of the pore seat (11), the locking adjustment mechanism being used to quickly press and connect the pore seat (11) and the evaporation source.

6. The anti-adhesion assembly of an evaporation source according to claim 5, characterized in that: The locking and adjusting mechanism comprises: A threaded barrel (10) and a connecting threaded groove (9), wherein the connecting threaded groove (9) is formed on the inner wall of the evaporation source body (1) near the bottom end, the outer surface of the threaded barrel (10) is screwed to the inner wall of the threaded groove, a plurality of cushion blocks (13) are fixedly connected to the top end of the threaded barrel (10), the top end of each cushion block (13) is movably connected to the bottom end of the pore seat (11), a hexagonal rotating block (14) is fixedly connected to the bottom end of the outer surface of the threaded barrel (10), and the bottom end of the hexagonal rotating block (14) is connected to the inside of the threaded barrel (10).

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