Thin film salient point detection device

Abstract

The utility model discloses a film bump detection device, which belongs to the technical field of film detection and comprises a supporting plate and a blocking piece, a channel for a film to pass through is formed between the blocking piece and the supporting plate, and the channel has a preset maximum height, forms rigid contact with a film bump and generates extrusion so as to generate tearing force on the film in the horizontal direction. And a tearing opening is formed in the film and serves as a salient point judgment basis. According to the thin film salient point detection device, the channel with the preset height is set to limit the overall thickness of the thin film, so that a tearing opening is formed at the salient point, and the salient point can be identified conveniently.

Description

Technical Field

[0001] The utility model relates to the technical field of film detection, in particular to a film convex point detection device. Background Art

[0002] For thin film products using vacuum evaporation, such as metal targets based on polymer films as carriers, the commonly used coating equipment is a vacuum coating machine. The vacuum coating machine is equipped with a wire feeding mechanism and an evaporation boat. The wire feeding mechanism transports the linear target material to the surface of the evaporation boat through a conduit. Under the high temperature generated by the evaporation mechanism, the metal is evaporated into a gaseous state and coated on the plastic film.

[0003] During the vapor deposition process, as the evaporation boat heats the molten metal wire, raised point defects are inevitable. If the raised points are too high, they will seriously affect the quality and safety of subsequent products when used in batteries.

[0004] Therefore, in actual production, it is necessary to conduct random inspections on the film samples off the machine to ensure the qualified rate. In the prior art, there is a substrate bump detection device based on a height sensor, but it is not suitable for film products with a larger width, and the detection cost is high, which needs further improvement. Utility Model Content

[0005] The utility model aims to solve one of the technical problems in the related art at least to a certain extent. To this end, one purpose of the utility model is to provide a film bump detection device, which sets a channel of a preset height to limit the overall thickness of the film, thereby generating a tear at the bump, thereby facilitating the identification of the bump site.

[0006] The technical solution of the utility model is as follows:

[0007] A film convex point detection device includes a support plate and a blocking member, wherein a channel for the film to pass is formed between the blocking member and the support plate, and the channel has a preset maximum height, and forms a rigid contact with the film convex points to generate extrusion, so as to generate a horizontal tearing force on the film, thereby generating a tear on the film as a basis for convex point judgment.

[0008] Based on the above technical solution, it can be quickly determined whether the film meets the production requirements.

[0009] Furthermore, an adjustment mechanism is included for adjusting the channel height to adapt to different bump height requirements.

[0010] Based on the above technical solution, it can adapt to different product requirements.

[0011] Furthermore, the adjustment mechanism includes a slide rail assembly, the slide rail assembly includes a slider that is displaceable in height, and the blocking member is connected to the slider; the adjustment mechanism also includes a height adjustment mechanism for driving the slider to move to a specific height and limiting the position of the slider.

[0012] Based on the above technical solution, the height of the blocking member can be easily adjusted.

[0013] Further, the blocking member is configured to be rod-shaped.

[0014] Based on the above technical solution, it can be adapted to the measurement of thin film samples with a large width.

[0015] Furthermore, the slide rail assembly also includes a guide rail that slidably cooperates with the slider, and the guide rail is assembled on the end side of the support plate.

[0016] Based on the above technical solution, the position of the guide rails can be reasonably arranged to form a larger width.

[0017] Furthermore, the height adjustment mechanism is configured as a micrometer screw, an assembly rod is installed on the side of the guide rail, and the height adjustment mechanism is installed on the assembly rod; the movable end of the height adjustment structure abuts against a constraint seat installed on the slider to accurately limit the detection height of the blocking member.

[0018] Based on the above technical solution, the movable height of the slider can be precisely controlled and limited, thereby precisely controlling the distance of the formed channel.

[0019] Furthermore, a locking structure is provided corresponding to the slider to keep the slider in position and locked.

[0020] Based on the above technical solution, the blocking member can be positioned.

[0021] Furthermore, the locking structure includes a positioning plate fixedly connected to the side of the guide rail, and a locking member connected to the slider is provided, and the locking member limits the positioning plate to be pressed against the side of the slider.

[0022] Based on the above technical solution, the slider can be positioned and locked to control the height of the channel.

[0023] Furthermore, an adjustment groove is provided in the positioning plate corresponding to the slider, and the locking member includes a locking column abutting against the outer end surface of the positioning plate, and a locking screw is connected to the center position of the end side of the locking column. The screw passes through the adjustment groove to form a threaded connection with the slider, so that the locking column can abut against the outer side of the positioning plate.

[0024] Based on the above technical solution, the positioning plate can be conveniently locked.

[0025] Furthermore, a gasket is sleeved on the screw rod, and the outer diameter of the gasket is greater than the groove width of the adjusting groove.

[0026] Based on the above technical solution, the limiting and fastening effect of the positioning plate can be further enhanced. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0028] Figure 1 A top view schematic diagram of the arrangement of an evaporation boat for a thin film bump detection device;

[0029] Figure 2 Figure 1 A partial enlarged view of the middle A;

[0030] Figure 3 for Figure 2 a side view from the middle left perspective, wherein the blocking member and the support plate are omitted;

[0031] Figure 4 for Figure 3 The schematic diagram of the height adjustment mechanism is omitted;

[0032] Figure 5 for Figure 2 Side view from the middle right perspective, with the locking structure omitted;

[0033] Figure 6 for Figure 2 Side view from center right perspective;

[0034] Figure 7 It is a schematic diagram of the film passing through the gap when the blocking member cooperates with the support plate.

[0035] In the figure:

[0036] 1-support plate; 2-base; 21-connecting seat; 3-slide rail assembly; 31-guide rail; 32-slider; 4-height adjustment mechanism; 41-assembly rod; 42-restraint seat; 5-locking structure; 51-positioning plate; 511-adjusting slot; 52-locking piece; 521-locking column; 522-gasket; 523-screw; 6-blocking piece; 61-mounting seat. DETAILED DESCRIPTION

[0037] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0038] Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0039] Reference Figure 1 and Figure 2 A device for detecting convex points of a thin film comprises a support plate 1 and a blocking member 6. A channel for the thin film to pass through is formed between the blocking member 6 and the support plate 1. The channel forms a rigid contact with the convex points of the thin film and generates extrusion to generate a horizontal tearing force on the thin film (conductive film), thereby generating a tear on the thin film as a basis for determining the convex points.

[0040] It also includes an adjustment mechanism for adjusting the channel height to meet different bump height requirements.

[0041] Further references Figure 3-4 The adjusting mechanism includes a slide rail assembly 3, which includes a slider 32 that is displaceable in height. At the same time, the adjusting mechanism also includes a height adjustment mechanism 4 for driving the slider 32 to move to a specific height and limiting the slider 32.

[0042] In this embodiment, the blocking member 6 is configured as a rod, which is fixed by a mounting seat 61 connected to the slider 32; the slide rail assembly also includes a guide rail 31 that is slidably matched with the slider 32, and the guide rail 31 is assembled on the end side of the support plate 1, and the adjustment mechanism is connected to the slider 32 to achieve sliding adjustment in height; in this embodiment, an (L-shaped) base 2 is installed on both ends of the support plate 1, and the base 2 is fixed to the guide rail 31 (screwed) in the vertical direction through the connecting seat 21;

[0043] In addition, an assembly rod 41 is installed on the side of the fixed guide rail 31 for fixing the height adjustment structure 4; in this embodiment, the height adjustment structure 4 is set as a micrometer screw, and the end (screwed) is fixed on the assembly rod 41; the movable end of the height adjustment structure 4 abuts against the constraint seat 42 installed on the slider 32 to accurately limit the detection height of the blocking member 6. Of course, the height adjustment structure can also be set with other structures that adjust the stroke of the slider 32 and cooperate with the constraint to achieve the limited distance, such as a screw guide rail structure, a cylinder, an electric push rod, etc.

[0044] At this time, the maximum height of the channel formed between the blocking member 6 and the support plate 1 is limited (the height can be accurately measured by a feeler gauge). At this time, the blocking member 6 can be made of a lightweight hard material, such as a hollow steel pipe; Figure 7 When the conductive film with bumps passes through, when the bumps with lower height pass through the blocking member 6, the blocking member 6 still has room for movement, so they can pass through smoothly and are not prone to tearing; the bumps higher than the channel height cannot pass through the blocking member 6 smoothly, so a tearing effect will occur.

[0045] Reference Figure 1-2 , 5-6, considering positioning the blocking member 6, a locking structure 5 is provided corresponding to the slider 32, which is used to keep the slider 32 in position and locked; in this example, the locking structure 5 includes a positioning plate 51 fixedly connected to the side of the guide rail 31, the positioning plate 51 is provided with an adjustment groove 511 corresponding to the slider 32, a locking member 52 connected to the slider 32 is provided corresponding to the adjustment groove 511, and the locking member 52 includes a locking column 521 against the outer end surface of the positioning plate 51, and a locking screw 523 is connected to the center position of the end side of the locking column 521, which forms a threaded connection with the slider 32, so that the locking column 521 can be against the outer side of the positioning plate 51 and apply pressure, thereby preventing the slider 32 from slipping. Obviously, the outer diameter of the locking column 521 is larger than the groove width of the adjustment groove 511.

[0046] A gasket 522 is also sleeved on the screw rod 523 , and the outer diameter of the gasket 522 is also larger than the groove width of the adjustment groove 522 to increase the contact pressure and friction force.

[0047] In the present application, other structures and connection relationships not described in detail are all prior arts, and their structures and principles are well-known technologies and will not be described in detail here.

[0048] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0049] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A thin film bump detection device, characterized in that: It includes a support plate and a blocking member, wherein a channel for the film to pass is formed between the blocking member and the support plate. The channel has a preset maximum height, forms a rigid contact with the convex points of the film, generates extrusion, and generates a horizontal tearing force on the film, thereby generating a tear on the film, which serves as a basis for determining the convex points.

2. The thin film bump detection device according to claim 1, characterized in that: It also includes an adjustment mechanism for adjusting the channel height to meet different bump height requirements.

3. The thin film bump detection device according to claim 2, characterized in that: The adjusting mechanism includes a slide rail assembly, which includes a slider that can be displaced in height, and a blocking member is connected to the slider; the adjusting mechanism also includes a height adjustment mechanism for driving the slider to move to a specific height and limiting the position of the slider.

4. The thin film bump detection device according to claim 3, characterized in that: The blocking member is configured in a rod shape.

5. The thin film bump detection device according to claim 3, characterized in that: The slide rail assembly also includes a guide rail that is slidably matched with the slider, and the guide rail is assembled on the end side of the support plate.

6. The thin film bump detection device according to claim 5, characterized in that: The height adjustment mechanism is set as a micrometer screw rod, and an assembly rod is installed on the side of the guide rail, and the height adjustment mechanism is installed on the assembly rod; the movable end of the height adjustment structure abuts against a constraint seat installed on the slide to accurately limit the detection height of the blocking member.

7. The thin film bump detection device according to any one of claims 3 to 6, characterized in that: A locking structure is provided corresponding to the slider to keep the slider in position and locked.

8. The thin film bump detection device according to claim 7, characterized in that: The locking structure includes a positioning plate fixedly connected to the side of the guide rail, and a locking member connected to the slider is provided, and the locking member limits the positioning plate to abut against the side of the slider.

9. The thin film bump detection device according to claim 8, characterized in that: An adjustment groove is formed on the positioning plate corresponding to the slider. The locking part includes a locking column that abuts against the outer end surface of the positioning plate. The center position of the end side of the locking column is connected to a locking screw. The screw passes through the adjustment groove to form a threaded connection with the slider, so that the locking column can abut against the outer side of the positioning plate.

10. The thin film bump detection device according to claim 9, characterized in that: A gasket is also sleeved on the screw rod, and the outer diameter of the gasket is larger than the groove width of the adjusting groove.

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