Coating equipment

Abstract

The utility model provides coating equipment, coating equipment includes coating cavity, carrier, first coating module and second coating module, coating station, first chamber and second chamber are provided in the coating cavity, when carrier is in coating station and carrier carries work piece, the first chamber and second chamber are mutually separated, and the first chamber and second chamber are mutually separated. The first coating surface of the workpiece faces the first chamber, the second coating surface of the workpiece faces the second chamber, the first coating module is used for coating the first coating surface, the second coating module is used for coating the second coating surface, and the first coating module and the second coating module can simultaneously coat the workpiece. According to the coating equipment, the double-sided coating efficiency of the workpiece is relatively high, and the structural complexity and the cost of the equipment are relatively low.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating, in particular to a film coating device. Background Art

[0002] Coating is a common process for processing workpieces, and some workpieces need to be coated on both the front and back sides. For example, in the production process of solar cells, silicon wafers (silicon wafers are workpieces) need to be coated to form TCO layers (Transparent Conductive Oxide) on the front and back sides of the silicon wafers. At present, the process of double-sided coating of workpieces is time-consuming and the coating efficiency is not high. In addition, the structure of the equipment required is relatively complex and the cost of the equipment is relatively high. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a coating device, which can improve the efficiency of double-sided coating of a workpiece, and the device has a simple structure and low cost.

[0004] According to an embodiment of the utility model, the coating equipment includes: a coating chamber, in which a coating station, a first chamber and a second chamber are provided, and the coating station is arranged between the first chamber and the second chamber; a carrier, the carrier is used to carry a workpiece to be coated, the workpiece includes a first coating surface and a second coating surface arranged back to back to each other, when the carrier is in the coating station and the carrier carries the workpiece, the first chamber and the second chamber are separated from each other, the first coating surface faces the first chamber, and the second coating surface faces the second chamber; a first coating module, at least a part of the first coating module is located in the first chamber, and the first coating module is used to coat the first coating surface; a second coating module, at least a part of the second coating module is located in the second chamber, and the second coating module is used to coat the second coating surface, and the first coating module and the second coating module can coat the workpiece at the same time.

[0005] The coating device according to the embodiment of the utility model has at least the following beneficial effects:

[0006] In the prior art, the process of coating the first coating surface and the second coating surface of the workpiece is roughly as follows: first, the workpiece is sent into the first coating chamber to coat the first coating surface; then the workpiece is sent into the second coating chamber to coat the second coating surface. Since the coating of the first coating surface and the coating of the second coating surface are carried out successively, it takes a long time to coat the double-sided workpiece, and the efficiency of double-sided coating is not high. In addition, since the first coating chamber and the second coating chamber are independent of each other, a number of connecting chambers need to be set between the first coating chamber and the second coating chamber. After the workpiece leaves the first coating chamber, the workpiece needs to be subjected to other treatments such as dust removal in the connecting chamber before being sent to the second coating chamber to ensure the coating quality of the second coating surface. This means that the coating equipment needs to be provided with a connecting chamber, and the structure of the coating equipment is relatively complex and the cost is relatively high.

[0007] As for the coating equipment of the present invention, its coating chamber is integrated with two chambers (a first chamber and a second chamber). When the carrier is in the coating station, the first coating surface and the second coating surface of the workpiece face different chambers respectively, and the first coating module and the second coating module can coat the two coating surfaces of the workpiece respectively, and the coating of the two coating surfaces can be performed simultaneously. In this way, the time required for the equipment to coat both sides of the workpiece is less, and the efficiency of double-sided coating is higher. In addition, since the equipment of the present invention integrates the first chamber and the second chamber into one coating chamber, there is no need to set a connecting chamber between the first chamber and the second chamber, which is conducive to reducing the structural complexity and cost of the equipment.

[0008] According to some embodiments of the utility model, the carrier includes a plurality of interconnected carrier plate units, two adjacent carrier plate units are interconnected to form a first gap, the end of the first gap facing the first chamber is the first end, the end of the first gap facing away from the first chamber is the second end, and the first end and the second end are staggered with each other.

[0009] According to some embodiments of the present invention, the coating chamber includes a plurality of partitions, the plurality of partitions surround the second chamber, and a portion of the surface of the partitions serves as the wall of the second chamber; wherein, when the carrier is in the coating station and the carrier carries the workpiece, the partitions abut against the carrier, thereby separating the first chamber from the second chamber; or, when the carrier is in the coating station and the carrier carries the workpiece, the coating equipment further includes a seal, which is connected to the partition and is clamped between the partition and the carrier, thereby separating the first chamber from the second chamber.

[0010] According to some embodiments of the utility model, the carrier includes a plurality of interconnected carrier units, two adjacent carrier units are interconnected to form a first gap, the end of the first gap facing the first chamber is the first end, the end of the first gap facing away from the first chamber is the second end, and the first end and the second end are staggered with each other; one part of the partition is the first partition, the first partition forms a first collecting groove, the first collecting groove is located outside the second chamber, and the first collecting groove is connected to the second end; the inner wall surface of the coating cavity is provided with a first dust removal port, the first dust removal port is connected to the first collection groove, and the coating equipment also includes an exhaust module, the exhaust module is located outside the coating cavity, and the exhaust module is connected to the first dust removal port, and the exhaust module is used to extract dust in the first collection groove.

[0011] According to some embodiments of the utility model, the first partition includes: a load-bearing portion; a first longitudinal portion, the bottom end of the first longitudinal portion is connected to the load-bearing portion; a second longitudinal portion, the bottom end of the second longitudinal portion is connected to the load-bearing portion, the first longitudinal portion and the second longitudinal portion are respectively connected to the two ends of the load-bearing portion, and the first longitudinal portion and the second longitudinal portion are both perpendicular to the load-bearing portion; a shielding portion, the shielding portion is connected to the top end of the first longitudinal portion, and the shielding portion protrudes toward the second longitudinal portion relative to the first longitudinal portion; the load-bearing portion, the first longitudinal portion, the second longitudinal portion and the shielding portion jointly define the first collecting groove, and a side surface of the first longitudinal portion facing away from the second longitudinal portion serves as a part of the inner wall surface of the second chamber.

[0012] According to some embodiments of the utility model, the coating equipment also includes a conveying mechanism, which includes: a driving member; a rotating member, the rotating member is configured as a roller, at least a portion of the rotating member is disposed in the second chamber, the outer peripheral surface of the rotating member abuts against the carrier, and the driving member is used to drive the rotating member to rotate so that the carrier enters and exits the coating chamber.

[0013] According to some embodiments of the utility model, the coating equipment also includes a cover plate, which covers the driving member, and the driving member is located on the side of the cover plate facing away from the first chamber, and a second gap is formed between the cover plate and the carrier; a part of the partition is a second partition, and the second partition forms a second collecting groove, which is located outside the second chamber and connected to the second gap; the inner wall surface of the coating cavity is also provided with a second dust removal port, and the second dust removal port is connected to the second collection groove; the coating equipment also includes an exhaust module, which is located outside the coating cavity and connected to the second dust removal port, and the exhaust module is used to extract dust in the second collection groove.

[0014] According to some embodiments of the present invention, the second partition is further provided with a through hole, the rotating member is passed through the through hole, and the outer peripheral surface of the rotating member abuts against the hole wall of the through hole.

[0015] According to some embodiments of the present invention, the first coating module includes a first target, a magnetron, a gas source and a power supply, the first target is arranged in the first chamber, the magnetron is arranged in the first chamber, the magnetron is located on the side of the first target facing away from the carrier, the gas source is connected to the coating chamber, the gas source is used to transport process gas to the first chamber, the carrier and the first target are both electrically connected to the power supply, the power supply is used to form an electric field in the first chamber, the electric field is used to convert the process gas into plasma, and to make at least a part of the ions in the plasma move toward the first target; and / or, the second coating module includes a second target and a plasma generator, the second target is arranged in the second chamber, the plasma generator is connected to the coating chamber, and the plasma generator is used to generate plasma and transport the plasma to the second chamber.

[0016] According to some embodiments of the utility model, the carrier includes a workpiece placement through hole, and the two ends of the workpiece placement through hole are respectively a first avoidance opening and a second avoidance opening, the first avoidance opening faces the first chamber, and the second avoidance opening faces the second chamber; when the workpiece is set in the workpiece placement through hole, the first coating surface is exposed from the first avoidance opening, and the second coating surface is exposed from the second avoidance opening, and the workpiece separates the first avoidance opening and the second avoidance opening.

[0017] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0019] Figure 1 A schematic diagram of a coating device according to an embodiment of the utility model;

[0020] Figure 2 A schematic diagram of a coating device according to another embodiment of the present invention;

[0021] Figure 3 A schematic diagram of the joint of two adjacent carrier board units;

[0022] Figure 4 is a schematic diagram of a first separator;

[0023] Figure 5 is a schematic diagram of the positions of the first partition, the second partition and the rotating member (from a top view);

[0024] Figure 6 A top view of the conveying mechanism and the carrier;

[0025] Figure 7 for Figure 6 A cross-sectional view of the conveying mechanism and the carrier along section AA shown;

[0026] Figure 8 Schematic diagram of the relative positions of the cover plate and the conveying mechanism.

[0027] Reference numerals:

[0028] 101-first coating module, 102-coating chamber, 103-first chamber, 104-rotating member, 105-first collecting tank, 106-first dust removal port, 107-second chamber, 108-second coating module, 109-carrier, 110-coating station, 111-partition, 112-first partition, 113-second partition, 114-plasma generator, 115-second target, 116-carrier unit, 117-first gap, 118-first end, 119-second end, 120-carrying part, 121-first longitudinal part, 122-second longitudinal part, 123-shielding part, 124-driving member, 125-cover plate, 126-workpiece placement through hole, 127-second gap;

[0029] 201 - workpiece, 202 - first coating surface, 203 - second coating surface. DETAILED DESCRIPTION

[0030] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0031] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0032] In the description of the present utility model, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used to distinguish the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0033] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0034] Figure 1The coating device of one embodiment of the utility model is shown, and the coating device includes a coating chamber 102, a carrier 109, a first coating module 101 and a second coating module 108. A coating station 110, a first chamber 103 and a second chamber 107 are provided in the coating chamber 102, and the coating station 110 is arranged between the first chamber 103 and the second chamber 107. The carrier 109 is used to carry a workpiece 201 to be coated, and the workpiece 201 includes a first coating surface 202 and a second coating surface 203 arranged back to back. The workpiece 201 can be a silicon wafer or other sheet-like materials that need to be coated. In this embodiment, the first chamber 103 is located above the second chamber 107, the first coating surface 202 is the top surface of the workpiece 201, and the second coating surface 203 is the bottom surface of the workpiece 201. When the carrier 109 is in the coating station 110 and the carrier 109 carries the workpiece 201, the first chamber 103 and the second chamber 107 are separated from each other, the first coating surface 202 faces the first chamber 103, and the second coating surface 203 faces the second chamber 107. At least a portion of the first coating module 101 is located in the first chamber 103, and the first coating module 101 is used to coat the first coating surface 202. At least a portion of the second coating module 108 is located in the second chamber 107, and the second coating module 108 is used to coat the second coating surface 203. In addition, the first coating module 101 and the second coating module 108 can coat the workpiece 201 at the same time.

[0035] Among them, the first coating module 101 can be a magnetron sputtering coating module, an atomic layer deposition coating module, a reactive plasma coating module, etc. (but not limited to the types listed above), and the second coating module 108 can be a magnetron sputtering coating module, an atomic layer deposition coating module, a reactive plasma coating module, etc. (but not limited to the types listed above). The types of the first coating module 101 and the second coating module 108 can be the same or different. In addition, if the film formed on the first coating surface 202 is called the first film layer, and the film formed on the second coating surface 203 is called the second film layer, then the first film layer and the second film layer can be the same or different.

[0036] In some embodiments, the first coating module 101 is configured as a magnetron sputtering coating module. The first coating module 101 includes a first target, a magnetron, a gas source, and a power supply. The first target and the magnetron are arranged in the first chamber 103, and the magnetron is located on the side of the first target facing away from the carrier 109. The gas source is located outside the first chamber 103, and the gas source is connected to the coating chamber 102, and the gas source is used to transport process gas to the first chamber 103. The process gas can be argon. The carrier 109 and the first target are both electrically connected to the power supply, and the power supply is used to form an electric field in the first chamber 103, and the electric field is used to convert the process gas into plasma, and at least a part of the ions in the plasma move toward the first target. More specifically, after the argon gas is converted into plasma, the argon ions move toward the target under the action of the electric field to bombard the target, and the target particles sputtered by the bombardment move toward the workpiece 201, thereby being deposited on the first coating surface 202 of the workpiece 201.

[0037] In some embodiments, the second coating module 108 is a reactive plasma coating module, and the second coating module 108 performs coating by using an RPD process (Reactive Plasma Deposition). Figure 2 As shown, the second coating module 108 includes a second target 115 and a plasma generator 114. The second target 115 is disposed in the second chamber 107. The plasma generator 114 is connected to the coating chamber 102. The plasma generator 114 is used to generate plasma and transport the plasma to the second chamber 107. The plasma in the second chamber 107 increases the temperature of the second target 115 and sublimates it. The sublimated gas of the second target 115 is deposited on the second coating surface 203.

[0038] In the prior art, the process of coating the first coating surface and the second coating surface of the workpiece is roughly as follows: first, the workpiece is sent into the first coating chamber to coat the first coating surface; then the workpiece is sent into the second coating chamber to coat the second coating surface 203. Since the coating of the first coating surface and the coating of the second coating surface are carried out successively, it takes a long time to coat the double-sided workpiece, and the efficiency of double-sided coating is not high. In addition, since the first coating chamber and the second coating chamber are independent of each other, a number of connecting chambers need to be set between the first coating chamber and the second coating chamber. After the workpiece leaves the first coating chamber, the workpiece needs to be subjected to other treatments such as dust removal in the connecting chamber before being sent to the second coating chamber to ensure the coating quality of the second coating surface. This means that the coating equipment needs to be provided with a connecting chamber, and the structure of the coating equipment is relatively complex and the cost is relatively high.

[0039] As for the coating device of the present invention, its coating chamber 102 is integrated with two chambers (a first chamber 103 and a second chamber 107). When the carrier is in the coating station 110, the first coating surface 202 and the second coating surface 203 of the workpiece 201 face different chambers respectively, and the first coating module 101 and the second coating module 108 can coat the two coating surfaces of the workpiece 201 respectively, and the coating of the two coating surfaces can be performed simultaneously. In this way, the time required for the equipment to perform double-sided coating on the workpiece 201 is less, and the efficiency of double-sided coating is higher. In addition, since the equipment of the present invention integrates the first chamber 103 and the second chamber 107 in a coating chamber 102, there is no need to set a connecting chamber between the first chamber 103 and the second chamber 107, which is conducive to reducing the structural complexity and cost of the equipment.

[0040] like Figure 1 As shown, in some embodiments, the carrier 109 includes a workpiece placement through hole 126, and the two ends of the workpiece placement through hole 126 are respectively a first avoidance opening and a second avoidance opening. Figure 1 For example, the first avoidance is the top of the hole for placing the workpiece 201, and the second avoidance is the bottom of the hole for placing the workpiece 201. The first avoidance faces the first chamber 103, and the second avoidance faces the second chamber 107. When the workpiece 201 is set in the workpiece placement through hole 126, the first coating surface 202 is exposed from the first avoidance, and the second coating surface 203 is exposed from the second avoidance, so that the first coating module 101 and the second coating module 108 coat the workpiece 201. In addition, when the workpiece 201 is set in the workpiece placement through hole 126, the workpiece 201 separates the first avoidance and the second avoidance. The first avoidance and the second avoidance are separated, which means that the gas cannot flow directly from the first avoidance to the second avoidance. Since the first avoidance and the second avoidance are separated by the workpiece 201, when the materials of the first film layer and the second film layer are different, the material used to form the first film layer is not easy to enter the second chamber 107, and the material used to form the second film layer is not easy to enter the first chamber 103, which is beneficial to improving the coating quality of the workpiece 201.

[0041] like Figure 1 As shown, the workpiece placement through hole 126 can be a stepped hole, and the hole wall of the stepped hole includes a stepped surface, and the stepped surface supports the edge of the bottom surface of the workpiece 201, thereby preventing the workpiece 201 from falling from the bottom of the workpiece placement through hole 126. The shape of the workpiece placement through hole 126 can be flexibly set according to the shape of the workpiece 201. For example, if the workpiece 201 is a rectangular silicon wafer, then the workpiece placement through hole 126 is rectangular (at a top view); if the workpiece 201 is circular, then the workpiece placement through hole 126 is circular (at a top view).

[0042] like Figure 2As shown, in some embodiments, the carrier 109 includes a plurality of interconnected carrier units 116, and each carrier unit 116 may be provided with a workpiece placement through hole 126. Two adjacent carrier units 116 are interconnected to form a first gap 117, and the end of the first gap 117 facing the first chamber 103 is a first end 118, and the end of the first gap 117 facing away from the first chamber 103 is a second end 119, and the first end 118 and the second end 119 are staggered. Figure 3 The first gap 117 between two adjacent carrier units 116 is shown. Figure 3 For example, the first end 118 is the top of the first gap 117, and the second end 119 is the bottom of the second gap. The first end 118 and the second end 119 are staggered from each other, which means that the first end 118 and the second end 119 are arranged at intervals in the horizontal direction. The first end 118 and the second end 119 are staggered from each other, which is conducive to improving the tortuosity of the first gap 117. In this way, even if the second end 119 is located in the second chamber 107, it is more difficult for the gas and dust in one chamber to pass through the first gap 117 and enter the other chamber, and the gas in the first chamber 103 and the gas in the second chamber 107 have less mutual interference, which is conducive to improving the coating quality of the workpiece 201. In addition, in order to further reduce the interference between the gases in different chambers, the second end 119 can be arranged outside the second chamber 107.

[0043] In some embodiments, the coating chamber 102 includes a plurality of partitions 111, the plurality of partitions 111 surround the second chamber 107, and a portion of the surface of the partitions 111 serves as the wall surface of the second chamber 107. Figure 5 As shown, the second chamber 107 is roughly rectangular, and there are four partitions 111 in total, and the adjacent partitions 111 are perpendicular to each other. Two of the partitions 111 are first partitions 112, and the other two partitions 111 are second partitions 113. The first partitions 112 are spaced apart along the arrangement direction (left-right direction) of the carrier units 116, and the arrangement direction of the second partitions 113 is perpendicular to the arrangement direction of the carrier units 116. The right side surface of the first partition 112 on the left side can be used as a part of the inner wall surface of the second chamber 107, and the left side surface of the first partition 112 on the right side can be used as a part of the inner wall surface of the second chamber 107. Similarly, the front side surface of the first partition 112 on the rear side can be used as a part of the inner wall surface of the second chamber 107, and the rear side surface of the first partition 112 on the front side can be used as a part of the inner wall surface of the second chamber 107.

[0044] like Figure 1As shown, when the carrier 109 is in the coating station 110 and the carrier 109 carries the workpiece 201, the partition 111 abuts against the carrier 109, thereby separating the first chamber 103 from the second chamber 107. That is, the top of the partition 111 can abut against the bottom surface of the carrier 109, thereby sealing the second chamber 107, thereby preventing dust or other impurities outside the second chamber 107 from entering the second chamber 107.

[0045] In other embodiments, in order to achieve sealing of the second chamber 107, the partition 111 may not abut against the carrier 109. Instead, the coating device further includes a seal (not shown), which is connected to the partition 111 and is clamped between the partition 111 and the carrier 109 (the seal is clamped by the top of the partition 111 and the bottom of the carrier 109), so as to separate the first chamber 103 from the second chamber 107. The seal may be a sealing strip or a sealing ring made of rubber. Alternatively, in order to reduce the resistance of the seal to the movement of the carrier 109, the seal may also be made of a soft and plush material, for example, the seal may be set as a brush, and the top of the bristles of the seal may abut against the bottom of the carrier 109.

[0046] like Figure 1 As shown, in some embodiments, the first partition 112 is formed with a first collection tank 105, and the first collection tank 105 is located outside the second chamber 107. The second end 119 of the first slit 117 is located outside the second chamber 107, and the first collection tank 105 and the second end 119 are connected to each other. The inner wall surface of the coating chamber 102 is provided with a first dust removal port 106, and the first dust removal port 106 is connected to the first collection tank 105. The coating device also includes an exhaust module, which is not shown in the drawings. The exhaust module can be a molecular pump, a vacuum pump, etc. The exhaust module is located outside the coating chamber 102, and the exhaust module is connected to the first dust removal port 106 (the exhaust module can be connected to the first dust removal port 106 through a pipeline). During the coating process of the coating device, the first dust removal port 106 is not open. The exhaust module is used to remove dust in the first collection tank 105. The first collecting slot 105 can collect dust passing through the first gap 117 (the dust mainly comes from the first chamber 103 ), and the exhaust module extracts the dust in the first collecting slot 105 to improve the environmental cleanliness inside the coating chamber 102 , thereby helping to improve the coating quality of the workpiece 201 .

[0047] like Figure 4As shown, in some embodiments, the first partition 112 includes a bearing portion 120, a first longitudinal portion 121, a second longitudinal portion 122 and a shielding portion 123. The bottom end of the first longitudinal portion 121 is connected to the bearing portion 120, and the bottom end of the second longitudinal portion 122 is connected to the bearing portion 120. The first longitudinal portion 121 and the second longitudinal portion 122 are respectively connected to the two ends of the bearing portion 120, and the first longitudinal portion 121 and the second longitudinal portion 122 are both perpendicular to the bearing portion 120. The shielding portion 123 is connected to the top end of the first longitudinal portion 121, and the shielding portion 123 protrudes toward the second longitudinal portion 122 relative to the first longitudinal portion 121. The bearing portion 120, the first longitudinal portion 121, the second longitudinal portion 122 and the shielding portion 123 jointly define the first collecting groove 105, and the side surface of the first longitudinal portion 121 facing away from the second longitudinal portion 122 serves as a part of the inner wall surface of the second chamber 107. The shielding portion 123 can prevent dust from the first collecting tank 105 from being raised. Figure 4 In the illustrated embodiment, the shielding portion 123 is inclined downward relative to the horizontal plane; in other embodiments, the shielding portion 123 may also be horizontal. In addition, the cross-sectional shape of the first collecting tank 105 may also be U-shaped, L-shaped, and the like.

[0048] It should be noted that, if only for sealing the second chamber 107 , the first partition 112 may also be set as only one plate (equivalent to the first partition 112 only including the first longitudinal portion 121 ), and the first partition 112 may not be provided with the first collecting tank 105 .

[0049] like Figure 6 and Figure 7 As shown, in some embodiments, the coating device further includes a conveying mechanism, and the conveying mechanism includes a driving member 124 and a rotating member 104. The driving member 124 can be a motor, and the rotating member 104 is a roller. At least a portion of the rotating member 104 is disposed in the second chamber 107, and the outer peripheral surface of the rotating member 104 abuts against the carrier 109 (for example, the outer peripheral surface of the rotating member 104 abuts against the bottom surface of the carrier 109). The driving member 124 is used to drive the rotating member 104 to rotate so as to move the carrier 109, thereby allowing the carrier 109 to enter and exit the coating chamber 102. In this way, the automatic conveyance of the carrier 109 can be achieved without manually taking out the carrier 109 or manually sending the carrier 109 into the coating chamber 102.

[0050] like Figure 8As shown, the coating device also includes a cover plate 125, which covers the driving member 124, and the driving member 124 is located on the side of the cover plate 125 facing away from the first chamber 103 (that is, the driving member 124 is located on the lower side of the cover plate 125). The cover plate 125 is used to shield the driving member 124 to reduce the influence of dust and particulate matter in the first chamber 103 on the driving member 124. In order to facilitate the rotation of the rotating member 104, a second gap 127 is formed between the cover plate 125 and the carrier 109. Dust and particulate matter in the first chamber 103 may pass through the second gap 127. In order to collect dust passing through the second gap 127, the second partition 113 is formed with a second collection trough. The second collection trough is not shown, and the shape of the second collection trough can refer to the shape of the first collection trough 105, which is not repeated here. The second collection trough is located outside the second chamber 107, the second collection trough is located below the second gap 127, and the second collection trough is connected to the second gap 127. The inner wall surface of the coating chamber 102 is also provided with a second dust removal port, which is not shown in the drawings. Figure 4 The positional relationship of the partitions 111 shown in the figure is that if the two first dust removal ports 106 are respectively located on the left and right side walls of the coating chamber 102, then the two second dust removal ports can be respectively located on the front and rear side walls of the coating chamber 102. The second dust removal port is communicated with the second collection tank, and the exhaust module is connected to the second dust removal port. The exhaust module is used to extract dust in the second collection tank to prevent dust from being deposited on the surface of the driving member 124 and affecting the operation of the driving member 124.

[0051] In order to allow the rotating member 104 to extend into the second chamber 107, the second partition 113 is provided with a through hole (the through hole is not shown), and the rotating member 104 is inserted into the through hole. That is, the rotating member 104 passes through the second partition 113. In order to improve the sealing performance of the second chamber 107, the outer circumference of the rotating member 104 abuts against the hole wall of the through hole. It should be noted that the fit between the rotating member 104 and the through hole is not an interference fit, and even if the outer circumference of the rotating member 104 abuts against the hole wall of the through hole, the rotating member 104 can still rotate.

[0052] In addition, the hole wall of the through hole may not abut against the outer circumference of the rotating member 104. As an alternative, a sealing member may be provided between the hole wall of the through hole and the rotating member 104. The sealing member is annular and surrounds the rotating member 104. The outer circumference of the sealing member abuts against the hole wall of the through hole, and the inner circumference of the sealing member abuts against the outer circumference of the rotating member 104. The sealing member and the rotating member 104 are not completely tightly abutted, and the rotating member 104 can still rotate. The sealing member may be configured as a brush made of a soft and plush material, or as a sealing ring made of rubber.

[0053] In the description of the utility model, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

Claims

1. A coating device, characterized in that: include: A coating chamber, wherein a coating station, a first chamber and a second chamber are arranged in the coating chamber, and the coating station is arranged between the first chamber and the second chamber; A carrier, the carrier is used to carry a workpiece to be coated, the workpiece comprises a first coating surface and a second coating surface arranged back to back, when the carrier is in the coating station and the carrier carries the workpiece, the first chamber and the second chamber are separated from each other, the first coating surface faces the first chamber, and the second coating surface faces the second chamber; A first coating module, at least a portion of which is located in the first chamber, and the first coating module is used to coat the first coating surface; A second coating module, at least a part of which is located in the second chamber, the second coating module is used to coat the second coating surface, and the first coating module and the second coating module can coat the workpiece simultaneously.

2. The coating device according to claim 1, characterized in that: The carrier includes a plurality of interconnected carrier plate units, and two adjacent carrier plate units are interconnected to form a first gap, the end of the first gap facing the first chamber is the first end, the end of the first gap facing away from the first chamber is the second end, and the first end and the second end are staggered with each other.

3. The coating device according to claim 1, characterized in that: The coating chamber comprises a plurality of partitions, the plurality of partitions surround the second chamber, and a portion of the surface of the partitions serves as a wall surface of the second chamber; Wherein, when the carrier is in the coating station and the carrier carries the workpiece, the partition abuts against the carrier, thereby separating the first chamber from the second chamber; or, when the carrier is in the coating station and the carrier carries the workpiece, the coating equipment further includes a seal, which is connected to the partition and is clamped between the partition and the carrier, thereby separating the first chamber from the second chamber.

4. The coating device according to claim 3, characterized in that: The carrier comprises a plurality of mutually connected carrier plate units, two adjacent carrier plate units are mutually connected to form a first gap, an end of the first gap facing the first chamber is a first end, an end of the first gap facing away from the first chamber is a second end, and the first end and the second end are staggered with each other; A portion of the partitions is a first partition, the first partition is formed with a first collecting groove, the first collecting groove is located outside the second chamber, and the first collecting groove is connected to the second end; A first dust removal port is provided on the inner wall surface of the coating cavity, and the first dust removal port is connected to the first collecting tank. The coating equipment also includes an exhaust module, which is located outside the coating cavity and connected to the first dust removal port. The exhaust module is used to remove dust in the first collecting tank.

5. The coating device according to claim 4, characterized in that: The first separator comprises: load-bearing part; a first longitudinal portion, wherein a bottom end of the first longitudinal portion is connected to the bearing portion; a second longitudinal portion, wherein the bottom end of the second longitudinal portion is connected to the bearing portion, the first longitudinal portion and the second longitudinal portion are respectively connected to two ends of the bearing portion, and the first longitudinal portion and the second longitudinal portion are both perpendicular to the bearing portion; a shielding portion, the shielding portion being connected to a top end of the first longitudinal portion, the shielding portion protruding toward the second longitudinal portion relative to the first longitudinal portion; The bearing portion, the first longitudinal portion, the second longitudinal portion and the shielding portion jointly define the first collecting groove, and a side surface of the first longitudinal portion facing away from the second longitudinal portion serves as a part of the inner wall surface of the second chamber.

6. The coating device according to claim 3, characterized in that: The coating device further comprises a conveying mechanism, and the conveying mechanism comprises: Driving parts; The rotating member is configured as a roller, at least a portion of the rotating member is disposed in the second chamber, the outer peripheral surface of the rotating member abuts against the carrier, and the driving member is used to drive the rotating member to rotate so that the carrier enters and exits the coating chamber.

7. The coating device according to claim 6, characterized in that: The coating device further includes a cover plate, the cover plate covers the driving member, and the driving member is located on a side of the cover plate facing away from the first chamber, and a second gap is formed between the cover plate and the carrier; A portion of the partitions is a second partition, the second partition is formed with a second collecting groove, the second collecting groove is located outside the second chamber, and the second collecting groove is connected to the second gap; The inner wall surface of the coating cavity is also provided with a second dust removal port, and the second dust removal port is connected to the second collecting tank. The coating equipment also includes an exhaust module, which is located outside the coating cavity and connected to the second dust removal port. The exhaust module is used to extract dust from the second collecting tank.

8. The coating device according to claim 7, characterized in that: The second partition is further provided with a through hole, the rotating member is passed through the through hole, and the outer peripheral surface of the rotating member abuts against the hole wall of the through hole.

9. The coating device according to claim 1, characterized in that: The first coating module includes a first target, a magnetron, a gas source and a power supply, wherein the first target is arranged in the first chamber, the magnetron is arranged in the first chamber, the magnetron is located on the side of the first target facing away from the carrier, the gas source is connected to the coating chamber, the gas source is used to transport process gas to the first chamber, the carrier and the first target are both electrically connected to the power supply, the power supply is used to form an electric field in the first chamber, the electric field is used to convert the process gas into plasma, and to make at least a part of ions in the plasma move toward the first target; and / or, The second coating module includes a second target and a plasma generator. The second target is disposed in the second chamber. The plasma generator is connected to the coating chamber. The plasma generator is used to generate plasma and transport the plasma to the second chamber.

10. The coating device according to any one of claims 1 to 9, characterized in that: The carrier comprises a workpiece placement through hole, and two ends of the workpiece placement through hole are respectively a first avoidance opening and a second avoidance opening, the first avoidance opening faces the first chamber, and the second avoidance opening faces the second chamber; When the workpiece is disposed in the workpiece placement through hole, the first coating surface is exposed from the first avoidance opening, the second coating surface is exposed from the second avoidance opening, and the workpiece separates the first avoidance opening and the second avoidance opening.

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