Furnace tube cleaning device of diffusion furnace

Abstract

The utility model belongs to the technical field of furnace tube cleaning devices, and discloses a diffusion furnace tube cleaning device which comprises a moving frame, a rotating shaft is rotatably arranged on the moving frame, connecting frames are evenly and fixedly arranged on the rotating shaft in the circumferential direction of the rotating shaft, and each connecting frame is fixedly arranged on the inner wall of a barrel. Cutter holders are uniformly and fixedly arranged on the outer wall of the barrel in the circumferential direction, a rotating shaft is of a hollow structure, a connecting hole is formed in a connecting frame, a cutter groove is formed in each cutter holder, the interior of the rotating shaft communicates with the cutter grooves through the connecting holes, and a scraper is slidably arranged in each cutter groove; a pressure pump is further fixedly arranged on the movable frame, one end of the pressure pump is fixedly connected with a rotating connector through a guide pipe, and the rotating connector is in rotating sealing fit with the end of the rotating shaft. According to the utility model, through the cooperation of the pressure pump, the rotary joint and the like, the scraper and the furnace tube of the diffusion furnace can keep good contact strength in an air pressure manner, so that the use effect of the scraper is ensured.

Description

Technical Field

[0001] The utility model belongs to the technical field of furnace tube cleaning devices, in particular to a diffusion furnace tube cleaning device. Background Art

[0002] The diffusion furnace is one of the important process equipment in the front process of the semiconductor production line. It is used for diffusion, oxidation, annealing, alloying and sintering processes in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and optical fibers. The furnace tube of the diffusion furnace is usually made of quartz material. After a long period of use, some foreign matter will be attached to the inside of the diffusion furnace tube due to factors such as crystallization. The conventional way is to disassemble the diffusion furnace tube and clean the foreign matter on it with a scraper. However, since the position of the scraper is fixed after entering the diffusion furnace tube, some foreign matter is too large. Therefore, in order to protect the scraper, the scraper is usually used to scrape a certain thickness of foreign matter each time. The cleaning of the foreign matter can only be completed through multiple adjustments. Therefore, this problem needs to be solved. Utility Model Content

[0003] In view of the above situation, in order to overcome the defects of the prior art, the utility model provides a diffusion furnace tube cleaning device, which effectively solves the problems raised by the background technology.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a diffusion furnace tube cleaning device, comprising a movable frame, a rotating shaft is rotatably arranged on the movable frame, connecting frames are evenly fixedly arranged on the rotating shaft along its circumference, each connecting frame is fixedly arranged on the inner wall of the cylinder, and a knife seat is evenly fixedly arranged on the outer wall of the cylinder along its circumference, wherein the rotating shaft is a hollow structure, a connecting hole is formed inside the connecting frame, a knife groove is formed inside the knife seat, the interior of the rotating shaft is connected with the knife groove through the connecting hole, and a scraper is slidably arranged inside the knife groove; wherein a pressure pump is also fixedly arranged on the movable frame, one end of the pressure pump is fixedly connected to a rotary joint through a conduit, and the rotary joint is rotatably sealed with the end of the rotating shaft; and a driving mechanism for driving the rotating shaft to rotate is also provided on the movable frame.

[0005] Preferably, the driving mechanism includes a driving motor, two transmission gears and a gear conveyor belt, wherein the driving motor is fixedly arranged on the movable frame, the two transmission gears are respectively fixedly arranged on the output shaft of the driving motor and the rotating shaft, and the two transmission gears are connected by a gear conveyor belt.

[0006] Preferably, the movable frame includes a base plate, a mounting plate and movable wheels, wherein the movable wheels are fixedly arranged at the corners of the base plate, and the mounting plate is fixedly arranged at the top of the base plate; the pressure pump, the driving mechanism and the rotating shaft are all arranged on the mounting plate.

[0007] Preferably, the scraper is T-shaped, and a telescopic spring is provided inside the knife groove, and the telescopic spring is located between the scraper and the inner top wall of the knife groove.

[0008] Preferably, a limiting groove is provided on the scraper, and a limiting mechanism cooperating with the limiting groove is provided on the blade seat.

[0009] Preferably, the limiting mechanism includes a fastening screw, a limiting block and a locking nut, wherein the fastening screw is threadedly matched with the screw hole on the knife seat, the round hole on the limiting block is movably matched with the smooth section of the fastening screw, and one end of the limiting block extends to the interior of the limiting groove, and the locking nut is threadedly matched with the threaded section of the fastening screw.

[0010] Compared with the prior art, the beneficial effects of the utility model are:

[0011] By cooperating with the pressure pump, the rotary joint, etc., the scraper can maintain good contact strength with the diffusion furnace tube by air pressure during the use of the scraper, so that the scraper is always in contact with the next foreign matter to be scraped, thereby eliminating the need for multiple adjustments;

[0012] By using the provided fastening screws, locking nuts, etc., the maximum length of the scraper extending out of the blade groove can be adjusted according to actual needs, thereby avoiding excessive collision between the scraper and the diffusion furnace tube when in use. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. They are used together with the embodiments of the present invention to explain the present invention and do not constitute a limitation to the present invention.

[0014] In the attached picture:

[0015] Figure 1 This is a schematic diagram of the structure of a diffusion furnace tube cleaning device of the utility model;

[0016] Figure 2 This is a schematic diagram of the scraper installation structure of the utility model;

[0017] Figure 3 For the utility model Figure 1 The enlarged structural diagram at A in the middle;

[0018] Figure 4 This is a schematic diagram of the drive motor installation structure of the utility model.

[0019] In the figure: 1. moving frame; 2. rotating shaft; 3. connecting frame; 4. cylinder; 5. knife seat; 6. connecting hole; 7. knife groove; 8. scraper; 9. pressure pump; 10. rotary joint; 11. driving motor; 12. transmission gear; 13. gear conveyor belt; 14. bottom plate; 15. mounting plate; 16. moving wheel; 17. limiting groove; 18. fastening screw; 19. limiting block; 20. locking nut; 21. telescopic spring. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments; based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0021] Embodiment 1, by Figure 1-4 The utility model relates to a furnace tube cleaning device for a diffusion furnace, comprising a movable frame 1, a rotating shaft 2 is rotatably arranged on the movable frame 1, connecting frames 3 are evenly fixedly arranged on the rotating shaft 2 along its circumference, each connecting frame 3 is fixedly arranged on the inner wall of a cylinder 4, and a knife seat 5 is evenly fixedly arranged on the outer wall of the cylinder 4 along its circumference, wherein the rotating shaft 2 is a hollow structure, a connecting hole 6 is formed inside the connecting frame 3, a knife groove 7 is formed inside the knife seat 5, the interior of the rotating shaft 2 is connected with the knife groove 7 through the connecting hole 6, and a scraper 8 is slidably arranged inside the knife groove 7; wherein a pressure pump 9 is also fixedly arranged on the movable frame 1, one end of the pressure pump 9 is fixedly connected to a rotary joint 10 through a conduit, and the rotary joint 10 is rotatably sealed with the end of the rotating shaft 2; a driving mechanism for driving the rotating shaft 2 to rotate is also provided on the movable frame 1;

[0022] With such a design, when in use, the movable frame 1 is adjusted so that the scraper 8 enters the interior of the diffusion furnace tube, and then squeezed by the pressure pump 9, the outside air enters the knife groove 7 in the knife seat 5 through the rotary joint 10, the rotating shaft 2, and the connecting hole 6 in the connecting frame 3 in turn, so that the air pressure in the knife groove 7 is enhanced, and under the action of the high air pressure, the scraper 8 moves out of the knife groove 7, and then the rotating shaft 2 is driven to rotate by the driving mechanism, so that the scraper 8 cleans the inner wall of the diffusion furnace tube after rotating; in this way, during the contact between the scraper 8 and the diffusion furnace tube, the contact force between the scraper 8 and the foreign matter on the inner wall of the diffusion furnace tube can be maintained by the high air pressure to ensure the cleaning effect of the scraper 8.

[0023] The driving mechanism includes a driving motor 11, two transmission gears 12 and a gear-type conveyor belt 13, wherein the driving motor 11 is fixedly arranged on the mobile frame 1, the two transmission gears 12 are respectively fixedly arranged on the output shaft of the driving motor 11 and the rotating shaft 2, and the two transmission gears 12 are connected by the gear-type conveyor belt 13;

[0024] In this design, the driving motor 11 drives the transmission gear 12 thereon to rotate, and the transmission gear 12 drives the transmission gear 12 on the rotating shaft 2 to rotate through the gear conveyor belt 13, thereby realizing the driving process of the rotating shaft 2.

[0025] The mobile frame 1 includes a bottom plate 14, a mounting plate 15 and a moving wheel 16, wherein the moving wheel 16 is fixedly arranged at the corner of the bottom plate 14, and the mounting plate 15 is fixedly arranged at the top of the bottom plate 14; the pressure pump 9, the driving mechanism and the rotating shaft 2 are all arranged on the mounting plate 15;

[0026] This design makes it easy to move the mobile frame 1 through the moving wheels 16, so that the position of the entire device can be easily adjusted.

[0027] The scraper 8 is T-shaped, and a telescopic spring 21 is provided inside the knife groove 7. The telescopic spring 21 is located between the scraper 8 and the inner top wall of the knife groove 7.

[0028] With this design, after use, the scraper 8 can be stored in the blade groove 7 through the telescopic spring 21, thereby protecting the scraper 8.

[0029] The scraper 8 is provided with a limiting groove 17, and the knife seat 5 is provided with a limiting mechanism that cooperates with the limiting groove 17;

[0030] The limiting mechanism includes a fastening screw 18, a limiting block 19 and a locking nut 20, wherein the fastening screw 18 is threadedly matched with the screw hole on the knife seat 5, the round hole on the limiting block 19 is movably matched with the smooth section of the fastening screw 18, and one end of the limiting block 19 extends to the inside of the limiting groove 17, and the locking nut 20 is threadedly matched with the threaded section of the fastening screw 18;

[0031] With this design, the distance between the top of the fastening screw 18 and the knife seat 5 can be adjusted by a tool, and then the fastening screw 18 can be locked by the locking nut 20. In this way, the limiting groove 17 on the scraper 8 can be limited by the limiting block 19 to adjust the maximum distance that the scraper 8 extends out of the knife groove 7, thereby avoiding excessive collision between the scraper 8 and the furnace tube of the diffusion furnace.

Claims

1. A diffusion furnace tube cleaning device, comprising a movable frame (1), a rotating shaft (2) being rotatably arranged on the movable frame (1), connecting frames (3) being evenly and fixedly arranged on the rotating shaft (2) along its circumference, each connecting frame (3) being fixedly arranged on the inner wall of a cylinder (4), characterized in that: The outer wall of the cylinder (4) is evenly and fixedly provided with a knife seat (5) along its circumference, wherein the rotating shaft (2) is a hollow structure, a connecting hole (6) is formed inside the connecting frame (3), a knife groove (7) is formed inside the knife seat (5), the interior of the rotating shaft (2) is connected to the knife groove (7) through the connecting hole (6), and a scraper (8) is slidably provided inside the knife groove (7); wherein a pressure pump (9) is also fixedly provided on the movable frame (1), one end of the pressure pump (9) is fixedly connected to a rotary joint (10) through a conduit, and the rotary joint (10) is rotatably sealed with the end of the rotating shaft (2); and a driving mechanism for driving the rotating shaft (2) to rotate is also provided on the movable frame (1).

2. The diffusion furnace tube cleaning device according to claim 1, characterized in that: The driving mechanism comprises a driving motor (11), two transmission gears (12) and a gear-type conveyor belt (13), wherein the driving motor (11) is fixedly arranged on the moving frame (1), the two transmission gears (12) are respectively fixedly arranged on the output shaft of the driving motor (11) and on the rotating shaft (2), and the two transmission gears (12) are connected to each other through the gear-type conveyor belt (13).

3. The diffusion furnace tube cleaning device according to claim 1, characterized in that: The movable frame (1) comprises a base plate (14), a mounting plate (15) and movable wheels (16), wherein the movable wheels (16) are fixedly arranged at the corners of the base plate (14), and the mounting plate (15) is fixedly arranged at the top of the base plate (14); the pressure pump (9), the driving mechanism and the rotating shaft (2) are all arranged on the mounting plate (15).

4. The diffusion furnace tube cleaning device according to claim 1, characterized in that: The scraper (8) is T-shaped, and a telescopic spring (21) is provided inside the knife groove (7). The telescopic spring (21) is located between the scraper (8) and the inner top wall of the knife groove (7).

5. The diffusion furnace tube cleaning device according to claim 4, characterized in that: The scraper (8) is provided with a limiting groove (17), and the blade seat (5) is provided with a limiting mechanism that cooperates with the limiting groove (17).

6. The diffusion furnace tube cleaning device according to claim 5, characterized in that: The limiting mechanism comprises a fastening screw (18), a limiting block (19) and a locking nut (20), wherein the fastening screw (18) is threadedly engaged with a screw hole on the knife seat (5), the round hole on the limiting block (19) is movably engaged with a smooth section of the fastening screw (18), one end of the limiting block (19) extends into the interior of the limiting groove (17), and the locking nut (20) is threadedly engaged with a threaded section of the fastening screw (18).

Images