Photoresist spraying mechanism of semiconductor gluing equipment

Abstract

The utility model relates to a photoresist spraying mechanism of semiconductor gluing equipment, which aims at solving the technical problem that the photoresist spraying mechanism of the current semiconductor gluing equipment is inconvenient to replace a photoresist spraying head, and comprises a mounting head, one end of the mounting head is connected with a mounting disc through a communicating pipe, a locking bolt is arranged in the middle of the mounting disc, and the locking bolt is connected with the mounting head through a connecting pipe. A glue inlet hole is formed in one side of the installation disc, a sealing ring is installed at the other end of the glue inlet hole, the bottom of the installation disc is connected with a sealing ring through a sealing groove, the other end of the sealing ring is fixedly connected with a rotary disc, a threaded hole is formed in the middle of the rotary disc, and a plurality of through holes are further formed in the rotary disc. According to the photoresist spraying mechanism disclosed by the utility model, an operator does not need to disassemble, assemble and replace the photoresist spraying heads on the photoresist spraying mechanism, so that the convenience of replacing the photoresist spraying heads of the photoresist spraying mechanism is improved.

Description

Technical Field

[0001] The utility model relates to the field of spraying mechanisms, in particular to a photoresist spraying mechanism of semiconductor glue coating equipment. Background Art

[0002] Photoresist, also known as photoresist, refers to a thin film material that changes its solubility when exposed to ultraviolet light, electron beam, ion beam, X-ray, etc. The photoresist spray mechanism is a process test instrument used in the fields of physics, electronics and communication technology.

[0003] In the process of realizing the utility model, the inventor found that there are at least the following problems in the prior art that have not been solved: during use, when replacing the spray head of the photoresist spray mechanism of the traditional semiconductor coating equipment, the operator needs to first disassemble the original spray head before installing the spray head to be used on the installation head, which reduces the convenience of the photoresist spray mechanism when replacing the spray head. Therefore, it is necessary to design a new technical solution to solve it. Utility Model Content

[0004] The purpose of the utility model is to overcome the deficiencies of the prior art, meet actual needs, and provide a photoresist spraying mechanism for semiconductor glue coating equipment to solve the technical problem that the photoresist spraying mechanism of the current semiconductor glue coating equipment is inconvenient when replacing the glue spraying head.

[0005] In order to achieve the purpose of the utility model, the technical solution adopted by the utility model is: designing a photoresist spray mechanism of a semiconductor coating equipment, including a mounting head, a connecting pipe at one end of the mounting head is connected to a mounting disk, a locking bolt is installed in the middle of the mounting disk, a glue inlet hole is opened on one side of the mounting disk, a sealing ring is installed at the other end of the glue inlet hole, a sealing ring is connected to the bottom of the mounting disk through a sealing groove, the other end of the sealing ring is fixedly connected to a turntable, a threaded hole is opened in the middle of the turntable, and a plurality of through holes are also opened on the turntable, and the other ends of the plurality of through holes are sealed and connected to a plurality of glue spray heads with different glue outlet apertures.

[0006] Preferably, one end of the connecting pipe is sealedly connected to one end of the mounting plate and communicates with the interior of the glue inlet hole.

[0007] Preferably, the locking bolt passes through the interior of the mounting plate and is connected to the interior of the threaded hole via threads.

[0008] Preferably, the sealing ring is fixedly connected to the other end of the mounting plate and covers the periphery of the glue inlet hole, and the other end of the sealing ring is attached to one end of the rotating plate.

[0009] Preferably, the sealing groove is located inside the other end of the mounting plate, and the size of the sealing ring matches the size of the sealing groove and is rotatably connected to the inside thereof.

[0010] Preferably, the other end of the connecting pipe is fixedly connected to the output end of the electric push rod, the mounting end of the electric push rod is fixedly connected to the middle of the support frame, the other end of the support frame is slidably connected to the inside of the cross beam, and is connected to the outside of the first screw rod through a thread, both ends of the first screw rod are rotatably connected to the inside of the cross beam, one end of the cross beam is connected to the inside of the first longitudinal beam through the second screw rod, the other end of the cross beam is slidably connected to the inside of the second longitudinal beam through a mounting plate, one end of the mounting plate is fixedly connected to the first servo motor, the output end of the first servo motor is fixedly connected to one end of the first screw rod, one end of the first longitudinal beam is fixedly connected to the second servo motor, and the output end of the second servo motor is fixedly connected to one end of the second screw rod.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] The utility model combines the connecting pipe, the mounting plate, the locking bolt, the glue inlet hole, the sealing ring, the sealing groove, the sealing ring, the rotating disk and the threaded hole. When the photoresist spraying mechanism replaces the glue spraying heads with different apertures as required, the operator can directly loosen the locking bolt from the threaded hole, and then rotate the rotating disk in the sealing groove of the mounting plate through the limiting ring, so that the required glue spraying head is rotated to the same position as the connecting pipe, and then the locking bolt is tightened inside the threaded hole, so that the rotating disk is fixed, so that the operator does not need to disassemble and replace the glue spraying head on the photoresist spraying mechanism, thereby improving the convenience of the photoresist spraying mechanism when replacing the glue spraying head;

[0013] By adding a sealing ring around the glue inlet hole, the sealing between the mounting plate and the turntable can be increased, thereby avoiding the phenomenon of glue leakage at the connection between the mounting plate and the turntable. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the structure of the utility model;

[0015] Figure 2 It is a bottom view of the utility model;

[0016] Figure 3 This is a top view of the turntable of the utility model;

[0017] Figure 4 This is a bottom view of the installation plate of the utility model;

[0018] In the figure: 1, mounting head; 11, connecting pipe; 12, mounting plate; 13, locking bolt; 14, glue inlet hole; 15, sealing ring; 16, sealing groove; 17, sealing ring; 18, turntable; 19, threaded hole;

[0019] 20. through hole; 21. glue spray head; 22. electric push rod; 23. support frame; 24. crossbeam; 25. first screw rod; 26. second screw rod; 27. first longitudinal beam; 28. mounting plate; 29. ​​second longitudinal beam;

[0020] 3. The first servo motor;

[0021] 4. Second servo motor. DETAILED DESCRIPTION

[0022] The utility model is further described below in conjunction with the accompanying drawings and embodiments:

[0023] Embodiment 1: A photoresist spraying mechanism of a semiconductor coating device, see Figures 1 to 4 , including a mounting head 1, a connecting pipe 11 at one end of the mounting head 1 is connected to a mounting plate 12, one end of the connecting pipe 11 is sealedly connected to one end of the mounting plate 12 and communicates with the inside of the glue inlet hole 14, a locking bolt 13 is installed in the middle of the mounting plate 12, a glue inlet hole 14 is opened on one side of the mounting plate 12, a sealing ring 15 is installed at the other end of the glue inlet hole 14, a sealing ring 17 is connected to the bottom of the mounting plate 12 through a sealing groove 16, the other end of the sealing ring 17 is fixedly connected to a turntable 18, a threaded hole 19 is opened in the middle of the turntable 18, the locking bolt 13 passes through the inside of the mounting plate 12, and is connected to the inside of the threaded hole 19 through a thread, the sealing ring 15 is fixedly connected to the other end of the mounting plate 12 and covers the periphery of the glue inlet hole 14, the other end of the sealing ring 15 is fitted to one end of the turntable 18, and the sealing groove 16 is located at the other end of the mounting plate 12 Inside one end, the size of the sealing ring 17 matches the size of the sealing groove 16, and is rotatably connected thereto. A plurality of through holes 20 are also provided on the turntable 18, and a plurality of glue spray heads 21 with different glue discharge apertures are sealed and connected at the other ends of the plurality of through holes 20. When the photoresist spray mechanism replaces glue spray heads 21 with different apertures as needed, the operator can directly loosen the locking bolt 13 from the threaded hole 19, and then rotate the turntable 18 in the sealing groove 16 of the mounting plate 12 through the limiting ring, so that the required glue spray head 21 is rotated to the same position as the connecting pipe 11, and then the locking bolt 13 is tightened inside the threaded hole 19, so that the turntable 18 is fixed, so that the operator does not need to disassemble and replace the glue spray head 21 on the photoresist spray mechanism, thereby improving the convenience of the photoresist spray mechanism when replacing the glue spray head 21;

[0024] By adding a sealing ring 15 around the glue inlet hole 14 , the sealing between the mounting plate 12 and the rotating plate 18 can be increased, thereby avoiding the glue leakage at the connection between the mounting plate 12 and the rotating plate 18 .

[0025] For details, see Figure 1 and Figure 2 The other end of the connecting pipe 11 is fixedly connected to the output end of the electric push rod 22, and the mounting end of the electric push rod 22 is fixedly connected to the middle of the support frame 23. The other end of the support frame 23 is slidably connected to the inside of the cross beam 24, and is connected to the outside of the first screw rod 25 through a thread. The two ends of the first screw rod 25 are rotatably connected to the inside of the cross beam 24, and one end of the cross beam 24 is connected to the inside of the first longitudinal beam 27 through the second screw rod 26. The other end of the cross beam 24 is slidably connected to the inside of the second longitudinal beam 29 through the mounting plate 28. One end of the mounting plate 28 is fixedly connected to the first servo motor 3, and the output end of the first servo motor 3 is fixedly connected to one end of the first screw rod 25. One end of the first longitudinal beam 27 is fixedly connected to the second servo motor 4, and the output end of the second servo motor 4 is fixedly connected to one end of the second screw rod 26. When the glue spray head When the height of 21 needs to be adjusted, the electric push rod 22 will drive the glue spray head 21 on the installation head 1 to rise and fall, so as to achieve the height adjustment of the glue spray head 21. When the glue spray head 21 moves laterally, the first servo motor 3 will drive the first screw rod 25 to rotate inside the cross beam 24. At this time, the first screw rod 25 will drive the support frame 23 to move laterally, so as to achieve the adjustment of the lateral position of the glue spray head 21. When the glue spray head 21 needs to adjust its position longitudinally, the second servo motor 4 will drive the second screw rod 26 to rotate inside the first longitudinal beam 27, so that the second screw rod 26 drives the cross beam 24 to adjust inside the first longitudinal beam 27. At the same time, the other end of the cross beam 24 will drive the installation inside the second longitudinal beam 29 to move, so as to achieve the adjustment of the longitudinal position of the glue spray head 21.

[0026] In addition, the components designed in the present utility model are all universal standard parts or components known to technical personnel in the field. Their structures and principles can be known to technical personnel through technical manuals or through conventional experimental methods. They can be fully implemented by technical personnel in the field, and there is no need to elaborate. The content protected by the present utility model does not involve improvements to internal structures and methods.

[0027] The embodiments of the present invention disclose preferred embodiments, but are not limited thereto. A person skilled in the art can easily understand the spirit of the present invention based on the above embodiments and make different extensions and changes. However, as long as they do not deviate from the spirit of the present invention, they are all within the protection scope of the present invention.

Claims

1. A photoresist spraying mechanism of a semiconductor coating device, comprising a mounting head (1), characterized in that: A connecting pipe (11) at one end of the mounting head (1) is connected to a mounting plate (12), a locking bolt (13) is installed in the middle of the mounting plate (12), a glue inlet hole (14) is provided on one side of the mounting plate (12), a sealing ring (15) is installed at the other end of the glue inlet hole (14), a sealing ring (17) is connected to the bottom of the mounting plate (12) through a sealing groove (16), the other end of the sealing ring (17) is fixedly connected to a rotating plate (18), a threaded hole (19) is provided in the middle of the rotating plate (18), a plurality of through holes (20) are also provided on the rotating plate (18), and a plurality of glue spray heads (21) with different glue outlet apertures are sealed at the other ends of the plurality of through holes (20).

2. A photoresist spraying mechanism for semiconductor coating equipment as claimed in claim 1, characterized in that: One end of the connecting pipe (11) is sealedly connected to one end of the mounting plate (12) and communicates with the interior of the glue inlet hole (14).

3. The photoresist spraying mechanism of a semiconductor coating device as claimed in claim 1, characterized in that: The locking bolt (13) passes through the interior of the mounting plate (12) and is connected to the interior of the threaded hole (19) via threads.

4. A photoresist spraying mechanism for semiconductor coating equipment as claimed in claim 1, characterized in that: The sealing ring (15) is fixedly connected to the other end of the mounting plate (12) and covers the periphery of the glue inlet hole (14). The other end of the sealing ring (15) is attached to one end of the rotating plate (18).

5. The photoresist spraying mechanism of a semiconductor coating device as claimed in claim 1, characterized in that: The sealing groove (16) is located inside the other end of the mounting plate (12), and the size of the sealing ring (17) matches that of the sealing groove (16) and is rotatably connected inside the sealing groove (16).

6. The photoresist spraying mechanism of a semiconductor coating device as claimed in claim 1, characterized in that: The other end of the connecting pipe (11) is fixedly connected to the output end of the electric push rod (22), the mounting end of the electric push rod (22) is fixedly connected to the middle of the support frame (23), the other end of the support frame (23) is slidably connected to the inside of the cross beam (24), and is connected to the outside of the first screw rod (25) through a thread, the two ends of the first screw rod (25) are rotatably connected to the inside of the cross beam (24), one end of the cross beam (24) is connected to the inside of the first longitudinal beam (27) through a second screw rod (26), the other end of the cross beam (24) is slidably connected to the inside of the second longitudinal beam (29) through a mounting plate (28), one end of the mounting plate (28) is fixedly connected to the first servo motor (3), the output end of the first servo motor (3) is fixedly connected to one end of the first screw rod (25), one end of the first longitudinal beam (27) is fixedly connected to the second servo motor (4), and the output end of the second servo motor (4) is fixedly connected to one end of the second screw rod (26).

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