Evaporation wire feeding guide pipe assembly, double-side wire feeding evaporation system and vacuum evaporation equipment

Abstract

The utility model discloses an evaporation wire feeding guide pipe assembly, a double-side wire feeding evaporation system and vacuum evaporation equipment, and belongs to the technical field of vacuum evaporation, the evaporation wire feeding guide pipe assembly comprises at least two sets of wire feeding guide pipes, the guide pipes directly or indirectly form mutual matching constraint, the projection length of the whole guide pipe assembly in the horizontal direction is smaller than or equal to nL, l represents the maximum outer contour width of the section of the catheter, and n represents the number of wire feeding catheters. According to the evaporation wire feeding guide pipe assembly, an optimized wire feeding guide pipe structure is adopted, shielding of a metal steam evaporation path generated by an evaporation vessel is reduced, the shaking condition of the guide pipe is reduced, and the wire feeding stability is improved to a certain degree.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to an evaporation wire feeding duct assembly, a double-side wire feeding evaporation system and vacuum evaporation equipment. Background Art

[0002] For thin film products using vacuum evaporation, such as metal targets based on polymer films as carriers, the commonly used coating equipment is a vacuum coating machine. The vacuum coating machine is equipped with a wire feeding mechanism and an evaporation boat. The wire feeding mechanism transports the linear target material to the surface of the evaporation boat. Under the high temperature generated by the evaporation mechanism, the metal is evaporated into a gaseous state and coated on the plastic film.

[0003] In order to increase the coating efficiency, the current consideration is to increase the number of evaporation vessels and the density of their arrangement. Therefore, a double-row evaporation boat structure is often used. A wire feeding mechanism can only be provided on one side of each evaporation boat, and the length of the evaporation boat is limited. Therefore, the evaporation amount of the metal wire is relatively small. In view of the above technical problems, the prior art, such as patent publication number CN219449843U, proposes to increase the wire feeding amount by adopting a double-sided, multi-wire feeding point method.

[0004] In the above technical solution, the wire feeding assembly arranges the wire feeding ducts in a side-by-side and horizontally spaced manner. The ducts will form a horizontal barrier, aggravating the obstruction of the evaporation path, especially when the number of ducts is set more; in addition, when the metal wire is introduced from the wire feeding disk into the duct after passing through the pressure wheel assembly, the metal wire will contact the (arc-shaped) duct in the duct and cause jitter, especially when the wire needs to be fed to the middle position of the evaporation boat, the jitter will intensify, which will cause the metal wire to jitter after being output, affecting the stability during evaporation.

[0005] Further improvement is needed. Utility Model Content

[0006] The utility model aims to solve one of the technical problems in the related art to at least a certain extent. To this end, one purpose of the utility model is to provide a vapor deposition wire feeding duct assembly, which adopts an optimized wire feeding duct structure to reduce the obstruction of the evaporation path of the metal vapor generated by the evaporation vessel, reduce the shaking of the duct, and increase the stability of wire feeding to a certain extent.

[0007] Another object of the present application is to provide an evaporation system having a wire feed guide tube assembly with multiple wire feed sites as described above;

[0008] Another object of the present application is to provide a vacuum coating device having the above-mentioned evaporation system.

[0009] The technical solution of the utility model is as follows:

[0010] A vapor deposition wire feeding duct assembly comprises at least two groups of wire feeding ducts, wherein the ducts directly or indirectly form mutual matching constraints, and the projection length of the duct assembly as a whole in the horizontal direction is ≤nL, wherein L represents the maximum outer contour width of the duct cross section, and n represents the number of wire feeding ducts.

[0011] Based on the above technical solution, by setting up multiple groups of conduits in a vertical arrangement, it is possible to provide multiple wire feeding locations while minimizing the impact on the evaporation path; and the mutual cooperation and restraint between the conduits can increase the overall stability of the component and reduce jitter.

[0012] Furthermore, adjacent wire feeding ducts are indirectly fixed by a connecting portion, and / or adjacent wire feeding ducts are directly fixed.

[0013] Based on the above technical solution, the conduits can be connected to each other for constraint, thereby ensuring the stability of each pipeline.

[0014] Furthermore, adjacent wire feeding ducts are connected via a plate-shaped connecting portion.

[0015] Based on the above technical solution, it is convenient to fix the components later.

[0016] Furthermore, the angle α between the central axis of the conduit assembly and the normal plane of the evaporation boat is ≤5°.

[0017] Based on the above technical solution, the conduit assembly is kept in a substantially vertical state, further reducing obstruction to the evaporation path.

[0018] Furthermore, the maximum thickness of the cross section of the connecting portion is less than or equal to the maximum outer contour width of the cross section of the corresponding conduit.

[0019] Based on the above technical solution, when the conduit assembly is arranged vertically, interference with the evaporation path can be reduced.

[0020] Furthermore, the length of the constrained fit between the conduits is adapted to the total length of the corresponding tube body.

[0021] Based on the above technical solution, the mutual matching between the catheters can be guaranteed and the stability can be guaranteed.

[0022] Furthermore, the length of the constrained fit between the conduits is not greater than the total length of the conduit body.

[0023] Based on the above technical solution, it can be ensured that the constraint structure between the conduits does not interfere with the evaporation path of the evaporation boat as much as possible.

[0024] Furthermore, the wall thickness corresponding to the cross section of the conduit is uniform, and the longest contour diameter dimension of the corresponding cross section is b, and the shortest contour diameter dimension is a, satisfying b=a.

[0025] Furthermore, the wall thickness of the cross section of the conduit increases in the direction toward the normal plane of the evaporation boat, and the corresponding longest contour diameter dimension of the cross section is b, and the shortest contour diameter dimension is a, satisfying b>a.

[0026] Based on the above technical solution, the stability of the overall wire feeding duct assembly can be further increased, and the impact on the evaporation path can be further reduced.

[0027] Furthermore, the longest contour diameter dimension b and the shortest contour diameter dimension a of the wire feeding guide tube cross section satisfy b / a≥1.2.

[0028] Based on the above technical solution, while ensuring the overall stability, the horizontal width can be appropriately shortened, thereby further reducing occlusion.

[0029] A vapor deposition system comprises a wire feeding mechanism and an evaporation tank, wherein a plurality of evaporation boats and an electrode assembly for supplying power to the evaporation boats are arranged in the evaporation tank; the wire feeding mechanism comprises the wire feeding conduit assembly and a wire feeding assembly for providing metal wires.

[0030] Furthermore, the wire feeding assembly is arranged at least on one side of the evaporation boat.

[0031] Furthermore, the evaporation boats are arranged in a single row or a double row.

[0032] In addition, a vacuum coating device is also disclosed, comprising the above-mentioned evaporation system. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0034] Figure 1 It is a schematic diagram of the cross-sectional structure of the vapor deposition wire feeding guide tube assembly (from a longitudinal perspective);

[0035] Figure 2 It is a schematic diagram of the side structure of the evaporation wire feeding guide tube assembly (from a horizontal perspective), in which the fixing part is omitted;

[0036] Figure 3 It is a top view structural diagram of the evaporation system;

[0037] Figure 4 for Figure 3 A partial enlarged view of the middle A;

[0038] Figure 5 for Figure 2 Structural schematic diagram of the improvement scheme of the middle connection part;

[0039] Figure 6 for Figure 1A schematic diagram of yet another improved solution for the middle catheter assembly.

[0040] In the figure:

[0041] 1-evaporation tank; 11-evaporation boat; 12-first metal wire; 13-second metal wire; 2-wire feeding reel; 31-mounting seat; 32-fixing seat; 41-first conduit; 42-second conduit; 43-connecting part. DETAILED DESCRIPTION

[0042] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0043] Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0044] Reference Figure 1-2 A vapor deposition wire feeding duct assembly includes at least two groups of wire feeding ducts. In this embodiment, two groups of ducts are shown, namely, a first duct 41 and a second duct 42, which have uniform wall thickness; a connecting portion 43 is provided between adjacent wire feeding ducts for tightly fixing the corresponding two groups of ducts so that mutual matching constraints are formed directly or indirectly between the ducts. In this embodiment, the connecting portion 43 is plate-shaped and is welded and fixed to the two groups of ducts; the projection length of the duct assembly as a whole in the horizontal direction is ≤nL, where L represents the maximum outer contour width of the duct cross section (corresponding to the maximum outer contour width in this embodiment). Figure 1 The circular tube diameter D) is shown, and n represents the number of tubes.

[0045] By arranging multiple groups of conduits vertically, it is possible to provide multiple wire feeding locations while minimizing the impact on the evaporation path; at the same time, the mutual coordination and restraint between the conduits can increase the overall stability of the component and reduce jitter.

[0046] The connecting portion 43 can also be set to other irregular plate shapes, such as locally thickened (reinforcement, etc.) or vacant (opening) structures, which should also be covered in the protection scope of the present application; at the same time, the fixing of the connecting portion 43 to the corresponding conduit can also be achieved by indirect fastening methods such as connectors.

[0047] In addition, if Figure 1The angle α between the central axis of the catheter assembly and the normal plane n of the evaporation boat is preferably ≤5°, that is, it basically maintains a vertical state, further reducing the obstruction of the evaporation path; the maximum cross-sectional thickness d of the connecting portion 43 is preferably less than or equal to the maximum outer contour width D of the corresponding catheter, so that when the catheter assembly is vertically arranged, the interference with the evaporation path can be reduced; the width of the connecting portion 43 (corresponding to the installation interval between the catheters) is greater than or equal to 0 cm (when it is equal to 0 cm, the two groups of catheters are directly connected); the length of the connecting portion 43 extending along the axial direction (longitudinal direction) of the catheter is adaptively set, and in this embodiment, it extends to the end of the straight tube of the relatively short first catheter 41.

[0048] Reference Figure 3 and Figure 4 , the present application also discloses a vapor deposition system, which includes a wire feeding mechanism and an evaporation tank 1, in which a plurality of evaporation boats 11 and an electrode assembly for supplying power to the evaporation boats are arranged, which belongs to the existing conventional technology and will not be described in detail;

[0049] The wire feeding mechanism comprises the above-mentioned wire feeding guide tube assembly and a wire feeding assembly for providing metal wire;

[0050] A mounting seat 31 is provided on the side of the evaporation tank 1 corresponding to the evaporation boat 11 for installation of the wire feeding guide tube assembly; a fixing seat 32 is provided on both sides of the connection portion 43 (laterally), and the fixing seat 32 is closely attached to the side of the connection portion 43 and / or the guide tube when fixed to achieve the fixation of the assembly, such as by clamping the screw / nut penetrating the fixing seat 32 (or penetrating the connection portion 43 at the same time) on both sides of the plate-shaped connection portion 43 for fastening, and of course, it can also be directly welded and fixed, and the fixing seat 32 can be fixed on the mounting seat 31 or integrally formed with the mounting seat, and the assembly size is well controlled;

[0051] The wire feeding assembly is at least arranged on one side of the evaporation boat 11. The above-mentioned wire feeding assembly is similar to the structure in the prior art, and includes (one by one) a wire feeding disc 2 corresponding to each conduit. The wire feeding disc 2 is driven to rotate by a driving component such as a motor, so that the metal wire is unwound from the wire feeding disc 2, (or) is input into the tube body after being guided by a pressure wheel roller.

[0052] The evaporation boat can be a conventional length evaporation boat (such as 10-15 cm), and is also applicable to an extended evaporation boat size (such as 15-35 cm); of course, it is also applicable to the existing conventional double-row evaporation boat evaporation system.

[0053] In addition, a vacuum coating device is also disclosed, comprising the above-mentioned evaporation system.

[0054] Further references Figure 5The main difference is that the connecting portion 43 is adaptively set to correspond to the length of the first conduit 41 and the second conduit 42; during assembly, since the end of the conduit is arranged in an arc shape, it is preferred to appropriately extend the length of the upper conduit to avoid interference between the metal wires. At this time, the upper length of the connecting portion 43 matches the second conduit 42 and is appropriately lengthened.

[0055] Of course, the connecting portion 43 may further extend to the arc-shaped curved end of the catheter.

[0056] That is, the length of the constrained fit between the conduits is adapted to the total length of the corresponding tube body, and is preferably not greater than the total length of the tube body.

[0057] Reference Figure 6 , the cross-sectional dimensions of the conduit in the assembly correspond to the increased wall thickness in the normal plane direction of the evaporation boat 11 (different from the conduit structure with uniform wall thickness), that is, the direction of the major axis b of the cross section in the figure (the longest contour diameter of the cross section). At this time, while ensuring that the pipe diameter remains unchanged, the requirements for the horizontal wall thickness are relatively low, so the horizontal wall thickness can be further shortened, that is, the direction of the minor axis a in the figure; satisfying b / a greater than or equal to 1 (when equal to 1, it is a circular pipeline), preferably greater than or equal to 1.2. On the one hand, increasing the length of the major axis can cooperate with the connecting portion 43 to further improve the mechanical strength. On the other hand, the minimum width a can be appropriately shortened, thereby further reducing obstruction. In addition, the above-mentioned special-shaped conduit cross section rotated along the center by a certain angle is still within the protection scope of the present application.

[0058] The wire feeding duct structure in this application is applicable to both conventional single-side wire feeding evaporation boats and double-side wire feeding evaporation boats. Other structures and connection relationships not described in detail are all prior art, and their structures and principles are well-known technologies, which will not be described in detail here.

[0059] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0060] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A vapor deposition wire feeding duct assembly, comprising at least two sets of wire feeding ducts, characterized in that: The conduits are directly or indirectly constrained to each other, and the projection length of the entire conduit assembly in the horizontal direction is ≤nL, where L represents the maximum outer contour width of the conduit cross section and n represents the number of wire feeding conduits.

2. The vapor deposition wire feeding duct assembly according to claim 1, characterized in that: Adjacent wire feeding ducts are indirectly fixed by providing a connecting portion, and / or adjacent wire feeding ducts are directly fixed.

3. The vapor deposition wire feeding duct assembly according to claim 2, characterized in that: The included angle α between the central axis of the conduit assembly and the normal plane of the evaporation boat is ≤5°.

4. The vapor deposition wire feeding duct assembly according to claim 3, characterized in that: Adjacent wire feeding ducts are connected by a plate-shaped connecting portion; the maximum cross-sectional thickness of the connecting portion is less than or equal to the maximum outer contour width of the cross-sectional area of ​​the corresponding duct.

5. The vapor deposition wire feeding duct assembly according to any one of claims 2 to 4, characterized in that: The length of the restrained fit between the conduits is adapted to the total length of the corresponding tube body.

6. The vapor deposition wire feeding duct assembly according to claim 5, characterized in that: The length of the restraint fit between the conduits is not greater than the total length of the conduit body.

7. The vapor deposition wire feeding duct assembly according to any one of claims 1 to 4 and 6, characterized in that: The wall thickness corresponding to the cross section of the conduit is uniform, and the longest contour diameter dimension of the corresponding cross section is b, and the shortest contour diameter dimension is a, satisfying b=a; And / or, the wall thickness of the cross section of the conduit increases in the direction toward the normal plane of the evaporation boat, and the corresponding longest contour diameter dimension of the cross section is b, and the shortest contour diameter dimension is a, satisfying b>a.

8. The vapor deposition wire feeding duct assembly according to claim 7, characterized in that: The longest contour diameter dimension b and the shortest contour diameter dimension a of the wire feeding guide cross section satisfy b / a≥1.

2.

9. A double-sided wire feeding evaporation system, comprising a wire feeding mechanism and an evaporation tank, wherein a plurality of evaporation boats and an electrode assembly for supplying power to the evaporation boats are arranged in the evaporation tank, characterized in that: The wire feeding mechanism comprises the wire feeding guide tube assembly according to claim 8, and a wire feeding assembly for providing a metal wire; The evaporation boat is arranged in a single row or a double row; and the wire feeding assembly is at least arranged on one side of the evaporation boat.

10. A vacuum evaporation device, characterized in that: It includes the double-sided wire feeding evaporation system as described in claim 9.

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