Micro-motion alignment platform

Abstract

The utility model discloses a micro-motion alignment platform which comprises a linear motion platform which comprises a bottom plate, a motion plate connected with the bottom plate in a sliding mode, a winding arranged on the bottom plate and a magnetic track arranged on the motion plate. The rotary platform comprises a motor rotor, a motor stator, a base fixed on the moving plate, a bearing and a rotary table which is rotatably arranged with the base based on the bearing; a cavity is formed between the base and the rotary table, the motor rotor and the motor stator are both arranged in the cavity, the motor rotor is connected with the rotary table, and the motor stator is connected with the base; the base is further provided with a wire outlet groove, and a cable electrically connected with the stator penetrates through the wire outlet groove. The overall height of the rotating platform is reduced, the overall mass center height is further reduced, and the response speed and the operation precision of the micro-motion alignment platform can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of motion platforms, in particular to a micro-motion alignment platform. Background Art

[0002] Micro-motion platforms are usually used in fields such as nano-precision imaging, precision machining, precision measurement and medical equipment. They have the characteristics of small size, fast response, high accuracy and stability.

[0003] Chinese patent CN209402387U discloses a micro-motion platform, including an ironless linear motor, a base and a slide; the ironless linear motor includes a stator assembly and a mover assembly that performs reciprocating linear motion relative to the stator assembly; the stator assembly is installed on the base, and the stator assembly includes a yoke arranged parallel to the base, and magnet arrays are symmetrically arranged on the two walls opposite to the yoke and the base; the mover assembly is located between the yoke and the base, and one side of the mover assembly passes through the gap between the yoke and the base. Since the mover assembly needs to be connected to an external cable, when the mover assembly moves, the external cable or the drag chain used to install the cable has uncertain resistance to the movement of the mover assembly, which can easily affect the movement accuracy of the micro-motion platform. Utility Model Content

[0004] In view of the deficiencies of the prior art, the utility model discloses a micro-motion alignment platform, which is intended to at least solve the technical problem in the prior art that the cables of the movable subassembly easily affect the movement accuracy of the platform.

[0005] The utility model provides a micro-motion alignment platform, comprising:

[0006] A linear motion platform, the linear motion platform comprising a base plate, a motion plate, a winding and a magnetic track;

[0007] The winding is arranged on the bottom plate, the magnetic track is arranged on the moving plate, the magnetic track is arranged corresponding to the winding, and the moving plate is slidably connected to the bottom plate;

[0008] A rotating platform, the rotating platform comprising a motor rotor, a motor stator, a base fixed on the moving plate, a bearing arranged on the base, and a turntable rotatably arranged based on the bearing and the base;

[0009] A cavity is formed between the base and the turntable, the motor rotor and the motor stator are both arranged in the cavity, the motor rotor is connected to the turntable, and the motor stator is connected to the base; the base is also provided with a wire outlet slot, and the cable electrically connected to the stator passes through the wire outlet slot.

[0010] In some preferred embodiments, a grating is provided on the outer side of the turntable; a reading head is provided on the base, and the reading head is arranged corresponding to the grating.

[0011] In some preferred embodiments, a protective frame is provided on the base; and the reading head is provided between the protective frame and the base.

[0012] In some preferred embodiments, the protective frame includes a cover plate and a plurality of support rods; one end of each of the support rods is connected to the base, and the other end of the support rod is provided with a screw hole; the cover plate is connected to the support rods by screws.

[0013] In some preferred embodiments, the cover is connected to the base.

[0014] In some preferred embodiments, the base and the sport board are integrally formed structures.

[0015] In some preferred embodiments, there are multiple linear motion platforms, which are stacked vertically in sequence.

[0016] In some preferred embodiments, any two adjacent linear motion platforms are staggered.

[0017] In some preferred embodiments, any two adjacent linear motion platforms are orthogonally arranged at an angle of 90 degrees.

[0018] In some preferred embodiments, the motion plate of one of the linear motion platforms located below is integrally formed with the bottom plate of another adjacent linear motion platform located above.

[0019] Compared with the prior art, the utility model has the following beneficial effects:

[0020] Compared with the prior art in which the winding is set on the mover, when the mover assembly moves, the external cable or the drag chain used to install the cable has uncertain resistance to the movement of the mover assembly, and the cable ages during the continuous deformation process, resulting in cable breakage and failure. The technical solution sets the winding on the bottom plate, and the cable of the winding is relatively static, which greatly reduces the setting of the drag chain and the probability of cable aging and breakage, so that the cable of the winding will not hinder the rotation of the linear motion platform, which is beneficial to improve the accuracy of the platform movement; and through the cooperation of the cable and the outlet groove, the overall height of the rotating platform is greatly reduced, thereby reducing the overall center of mass height, which helps to improve the response speed and operation accuracy of the micro-motion alignment platform. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the three-dimensional structure of the micro-motion alignment platform.

[0022] Figure 2 It is a schematic diagram of the front view structure of the micro-motion alignment platform.

[0023] Figure 3 It is a schematic diagram of the three-dimensional structure of the rotating platform.

[0024] Figure 4 It is a schematic diagram of the internal structure of the rotating platform.

[0025] Figure 5 It is a schematic diagram of the cable outlet structure of the rotating platform. DETAILED DESCRIPTION

[0026] In order to further explain the technical means and effects adopted by the present application to achieve the predetermined purpose, the specific implementation methods, structures, features and effects of the present application are described in detail below in conjunction with the accompanying drawings and preferred embodiments. In the following description, different "one embodiment" or "embodiment" does not necessarily refer to the same embodiment. In addition, specific features, structures, or characteristics in one or more embodiments may be combined in any suitable form.

[0027] Combination Figure 1-Figure 5 As shown, the utility model provides a micro-motion alignment platform, which includes a linear motion platform 1 and a rotating platform 2 which provides a certain angle of rotation relative to the linear motion platform 1 .

[0028] Especially combined with Figure 1-Figure 2 As shown, the linear motion platform 1 includes a base plate 11, a moving plate 12 slidably connected to the base plate 11, a winding 13 and a magnetic track 14. The winding 13 is arranged on the base plate 11, the magnetic track 14 is arranged on the moving plate 12, and the magnetic track 14 is arranged corresponding to the winding 13.

[0029] Especially combined with Figure 3 and Figure 4 As shown, the rotating platform 2 includes a base 21 fixed on the moving plate 12, a bearing 23 arranged on the base 21, and a turntable 22 rotatably arranged relative to the base 21 through the bearing 23; the rotating motor used to drive the rotating platform 2 includes a motor rotor 31 and a motor stator 32 arranged opposite to the motor rotor 31.

[0030] A bearing mounting plate 24 is fixed on the inner side of the turntable 22 . The bearing mounting plate 24 has an inner support platform. The outer ring of the bearing 23 is fixed to the inner support platform. Thus, the turntable 22 is assembled and connected with the bearing 23 by means of the bearing mounting plate 24 .

[0031] A cavity is formed between the base 21 and the turntable 22 , and the motor rotor 31 and the motor stator 32 are both disposed in the cavity. Therefore, the motor rotor 31 is fixed to the inner side of the turntable 22 , and the motor stator 32 is fixed to the base 21 .

[0032] The base 21 of the rotating platform 2 and the moving plate 12 of the linear motion platform 1 can be a separate assembly structure or an integrally formed structure. The base 21 is fixedly connected to the moving plate 12, so that the rotating platform 2 and the linear motion platform 1 form a compact whole.

[0033] The size of the base 21 matches the size of the turntable 22. Figure 3 Of course, the size of the base 21 can also be much larger than the size of the turntable 22, such as Figure 5 shown.

[0034] The utility model provides a wire outlet slot 211 on the base 21, allowing the cable 33 electrically connected to the motor stator 32 to pass through the wire outlet slot 131. Through the cooperation between the cable 33 and the wire outlet slot 131, the overall height of the rotating platform 2 is greatly reduced, thereby reducing the overall center of mass height, thereby helping to improve the response speed and operation accuracy of the micro-motion alignment platform.

[0035] The technical solution sets the winding 13 on the bottom plate 11, and the cable of the winding 13 is relatively static, which greatly reduces the setting of the drag chain and greatly reduces the probability of cable aging and breakage. The cable of the winding 13 will not hinder the rotation of the linear motion platform 1, which is beneficial to improve the accuracy of the platform movement.

[0036] Preferably, the winding 13 adopts a PCB winding plate or a coreless winding. The PCB winding plate or the coreless winding has a flat structure, so that the winding 13 occupies a smaller height space inside the linear motion platform 1, which is beneficial to reduce the outer volume of the micro-motion alignment platform to reduce its own weight and reduce the motion inertia, thereby helping to improve the response speed and operation accuracy of the micro-motion alignment platform.

[0037] Preferably, the motor stator 32 adopts a PCB winding plate or a coreless winding. The PCB winding plate or the coreless winding has a flat structure, so that the rotating motor occupies a smaller height space inside the rotating platform 2, which is conducive to reducing the outer volume of the micro-motion alignment platform to reduce its own weight and reduce the motion inertia, thereby helping to improve the response speed and operation accuracy of the micro-motion alignment platform.

[0038] The micro-motion alignment platform disclosed in the utility model provides a relatively small range of motion, generally at the micron level, so the precision requirement is very high.

[0039] Furthermore, the present application adopts an external arc grating in combination with a rotary motor instead of an encoder disk built into the rotary platform 2, which can further reduce the volume of the rotary platform 2 and thereby improve the response speed and operating accuracy of the micro-motion alignment platform.

[0040] An arc grating 29 is provided on the outer side surface of the turntable 22 ; a reading head 5 is provided on the base 21 , and the reading head 5 is provided corresponding to the grating 29 .

[0041] Specifically, a protective frame 4 is provided on the base 21, and the protective frame includes a cover plate 41 and a plurality of support rods 42; one end of each support rod 42 is connected to the base 21, and the other end of the support rod 42 is provided with a screw hole; the cover plate 41 is connected to the support rod 42 by screws. The cover plate 41 is connected to the base 21, so that the reading head 5 is provided between the protective frame 4 and the base 11, and the protective frame 4 protects the reading head 5 from external interference, thereby ensuring that the reading head 5 works stably and reliably.

[0042] Combine again Figure 1 and Figure 2 As shown. The number of the linear motion platform 1 can be one or more as required, and multiple linear motion platforms 1 are stacked vertically. Figure 2 The figure shows that two linear motion platforms 1 and 1' are stacked vertically. At this time, the motion plate 12' of the lower linear motion platform 1' and the bottom plate 11 of the upper other linear motion platform 1 are integrally formed, making the structure of the two linear motion platforms 1 and 1' more compact.

[0043] Preferably, any two adjacent linear motion platforms 1 and 1' are arranged alternately. Preferably, any two adjacent linear motion platforms 1 and 1' are arranged orthogonally at an angle of 90 degrees, wherein one linear motion platform 1 provides linear motion in the X-axis direction, and the other linear motion platform 1' provides linear motion in the Y-axis direction.

[0044] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A micro-motion alignment platform, characterized in that: include: A linear motion platform, the linear motion platform comprising a base plate, a motion plate, a winding and a magnetic track; The winding is arranged on the bottom plate, the magnetic track is arranged on the moving plate, the magnetic track is arranged corresponding to the winding, and the moving plate is slidably connected to the bottom plate; A rotating platform, the rotating platform comprising a motor rotor, a motor stator, a base fixed on the moving plate, a bearing arranged on the base, and a turntable rotatably arranged based on the bearing and the base; A cavity is formed between the base and the turntable, the motor rotor and the motor stator are both arranged in the cavity, the motor rotor is connected to the turntable, and the motor stator is connected to the base; the base is also provided with a wire outlet slot, and the cable electrically connected to the stator passes through the wire outlet slot.

2. The micro-motion alignment platform according to claim 1, characterized in that: A grating is arranged on the outer side of the turntable; a reading head is arranged on the base, and the reading head is arranged corresponding to the grating.

3. The micro-motion alignment platform according to claim 2, characterized in that: A protective frame is arranged on the base; and the reading head is arranged between the protective frame and the base.

4. The micro-motion alignment platform according to claim 3, characterized in that: The protective frame includes a cover plate and a plurality of support rods; One end of each of the support rods is connected to the base, and the other end of the support rod is provided with a screw hole; the cover plate is connected to the support rods by screws.

5. The micro-motion alignment platform according to claim 4, characterized in that: The cover plate is connected to the base.

6. The micro-motion alignment platform according to claim 1, characterized in that: The base and the sports board are integrally formed structures.

7. The micro-motion alignment platform according to any one of claims 1 to 6, characterized in that: There are a plurality of linear motion platforms, which are stacked in sequence in a vertical manner.

8. The micro-motion alignment platform according to claim 7, characterized in that: Any two adjacent linear motion platforms are arranged alternately.

9. The micro-motion alignment platform according to claim 8, characterized in that: Any two adjacent linear motion platforms are orthogonally arranged at an angle of 90 degrees.

10. The micro-motion alignment platform according to claim 7, characterized in that: The moving plate of one of the linear motion platforms located below is integrally formed with the bottom plate of another adjacent linear motion platform located above.

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