Line width scanning electron microscope sample stage

Abstract

The utility model discloses a line width scanning electron microscope sample stage, and relates to the technical field of sample stages. The sample table comprises a sample table body, an adjusting assembly is fixedly installed in an inner cavity of the sample table body, a positioning assembly is fixedly installed in the middle of the adjusting assembly, and a circuit board is arranged at the position, located at the top of the sample table body, of the axis of the positioning assembly. According to the utility model, the four corners of the positioning assembly are driven to move and approach each other to enable the positioning assembly to synchronously position the circuit board on the central axis of the positioning assembly, so that the problem that the circuit board is inaccurately scanned by the electron microscope due to dislocation caused by vibration of the line width scanning electron microscope during the working period of the line width scanning electron microscope is prevented; and the problems that the position of the circuit board relative to the sample table is changed due to the fact that the circuit board cannot be limited, and errors are generated when the electron microscope scans the circuit board are solved.

Description

Technical Field

[0001] The utility model belongs to the technical field of sample stages, and in particular relates to a line width scanning electron microscope sample stage. Background Art

[0002] Line width measurement equipment is used in the integrated circuit manufacturing process to measure the strip width after active area lithography, polycrystalline lithography, contact hole lithography, metal lithography and other lithography layer processing, as well as the strip width measurement after active area etching, polycrystalline etching, contact hole etching, metal etching and other etching layers, to meet the product production quality control requirements and ultimately ensure the yield and reliability of the product.

[0003] In the existing linewidth scanning electron microscope sample stage, when the integrated circuit board is placed on the sample stage, deviation is easy to occur, and because the linewidth scanning electron microscope still has a small vibration when working, the integrated circuit board will be slightly misaligned with respect to the sample stage, and angle cutting problems will occur. As a result, during the process of the electron microscope performing linewidth scanning of the circuit board, the position of the circuit board relative to the sample stage changes, resulting in errors in the electron microscope's scanning of the circuit board, thereby reducing the usability of the linewidth scanning electron microscope sample stage.

[0004] Currently, no effective solution has been proposed for the problems in the related technologies. Utility Model Content

[0005] In view of the problems in the related art, the utility model proposes a line width scanning electron microscope sample stage to overcome the above technical problems existing in the existing related art.

[0006] In order to solve the above technical problems, the utility model is realized by the following technical solutions:

[0007] The utility model discloses a line width scanning electron microscope sample stage, comprising a sample stage body, an adjustment component is fixedly installed in the inner cavity of the sample stage body, a positioning component is fixedly installed in the middle of the adjustment component, and a circuit board is arranged at the axis of the positioning component and at the top of the sample stage body.

[0008] Furthermore, the adjustment assembly includes two support frames, and the two support frames are respectively fixedly installed in the inner cavity of the sample table body, and the two support frames are respectively fixedly installed with synchronous wheels, and synchronous belts are rotatably installed on the circumferential surfaces of the two synchronous wheels, and an adjustment rod is fixedly installed on one of the two synchronous wheels, and an adjustment block is fixedly installed on the other end of the adjustment rod.

[0009] Furthermore, the positioning assembly includes four positioning blocks, the positioning blocks are slidably mounted on the synchronous belt, and rotating rods are rotatably mounted on one end of the four positioning blocks close to each other, and the four rotating rods are rotatably mounted on the rotating blocks respectively.

[0010] Furthermore, the rotating block is rotatably mounted at the bottom of the inner cavity of the sample stage body, a telescopic rod is fixedly mounted between any mutually symmetrical positioning blocks, and a positioning groove is formed at one end of the positioning block close to the circuit board.

[0011] Furthermore, the adjustment block is located outside the sample stage body.

[0012] Furthermore, a sliding groove for sliding installation with four positioning blocks is provided inside the sample stage body, and the four rotating rods are all arranged in an L shape.

[0013] The utility model has the following beneficial effects:

[0014] 1. The utility model drives the four corners of the positioning assembly to move closer to each other so that the positioning assembly can synchronously position the circuit board on its central axis, thereby preventing the line width scanning electron microscope from being dislocated due to the vibration of the line width scanning electron microscope during operation, thereby causing the electron microscope to scan the circuit board inaccurately, and avoiding the problem that the position of the circuit board relative to the sample stage changes due to the inability to limit the circuit board, thereby causing errors in the scanning of the circuit board by the electron microscope.

[0015] 2. The utility model allows the operator to manually rotate the adjustment component to move, and then the adjustment component will drive the positioning component and the circuit board in the positioning component to move until the circuit board is adjusted to the position to be measured, thereby solving the cumbersome steps of not having to take down the circuit board separately and then placing the circuit board on the sample stage body for measurement, thereby greatly increasing the usability of the line width scanning electron microscope sample stage.

[0016] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the utility model embodiments, the drawings required for describing the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0018] Figure 1 This is a three-dimensional structural diagram of the utility model;

[0019] Figure 2 This is a schematic diagram of a positioning component of the utility model;

[0020] Figure 3 It is a schematic diagram of the rotating rod of the utility model;

[0021] Figure 4 It is a schematic diagram of the telescopic rod of the utility model;

[0022] Figure 5 It is a schematic diagram of the support frame of the utility model;

[0023] Figure 6 It is a schematic diagram of the positioning groove of the utility model.

[0024] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0025] 1. Sample stage body; 101. Sliding groove; 2. Adjustment assembly; 201. Support frame; 202. Synchronous wheel; 203. Synchronous belt; 204. Adjustment rod; 205. Adjustment block; 3. Positioning assembly; 301. Positioning block; 302. Rotating rod; 303. Rotating block; 304. Telescopic rod; 305. Positioning groove; 4. Circuit board. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the utility model embodiments to clearly and completely describe the technical solutions in the utility model embodiments. Obviously, the described embodiments are only part of the utility model embodiments, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] In the description of the present utility model, it should be understood that the terms "opening", "upper", "lower", "top", "middle", "inside" and the like indicating orientation or positional relationship are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model.

[0028] See also Figure 1-Figure 6 As shown, the utility model is a linewidth scanning electron microscope sample stage, including a sample stage body 1, an adjustment component 2 is fixedly installed in the inner cavity of the sample stage body 1, a positioning component 3 is fixedly installed in the middle of the adjustment component 2, and a circuit board 4 is arranged at the axis of the positioning component 3 and on the top of the sample stage body 1.

[0029] First, place the sample stage body 1 into the line width measurement equipment, and then place the circuit board 4 on the sample stage body 1 and position it at the central axis of the positioning component 3. After determining the position of the circuit board 4, drive the four corners of the positioning component 2 to move closer to each other, and synchronously position the four corners of the circuit board 4 on its central axis to prevent the line width scanning electron microscope from being dislocated due to the vibration of the line width scanning electron microscope during operation. The electron microscope can then measure the line width on the circuit board 4. When the electron microscope needs to scan other line width positions of the circuit board 4, the operator can directly rotate the adjustment component 2 by hand, and the adjustment component 2 will drive the positioning component 3 fixed thereon to move. Since the circuit board 4 is now located in the limit positioning of the positioning component 2, the positioning component 3 will drive the circuit board 4 to move at the same time. After moving to the desired position, the electron microscope can measure the line width on the circuit board 4 again. This method does not require the tedious steps of taking down the circuit board 4 separately and placing it back on the sample stage body 1 for measurement.

[0030] Thus, by driving the four corners of the positioning component 2 to move closer to each other, the positioning component 3 can synchronously position the circuit board 4 on its central axis, thereby preventing the line width scanning electron microscope from being dislocated due to the vibration of the line width scanning electron microscope during operation, thereby causing inaccurate scanning of the circuit board 4 by the electron microscope, and avoiding the problem that the position of the circuit board relative to the sample stage changes due to the inability to limit the circuit board 4, thereby causing errors in the scanning of the circuit board by the electron microscope.

[0031] Therefore, the operator can manually rotate the adjustment component 2 to move it, and then the adjustment component 2 will drive the positioning component 2 and the circuit board 4 in the positioning component 2 to move, until the circuit board 4 is adjusted to the position to be measured, thereby solving the tedious steps of not having to take down the circuit board 4 separately and then placing the circuit board 4 on the sample stage body 1 for measurement, thereby greatly increasing the usability of the linewidth scanning electron microscope sample stage.

[0032] In one embodiment, for the above-mentioned adjustment component 2, the adjustment component 2 includes two support frames 201, and the two support frames 201 are respectively fixedly installed in the inner cavity of the sample stage body 1, and the two support frames 201 are respectively fixedly installed with synchronous wheels 202, and synchronous belts 203 are rotatably installed on the circumferential surfaces of the two synchronous wheels 202. One of the two synchronous wheels 202 is fixedly installed with an adjustment rod 204, and the other end of the adjustment rod 204 is fixedly installed with an adjustment block 205.

[0033] When the electron microscope needs to scan other line width positions of the circuit board 4, the operator can directly rotate the adjustment block 205 by hand, and then the adjustment block 205 will drive the adjustment rod 204 to rotate. At the same time, the adjustment rod 204 will drive the fixed synchronous wheel 202 to rotate. Since the synchronous wheel 202 and the synchronous belt 203 are rotatably installed, the two synchronous wheels 202 will then synchronously move the synchronous belt 203 under the support of the support frame 201, and then the synchronous belt 203 will drive the positioning component 3 fixed thereon to move. At the same time, the positioning component 3 will drive the circuit board 4 to move. After moving to the desired position, the electron microscope can measure the line width on the circuit board 4 again. This method does not require the tedious steps of taking the circuit board 4 down separately and placing it back on the sample stage body 1 for measurement.

[0034] Therefore, the operator can directly rotate the adjustment block 205 by hand, and then the adjustment block 205 drives the adjustment rod 204 to rotate. The rotation of the adjustment rod 204 will move the synchronous belt 203, and then the synchronous belt 203 drives the circuit board 4 in the positioning component 3 to move, thereby changing the position of the circuit board 4. By adjusting the position of the circuit board 4 in this way, the tedious steps of taking down the circuit board 4 separately and then placing the circuit board 4 on the sample stage body 1 for measurement are solved, which greatly increases the usability of the line width scanning electron microscope sample stage.

[0035] In one embodiment, for the above-mentioned positioning assembly 3, the positioning assembly 3 includes four positioning blocks 301, and the positioning blocks 301 are slidably installed on the synchronous belt 203. The ends of the four positioning blocks 301 close to each other are rotatably installed with rotating rods 302, and the four rotating rods 302 are rotatably installed on the rotating blocks 303 respectively.

[0036] The rotating block 303 is rotatably mounted at the bottom of the inner cavity of the sample stage body 1 , and a telescopic rod 304 is fixedly mounted between any mutually symmetrical positioning blocks 301 . A positioning groove 305 is formed at one end of the positioning block 301 close to the circuit board 4 .

[0037] First, place the sample stage body 1 into the line width measurement equipment, and then place the circuit board 4 on the sample stage body 1 and at the central axis of the positioning assembly 3. After determining the position of the circuit board 4, drive the telescopic rod 304 to drive the two positioning blocks 301 fixed thereto to move, and then the two positioning blocks 301 will respectively drive the rotating rod 302 rotatably mounted thereto to rotate, and then the rotating rod 302 will drive the rotating block 303 rotatably mounted thereto to rotate. Since the four rotating rods 302 are respectively rotatably mounted on the rotating block 303, the rotation of the rotating block 303 will simultaneously drive the four rotating rods 302 to rotate, and the rotating rods 302 will respectively drive their respective positioning blocks 301 to move closer to each other, until the four positioning blocks 301 move to the four corners of the circuit board 4 at the same time, and make the circuit board 4 completely enter the positioning groove 305 restricted thereto, at this time, stop the telescopic rod 304 from pushing the two positioning blocks 301, so as to prevent the line width scanning electron microscope from being dislocated due to the vibration of the line width scanning electron microscope during operation.

[0038] By driving any two symmetrical positioning blocks 301 to move through the telescopic rod 304, the positioning blocks 301 will respectively drive the rotating rod 302 on each of them to rotate, and the rotating rod 302 will drive the rotating block 303 to rotate, and the rotating block 303 will drive the four rotating rods 302 to rotate, and the rotating rods 302 will respectively drive their respective positioning blocks 301 to move closer to each other, and then the four positioning blocks 301 will move simultaneously to position the circuit board 4 synchronously, and make the circuit board 4 completely enter the positioning groove 305 restricted to prevent the line width scanning electron microscope from being dislocated due to the vibration of the line width scanning electron microscope during operation, thereby causing the electron microscope to scan the circuit board 4 inaccurately, and avoiding the problem of the circuit board being unable to be limited due to the change in the position of the circuit board relative to the sample stage, thereby causing the electron microscope to scan the circuit board with errors.

[0039] In one embodiment, for the above-mentioned adjustment block 205 , the adjustment block 205 is located outside the sample stage body 1 .

[0040] In one embodiment, for the sample stage body 1 described above, a sliding groove 101 is provided inside the sample stage body 1 to form a sliding installation with four positioning blocks 301 , and the four rotating rods 302 are all arranged in an L shape.

[0041] During the movement of the positioning blocks 301 , the sliding grooves 101 guide the positioning blocks 301 and enable the four positioning blocks 301 to move the same distance.

[0042] In summary, with the aid of the above-mentioned technical scheme of the utility model, by first placing the sample stage body 1 into the line width measuring device, and then placing the circuit board 4 onto the sample stage body 1 and at the central axis of the positioning assembly 3, after determining the position of the circuit board 4, the telescopic rod 304 is then driven to drive the two positioning blocks 301 to move, and then the two positioning blocks 301 will respectively drive the rotating rod 302 to rotate, and then the rotating rod 302 will drive the rotating block 303 to rotate. Since the four rotating rods 302 are respectively rotatably mounted on the rotating blocks 303, the rotation of the rotating block 303 will simultaneously drive the four rotating rods 302 to rotate, and the rotating rods 302 will respectively drive their respective positioning blocks 301 to move closer to each other, until the four positioning blocks 301 simultaneously move to the four corners of the circuit board 4, and make the circuit board 4 completely enter the positioning groove 305 restricted, and then stop. The telescopic rod 304 can push the two positioning blocks 301 to prevent the line width scanning electron microscope from being misaligned due to the vibration of the line width scanning electron microscope during operation. When the electron microscope needs to scan other line width positions of the circuit board 4, the operator can directly rotate the adjustment block 205 by hand, and then the adjustment block 205 will drive the adjustment rod 204 to rotate. At the same time, the adjustment rod 204 will drive the synchronous wheel 202 to rotate. Then the two synchronous wheels 202 will synchronously move the synchronous belt 203 under the support of the support frame 201, and then the synchronous belt 203 will drive the rotating block 303 to move. At the same time, the rotating block 303 will drive the circuit board 4 to move. After moving to the desired position, the electron microscope can measure the line width on the circuit board 4 again. This method does not require the tedious steps of taking the circuit board 4 down separately and placing it on the sample stage body 1 for measurement.

[0043] Through the above technical solution, 1. any two symmetrical positioning blocks 301 are driven to move by the telescopic rod 304, and the positioning blocks 301 will respectively drive the rotating rod 302 on each of them to rotate, and the rotating rod 302 will drive the rotating block 303 to rotate, and the rotating block 303 will drive the four rotating rods 302 to rotate, and the rotating rods 302 will respectively drive their respective positioning blocks 301 to move closer to each other, and then the four positioning blocks 301 will move simultaneously to position the circuit board 4 synchronously, and make the circuit board 4 completely enter the positioning groove 305 restricted to prevent the line width scanning electron microscope from being dislocated due to the vibration of the line width scanning electron microscope during operation, thereby causing the electron microscope to scan the circuit board 4 inaccurately, and avoiding the problem of the circuit board being unable to be limited due to the change in the position of the circuit board relative to the sample stage, thereby causing the electron microscope to scan the circuit board with errors.

[0044] 2. The operator can directly rotate the adjustment block 205 by hand, and then the adjustment block 205 drives the adjustment rod 204 to rotate. The rotation of the adjustment rod 204 will move the synchronous belt 203, and then the synchronous belt 203 drives the circuit board 4 in the positioning component 3 to move, thereby changing the position of the circuit board 4. By adjusting the position of the circuit board 4 in this way, the tedious steps of taking down the circuit board 4 separately and then placing the circuit board 4 on the sample stage body 1 for measurement are solved, which greatly increases the usability of the line width scanning electron microscope sample stage.

[0045] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0046] The preferred embodiments of the utility model disclosed above are only used to help explain the utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the utility model to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can well understand and use the utility model. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A linewidth scanning electron microscope sample stage, comprising a sample stage body (1), characterized in that: An adjustment component (2) is fixedly installed in the inner cavity of the sample stage body (1), a positioning component (3) is fixedly installed in the middle of the adjustment component (2), and a circuit board (4) is arranged at the axis of the positioning component (3) and at the top of the sample stage body (1); The adjustment assembly (2) comprises two support frames (201), the two support frames (201) are respectively fixedly mounted in the inner cavity of the sample stage body (1), the two support frames (201) are respectively fixedly mounted with a synchronous wheel (202), a synchronous belt (203) is rotatably mounted on the circumferential surface of the two synchronous wheels (202), an adjustment rod (204) is fixedly mounted on one of the two synchronous wheels (202), and an adjustment block (205) is fixedly mounted on the other end of the adjustment rod (204); The positioning assembly (3) comprises four positioning blocks (301), wherein the positioning blocks (301) are slidably mounted on a synchronous belt (203), and a rotating rod (302) is rotatably mounted on one end of the four positioning blocks (301) close to each other, and the four rotating rods (302) are rotatably mounted on the rotating blocks (303) respectively.

2. A line width scanning electron microscope sample stage according to claim 1, characterized in that: The rotating block (303) is rotatably mounted at the bottom of the inner cavity of the sample stage body (1), and a telescopic rod (304) is fixedly mounted between any mutually symmetrical positioning blocks (301). A positioning groove (305) is provided at one end of the positioning block (301) close to the circuit board (4).

3. A line width scanning electron microscope sample stage according to claim 2, characterized in that: The adjustment block (205) is located outside the sample stage body (1).

4. A line width scanning electron microscope sample stage according to claim 3, characterized in that: The sample stage body (1) is provided with a sliding groove (101) for slidingly mounting with four positioning blocks (301), and the four rotating rods (302) are all arranged in an L shape.

Images