Portable cleaning device for auxiliary chamber of single crystal furnace

Abstract

The utility model discloses a portable single crystal furnace auxiliary chamber cleaning device which comprises a fixed disc, a connecting rod is positioned and mounted at the bottom of the fixed disc, a driving mechanism is positioned and mounted in the fixed disc, a telescopic mechanism is connected to the outer side of the driving mechanism, an arc-shaped piece is connected to the end of the telescopic mechanism, and the arc-shaped piece is connected to the end of the telescopic mechanism. The number of the telescopic mechanisms is eight, eight sliding grooves at equal intervals are formed in the positions, located on the telescopic mechanisms, of the fixed disc, the number of the arc-shaped pieces is four, and every two telescopic mechanisms are connected with one arc-shaped piece. According to the portable cleaning device for the auxiliary chamber of the single crystal furnace, the arc-shaped sheet is in a contraction state before the cleaning device enters the auxiliary chamber, namely the inner circumferential surface of the cleaning ring is overlapped with the outer circumferential surface of the fixed ring, so that the problem that volatile matters are accumulated at the top of the auxiliary chamber is effectively solved, the cleanliness of the auxiliary chamber is improved, and high purity and sanitation of crystal pulling operation are ensured; therefore, the single crystal growth crystallization rate and the single crystal quality are effectively improved, and the line breakage rate is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnace equipment cleaning, in particular to a convenient single crystal furnace auxiliary chamber cleaning device. Background Art

[0002] The cleaning device for the auxiliary chamber of a single crystal furnace is a supporting structure for cleaning the equipment of a single crystal furnace. In the photovoltaic field, a vertical pulling single crystal furnace is used to produce single crystal silicon rods. The vertical pulling single crystal furnace includes a main furnace chamber and an auxiliary furnace chamber. The main furnace chamber melts the polysilicon material, and after forming single crystal silicon, it gradually grows under the lifting device of the auxiliary furnace chamber. In the process of pulling single crystal silicon, the flowing argon gas not only serves as a protective gas, but also carries volatiles to move, causing the volatiles to be deposited on the inner wall of the auxiliary furnace chamber during the movement, which makes cleaning more complicated. The existing cleaning device for the auxiliary chamber of a single crystal furnace is a long rod connected to a ring, and the cleaning is performed by wrapping multiple layers of dust-free paper soaked in anhydrous ethanol on the ring. During the cleaning process of the auxiliary chamber, the operator needs to extend the long rod of the auxiliary chamber into the auxiliary chamber of the single crystal furnace, and clean it by pushing and pulling the long rod up and down. With the continuous development of science and technology, people have higher and higher requirements for the manufacturing process of the cleaning device for the auxiliary chamber of the single crystal furnace.

[0003] The existing single crystal furnace auxiliary chamber cleaning device has certain drawbacks when in use. Since the cleaning head of the existing auxiliary chamber cleaning rod is the same size as the auxiliary chamber, it comes into close contact with the auxiliary chamber as soon as it enters the auxiliary chamber. When in use, it extends into the auxiliary chamber from bottom to top, causing volatiles to be accumulated on the top of the auxiliary chamber, failing to achieve a good auxiliary chamber cleaning effect. During the crystal pulling process, volatiles are easy to fall into the molten silicon liquid, causing the crystal rod to break and affecting the crystal formation rate. Because the dust-free paper on the ring needs to be replaced before each cleaning, the reuse rate is low, which brings certain adverse effects to the actual use process. For this reason, we propose a convenient single crystal furnace auxiliary chamber cleaning device. Utility Model Content

[0004] Technical problem solved: In view of the deficiencies in the prior art, the utility model provides a convenient single crystal furnace auxiliary chamber cleaning device. Before the cleaning device enters the auxiliary chamber, the arc-shaped sheet is in a contracted state, that is, the inner circumference of the cleaning circle coincides with the outer circumference of the fixed circle, which effectively solves the problem of volatiles being accumulated on the top of the auxiliary chamber, improves the cleanliness of the auxiliary chamber, ensures the high purity and hygiene of the crystal pulling operation, and thus effectively improves the single crystal growth rate and single crystal quality, reduces the wire breakage rate, and can effectively solve the problems in the background technology.

[0005] Technical solution: To achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a portable single crystal furnace sub-chamber cleaning device, comprising a fixed plate, a connecting rod is positioned and installed at the bottom of the fixed plate, a driving mechanism is positioned and installed inside the fixed plate, a telescopic mechanism is connected to the outside of the driving mechanism, an arc-shaped piece is connected to the end of the telescopic mechanism, eight groups of telescopic mechanisms are provided, eight equally spaced slide grooves are opened at the position of the telescopic mechanism in the fixed plate, four groups of arc-shaped pieces are provided, and one group of arc-shaped pieces is connected to every two groups of telescopic mechanisms.

[0006] Preferably, the fixed plate comprises an upper plate body and a lower plate body, a hollow annular structure is provided in the middle of the fixed plate, the driving mechanism is positioned between the upper plate body and the lower plate body, and a slider is provided at the position where the telescopic mechanism is connected to the driving mechanism.

[0007] Preferably, an elastic cleaning pad is positioned on the outer surface of the arc-shaped sheet, an elastic frame and a spring are connected between the arc-shaped sheet and the elastic cleaning pad, the spring is located on the outer wall of the elastic frame, and a detachable pad is positioned on the outer surface of the elastic cleaning pad.

[0008] Preferably, the driving mechanism, the upper disk body and the lower disk body are fixed by bolts, the slider moves in a slide groove inside the fixed disk, and the slider is driven by the driving mechanism, and the slider drives the position of the telescopic mechanism to rotate.

[0009] Preferably, the elastic cleaning pad and the arc-shaped sheet are elastically movable via an elastic frame and a spring, and the detachable pad is bonded and positioned to the elastic cleaning pad.

[0010] Preferably, a thread is provided between the fixed disk and the connecting rod, and the connecting rod is positioned at the bottom of the fixed disk by the thread spiral, and the telescopic mechanism outside the fixed disk drives the position of the arc piece to be adjusted and is driven to rotate by the driving mechanism.

[0011] Beneficial effects: Compared with the prior art, the utility model provides a convenient single crystal furnace auxiliary chamber cleaning device, which has the following beneficial effects: in this convenient single crystal furnace auxiliary chamber cleaning device, the arc-shaped sheet is in a contracted state before the cleaning device enters the auxiliary chamber, that is, the inner circumference of the cleaning circle coincides with the outer circumference of the fixed circle, and a dust-free cover with adjustable tightness is provided on the cleaning circle. After the cleaning device is extended into the upper end of the auxiliary chamber, the slider is moved in the slide groove in a direction away from the fixed disk through the driving mechanism, so that the diameter of the cleaning circle wrapped by the dust-free cover becomes larger, and cleaning is performed from top to bottom, which effectively solves the problem of volatiles being accumulated on the top of the auxiliary chamber, improves the cleanliness of the auxiliary chamber, ensures the high purity and hygiene of the crystal pulling operation, and thus effectively improves the single crystal growth rate and the single crystal quality, and reduces the wire breakage rate. The entire single crystal furnace auxiliary chamber cleaning device has a simple structure and is easy to operate, and the effect of use is better than that of the traditional method. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 The utility model is a schematic diagram of the overall structure of a convenient single crystal furnace auxiliary chamber cleaning device.

[0013] Figure 2 It is a structural schematic diagram of a top view of a convenient single crystal furnace auxiliary chamber cleaning device of the utility model.

[0014] Figure 3 It is a structural schematic diagram of a cross-sectional view of a fixed plate in a convenient single crystal furnace auxiliary chamber cleaning device of the utility model.

[0015] Figure 4 The utility model is a schematic diagram of the structure of an arc-shaped sheet in a convenient single crystal furnace auxiliary chamber cleaning device.

[0016] Figure 5 This is a structural schematic diagram of an enlarged view of point A in a convenient single crystal furnace auxiliary chamber cleaning device of the utility model.

[0017] In the figure: 1. fixed plate; 2. telescopic mechanism; 3. arc-shaped sheet; 4. connecting rod; 5. hollow ring structure; 6. elastic cleaning pad; 7. driving mechanism; 8. slider; 9. upper plate body; 10. lower plate body; 11. removable pad; 12. elastic frame; 13. spring. DETAILED DESCRIPTION

[0018] The technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings and specific embodiments, but those skilled in the art will understand that the embodiments described below are part of the embodiments of the utility model, rather than all of the embodiments, and are only used to illustrate the utility model, and should not be considered as limiting the scope of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the utility model. If the specific conditions are not specified in the embodiments, they are carried out according to conventional conditions or conditions recommended by the manufacturer. If the manufacturer is not specified for the reagents or instruments used, they are all conventional products that can be purchased commercially.

[0019] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0020] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0021] like Figure 1-5 As shown, a portable single crystal furnace auxiliary chamber cleaning device comprises a fixed plate 1, a connecting rod 4 is positioned and installed at the bottom of the fixed plate 1, a driving mechanism 7 is positioned and installed inside the fixed plate 1, a telescopic mechanism 2 is connected to the outside of the driving mechanism 7, an arc-shaped sheet 3 is connected to the end of the telescopic mechanism 2, eight groups of telescopic mechanisms 2 are provided, eight equally spaced chute grooves are opened at the position of the telescopic mechanism 2 in the fixed plate 1, four groups of arc-shaped sheets 3 are provided, and every two groups of telescopic mechanisms 2 are connected to one group of arc-shaped sheets 3, and the cleaning device enters the auxiliary chamber before the arc-shaped sheets In the contracted state, the inner circumference of the cleaning ring coincides with the outer circumference of the fixed ring. A dust-free cover with adjustable tightness is placed on the cleaning ring. After the cleaning device is extended into the upper end of the auxiliary chamber, the slider is moved in the slide groove away from the fixed disk through the driving mechanism, so that the diameter of the cleaning ring wrapped by the dust-free cover becomes larger, and cleaning is performed from top to bottom, which effectively solves the problem of volatiles being accumulated on the top of the auxiliary chamber, improves the cleanliness of the auxiliary chamber, ensures the high purity and hygiene of the crystal pulling operation, and thus effectively improves the single crystal growth rate and single crystal quality, and reduces the wire breakage rate.

[0022] Furthermore, the fixed plate 1 includes an upper plate body 9 and a lower plate body 10 , a hollow annular structure 5 is provided in the middle of the fixed plate 1 , the driving mechanism 7 is positioned between the upper plate body 9 and the lower plate body 10 , and a slider 8 is provided at the position where the telescopic mechanism 2 is connected to the driving mechanism 7 .

[0023] Furthermore, an elastic cleaning pad 6 is positioned on the outer surface of the arc-shaped sheet 3 , an elastic frame 12 and a spring 13 are connected between the arc-shaped sheet 3 and the elastic cleaning pad 6 , the spring 13 is located on the outer wall of the elastic frame 12 , and a detachable pad 11 is positioned on the outer surface of the elastic cleaning pad 6 .

[0024] Furthermore, the driving mechanism 7, the upper plate body 9 and the lower plate body 10 are fixed by bolts, the slider 8 moves in the slide groove inside the fixed plate 1, and the slider 8 is driven by the driving mechanism 7, and the slider 8 drives the position of the telescopic mechanism 2 to rotate.

[0025] Furthermore, the elastic cleaning pad 6 and the arc-shaped sheet 3 are elastically movable via the elastic frame 12 and the spring 13 , and the detachable pad 11 and the elastic cleaning pad 6 are bonded and positioned.

[0026] Furthermore, a thread is provided between the fixed disk 1 and the connecting rod 4, and the connecting rod 4 is positioned at the bottom of the fixed disk 1 by the thread spiral. The telescopic mechanism 2 outside the fixed disk 1 drives the position of the arc piece 3 to be adjusted, and is driven to rotate by the driving mechanism 7.

[0027] Working principle: The utility model includes a fixed disk 1, a telescopic mechanism 2, an arc-shaped piece 3, a connecting rod 4, a hollow annular structure 5, an elastic cleaning pad 6, a driving mechanism 7, a slider 8, an upper disk body 9, a lower disk body 10, a detachable pad 11, an elastic frame 12, and a spring 13. The cleaning device mainly includes a connecting rod and a cleaning component. The cleaning component specifically includes a fixed disk, a telescopic mechanism, and a driving component. The fixed disk is a hollow annular structure, and eight equally spaced slide grooves are provided on the fixed disk; the telescopic mechanism includes an arc-shaped piece in contact with the inner wall of the single crystal furnace auxiliary chamber, and four arc-shaped pieces are distributed in a circle to form a cleaning circle, and a telescopic rod is fixedly connected to the inner circumference of the arc-shaped piece, and a slider is provided on the telescopic rod, and the slider cooperates with the slide groove; one end of the slider away from the arc-shaped piece is connected to a driving device. Under the operation of the driving mechanism, the slider can move the arc-shaped piece connected to the telescopic rod in a direction away from the fixed disk, so that the diameter of the cleaning circle becomes larger. When the driving mechanism works in the opposite direction, the slider moves the arc-shaped piece connected to the telescopic rod in a direction close to the fixed disk, so that the cleaning The inner circumference of the ring coincides with the outer circumference of the fixed ring, and the diameter becomes smaller. Before the cleaning device enters the auxiliary chamber, the arc-shaped sheet is in a contracted state, that is, the inner circumference of the cleaning ring coincides with the outer circumference of the fixed ring. A dust-free cover with adjustable tightness is provided on the cleaning ring. After the cleaning device is extended into the upper end of the auxiliary chamber, the slider is moved in the slide groove away from the fixed disk through the driving mechanism, so that the diameter of the cleaning ring wrapped by the dust-free cover becomes larger, and cleaning is performed from top to bottom, which effectively solves the problem of volatiles being accumulated on the top of the auxiliary chamber, improves the cleanliness of the auxiliary chamber, ensures the high purity and hygiene of the crystal pulling operation, and thus effectively improves the single crystal growth rate and single crystal quality, and reduces the wire breakage rate.

[0028] It should be noted that, in this article, relational terms such as first and second (number one, number two), etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0029] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. The technicians in this industry should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model will have various changes and improvements, and these changes and improvements fall within the scope of the utility model to be protected.

Claims

1. A portable single crystal furnace auxiliary chamber cleaning device, comprising a fixed plate (1), characterized in that: A connecting rod (4) is positioned and installed at the bottom of the fixed plate (1); a driving mechanism (7) is positioned and installed inside the fixed plate (1); a telescopic mechanism (2) is connected to the outside of the driving mechanism (7); an arc-shaped piece (3) is connected to the end of the telescopic mechanism (2); eight groups of the telescopic mechanism (2) are provided; eight equally spaced sliding grooves are provided at the position of the telescopic mechanism (2) in the fixed plate (1); four groups of the arc-shaped pieces (3) are provided, and one group of arc-shaped pieces (3) is connected to every two groups of telescopic mechanisms (2); the fixed plate (1) comprises an upper plate body (9) and a lower plate body (10); a hollow annular structure (5) is provided in the middle of the fixed plate (1); the driving mechanism (7) is positioned between the upper plate body (9) and the lower plate body (10); The upper plate (9) and the lower plate (10) are fixed with bolts, the slide block (8) is moved in a slide groove inside the fixed plate (1), and the slide block (8) is driven by the drive mechanism (7). The slide block (8) drives the telescopic mechanism (2) to rotate.

2. A portable single crystal furnace auxiliary chamber cleaning device according to claim 1, characterized in that: The elastic cleaning pad (6) and the arc-shaped sheet (3) are elastically movable via an elastic frame (12) and a spring (13), and the detachable pad (11) and the elastic cleaning pad (6) are bonded and positioned.

3. A portable single crystal furnace auxiliary chamber cleaning device according to claim 1, characterized in that: A thread is provided between the fixed disk (1) and the connecting rod (4); the connecting rod (4) is positioned at the bottom of the fixed disk (1) by means of the thread; the telescopic mechanism (2) outside the fixed disk (1) drives the position of the arc-shaped sheet (3) to be adjusted, and is driven to rotate by the driving mechanism (7).

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