Embedded large-drift-diameter high-vacuum rectangular transmission valve

Abstract

The utility model discloses an embedded large-drift-diameter high-vacuum rectangular transmission valve which comprises a valve body, a valve element is arranged in the valve body, and the valve element comprises a supporting plate, a sealing plate and a supporting assembly. The supporting plate and the sealing plate are connected through a swing rod, the multiple supporting assemblies are located at the two ends of the supporting plate respectively, each supporting assembly comprises a guide wheel, a guide wheel support, a side support and a side guide wheel, the guide wheels are installed on the guide wheel supports and can rotate, and the side guide wheels are installed on the guide wheel supports. According to the utility model, when the valve core moves up and down, the guide wheel only plays a role in guiding, and when the valve body is opened and closed, the guide wheel is only subjected to the acting force of the spring and is not extruded, so that the valve core is not damaged, and the valve core is not damaged. And therefore, the service life is longer, and the service life of the valve body is further prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of transmission valves, in particular to an embedded large-diameter high-vacuum rectangular transmission valve. Background Art

[0002] The high vacuum transfer valve is a type of high vacuum valve, which is mainly used for transferring wafers between cavities. Large-diameter rectangular transfer valves are often used for partitions between large vacuum chambers or for sealing cavities. Under a certain vacuum pressure difference, the valve is required to have a high and stable sealing effect. However, the large vacuum rectangular transfer valves in the prior art often have a relatively large diameter, a bulky valve core structure, and are difficult to process and install. In addition, the existing structure is prone to poor sealing and leakage. At the same time, due to the large diameter, the weight of the valve core is often relatively large, and the guide wheel plays both a guiding role and a supporting role, and the guide wheel is easily damaged. Utility Model Content

[0003] In order to solve the above technical problems, the utility model provides an embedded large-diameter high-vacuum rectangular transmission valve, comprising a valve body, a valve core is arranged in the valve body, and the valve core comprises a support plate, a sealing plate and a support assembly;

[0004] The support plate and the sealing plate are connected by a rocker rod, and a plurality of support assemblies are provided. The plurality of support assemblies are respectively located at both ends of the support plate. The support assembly includes a guide wheel and a guide wheel bracket. The guide wheel is installed on the guide wheel bracket. A compression spring is provided on the inner side of the guide wheel bracket. The fastening bolt passes through the compression spring to connect the guide wheel bracket to the support plate.

[0005] Preferably: the support assembly further comprises a bracket and a side guide wheel, the outer end of the guide wheel bracket is fixedly connected to the side bracket, the side bracket is equipped with a side guide wheel, and the axis of the side guide wheel is perpendicular to the axis of the guide wheel.

[0006] Preferably, the connection between the guide wheel bracket and the support plate is U-shaped.

[0007] Preferably: the support plate is provided with a mounting groove corresponding to the compression spring.

[0008] Preferably, at least one lower support block is fixedly connected to the lower end of the support plate, and the lower support block is fixed to the support plate by bolts.

[0009] Preferably, at least one upper support block is fixedly connected to the upper end of the sealing plate, and the upper support block is fixed to the sealing plate by bolts.

[0010] Preferably: a tension spring is arranged between the upper support block and the lower support block, both ends of the tension spring are connected to fixing rods, the upper fixing rod is fixedly connected to the upper support block, and the lower fixing rod is fixedly connected to the lower support block.

[0011] Preferably, the valve body comprises a frame, a first valve plate and a second valve plate, and the first valve plate and the second valve plate are fixed to both side ends of the frame.

[0012] Preferably, a valve cover is fixed at the top opening of the valve body, and at least one driving member is installed on the valve cover, the driving member is connected to a driving rod, and the driving rod is hinged to the valve core.

[0013] Preferably: the first valve plate is provided with a channel, the second valve plate is provided with a valve port, and the outer side walls of the first valve plate and the second valve plate are arranged with blind holes, which are threaded holes.

[0014] Technical effects and advantages of the utility model:

[0015] In the utility model, when the valve core moves up and down, the guide wheel only plays a guiding role. When the valve body is opened and closed, the guide wheel is only subjected to the force of the spring and is not squeezed. Therefore, the guide wheel is not easily damaged and has a longer service life, thereby extending the service life of the valve body. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is an exploded view of an embedded large-diameter high-vacuum rectangular transfer valve provided in an embodiment of the present application;

[0017] Figure 2 It is a structural schematic diagram of an embedded large-diameter high-vacuum rectangular transfer valve provided in an embodiment of the present application;

[0018] Figure 3 It is an exploded view of the valve core in the embedded large-diameter high-vacuum rectangular transmission valve provided in an embodiment of the present application;

[0019] Figure 4 It is a structural schematic diagram of a valve core in an embedded large-diameter high-vacuum rectangular transmission valve provided in an embodiment of the present application;

[0020] Figure 5 It is a structural schematic diagram of a valve core in an embedded large-diameter high-vacuum rectangular transmission valve provided in an embodiment of the present application from another perspective;

[0021] Figure 6 It is a structural schematic diagram of a support assembly in an embedded large-diameter high-vacuum rectangular transfer valve provided in an embodiment of the present application;

[0022] Figure 7 It is a structural schematic diagram of the support component in the embedded large-diameter high-vacuum rectangular transfer valve provided in an embodiment of the present application from another perspective.

[0023] In the figure: 1. valve body; 11. frame; 12. first valve plate; 121. channel; 122. blind hole; 13. second valve plate; 131. valve port; 132. limit block; 2. valve cover; 3. drive member; 31. drive rod; 4. valve core; 41. support plate; 411. fixed block; 412. mounting groove; 42. sealing plate; 421. sealing ring groove; 43. movable seat; 44. support assembly; 441. guide wheel; 442. guide wheel bracket; 443. side bracket; 444. side guide wheel; 445. compression spring; 446. fastening bolt; 45. upper support block; 46. rocker arm; 47. support wheel; 48. lower support block; 49. tension spring; 410. fixed rod. DETAILED DESCRIPTION

[0024] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations are obvious to those of ordinary skill in the art. The embodiments are selected and described in order to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific purposes.

[0025] See also Figures 1-2 In this embodiment, an embedded large-diameter high-vacuum rectangular transfer valve is provided, including a valve body 1. The valve body 1 includes a frame 11, a first valve plate 12 and a second valve plate 13. The first valve plate 12 and the second valve plate 13 are fixed to the two side ends of the frame 11. A valve cover 2 is fixed to the top opening of the valve body 1. At least one driving member 3 is installed on the valve cover 2. The driving member 3 is connected to a driving rod 31. The driving rod 31 is hinged to a valve core 4. The driving member 3 drives the driving rod 31 to move up and down, thereby driving the valve core 4 to move up and down.

[0026] Specifically, the first valve plate 12 is provided with a channel 121 , and the outer side wall of the first valve plate 12 is arranged with blind holes 122 .

[0027] Specifically, the second valve plate 13 is provided with a valve port 131, and the outer wall of the second valve plate 13 is arranged with blind holes 122, the blind holes 122 are threaded holes, and the inner wall of the second valve plate 13 is provided with at least one limit block 132, and the limit block 132 is located below the valve port 131. The blind hole 122 is provided to facilitate the connection of the valve body 1 with an external pipeline or a vacuum chamber.

[0028] In this embodiment, the driving member 3 can be a cylinder or an electric telescopic rod, which can drive the driving rod 31 to move up and down, and then drive the valve core 4 to move up and down. When the valve core 4 moves downward to the lowermost end and blocks the channel 121 and the valve port 131, the valve body 1 is in a closed state. When the valve core 4 moves upward to the uppermost end, the channel 121 and the valve port 131 are connected, and the valve body 1 is in an open state.

[0029] See also Figures 3 to 5 As shown, in this embodiment, the valve core 4 includes a support plate 41 , a sealing plate 42 and a support assembly 44 . A plurality of support assemblies 44 are provided, and the plurality of support assemblies 44 are respectively located at both ends of the support plate 41 .

[0030] Furthermore, a sealing ring groove 421 is provided on the outer side wall of the sealing plate 42 for accommodating the sealing ring. The sealing ring cooperates with the sealing plate 42 to seal the valve port 131 .

[0031] Furthermore, at least one rocker arm 46 is provided between the support plate 41 and the sealing plate 42, one end of the rocker arm 46 is hinged to the support plate 41 through a movable seat 43, and the other end of the rocker arm 46 is hinged to the sealing plate 42 through the movable seat 43. The support plate 41 and the sealing plate 42 are connected by the rocker arm 46, so that the support plate 41 and the sealing plate 42 can be relatively displaced.

[0032] Furthermore, the number of the swing rods 46 can be 4, 6, 8 or 10 according to the length of the support plate 41 .

[0033] Furthermore, at least one fixed block 411 is fixedly connected to the side wall of the support plate 41 close to the sealing plate 42. The number of the fixed blocks 411 is the same as the number of the driving rods 31. The driving rods 31 are connected to the fixed blocks 411 via a rotating pin, and the fixed blocks 411 are provided with a U-shaped hole corresponding to the rotating pin. The rotating pin can be displaced in the horizontal direction along the U-shaped hole.

[0034] In this embodiment, at least one lower support block 48 is fixedly connected to the lower end of the support plate 41, and the lower support block 48 is fixed to the support plate 41 by bolts. At least one upper support block 45 is fixedly connected to the upper end of the sealing plate 42, and the upper support block 45 is fixed to the sealing plate 42 by bolts.

[0035] Furthermore, a tension spring 49 is provided between the upper support block 45 and the lower support block 48 , and both ends of the tension spring 49 are connected to the fixing rod 410 , the upper fixing rod 410 is fixedly connected to the upper support block 45 , and the lower fixing rod 410 is fixedly connected to the lower support block 48 .

[0036] Furthermore, at least one supporting wheel 47 is installed on the inner side wall of the lower end of the sealing plate 42. When the valve body 1 is in the open state, the swing rod 46 is inclined. Under the action of the tension spring, there is a height difference between the sealing plate 42 and the supporting plate 41. At this time, there is a gap between the sealing ring and the second valve plate 13. When the driving member 3 drives the supporting plate 41 to descend through the driving rod 31, the supporting wheel 47 first contacts the limiting block 132 to limit the sealing plate 42. The sealing plate 42 stops moving, and the sealing ring does not contact the inner wall of the second valve plate 13. The sealing ring on the sealing plate 42 seals the valve port 131. The driving rod 31 continues to descend, and the supporting plate 41 and the sealing plate 42 are in contact. In response to displacement, the support plate 41 descends, and when the rocker arm 46 is in a horizontal state, the support plate 41 moves to the lowermost end, the driving member 3 stops, and the rocker arm 46 supports the support plate 41 and the sealing plate 42 in the horizontal direction. At this time, the support plate 41 is against the inner wall of the first valve plate 12, and the sealing ring blocks the valve port 131, so that the valve body 1 is in a closed state, and a reverse force is applied to the sealing plate 42 through the support plate 41, so as to support the sealing plate 42. When the sealing ring moves downward, no direct friction is generated between the sealing ring and the valve plate, thereby protecting the sealing ring, reducing the wear of the sealing ring, and reducing the generation of particulate matter caused by wear.

[0037] In another embodiment, the support plate 41 may also be hollow, so as to reduce the use of materials of the support plate 41 .

[0038] See also Figures 6-7 As shown, the support assembly 44 includes a guide wheel 441, a guide wheel bracket 442, a side bracket 443 and a side guide wheel 444. The guide wheel 441 is installed on the guide wheel bracket 442 and is rotatable. The outer end of the guide wheel bracket 442 is fixedly connected to the side bracket 443. The side bracket 443 is installed with a side guide wheel 444. The axis of the side guide wheel 444 is perpendicular to the axis of the guide wheel 441. The connection between the guide wheel bracket 442 and the support plate 41 is U-shaped. A compression spring 445 is arranged inside the guide wheel bracket 442 to tighten The fixing bolt 446 passes through the compression spring 445 to connect the guide wheel bracket 442 to the support plate 41. When the support plate 41 moves, the guide wheel 441 plays a guiding role. The side guide wheel 444 abuts against the inner wall of the frame 11. The guide wheel 441 is not squeezed during the opening and closing of the transmission valve. The guide wheel 441 is only subjected to the force of the spring, thereby avoiding damage to the guide wheel 441. The support plate 41 is provided with a mounting groove 412 corresponding to the compression spring 445, which is convenient for positioning and installing the guide wheel bracket 442 and the compression spring 445.

[0039] The support assembly 44 is installed at both ends of the support plate 41. When the valve core 4 moves up and down, the guide wheel 441 only plays a guiding role. Compared with the existing method in which the support assembly 44 is installed at the lower end of the support plate 41, and the guide wheel 441 also plays a role of supporting the entire valve core 4, the guide wheel 441 of the present application is only subjected to the force of the spring when the valve body 1 is opened and closed. The guide wheel 441 is in contact with the first valve plate 12 and the second valve plate 13, and the guide wheel 441 is not squeezed, so it is not easy to be damaged and has a longer service life, thereby extending the service life of the valve body 1.

[0040] Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field and related fields without creative work should fall within the scope of protection of the present invention. Structures, devices and operating methods not specifically described and explained in the present invention shall be implemented according to conventional means in the field unless otherwise specified and limited.

Claims

1. An embedded large-diameter high-vacuum rectangular transmission valve, comprising a valve body (1), wherein a valve core (4) is arranged in the valve body (1), characterized in that: The valve core (4) comprises a support plate (41), a sealing plate (42) and a support assembly (44); The support plate (41) and the sealing plate (42) are connected via a rocker rod (46); a plurality of support assemblies (44) are provided, and the plurality of support assemblies (44) are respectively located at two ends of the support plate (41); the support assembly (44) comprises a guide wheel (441) and a guide wheel bracket (442); the guide wheel (441) is mounted on the guide wheel bracket (442); a compression spring (445) is provided on the inner side of the guide wheel bracket (442); a fastening bolt (446) passes through the compression spring (445) to connect the guide wheel bracket (442) to the support plate (41).

2. The embedded large-diameter high-vacuum rectangular transmission valve according to claim 1 is characterized in that: The support assembly (44) further comprises a bracket (443) and a side guide wheel (444); the outer end of the guide wheel bracket (442) is fixedly connected to the side bracket (443); the side bracket (443) is provided with a side guide wheel (444); the axis of the side guide wheel (444) is perpendicular to the axis of the guide wheel (441).

3. The embedded large-diameter high-vacuum rectangular transmission valve according to claim 2 is characterized in that: The connection between the guide wheel bracket (442) and the support plate (41) is U-shaped.

4. The embedded large-diameter high-vacuum rectangular transmission valve according to claim 3 is characterized in that: The support plate (41) is provided with a mounting groove (412) corresponding to the compression spring (445).

5. The embedded large-diameter high-vacuum rectangular transmission valve according to claim 4 is characterized in that: At least one lower support block (48) is fixedly connected to the lower end of the support plate (41), and the lower support block (48) is fixed to the support plate (41) by bolts.

6. The embedded large-diameter high-vacuum rectangular transmission valve according to claim 5, characterized in that: At least one upper support block (45) is fixedly connected to the upper end of the sealing plate (42), and the upper support block (45) is fixed to the sealing plate (42) by bolts.

7. The embedded large-diameter high-vacuum rectangular transmission valve according to claim 6, characterized in that: A tension spring (49) is provided between the upper support block (45) and the lower support block (48), and both ends of the tension spring (49) are connected to fixed rods (410), the upper fixed rod (410) is fixedly connected to the upper support block (45), and the lower fixed rod (410) is fixedly connected to the lower support block (48).

8. The embedded large-diameter high-vacuum rectangular transmission valve according to claim 1, characterized in that: The valve body (1) comprises a frame (11), a first valve plate (12) and a second valve plate (13), wherein the first valve plate (12) and the second valve plate (13) are fixed to two side ends of the frame (11).

9. The embedded large-diameter high-vacuum rectangular transmission valve according to claim 8, characterized in that: A valve cover (2) is fixed at the top opening of the valve body (1), and at least one driving member (3) is installed on the valve cover (2). The driving member (3) is connected to a driving rod (31), and the driving rod (31) is hinged to the valve core (4).

10. The embedded large-diameter high-vacuum rectangular transmission valve according to claim 9, characterized in that: The first valve plate (12) is provided with a channel (121), the second valve plate (13) is provided with a valve port (131), and the outer side walls of the first valve plate (12) and the second valve plate (13) are arranged with blind holes (122), and the blind holes (122) are threaded holes.

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