White light interferometer three-dimensional adjusting structure

Abstract

The utility model relates to a white light interferometer three-dimensional adjusting structure, which is connected with a white light interferometer and an XYZ-axis motion platform and comprises a vertical plane adjusting assembly, a pitching adjusting assembly and a horizontal plane adjusting assembly, the vertical plane adjusting assembly is connected with the XYZ-axis motion platform and is provided with a first adjusting end moving in a first vertical plane, and the pitching adjusting assembly is provided with a second adjusting end moving in a second vertical plane. The pitching adjusting assembly is connected with the first adjusting end and provided with a second adjusting end moving in a second vertical plane perpendicular to the first vertical plane, the horizontal plane adjusting assembly is connected with the second adjusting end and provided with a third adjusting end moving in the horizontal plane, and the third adjusting end is connected with a white light interferometer; the vertical plane adjusting assembly and the pitching adjusting assembly can drive the white light interferometer to move in a first plane and a second plane which are perpendicular to each other so as to adjust the perpendicularity of the white light interferometer, and the horizontal plane adjusting assembly can drive the white light interferometer to move in the horizontal plane so as to adjust the parallelism of the white light interferometer.

Description

Technical Field

[0001] The utility model relates to the technical field of measuring instruments, in particular to a three-dimensional adjustment structure of a white light interferometer. Background Art

[0002] In the inspection of products such as PCB boards and wafers, white light interferometers are used to detect a series of microscopic dimensions of the products. The structure of the white light interferometer inspection equipment is usually a white light interferometer, a stage, and an XYZ axis motion platform.

[0003] Usually, the white light interferometer is directly mounted on an XYZ axis motion platform, and the XYZ axis motion platform can drive the white light interferometer to move along the X-axis, Y-axis and Z-axis directions.

[0004] However, the installation and fixation of the white light interferometer has no adjustment structure, which makes it difficult to ensure the perpendicularity of the optical axis of the white light interferometer and the surface of the stage, as well as the parallelism of the imaging XY coordinate axis of the white light interferometer and the XY axis of the motion platform. It is also impossible to control the number and thickness of the interference fringes of the white light interferometer imaging and the image stitching effect. Utility Model Content

[0005] In view of this, it is necessary to provide a three-dimensional adjustment structure of a white light interferometer to solve the problem that the installation and fixation of the white light interferometer has no adjustment structure, it is difficult to ensure the perpendicularity of the optical axis of the white light interferometer and the surface of the stage, and the parallelism of the imaging XY coordinate axis of the white light interferometer and the XY axis of the motion platform.

[0006] The utility model provides a three-dimensional adjustment structure of a white light interferometer, which connects the white light interferometer and an XYZ axis motion platform, and comprises a vertical plane adjustment component, a pitch adjustment component and a horizontal plane adjustment component. The vertical plane adjustment component is connected to the XYZ axis motion platform and has a first adjustment end moving in a first vertical plane, the pitch adjustment component is connected to the first adjustment end and has a second adjustment end moving in a second vertical plane perpendicular to the first vertical plane, the horizontal plane adjustment component is connected to the second adjustment end and has a third adjustment end moving in a horizontal plane, the third adjustment end is connected to the white light interferometer, and the first adjustment end, the second adjustment end and the third adjustment end are used to adjust the verticality and parallelism of the white light interferometer.

[0007] Furthermore, the vertical plane adjustment component includes a vertical adjustment base plate, a vertical adjustment rotating plate and a vertical adjustment member. The vertical adjustment base plate is connected to the XYZ axis motion platform. The vertical adjustment rotating plate is rotatably connected to the vertical adjustment base plate in a first vertical plane. The vertical adjustment member is installed on the vertical adjustment base plate, and its output end is connected to the vertical adjustment rotating plate to adjust the rotation angle of the vertical adjustment rotating plate.

[0008] Furthermore, a first circular hole is formed on the vertical adjustment turn plate, a first pin is fixedly connected to the vertical adjustment base plate, the first pin is arranged through the first circular hole, and a plurality of first arc-shaped waist grooves are formed on the vertical adjustment turn plate and are evenly arranged along the circumference of the first circular hole. The structure also includes a plurality of first locking screws, and the plurality of first locking screws respectively pass through the plurality of first arc-shaped waist grooves and are connected to the threaded holes opened on the vertical adjustment base plate.

[0009] Furthermore, the vertical adjustment member includes two first adjustment blocks, a first fixed block and two vertical adjustment top screws, the two first adjustment blocks are fixedly connected to the vertical adjustment base plate, the first fixed block is connected to the vertical adjustment rotating plate and partially extends to the position between the two first adjustment blocks, and the opposite ends of the two vertical adjustment top screws respectively pass through the two first adjustment blocks and abut against the two sides of the first fixed block.

[0010] Furthermore, the pitch adjustment assembly includes a pitch adjustment base plate, a pitch adjustment rotating plate, a first pitch adjustment top screw, a second pitch adjustment top screw and a plurality of gaskets. The pitch adjustment base plate is horizontally arranged and one side of the pitch adjustment bottom plate is connected to the first adjustment end. The pitch adjustment rotating plate is arranged above the pitch adjustment base plate. The first pitch adjustment top screw and the second pitch adjustment top screw are respectively arranged at the two side positions of the top of the pitch adjustment rotating plate, and both pass through the pitch adjustment rotating plate and are connected with the threaded holes opened on the pitch adjustment base plate. The gasket is arranged at the position between the pitch adjustment rotating plate and the pitch adjustment base plate. By controlling the number of the gaskets and installing them on the side close to the first pitch adjustment top screw or the second pitch adjustment top screw, the inclination angle of the pitch adjustment rotating plate can be controlled.

[0011] Furthermore, the number of the first pitch adjustment top screws is two, and the two first pitch adjustment top screws are respectively arranged on both sides of the second vertical plane, and the number of the second pitch adjustment top screw is one and is arranged in the second vertical plane.

[0012] Furthermore, the horizontal plane includes a horizontal adjustment turn plate and a horizontal adjustment member, the horizontal adjustment turn plate is rotatably connected to the top of the pitch adjustment turn plate, the horizontal adjustment member is installed on the pitch adjustment turn plate, and its output end is connected to the horizontal adjustment turn plate to adjust the rotation angle of the horizontal adjustment turn plate.

[0013] Furthermore, a second circular hole is formed on the horizontal adjustment turn plate, and a third circular hole is formed on the pitch adjustment turn plate. The bottom of the horizontal adjustment turn plate is fixedly connected to the inner wall of the second circular hole with a first arc flange and a second arc flange that are relatively arranged. The two arc flanges extend downward into the third circular hole and are slidably abutted against the first arc groove and the second arc groove opened on the inner wall of the third circular hole, respectively.

[0014] Furthermore, the horizontal adjustment rotating plate is provided with a plurality of second arc-shaped waist grooves evenly arranged along the circumference of the second circular hole. The structure also includes a plurality of second locking screws, which respectively pass through the plurality of second arc-shaped waist grooves and are connected to the threaded holes opened on the pitch adjustment rotating plate.

[0015] Furthermore, the horizontal adjustment member includes two second adjustment blocks, a second fixed block and two horizontal adjustment top screws, the two second adjustment blocks are fixedly connected to the horizontal adjustment turn plate, the second fixed block is connected to the pitch adjustment turn plate and partially extends to the position between the two second adjustment blocks, and the opposite ends of the two horizontal adjustment top screws respectively pass through the two second adjustment blocks and abut against the two sides of the second fixed block.

[0016] Compared with the prior art, the vertical plane adjustment component and the pitch adjustment component are arranged to drive the white light interferometer to move in a first plane and a second plane perpendicular to each other, thereby adjusting the verticality between the optical axis of the white light interferometer and the surface of the stage; the horizontal plane adjustment component is arranged to drive the white light interferometer to move in the horizontal plane, thereby adjusting the parallelism between the imaging XY coordinate axis of the white light interferometer and the XY axis of the motion platform. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 The three-dimensional adjustment structure of the white light interferometer provided in the embodiment of the utility model integrally connects the light interferometer and the XYZ axis motion platform;

[0018] Figure 2 A schematic diagram of the overall structure of the three-dimensional adjustment structure of the white light interferometer provided in an embodiment of the utility model;

[0019] Figure 3 A schematic structural diagram of a vertical plane adjustment component in a three-dimensional adjustment structure of a white light interferometer provided in an embodiment of the utility model;

[0020] Figure 4 A schematic structural diagram of a pitch adjustment component in a three-dimensional adjustment structure of a white light interferometer provided in an embodiment of the utility model;

[0021] Figure 5A schematic diagram of the structure of a horizontal plane adjustment component in a three-dimensional adjustment structure of a white light interferometer provided in an embodiment of the utility model;

[0022] Figure 6 A schematic diagram of the connection between the pitch adjustment rotating plate and the horizontal adjustment rotating plate in the three-dimensional adjustment structure of the white light interferometer provided in an embodiment of the utility model. DETAILED DESCRIPTION

[0023] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of the present application and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not used to limit the scope of the present invention.

[0024] like Figure 1 As shown, the structure is applied to a detection device of a white light interferometer, and the white light interferometer detection device includes a white light interferometer N, a detection platform M1, a stage M3 and an XYZ axis motion platform M2, wherein the stage M3 and the XYZ axis motion platform M2 are both installed on the detection platform M1, and an object to be detected can be placed on the stage M3, and the XYZ axis motion platform M2 is connected to the white light interferometer N via the three-dimensional adjustment structure in this embodiment, wherein the XYZ axis motion platform M2 is used to drive the white light interferometer N to move in a direction relative to the detection platform M1, and the three-dimensional adjustment structure in this embodiment is used to adjust the verticality between the optical axis of the white light interferometer N and the surface of the stage M3, and the parallelism between the imaging XY coordinate axis of the white light interferometer N and the XY axis of the motion platform. Among them, the base M1 is made of marble, the XYZ axis motion platform M includes an X-axis moving part, a Y-axis moving part and a Z-axis moving part, the X-axis moving part and the Y-axis moving part are both installed on the base M1, the Z axis is installed on the X-axis moving part, and the stage M3 is installed on the Y-axis moving part.

[0025] like Figure 2 As shown, the utility model provides a three-dimensional adjustment structure of a white light interferometer N, which connects the white light interferometer N and the XYZ axis motion platform M2, and includes a vertical plane adjustment component 100, a pitch adjustment component 200 and a horizontal plane adjustment component 300. The vertical plane adjustment component 100 is connected to the XYZ axis motion platform M2, and has a first adjustment end that moves in a first vertical plane. The pitch adjustment component 200 is connected to the first adjustment end, and has a second adjustment end that moves in a second vertical plane perpendicular to the first vertical plane. The horizontal plane adjustment component 300 is connected to the second adjustment end, and has a third adjustment end that moves in a horizontal plane. The third adjustment end is connected to the white light interferometer N. The first adjustment end, the second adjustment end and the third adjustment end are used to adjust the verticality and parallelism of the white light interferometer N.

[0026] During implementation, the vertical plane adjustment component 100 and the pitch adjustment component 200 can drive the white light interferometer N to move in the first plane and the second plane perpendicular to each other, so as to adjust the verticality between the optical axis of the white light interferometer N and the surface of the stage M3, and the horizontal plane adjustment component 300 can drive the white light interferometer N to move in the horizontal plane, so as to adjust the parallelism between the imaging XY coordinate axis of the white light interferometer N and the XY axis of the motion platform.

[0027] It should be noted that the perpendicularity between the optical axis of the white light interferometer N and the surface of the stage M3 will directly affect the number and thickness of the interference fringes imaged by the white light interferometer N. The better the perpendicularity, the fewer and thicker the interference fringes, and the better the scanning image effect of the white light interferometer N. The parallelism between the imaging XY coordinate axis of the white light interferometer N and the XY axis of the motion platform directly affects the image stitching effect. The better the parallelism, the smaller the step difference of the image stitching.

[0028] First, the angle of the optical axis of the white light interferometer N in the first vertical plane is adjusted.

[0029] like Figure 3 As shown, in one embodiment, the vertical plane adjustment assembly 100 includes a vertical adjustment base plate 110, a vertical adjustment rotating plate 120 and a vertical adjustment member 130. The vertical adjustment base plate 110 is connected to the XYZ axis motion platform. The vertical adjustment rotating plate 120 is rotatably connected to the vertical adjustment base plate 110 in a first vertical plane. The vertical adjustment member 130 is installed on the vertical adjustment base plate 110, and its output end is connected to the vertical adjustment rotating plate 120 for adjusting the rotation angle of the vertical adjustment rotating plate 120.

[0030] The vertical adjustment rotating plate 120 rotates relative to the vertical adjustment base plate 110 , thereby driving the white light interferometer N to rotate in the first vertical plane, thereby adjusting the angle of the optical axis of the white light interferometer N in the first vertical plane.

[0031] In order to realize the rotational connection between the vertical adjustment base plate 110 and the vertical adjustment rotating plate 120, a first circular hole 121 is formed on the vertical adjustment rotating plate 120 in this embodiment, a first pin 111 is fixedly connected to the vertical adjustment base plate 110, and the first pin 111 is arranged through the first circular hole 121. A plurality of first arc-shaped waist grooves 122 uniformly arranged along the circumference of the first circular hole 121 are formed on the vertical adjustment rotating plate 120. The structure also includes a plurality of first locking screws 140, which respectively pass through the plurality of first arc-shaped waist grooves 122 and are connected to the threaded holes provided on the vertical adjustment base plate 110. The vertical adjustment rotating plate 120 can rotate relative to the vertical adjustment base plate 110 around the first pin 111 through the provided first pin 111, and at the same time, the plurality of first arc-shaped waist grooves 122 are arranged concentrically with the first circular hole 121.

[0032] The first arc-shaped waist groove 122 defines the rotation direction of the vertical adjustment rotating plate 120 , and the first locking screw 140 can lock the vertical adjustment rotating plate 120 at the current position.

[0033] It is understandable that other forms of structures may also be used to achieve the rotational connection between the vertical adjustment base plate 110 and the vertical adjustment rotating plate 120 .

[0034] The vertical adjustment member 130 in this embodiment includes two first adjustment blocks 131, a first fixed block 132 and two vertical adjustment top screws 133. The two first adjustment blocks 131 are fixedly connected to the vertical adjustment base plate 110. The first fixed block 132 is connected to the vertical adjustment rotating plate 120 and partially extends to the position between the two first adjustment blocks 131. The opposite ends of the two vertical adjustment top screws 133 respectively pass through the two first adjustment blocks 131 and abut against the two sides of the first fixed block 132.

[0035] It is understandable that the vertical adjustment member 130 may also adopt other structures to control the rotation of the vertical adjustment rotating plate 120 .

[0036] After adjusting the angle of the optical axis of the white light interferometer N in the first vertical plane, the angle of the optical axis of the white light interferometer N in the second vertical plane is adjusted.

[0037] like Figure 4 As shown, in one embodiment, the pitch adjustment assembly 200 includes a pitch adjustment base plate 210, a pitch adjustment rotating plate 220, a first pitch fastening screw 230, a first pitch adjustment top screw 240, a second pitch fastening screw 250, a second pitch adjustment top screw 260 and a plurality of gaskets, the pitch adjustment base plate 210 is horizontally arranged and one side thereof is connected to the first adjustment end, the pitch adjustment rotating plate 220 is arranged at an upper position of the pitch adjustment base plate 210, the first pitch fastening screw 230 and the first pitch adjustment top screw 240 are arranged on one side of the top of the pitch adjustment rotating plate 220, and the second pitch fastening screw 250 is arranged on the second side of the pitch adjustment top screw 260. The pitch fastening screw 250 and the second pitch adjustment top screw 260 are respectively arranged at the two side positions of the top of the pitch adjustment rotating plate 220, and both pass through the pitch adjustment rotating plate 220 and are connected with the threaded holes opened on the pitch adjustment base plate 210. The gasket is arranged in the first adjustment gap 231 and / or the second adjustment gap 251 formed between the pitch adjustment rotating plate 220 and the pitch adjustment base plate 210. By controlling the number of gaskets and installing them on the side close to the first pitch adjustment top screw 240 or the second pitch adjustment top screw 260, the inclination angle of the pitch adjustment rotating plate 220 can be controlled.

[0038] When the pitch adjustment rotating plate 220 needs to be rotated toward the first pitch adjustment top screw 240, loosen the first pitch fastening screw 230, and then adjust the first pitch adjustment top screw 240 to pad the gasket into the first adjustment gap 231 formed between the pitch adjustment base plate 210 and the pitch adjustment rotating plate 220. After the inclination angle of the pitch adjustment rotating plate 220 reaches the standard, tighten the first pitch fastening screw 230 to complete the adjustment process.

[0039] Similarly, when the pitch adjustment rotating plate 220 needs to be rotated toward the direction approaching the second pitch adjustment top screw 260, loosen the second pitch fastening screw 250, then adjust the second pitch adjustment top screw 260, and pad the gasket into the second adjustment gap 251 formed between the pitch adjustment base plate 210 and the pitch adjustment rotating plate 220. After the inclination angle of the pitch adjustment rotating plate 220 reaches the standard, tighten the second pitch fastening screw 250 to complete the adjustment process.

[0040] In this embodiment, there are two first pitch adjustment screws 240 , which are respectively disposed on both sides of the second vertical plane, and there is one second pitch adjustment screw 260 , which is disposed in the second vertical plane.

[0041] In this embodiment, two positioning holes are formed on the pitch adjustment rotating plate 220, and two second pins 270 are connected to the pitch adjustment base plate 210 after passing through the two positioning holes respectively. The diameter of the positioning holes is larger than the second pins 270 and is used to limit the tilt angle of the pitch adjustment rotating plate 220.

[0042] After adjusting the angles of the optical axis of the white light interferometer N in the first vertical plane and the second vertical plane, the process of adjusting the verticality of the optical axis of the white light interferometer N and the surface of the stage M3 is completed. At this time, the parallelism of the imaging XY coordinate axis of the white light interferometer N and the XY axis of the motion platform is adjusted.

[0043] like Figure 5 As shown, in one embodiment, the horizontal plane includes a horizontal adjustment turn plate 310 and a horizontal adjustment member 320. The horizontal adjustment turn plate 310 is rotatably connected to the top of the pitch adjustment turn plate 220. The horizontal adjustment member 320 is installed on the pitch adjustment turn plate 220, and its output end is connected to the horizontal adjustment turn plate 310 to adjust the rotation angle of the horizontal adjustment turn plate 310.

[0044] The adjustment principle is the same as that of the vertical plane adjustment assembly 100. By rotating the horizontal adjustment rotating plate 310 relative to the pitch adjustment rotating plate 220, the white light interferometer N is driven to rotate in the horizontal plane, thereby adjusting the parallelism of the white light interferometer N relative to the XY axis of the XYZ axis motion platform M2.

[0045] like Figure 6As shown, in this embodiment, a second circular hole is formed on the horizontal adjustment rotating plate 310, and a third circular hole 221 is formed on the pitch adjustment rotating plate 220. The bottom of the horizontal adjustment rotating plate 310 and the inner wall of the second circular hole are fixedly connected with a first arc flange 314 and a second arc flange 315 which are arranged opposite to each other. The two arc flanges 313 extend downward into the third circular hole 221 and are respectively slidably abutted with a first arc groove 312 and a second arc groove 313 which are opened on the inner wall of the third circular hole 221. The first arc groove 312 and the second arc groove 313 are arranged concentrically and eccentrically with the second circular hole and the third circular hole 221 to avoid the four lenses installed on the white light probe.

[0046] It is understandable that other forms of structures may be used to achieve the rotational connection between the horizontal adjustment rotating plate 310 and the pitch adjustment rotating plate 220 .

[0047] In this embodiment, a plurality of second arc-shaped waist grooves 311 evenly arranged circumferentially along the second circular hole 312 are formed on the horizontal adjustment rotating plate 310. The structure also includes a plurality of second locking screws 330, which respectively pass through the plurality of second arc-shaped waist grooves 311 and are connected to the threaded holes opened on the pitch adjustment rotating plate 220.

[0048] The second arc-shaped waist groove 311 defines the rotation direction of the horizontal adjustment rotating plate 310 , and the second locking screw 330 can lock the horizontal adjustment rotating plate 310 to rotate at the current position.

[0049] In this embodiment, the horizontal adjustment member 320 includes two second adjustment blocks 321, a second fixed block 322 and two horizontal adjustment top screws 323. The two second adjustment blocks 321 are fixedly connected to the horizontal adjustment turn plate 310. The second fixed block 322 is connected to the pitch adjustment turn plate 220 and partially extends to the position between the two second adjustment blocks 321. The opposite ends of the two horizontal adjustment top screws 323 respectively pass through the two second adjustment blocks 321 and abut against the two sides of the second fixed block 322.

[0050] In this embodiment, a vertically arranged mounting plate 316 is fixedly connected to the top of the horizontal adjustment rotating plate 310 . The mounting plate 316 is connected to the side wall of the white light interferometer N. The lens of the white light interferometer N is arranged to point to the second circular hole 312 and the third circular hole 221 .

[0051] Compared with the prior art, the vertical plane adjustment component 100 and the pitch adjustment component 200 can drive the white light interferometer N to move in a first plane and a second plane perpendicular to each other, thereby adjusting the verticality between the optical axis of the white light interferometer N and the surface of the stage M3; the horizontal plane adjustment component 300 can drive the white light interferometer N to move in the horizontal plane, thereby adjusting the parallelism between the imaging XY coordinate axis of the white light interferometer N and the XY axis of the motion platform.

[0052] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by any technician familiar with the technical field within the technical scope disclosed in the present invention should be included in the protection scope of the present invention.

Claims

1. A three-dimensional adjustment structure of a white light interferometer, connecting a white light interferometer and an XYZ axis motion platform, characterized in that: include: A vertical plane adjustment assembly connected to the XYZ axis motion platform and having a first adjustment end that moves in a first vertical plane; a pitch adjustment assembly connected to the first adjustment end and having a second adjustment end that moves in a second vertical plane that is perpendicular to the first vertical plane; a horizontal plane adjustment component, which is connected to the second adjustment end and has a third adjustment end that moves in the horizontal plane, and the third adjustment end is connected to the white light interferometer; The first adjustment end, the second adjustment end and the third adjustment end are used to adjust the verticality and parallelism of the white light interferometer.

2. The three-dimensional adjustment structure of white light interferometer according to claim 1, characterized in that: The vertical plane adjustment assembly includes a vertical adjustment base plate, a vertical adjustment rotating plate and a vertical adjustment member. The vertical adjustment base plate is connected to the XYZ axis motion platform. The vertical adjustment rotating plate is rotatably connected to the vertical adjustment base plate in a first vertical plane. The vertical adjustment member is installed on the vertical adjustment base plate, and its output end is connected to the vertical adjustment rotating plate to adjust the rotation angle of the vertical adjustment rotating plate.

3. The three-dimensional adjustment structure of white light interferometer according to claim 2, characterized in that: A first circular hole is formed on the vertical adjustment rotating plate, and a first pin is fixedly connected to the vertical adjustment base plate. The first pin is arranged through the first circular hole, and a plurality of first arc-shaped waist grooves are formed on the vertical adjustment rotating plate and are evenly arranged along the circumference of the first circular hole. The structure also includes a plurality of first locking screws, and the plurality of first locking screws respectively pass through the plurality of first arc-shaped waist grooves and are connected to the threaded holes opened on the vertical adjustment base plate.

4. The three-dimensional adjustment structure of white light interferometer according to claim 2, characterized in that: The vertical adjustment member includes two first adjustment blocks, a first fixed block and two vertical adjustment top screws. The two first adjustment blocks are fixedly connected to the vertical adjustment base plate. The first fixed block is connected to the vertical adjustment rotating plate and partially extends to the position between the two first adjustment blocks. The opposite ends of the two vertical adjustment top screws respectively pass through the two first adjustment blocks and abut against the two sides of the first fixed block.

5. The three-dimensional adjustment structure of white light interferometer according to claim 1, characterized in that: The pitch adjustment assembly includes a pitch adjustment base plate, a pitch adjustment rotating plate, a first pitch adjustment top screw, a second pitch adjustment top screw and a plurality of gaskets. The pitch adjustment base plate is horizontally arranged and one side of the pitch adjustment base plate is connected to the first adjustment end. The pitch adjustment rotating plate is arranged above the pitch adjustment base plate. The first pitch adjustment top screw and the second pitch adjustment top screw are respectively arranged at the two side positions of the top of the pitch adjustment rotating plate, and both pass through the pitch adjustment rotating plate and are connected with the threaded holes opened on the pitch adjustment base plate. The gasket is arranged at the position between the pitch adjustment rotating plate and the pitch adjustment base plate. By controlling the number of the gaskets and installing them on the side close to the first pitch adjustment top screw or the second pitch adjustment top screw, the inclination angle of the pitch adjustment rotating plate can be controlled.

6. The three-dimensional adjustment structure of white light interferometer according to claim 5, characterized in that: The number of the first pitch adjustment top screws is two, and the two first pitch adjustment top screws are respectively arranged on both sides of the second vertical plane, and the number of the second pitch adjustment top screw is one and is arranged in the second vertical plane.

7. The three-dimensional adjustment structure of white light interferometer according to claim 5, characterized in that: The horizontal plane includes a horizontal adjustment turn plate and a horizontal adjustment member, the horizontal adjustment turn plate is rotatably connected to the top of the pitch adjustment turn plate, the horizontal adjustment member is installed on the pitch adjustment turn plate, and its output end is connected to the horizontal adjustment turn plate to adjust the rotation angle of the horizontal adjustment turn plate.

8. The three-dimensional adjustment structure of white light interferometer according to claim 7, characterized in that: A second circular hole is formed on the horizontal adjustment turn plate, and a third circular hole is formed on the pitch adjustment turn plate. The bottom of the horizontal adjustment turn plate is fixedly connected to the inner wall of the second circular hole with a first arc flange and a second arc flange that are relatively arranged. The two arc flanges extend downward into the third circular hole and are respectively slidably abutted against the first arc groove and the second arc groove opened on the inner wall of the third circular hole.

9. The three-dimensional adjustment structure of white light interferometer according to claim 8, characterized in that: The horizontal adjustment rotating plate is provided with a plurality of second arc-shaped waist grooves evenly arranged along the circumference of the second circular hole. The structure also includes a plurality of second locking screws, which respectively pass through the plurality of second arc-shaped waist grooves and are connected to the threaded holes provided on the pitch adjustment rotating plate.

10. The three-dimensional adjustment structure of white light interferometer according to claim 7, characterized in that: The horizontal adjustment member includes two second adjustment blocks, a second fixed block and two horizontal adjustment top screws. The two second adjustment blocks are fixedly connected to the horizontal adjustment rotating plate. The second fixed block is connected to the pitch adjustment rotating plate and partially extends to the position between the two second adjustment blocks. The opposite ends of the two horizontal adjustment top screws respectively pass through the two second adjustment blocks and abut against the two sides of the second fixed block.

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