Cooling assembly and cooling system for vacuum coating processing

Abstract

The utility model discloses a cooling assembly and cooling system for vacuum coating processing, which comprises a vacuum coating chamber, an electrostatic chuck is arranged in the vacuum coating chamber, the electrostatic chuck comprises a base, a connecting material, a heater, an electrode and a ceramic disc are sequentially arranged on the base from bottom to top, and an annular water channel is arranged in the base. The annular water channel is connected with a liquid inlet pipe and a liquid outlet pipe, the vacuum coating cavity is further connected with a vacuumizing pipeline and a dry pump, a valve is arranged on the vacuumizing pipeline, a cooling pipeline is further arranged on one side in the vacuum coating cavity, and an air inlet pipeline is further arranged on the same side as the cooling pipeline in the vacuum coating cavity. The electrostatic chuck cooling device has the beneficial effects that cooling gas is introduced, cooling liquid is introduced into the cooling pipeline, the temperature in the coating cavity is rapidly cooled, cooling liquid is introduced into the annular water path, and therefore the phenomenon that the electrostatic chuck is damaged due to shock cooling caused by the fact that the cooling liquid is directly introduced in the high-temperature state can be effectively prevented.

Description

Technical Field

[0001] The utility model relates to the technical field of electrostatic chucks, in particular to a cooling component and a cooling system for vacuum coating processing. Background Art

[0002] Vacuum coating is an important aspect of vacuum application. It is based on vacuum technology, uses physical or chemical methods, and absorbs a series of new technologies such as electron beam, molecular beam, ion beam, plasma beam, radio frequency and magnetron to provide a new process for thin film preparation for scientific research and actual production. Simply put, the method of evaporating or sputtering metals, alloys or compounds in a vacuum to solidify and deposit them on the coated object (called substrate, substrate or matrix) is called vacuum coating, which is generally divided into two categories, namely physical vapor deposition (PVD) technology and chemical vapor deposition (CVD) technology.

[0003] When PVD process is used for coating processing, it needs to be carried out at high temperature. Different raw materials have different heating temperatures, usually 150-500℃. On the one hand, the temperature must be controlled so as not to change significantly during the process. On the other hand, when the processing is completed, the heat in the coating cavity and on the carrier needs to be dissipated in time before the material can be put in for processing again. The efficiency of traditional heat dissipation is low, which results in a longer heat dissipation time. Therefore, a device that can discharge the heat in the coating cavity more quickly is needed. Utility Model Content

[0004] (I) Technical solution

[0005] In order to solve the above technical problems, the utility model provides a cooling component and a cooling system for vacuum coating processing.

[0006] The specific technical solutions are:

[0007] A cooling component for vacuum coating processing includes a vacuum coating chamber, an electrostatic chuck is arranged in the vacuum coating chamber, the electrostatic chuck includes a base, a connecting material, a heater, an electrode and a ceramic disc are arranged on the base from bottom to top, an annular water channel is arranged in the base, a liquid inlet pipe and a liquid outlet pipe are connected to the annular water channel, a vacuum pipeline and a dry pump are also connected to the vacuum coating chamber, a valve is arranged on the vacuum pipeline, a cooling pipeline is also arranged on one side of the vacuum coating chamber, and an air intake pipeline is also arranged on the same side of the vacuum coating chamber as the cooling pipeline.

[0008] Furthermore, a partition is provided in the vacuum coating chamber to divide the vacuum coating chamber into an air uniforming chamber and a coating chamber. The air inlet pipeline is connected to the air uniforming chamber, and the cooling pipeline is also arranged in the air uniforming chamber. Ventilation holes are provided on the partition.

[0009] Furthermore, the cooling pipelines are arranged in a zigzag reciprocating pattern, and the arrangement spacing is the same as the distance between the ventilation holes on the partition, and the positions correspond.

[0010] Furthermore, the diameter of the ventilation hole on the side of the uniform air chamber is smaller than the diameter of the ventilation hole on the side of the coating chamber.

[0011] Furthermore, a reciprocating baffle is provided in the air-uniform cavity, and the baffle is also provided with ventilation holes corresponding to the partition, and a cylinder is provided outside the vacuum coating chamber to drive the baffle to move up and down.

[0012] Furthermore, a secondary cooling pipe is provided on one side of the coating chamber close to the partition. The secondary cooling pipe has the same shape as the cooling pipeline and is connected to the cooling pipeline via a three-way valve.

[0013] Based on the same inventive concept, the utility model also proposes a cooling system for vacuum coating processing, including the above-mentioned cooling component for vacuum coating processing, and also including a control system, a flow regulating valve and a thermocouple. The flow regulating valve and the thermocouple are multiple, and the multiple flow regulating valves are used to adjust the coolant flow in the annular water channel, the coolant flow in the cooling pipeline, and the flow in the intake pipeline. The multiple thermocouples are respectively located in the upper and lower parts of the vacuum coating chamber, and three thermocouples are provided in the upper and lower parts, which are respectively located on the intake side, the middle and one side of the vacuum pipeline. At the same time, a temperature measuring component for measuring the temperature of the ceramic disc is also provided. The multiple flow regulating valves, the multiple thermocouples, the three-way valve, the dry pump and the cylinder are all connected to the control system.

[0014] (II) Beneficial effects

[0015] Compared with the prior art, the technical solution proposed by the utility model has the following advantages:

[0016] (1) During the vacuum coating process, the surface temperature of the heater and the ceramic disc is measured, the temperature is monitored in real time, the heater power is adjusted, the temperature is controlled, and the processing technology is stable;

[0017] (2) After the coating is completed, the temperature in the coating chamber is quickly cooled by introducing cooling gas and cooling liquid into the cooling pipeline, so that the heat of the electrostatic chuck can be dissipated into the chamber faster;

[0018] (3) After cooling for a period of time, coolant is introduced into the annular water channel. This can effectively prevent the electrostatic chuck from being damaged by sudden cooling due to direct introduction of coolant at a high temperature. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0020] Figure 1 It is a schematic diagram of the cooling component structure;

[0021] Figure 2 It is a schematic diagram of the structure of an electrostatic chuck;

[0022] Figure 3 It is a schematic diagram of the cooling pipeline and the partition position;

[0023] Figure 4 Schematic diagram of the control system. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the utility model embodiments to clearly and completely describe the technical solutions in the utility model embodiments. The described embodiments are only part of the utility model embodiments, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] When PVD process is used for coating processing, it needs to be carried out at high temperature. Different raw materials have different heating temperatures, usually 150-500℃. On the one hand, the temperature must be controlled so as not to change significantly during the process. On the other hand, when the processing is completed, the heat in the coating cavity and on the carrier needs to be dissipated in time before the material can be put in for processing again. The efficiency of traditional heat dissipation is low, which results in a longer heat dissipation time. Therefore, a device that can discharge the heat in the coating cavity more quickly is needed.

[0026] In order to solve the problems existing in the related prior art, the utility model proposes a cooling component and a cooling system for vacuum coating processing. The principle and structure of the utility model are described in detail below in conjunction with the drawings and embodiments.

[0027] See also Figure 1 and Figure 2The utility model proposes a cooling component for vacuum coating processing, including a vacuum coating chamber 1, an electrostatic chuck 2 is arranged in the vacuum coating chamber 1, the electrostatic chuck 2 includes a base 2a, a connecting material 2b, a heater 2c, an electrode 2d and a ceramic disc 2e are arranged on the base 2a from bottom to top, an annular water channel 2f is arranged in the base 2a, a liquid inlet pipe 3 and a liquid outlet pipe 4 are connected to the annular water channel 2f, a vacuum coating chamber 1 is also connected to a vacuum pipeline and a dry pump 5, a valve is arranged on the vacuum pipeline, a cooling pipeline 6 is also arranged on one side of the vacuum coating chamber 1, and an air intake pipeline 7 is also arranged on the same side of the vacuum coating chamber 1 as the cooling pipeline 6.

[0028] The vacuum coating chamber is a closed chamber with opening and closing doors at both ends. The raw materials to be processed are transported to the electrostatic chuck through the material conveying assembly, the conveying assembly retreats, the doors at both ends are closed, and then the raw materials are heated. After reaching the specified temperature, the coating operation is carried out. When the coating operation is completed, the heater 2c stops heating, and cooling gas and coolant are introduced into the air inlet pipe 7 and the cooling pipe 6 respectively. The specific cooling gas is helium. Because heat transfer is slow under a vacuum environment, the introduction of helium into the vacuum coating chamber can effectively improve the heat transfer efficiency. At the same time, the cooling pipe accelerates the cooling speed in the chamber, so that the residual heat of the heater 2c can be dissipated into the vacuum coating chamber faster. After cooling for a period of time, coolant is also introduced into the annular water channel 2f. This can effectively prevent the electrostatic chuck from being damaged by sudden cooling due to the direct introduction of coolant under a high temperature state, and further improve the cooling speed of the heater 2c.

[0029] If the temperature in the vacuum coating chamber is too high, a cooling liquid may be introduced into the cooling pipe 6 to absorb a portion of the heat in the chamber, thereby preventing the temperature in the vacuum coating chamber from overheating.

[0030] Please continue reading Figure 1 and Figure 3 A partition 8 is also provided in the vacuum coating chamber 1, which divides the vacuum coating chamber 1 into a uniform air chamber and a coating chamber. The air inlet pipe 7 is connected to the uniform air chamber, and the cooling pipe 6 is also provided in the uniform air chamber. Ventilation holes are provided on the partition 8. The cooling pipe 6 is arranged in a zigzag reciprocating pattern, and the arrangement spacing is the same as the distance between the ventilation holes on the partition 8, and the positions correspond. The diameter of the ventilation holes on the side of the uniform air chamber is smaller than the diameter on the side of the coating chamber.

[0031] Through the above arrangement, a uniform air chamber is separated from the vacuum coating chamber, and the cooling gas first enters the uniform air chamber and is fully mixed with the cooling pipeline 6 to further cool the cooling gas, and then is blown into the coating chamber through the ventilation holes on the partition 8 to complete the cooling of the coating chamber. At the same time, the diameter of the ventilation holes on one side of the uniform air chamber is smaller than the diameter on one side of the coating chamber to ensure a steady gas flow rate, while ensuring that the temperature of the entire coating chamber is reduced synchronously to prevent the local inability to effectively cool down and cause the cooling efficiency to become low.

[0032] Please continue reading Figure 1 A reciprocating baffle 9 is also provided in the uniform air cavity, and the baffle 9 is also provided with ventilation holes corresponding to the partition 8. A cylinder 10 is provided on the outside of the vacuum coating chamber 1 to drive the baffle 9 to move up and down. Specifically, the length of the baffle is half of the length of the partition, and the ventilation holes on the baffle correspond to the positions of the ventilation holes on the partition. The baffle 9 is driven up or down by the cylinder 10 to achieve alignment and misalignment of the ventilation holes on the partition with the ventilation holes on the baffle. After the coating is completed, it is generally necessary to quickly dissipate the residual heat on the electrostatic suction cup so as to ensure that the annular water channel can be passed through the coolant more quickly without causing damage to the electrostatic chuck. At this time, the cylinder 10 can be adjusted to make the upper ventilation holes misaligned and closed, and the cooling gas can be concentratedly blown to the electrostatic suction cup to take away the residual heat on the electrostatic chuck more quickly. Then the cylinder is adjusted to align the upper ventilation holes for ventilation, so as to achieve comprehensive ventilation and cooling.

[0033] Please continue reading Figure 1 A secondary cooling pipe 11 is also provided on the side of the coating chamber close to the partition 8. The secondary cooling pipe 11 has the same shape as the cooling pipe 6 and is connected to the cooling pipe 6 through a three-way valve 12. In order to improve the cooling efficiency, a double row of cooling pipes can be used for synchronous cooling, which is suitable for vacuum coating chambers operating at a temperature of 450-500°C.

[0034] Based on the same inventive concept, the utility model also proposes a cooling system for vacuum coating processing, including the above-mentioned cooling component for vacuum coating processing, and also includes a control system 13, a flow regulating valve 14 and a thermocouple 15. The flow regulating valve 14 and the thermocouple are multiple, and the multiple flow regulating valves 14 are respectively used to adjust the coolant flow in the annular water channel, the coolant flow in the cooling pipeline 6, and the flow in the intake pipeline 7. The multiple thermocouples 15 are respectively located in the upper and lower parts of the vacuum coating chamber 1, and three thermocouples 15 are provided in the upper and lower parts, which are respectively located on the intake side, the middle and the vacuum pipeline side. At the same time, a temperature measuring component 16 for measuring the temperature of the ceramic disc 2e is also provided. The multiple flow regulating valves 14, the multiple thermocouples 15, the three-way valve 12, the dry pump 5 and the cylinder 10 are all connected to the control system 13.

[0035] Specifically, the flow rate can be adjusted by measuring the temperature of the vacuum coating chamber and the temperature feedback on the electrostatic chuck to achieve a faster cooling operation, while preventing local heat accumulation caused by excessive cooling speed. The following is a specific example.

[0036] In order to facilitate distinction, the three flow regulating valves 14 at the upper part of the vacuum coating chamber are named as thermocouple A1, thermocouple A2 and thermocouple A3, respectively. Thermocouple A1 is installed on the side close to the uniform gas chamber, thermocouple A2 corresponds to the middle upper part of the vacuum coating chamber, and thermocouple A3 corresponds to the side close to the dry pump. The three flow regulating valves 14 at the lower part of the vacuum coating chamber are named as thermocouple B1, thermocouple B2 and thermocouple B3, respectively. Thermocouple B1, thermocouple B2 and thermocouple B3 correspond to thermocouple A1, thermocouple A2 and thermocouple A3 in the vertical direction. At the same time, the temperature measuring component 16 corresponds to the measurement. The temperature of the ceramic disc, and the flow regulating valves on the annular water channel, the cooling pipeline 6 and the intake pipeline 7 are named flow regulating valve A, flow regulating valve B and flow regulating valve C respectively. Specifically, when cooling is required, the refrigerant is first introduced into the cooling pipeline 6 and the intake pipeline 7 through the flow regulating valve B and the flow regulating valve C. At the same time, the dry pump 5 works in the vacuum coating chamber to form a stable cooling airflow. When the electrostatic chuck needs to be cooled first, the cylinder 10 is adjusted so that the ventilation holes in the upper part are offset and closed, and the lower part of the chamber is cooled first. At the same time, the temperature of the ceramic disc is measured by the temperature measuring component 16. After the initial cooling, the cylinder 10 is adjusted so that the ventilation holes in the upper part are offset and aligned to cool the entire chamber. At the same time, the flow control valve A is controlled to pass the refrigerant into the annular water channel for cooling. If there is a temperature difference between the upper and lower parts during the process, there will be a large temperature difference between the temperatures measured by thermocouples A1, A2 and A3 and thermocouples B1, B2 and B3. At this time, it is mainly because the temperature of the electrostatic chuck escapes to the chamber, causing the temperature of the lower part to be higher than the temperature of the upper part. At this time, the cylinder 10 is adjusted so that the ventilation holes in the upper part are offset and closed, and the lower part of the chamber is cooled first. When the temperature difference is eliminated, the control The system will control the cylinder 10 to return to its original position. When the temperatures measured by thermocouple B1, thermocouple B2 and thermocouple B3 increase in a gradient, it means that the cooling efficiency needs to be improved. The cold air blows to the other side where the temperature is higher and normal cooling is no longer possible. At this time, the control system controls the flow regulating valve C to increase the gas flow rate in the intake pipe, and at the same time controls the flow regulating valve B to increase the fluid flow rate in the cooling pipe 6, thereby increasing the heat exchange rate and ensuring that the rear end can also be cooled synchronously. When the cooling rate needs to be further increased, the control system controls the three-way valve 12 to allow the coolant to pass through the cooling pipe 6 and the auxiliary cooling pipe 11 at the same time to achieve dual-channel cooling.

[0037] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A cooling component for vacuum coating processing, characterized in that: The invention comprises a vacuum coating chamber (1), wherein an electrostatic chuck (2) is arranged in the vacuum coating chamber (1), wherein the electrostatic chuck (2) comprises a base (2a), wherein connecting material (2b), a heater (2c), an electrode (2d) and a ceramic disc (2e) are arranged on the base (2a) in order from bottom to top, wherein an annular water channel (2f) is arranged in the base (2a), wherein a liquid inlet pipe (3) and a liquid outlet pipe (4) are connected to the annular water channel (2f), wherein a vacuum pumping pipeline and a dry pump (5) are also connected to the vacuum coating chamber (1), wherein a valve is arranged on the vacuum pumping pipeline, wherein a cooling pipeline (6) is also arranged on one side of the vacuum coating chamber (1), and an air inlet pipeline (7) is also arranged on the same side of the vacuum coating chamber (1) as the cooling pipeline (6).

2. A cooling component for vacuum coating processing according to claim 1, characterized in that: The vacuum coating chamber (1) is also provided with a partition (8) to divide the vacuum coating chamber (1) into an air-uniform chamber and a coating chamber. The air inlet pipe (7) is connected to the air-uniform chamber, and the cooling pipe (6) is also arranged in the air-uniform chamber. The partition (8) is provided with ventilation holes.

3. A cooling component for vacuum coating processing according to claim 2, characterized in that: The cooling pipelines (6) are arranged in a zigzag reciprocating pattern, and the arrangement spacing is the same as the distance between the ventilation holes on the partition (8), and the positions correspond.

4. The cooling component for vacuum coating processing according to claim 3, characterized in that: The diameter of the ventilation hole on one side of the uniform air cavity is smaller than the diameter on one side of the coating cavity.

5. A cooling component for vacuum coating processing according to claim 4, characterized in that: A reciprocating baffle (9) is also provided in the air-uniform cavity, and the baffle (9) is also provided with ventilation holes corresponding to the partition (8). A cylinder (10) is provided on the outside of the vacuum coating chamber (1) for driving the baffle (9) to move up and down.

6. The cooling component for vacuum coating processing according to claim 5, characterized in that: The coating chamber is also provided with an auxiliary cooling pipe (11) on one side close to the partition (8); the auxiliary cooling pipe (11) has the same shape as the cooling pipeline (6) and is connected to the cooling pipeline (6) via a three-way valve (12).

7. A cooling system for vacuum coating processing, characterized in that: It comprises a cooling component for vacuum coating processing as described in claim 6, and also comprises a control system (13), a flow regulating valve (14) and a thermocouple (15), wherein the flow regulating valve (14) and the thermocouple are multiple, and the multiple flow regulating valves (14) are respectively used to adjust the coolant flow in the annular water channel, the coolant flow in the cooling pipeline (6), and the flow in the intake pipeline (7), and the multiple thermocouples (15) are respectively located in the upper and lower parts of the vacuum coating chamber (1), and three thermocouples (15) are provided in the upper and lower parts, respectively located on the intake side, the middle part and the vacuum pipeline side, and a temperature measuring component (16) for measuring the temperature of the ceramic disc (2e) is also provided, and the multiple flow regulating valves (14), the multiple thermocouples (15), the three-way valve (12), the dry pump (5) and the cylinder (10) are all connected to the control system (13).

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