Detection tool for detecting size and form and location tolerance of groove of vertical quartz boat

Abstract

The utility model discloses a gauge for detecting the size and the form and location tolerance of a vertical quartz boat detection groove, relates to the technical field of tolerance gauges, and solves the technical problems that the efficiency is low and the form and location tolerance cannot be accurately detected in the prior art, the gauge comprises a bottom plate, the bottom plate is provided with a guide rail mounting groove, and the bottom plate is provided with a pair of guide rails. A guide rail is arranged on the base, a sliding sleeve is arranged on the guide rail in a sliding mode, a supporting plate is fixedly arranged on the sliding sleeve, and a high-precision testing fixture is fixedly arranged on the supporting plate. The interference condition of the high-precision gauge and the quartz boat groove rod can directly reflect the form and location tolerance of the groove rod, so that the detection accuracy is ensured, and the problem that the form and location tolerance cannot be accurately detected by a traditional method is solved; the use convenience is improved; the height can be adjusted according to needs to adapt to quartz boats of different specifications, and the application range of the testing fixture is widened.

Description

Technical Field

[0001] The utility model relates to the technical field of tolerance inspection tools, in particular to an inspection tool used for inspecting the size and shape and position tolerance of a vertical quartz boat. Background Art

[0002] The utility model relates to the technical field of vertical quartz boats used for silicon wafer diffusion in the photovoltaic industry. The design and manufacture of vertical quartz boats have increasingly stringent requirements on size and form tolerances, especially when silicon wafers are automatically loaded. In order to ensure that the slots of each quartz boat can meet the needs of efficient production, the slot sizes and form tolerances of its four rods must be strictly tested before leaving the factory. However, since each quartz boat has hundreds of slots, the traditional three-coordinate measurement method is inefficient, and the height gauge cannot provide sufficiently accurate form tolerance measurements. Therefore, there is an urgent need to find a more efficient and accurate detection method to ensure the quality and performance of the quartz boat.

[0003] The existing technology has the technical problem that it cannot accurately detect geometric tolerances. Summary of the invention

[0004] In view of the deficiencies of the prior art, the utility model provides a gauge for detecting the size and shape and position tolerance of a vertical quartz boat, which solves the technical problem of the prior art that the shape and position tolerance cannot be accurately detected due to inefficient inspection.

[0005] To achieve the above purpose, the utility model is implemented through the following technical solutions: a gauge for detecting the size and form and position tolerance of a vertical quartz boat groove, comprising a base plate, a guide rail mounting groove is opened on the base plate, a pair of guide rails are installed on the base plate, a sliding sleeve is slidably installed on the guide rail, a support plate is fixedly installed on the sliding sleeve, and a high-precision gauge is fixedly installed on the support plate. The base plate is processed with a groove for fixing the slide rail, and the groove for placing the quartz boat can ensure the parallelism of the slide rail and the quartz boat. When in use, the quartz boat is placed in the quartz boat placement groove, and then the base plate is slid, and the high-precision gauge fixed on the base plate passes through the front and rear groups of quartz rods of the quartz boat in turn. If the size and form and position tolerance of the quartz groove rod are not good, the high-precision gauge will interfere with the groove rod of the quartz boat during the sliding process. If interference occurs, it can be determined that the size or form and position tolerance of the quartz boat is unqualified.

[0006] Preferably, the two side walls of the high-precision inspection fixture are provided with five high-precision inspection teeth, and the high-precision inspection fixture is processed according to the maximum tolerance of the quartz boat groove. The teeth of the five high-precision inspection grooves can detect the size of the groove and the positioning tolerance by detecting the five grooves.

[0007] Preferably, handles are fixedly mounted on the upper wall surface of the support plate and on both ends of the bottom plate.

[0008] Preferably, a support is provided on the lower wall of the bottom plate to support the entire inspection fixture and adjust its height.

[0009] Preferably, a limit block is fixedly mounted on one end of the guide rail.

[0010] Beneficial Effects

[0011] The utility model provides a gauge for detecting the size and shape and position tolerance of a vertical quartz boat slot. The utility model realizes rapid detection of multiple slots through the combination of a sliding bottom plate and an efficient gauge, greatly improves detection efficiency, and reduces manpower and time costs; the interference between the high-precision gauge and the slot rod of the quartz boat can directly reflect the shape and position tolerance of the slot rod, ensures the accuracy of detection, and overcomes the problem that the traditional method cannot accurately detect the shape and position tolerance; the overall structure is reasonably designed and equipped with a handle, which is convenient for operators to move and fix the gauge, simplifies the detection process, and improves the convenience of use; a support is provided on the lower wall of the bottom plate, which can adjust the height according to needs to adapt to quartz boats of different specifications, thereby increasing the applicable scope of the gauge; a limited position block is fixed at one end of the guide rail, which effectively prevents displacement during sliding and ensures the stability and consistency of the gauge during the detection process; the tooth design of the high-precision gauge can be processed according to the maximum tolerance of the quartz boat slot, making the gauge more flexible and applicable in the detection of various models of quartz boats. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 The utility model is a three-dimensional structural schematic diagram of a checking fixture for checking the size and shape and position tolerance of a vertical quartz boat.

[0013] Figure 2 The utility model is a schematic diagram of the main structure of a checking fixture for checking the size and shape and position tolerance of a vertical quartz boat.

[0014] Figure 3 The utility model is a schematic diagram of the side structure of a checking fixture for checking the size and shape and position tolerance of a vertical quartz boat.

[0015] Figure 4 The utility model is a schematic diagram of a top view of a fixture for detecting the size and shape and position tolerance of a vertical quartz boat.

[0016] In the figure: 1. Base plate; 2. Guide rail; 3. Sliding sleeve; 4. Support plate; 5. High-precision inspection fixture; 6. Handle; 7. Support; 8. Limit block; DETAILED DESCRIPTION

[0017] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined purpose of the invention, the technical scheme in the embodiment of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiment of the present invention. Obviously, the described embodiment is only a part of the embodiment of the present invention, rather than all the embodiments. The detailed description is as follows.

[0018] See also Figure 1-4 The utility model provides a technical solution: a gauge for detecting the size and shape and position tolerance of a vertical quartz boat groove, comprising a base plate 1, a guide rail mounting groove is opened on the base plate 1, a pair of guide rails 2 are installed on the base plate 1, a sliding sleeve 3 is slidably installed on the guide rail 2, a support plate 4 is fixedly installed on the sliding sleeve 3, and a high-precision gauge 5 is fixedly installed on the support plate 4. The base plate 1 is processed with a groove for fixing the slide rail, and the groove for placing the quartz boat can ensure the parallelism of the slide rail and the quartz boat. When in use, the quartz boat is placed in the quartz boat placement groove, and then the base plate 1 is slid, and the high-precision gauge 5 fixed on the base plate 1 passes through the front and rear groups of quartz rods of the quartz boat in sequence. If the size and shape and position tolerance of the quartz groove rod are not good, the high-precision gauge 5 will interfere with the groove rod of the quartz boat during the sliding process. If interference occurs, it can be determined that the size or shape and position tolerance of the quartz boat is unqualified.

[0019] This embodiment is further configured such that five high-precision detection teeth are provided on the two side walls of the high-precision inspection fixture 5. The high-precision inspection fixture 5 is processed according to the maximum tolerance of the quartz boat groove. Through the tooth composition of the five high-precision detection grooves, the size of the groove and the positioning tolerance can be detected by detecting the five grooves.

[0020] The present embodiment is further configured such that handles 6 are fixedly mounted on the upper wall surface of the support plate 4 and on both ends of the bottom plate 1 .

[0021] This embodiment is further configured such that a support 7 is provided on the lower wall of the bottom plate 1 to support the entire inspection fixture and to adjust its height.

[0022] This embodiment is further configured such that a limit block 8 is fixedly mounted on one end of the guide rail 2 .

[0023] The detailed connection means are well known in the art; Figure 1-4 As shown, first ensure that the gauge and quartz boat are clean to prevent dust and other debris from affecting the measurement results; check the components of the gauge to ensure that all parts are operating normally and without damage.

[0024] Place the quartz boat steadily into the slot on the bottom plate 1 of the inspection tool, and ensure that the quartz boat fits tightly with the slot to maintain stability; if the height of the bottom plate 1 needs to be adjusted, please loosen the support 7 first and adjust it to the appropriate height, and then fix the support 7; confirm the parallelism between the bottom plate 1 and the quartz boat, and ensure that the slide rail and the groove surface of the quartz boat remain in the same plane; hold the handle 6 on the support plate 4, and slowly slide the bottom plate 1 so that the high-precision inspection tool 5 passes through the front and rear groups of quartz slot rods of the quartz boat; during the sliding process, pay attention to the contact between the high-precision inspection tool 5 and the slot rod. If the high-precision inspection tool 5 interferes with the slot rod, it means that the slot does not meet the size or shape tolerance requirements; according to the interference situation during the test, record the test results of each slot and mark the unqualified slots for subsequent maintenance or replacement; after the test is completed, clean the residues on the inspection tool and the quartz boat to ensure that they remain in good condition; store the inspection tool in the designated location to ensure the safe storage of the equipment.

[0025] It should be noted that, in this document, relational terms such as first and second, etc. are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.

[0026] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technical personnel in this field can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A test fixture for testing the size and shape and position tolerance of a vertical quartz boat, comprising a bottom plate (1), characterized in that: The base plate (1) is provided with a guide rail installation groove, a pair of guide rails (2) are installed on the base plate (1), a sliding sleeve (3) is slidably installed on the guide rail (2), a support plate (4) is fixedly installed on the sliding sleeve (3), and a high-precision inspection fixture (5) is fixedly installed on the support plate (4).

2. A test fixture for measuring the size and shape and position tolerance of a vertical quartz boat according to claim 1, characterized in that The high-precision inspection tool (5) has five high-precision inspection teeth on both side walls.

3. A gauge for measuring the size and shape and position tolerance of a vertical quartz boat according to claim 1, characterized in that Handles (6) are fixedly mounted on the upper wall of the support plate (4) and on both ends of the bottom plate (1).

4. A test fixture for testing the size and shape and position tolerance of a vertical quartz boat according to claim 1, characterized in that A support (7) is provided on the lower wall surface of the bottom plate (1).

5. A test fixture for testing the size and shape and position tolerance of a vertical quartz boat according to claim 1, characterized in that A limiting block (8) is fixedly mounted on one end of the guide rail (2).

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