Platform adjusting device for AMAT coating equipment

Abstract

The utility model discloses a platform adjusting device for AMAT coating equipment, which relates to the field of platform adjusting devices and comprises a screw rod, a screw cylinder is sleeved outside the screw rod in a threaded manner, a threaded part and a smooth part are arranged outside the screw cylinder, a sliding seat is sleeved on the smooth part of the screw cylinder in an axial sliding manner, a sleeve is sleeved on the threaded part of the screw cylinder in a threaded manner, and one end of the sliding seat is propped against the sleeve. According to the utility model, the position of the sliding seat can be quickly adjusted by adopting the screw rod and the screw cylinder with larger adaptive screw pitch, the position of the sliding seat can be accurately adjusted by adopting the sleeve and the screw cylinder with smaller adaptive screw pitch, and the displacement adjustment of the platform is quick and accurate by combining a coarse adjustment mode and a fine adjustment mode.

Description

Technical Field

[0001] The utility model relates to the field of platform adjustment devices, in particular to a platform adjustment device for AMAT coating equipment. Background Art

[0002] The processing of high-precision products such as semiconductor product coating requires an adjustable platform. Due to the high requirements for processing accuracy, the platform adjustment accuracy needs to be improved. The displacement adjustment of the traditional adjustment platform is controlled by a single set of threaded components, but the group thread adjustment cannot achieve both adjustment accuracy and adjustment efficiency. Utility Model Content

[0003] The utility model aims to provide a platform adjustment device for AMAT coating equipment, so as to solve the problem that the displacement adjustment accuracy and adjustment efficiency of the traditional high-precision adjustment platform are not compatible.

[0004] In order to solve the problems existing in the prior art, the technical solution of the utility model is as follows:

[0005] A platform adjustment device for AMAT coating equipment includes a screw, wherein the outer thread of the screw is sleeved with a screw barrel, the outer part of the screw barrel has a threaded portion and a smooth portion, the smooth portion of the screw barrel is axially slidably sleeved with a sliding seat, the threaded portion of the screw barrel is threadedly sleeved with a sleeve, one end of the sliding seat is resisted by the sleeve, and the other end of the sliding seat is elastically connected to the screw barrel through a spring.

[0006] Preferably, the pitch of the screw rod and the barrel is more than 3 times the pitch of the threaded portion of the barrel and the sleeve.

[0007] Preferably, a digital measuring ruler is provided on one side of the screw rod, the ruler plate of the digital measuring ruler rotates parallel to the screw rod, and the body of the digital measuring ruler is fixedly connected to the slide seat.

[0008] Preferably, the smooth portion of the screw barrel has a sliding key, and the inner wall of the sliding seat has a keyway, and the sliding key and the keyway are adapted so that the sliding seat can only slide axially and linearly along the smooth portion of the screw barrel.

[0009] Preferably, the sleeve has an expansion cavity at one end that abuts against the sliding seat, and the diameter of the expansion cavity of the sleeve is larger than the diameter of the smooth portion of the barrel.

[0010] Preferably, the surface of the sleeve and the end of the screw both have hexagonal torsion bodies.

[0011] Preferably, an edge of the sleeve that abuts against one end of the slide seat is provided with an angle mark, and a surface of the slide seat has a positioning mark for aligning the angle mark.

[0012] Compared with the related art, the utility model has the following beneficial effects:

[0013] 1. The utility model adopts a screw and a screw barrel with a larger pitch to quickly adjust the position of the slide seat, and adopts a sleeve and a screw barrel with a smaller pitch to accurately adjust the position of the slide seat. The combination of coarse and fine adjustment methods makes the displacement adjustment of the platform fast and accurate;

[0014] 2. The utility model adopts a digital measuring ruler to connect with the slide seat. During the adjustment of the slide seat position, the digital measuring ruler is displaced equally with the ruler plate. The position adjustment of the slide seat is visualized in real time through the digital measuring ruler, making the platform displacement adjustment convenient and accurate. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0016] Figure 2 It is a schematic diagram of the slide seat and sleeve structure of the utility model.

[0017] Figure 3 It is a cross-sectional structural schematic diagram of the utility model.

[0018] Figure numerals: 1, screw; 2, screw barrel; 21, sliding key; 3, sliding seat; 31, keyway; 4, sleeve; 5, digital display measuring ruler; 51, ruler plate. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments.

[0020] like Figure 1-3 As shown, a platform adjustment device for AMAT coating equipment is provided, with a screw 1 as a basis, a screw barrel 2 sleeved on the outside of the screw 1 and threadedly connected with the screw 1, the outside of the screw barrel 2 has a threaded portion and a smooth portion, a slide seat 3 is slidably sleeved on the smooth portion of the screw barrel 2, and a slide key 21 is fixed on the smooth portion of the screw barrel 2, a key groove 31 is provided on the inner wall of the slide seat 3, and the slide key 21 is adapted to the key groove 31 so that the slide seat 3 can only slide axially linearly along the smooth portion of the screw barrel 2, a sleeve 4 is sleeved on the outside of the screw barrel 2 and threadedly connected with the threaded portion of the screw barrel 2, one end of the slide seat 3 is resisted by the sleeve 4, and the other end is elastically connected to the screw barrel 2 through a spring, and the pitch adapted between the screw 1 and the screw barrel 2 is more than 3 times the pitch adapted between the threaded portion of the screw barrel 2 and the sleeve 4;

[0021] The principle of the digital measuring ruler 5 is the same as that of the existing digital vernier caliper. The digital measuring ruler 5 is arranged at the edge of the screw 1. The ruler plate 51 of the digital measuring ruler 5 is fixed with end plates at both ends. The ruler plate 51 is parallel to the screw 1. The two ends of the screw 1 are rotatably connected with the end plates. The body of the digital measuring ruler 5 is fixedly connected with the slide seat 3 through a right-angle plate.

[0022] The slide 3 is used as the installation base of the finishing device. The position adjustment of the finishing device has two modes: coarse and fine.

[0023] Rough adjustment mode: Rotate the screw 1 to make the screw barrel 2 move quickly in a straight line, which is used to quickly adjust the position of the slide 3 and the finishing device. During the movement of the slide 3, the digital display measuring ruler 5 will be driven to move relative to the ruler plate 51, and the approximate range of the adjustment distance can be observed through the digital display measuring ruler 5;

[0024] In fine adjustment mode, the rotating sleeve 4 moves axially on the surface of the screw barrel 2, so that the sleeve 4 pushes the slide 3 to overcome the elastic force and slide. By observing the digital measuring ruler 5, the position of the finishing device can be finely adjusted.

[0025] The end of the sleeve 4 that contacts the slide seat 3 has an expansion cavity, and the diameter of the expansion cavity of the sleeve 4 is larger than the diameter of the smooth part of the barrel 2, so that the expansion cavity of the sleeve 4 can move toward the smooth part, expanding the adjustment range of the sleeve 4 on the surface of the barrel 2.

[0026] The surface of the sleeve 4 and the end of the screw 1 are both provided with hexagonal torsion bodies, which facilitates the use of tools or direct manual rotation of the screw 1 and the sleeve 4.

[0027] An angle mark is provided on the edge of the sleeve 4 that contacts one end of the slide 3, and a positioning mark is provided on the surface of the slide 3 for aligning the angle mark. By aligning the angle mark with the positioning mark, the angle of the rotating sleeve 4 can be controlled, and the position adjustment amount of the slide 3 can be accurately controlled.

[0028] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A platform adjustment device for AMAT coating equipment, characterized in that: The invention comprises a screw rod (1), wherein the screw rod (1) is externally threadedly sleeved with a screw barrel (2), the screw barrel (2) has a threaded portion and a smooth portion on the outside, the smooth portion of the screw barrel (2) is axially slidably sleeved with a slide seat (3), the threaded portion of the screw barrel (2) is threadedly sleeved with a sleeve (4), one end of the slide seat (3) is abutted against by the sleeve (4), and the other end of the slide seat (3) is elastically connected to the screw barrel (2) via a spring.

2. The platform adjustment device for AMAT coating equipment according to claim 1, characterized in that: The pitch of the screw (1) and the barrel (2) is more than three times the pitch of the threaded portion of the barrel (2) and the sleeve (4).

3. The platform adjustment device for AMAT coating equipment according to claim 1, characterized in that: A digital measuring ruler (5) is provided on one side of the screw rod (1); a ruler plate (51) of the digital measuring ruler (5) rotates parallel to the screw rod (1); and a body of the digital measuring ruler (5) is fixedly connected to the slide seat (3).

4. The platform adjustment device for AMAT coating equipment according to claim 1, characterized in that: The smooth portion of the screw barrel (2) has a sliding key (21), and the inner wall of the slide seat (3) has a key groove (31). The sliding key (21) and the key groove (31) are adapted to enable the slide seat (3) to slide only axially and linearly along the smooth portion of the screw barrel (2).

5. The platform adjustment device for AMAT coating equipment according to claim 1, characterized in that: The sleeve (4) has an expansion cavity at one end that contacts the sliding seat (3), and the diameter of the expansion cavity of the sleeve (4) is greater than the diameter of the smooth portion of the screw barrel (2).

6. The platform adjustment device for AMAT coating equipment according to claim 1, characterized in that: The surface of the sleeve (4) and the end of the screw rod (1) both have hexagonal torsion bodies.

7. The platform adjustment device for AMAT coating equipment according to claim 1, characterized in that: An angle mark is provided on the edge of the sleeve (4) that contacts one end of the slide seat (3), and a positioning mark for aligning the angle mark is provided on the surface of the slide seat (3).

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