Pressing rod feeding and discharging machine and machining equipment

Abstract

The utility model provides a pressing rod feeding and discharging machine and machining equipment, relates to the field of semiconductor or photovoltaic material machining, and solves the technical problem that a pressing rod is easily placed reversely when the pressing rod is manually fed. According to the pressing rod feeding and discharging machine, at least one first groove is formed in a first side plate in the first horizontal direction; the second side plate and the first side plate are oppositely arranged, at least one second groove is formed in the second side plate in the first horizontal direction, and the connecting line of the geometric center of the first groove and the geometric center of the corresponding second groove forms a center connecting line; the at least two baffles are arranged between the first side plate and the second side plate and arranged at intervals in the first horizontal direction, and every two adjacent baffles are arranged on the two sides of a center connecting line respectively. By means of the structure, if the groove teeth of the pressing rod face the reverse direction when the pressing rod is placed in, the groove teeth can be blocked by the baffle, the distance between the baffle and the center connecting line is the second distance, and the pressing rod with the groove teeth facing the reverse direction cannot be placed in the containing space.

Description

Technical Field

[0001] The present application relates to the field of semiconductor or photovoltaic material processing, and in particular to a pressure rod loading and unloading machine and processing equipment. Background Art

[0002] Semiconductor materials or photovoltaic materials are widely used in electronics, new energy and other industries. Semiconductor and photovoltaic materials usually need to be chemically treated before they can be applied to products. Texturing technology is one of the treatment methods. It plays an indispensable role in the production process of solar cells and has an important impact on the efficiency of solar cells. Texturing is the beginning of the production process of solar cells. Its main purpose is to remove the impurity damage layer on the surface of the silicon wafer and form a light-trapping velvet structure. The basic process of texturing includes loading, acid washing (or alkaline washing), unloading, and transfer.

[0003] With the continuous upgrading of texturing technology, in some texturing processes, silicon wafers will be texturized through a trough reaction chain, that is, a flower basket carrying silicon wafers is placed in a reaction tank carrying a reaction liquid (such as an acid solution or an alkaline solution) to process the silicon wafers. However, with this texturing method, the silicon wafers will continue to swing in the reaction liquid or even suspend. In order to solve this problem, a pressure rod is usually placed in the flower basket to press the silicon wafer before the silicon wafer enters the trough reaction chain for processing. Specifically, it is necessary to manually load the pressure rod into the pressure rod loading and unloading machine, and then the transportation device (such as a transportation robot) picks up the pressure rod in the pressure rod loading and unloading machine through the pressure rod gripper, and the two ends of the pressure rod are respectively engaged with the two slots of the flower basket, and finally the pressure rod stuck in the slot is rotated to fix the pressure rod.

[0004] However, when manually loading the pressure rod into the pressure rod loading and unloading machine, the pressure rod's groove teeth are easily placed in the wrong direction due to negligence of the staff. Especially when the capacity of the pressure rod loading and unloading machine is small, frequent manual loading is required, which makes it more likely that the pressure rod's groove teeth are placed in the wrong direction. If the pressure rod in the pressure rod loading and unloading machine has the groove teeth in the wrong direction, the pressure rod with the groove teeth in the wrong direction cannot rotate in the slot. If the transportation device forcibly rotates the pressure rod with the groove teeth in the wrong direction according to the preset program, the pressure rod with the groove teeth in the wrong direction will break. Utility Model Content

[0005] In order to solve the above technical problems, the present application is proposed. The embodiment of the present application provides a pressure rod loading and unloading machine and processing equipment.

[0006] In the first aspect, an embodiment of the present application provides a pressure rod loading and unloading machine, which is configured to carry a horizontally placed pressure rod and provide the pressure rod to a transportation device, wherein the pressure rod includes a rod body and groove teeth, and the groove teeth are axially arranged on the outer wall of the rod body; it is characterized in that the pressure rod loading and unloading machine includes: a first side plate, the first side plate has at least one first groove along a first horizontal direction, the first groove is configured to accommodate the first end of the pressure rod, and the first horizontal direction is perpendicular to the axial direction and vertical direction of the rod body; a second side plate, which is arranged opposite to the first side plate, and the second side plate has at least one second groove along the first horizontal direction, and the second groove is configured to accommodate the pressure rod. At the second end, the first groove and the second groove are arranged in one-to-one correspondence, and the line connecting the geometric center of the first groove and the corresponding geometric center of the second groove forms a center line; at least two baffles are arranged between the first side plate and the second side plate, and are arranged at intervals along the first horizontal direction, and two adjacent baffles are respectively arranged on both sides of a center line to form a placement space for accommodating the pressure rod; wherein, in any placement space, the first distance between a baffle and the center line is greater than the second distance between another baffle and the center line, and the center line and the baffle at the first distance are used to accommodate the side of the pressure rod with groove teeth.

[0007] In some embodiments, the shape of the horizontal cross section of the first groove is the same as the shape of the horizontal cross section of the first end of the pressure rod; and / or the shape of the horizontal cross section of the second groove is the same as the shape of the horizontal cross section of the second end of the pressure rod.

[0008] In some embodiments, the placement space is configured to accommodate more than two vertically arranged pressure rods, each first groove is configured to accommodate the first ends of more than two vertically arranged pressure rods, and each second groove is configured to accommodate the second ends of more than two vertically arranged pressure rods.

[0009] In some embodiments, the first end of the pressure rod has a first mark, and the first side panel has a first mark; the first mark includes a first color and / or a first pattern; and / or, the second end of the pressure rod has a second mark, and the second side panel has a second mark; the second mark includes a second color and / or a second pattern.

[0010] In some embodiments, the pressure rod loading and unloading machine further comprises: a color sensor mounted to the unloading end of the pressure rod loading and unloading machine and configured to detect a first color of a first end of a pressure rod passing through the unloading end and / or a second color of a second end of the pressure rod.

[0011] In some embodiments, the pressure rod loading and unloading machine also includes: a fixed plate; a slide rail, arranged above the fixed plate; a sliding plate, arranged above the fixed plate and slidably connected to the slide rail; a bottom plate assembly, the lower surface of the bottom plate assembly is connected to the top of the sliding plate, the upper surface of the bottom plate assembly is connected to the bottom of the first side plate and the bottom of the second side plate, and the bottom of the baffle is connected to the upper surface of the bottom plate assembly.

[0012] In some embodiments, the pressure rod loading and unloading machine also includes: a handle connected to the base plate assembly; a sensor assembly installed to the fixed plate and / or the base plate assembly, and configured to sense the position of the base plate assembly relative to the fixed plate; a stop block connected to the end of the slide rail on the unloading side to limit the extreme position of the sliding plate.

[0013] In some embodiments, the sliding plate has a relative sliding in direction and sliding out direction relative to the sliding rail, and the pressure rod loading and unloading machine also includes: a driving member, which is installed on the fixed plate and arranged under the base plate assembly; a blocking member, the first end of the blocking member is slidably connected to the driving member along an inclined extension direction so that the second end of the blocking member can abut against the lower surface of the base plate assembly, and the extension direction of the blocking member is set at an obtuse angle to the sliding out direction of the sliding plate.

[0014] In some embodiments, the blocking member includes: a cylinder rod, one end of which can be slidably inserted into the driving member along the extension direction; and an abutment block, which is connected to the other end of the cylinder rod, and the end of the abutment block facing away from the cylinder rod is conical; wherein the base plate assembly has a clamping portion, and the cylinder rod can drive the abutment block to abut the clamping portion.

[0015] In a second aspect, an embodiment of the present application provides a processing device, comprising: a pressure rod loading and unloading machine of any one of the above-mentioned first aspects, configured to receive and carry a horizontally placed pressure rod; a transportation device, configured to grab the pressure rod carried by the pressure rod loading and unloading machine, and transport the pressure rod; a carrier, configured to receive and carry the pressure rod and sheet material transported by the transportation device, the pressure rod carried by the carrier is located above the sheet material carried by the carrier, and the pressure rod is configured to apply downward pressure to the sheet material; a reaction chamber, configured to carry the carrier and the reaction solution to process the sheet material.

[0016] The pressure rod loading and unloading machine and processing equipment proposed in the embodiment of the present application, if the groove teeth of the pressure rod face in the opposite direction when the pressure rod is placed, the groove teeth will be blocked by a baffle whose distance from the center line is the second distance, so that the pressure rod with the groove teeth facing in the opposite direction cannot be placed in the placement space, thereby avoiding manual misoperation that causes the pressure rod to be placed in the pressure rod loading and unloading machine with the groove teeth facing in the opposite direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0018] Figure 1Shown is a schematic structural diagram of a pressure rod loading and unloading machine provided by an exemplary embodiment of the present application.

[0019] Figure 2 Shown is a schematic structural diagram of a pressure rod loading and unloading machine provided by another exemplary embodiment of the present application.

[0020] Figure 3 An exemplary embodiment of the present application is shown. Figure 1 A partial enlarged view of area A in the middle.

[0021] Figure 4 An exemplary embodiment of the present application is shown. Figure 1 A partial enlarged view of area B in the middle.

[0022] Figure 5 Shown is a schematic diagram of a pressure rod provided by an exemplary embodiment of the present application with its groove teeth facing in a positive direction being placed in a placement space.

[0023] Figure 6 Shown is a side view of a pressure rod loading and unloading machine provided by an exemplary embodiment of the present application.

[0024] Figure 7 Shown is a schematic structural diagram of a pressure rod loading and unloading machine provided by another exemplary embodiment of the present application.

[0025] Figure 8 An exemplary embodiment of the present application is shown. Figure 2 A partial enlarged view of area E in the middle.

[0026] Fig. 9 An exemplary embodiment of the present application is shown. Figure 7 A partial enlarged view of the middle area F.

[0027] Fig.10 Shown is a schematic structural diagram of a processing device provided by an exemplary embodiment of the present application.

[0028] Reference numerals:

[0029] 100, pressure rod loading and unloading machine; 110, first side plate; 111, first groove; 120, second side plate; 121, second groove; 130, baffle; 140, bottom plate assembly; 141, first bottom plate; 142, second bottom plate; 143, third bottom plate; 144, fourth bottom plate; 145, clamping part; 150, color sensor; 160, sliding plate; 170, slide rail; 171, slide rail mounting plate; 180, handle; 190, driving member; 191, fixing plate; 192, blocking member; 1921, cylinder rod; 1922, abutment block; 193, sensor assembly; 194, block; 200, pressure rod; 210, rod body; 220, groove teeth; 300, processing equipment; 310, transportation device; 320, carrier; 330, reaction chamber. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0031] Exemplary Devices

[0032] Figure 1 The figure is a schematic diagram of the structure of a pressure rod loading and unloading machine provided by an exemplary embodiment of the present application. Figure 2 The figure is a schematic structural diagram of a pressure rod loading and unloading machine provided by another exemplary embodiment of the present application. Figure 3 An exemplary embodiment of the present application is shown. Figure 1 A partial enlarged view of area A in the middle. Figure 4 An exemplary embodiment of the present application is shown. Figure 1 A partial enlarged view of area B in the middle. Figure 5 It is a schematic diagram showing a pressure rod provided by an exemplary embodiment of the present application with its groove teeth facing the positive direction being placed in a placement space. Figure 5 D1 represents the first distance, D2 represents the second distance, D3 represents the third distance, D4 ​​represents the fourth distance, and the dotted line C represents the center line or the axis of the rod body 210 .

[0033] like Figure 1 to Figure 5As shown, an embodiment of the present application provides a pressure rod loading and unloading machine 100, which is configured to carry a horizontally placed pressure rod 200 and provide the pressure rod 200 to a transportation device, the pressure rod 200 includes a rod body 210 and groove teeth 220 (such as a crocodile tooth structure, a limiting groove is formed between adjacent groove teeth 220, so that the upper end of a vertically placed sheet material can be inserted), and the groove teeth 220 are arranged on the outer side wall of the rod body 210 along the axial direction (that is, the direction in which the axis of the rod body 210 extends); the pressure rod loading and unloading machine 100 includes: a first side plate 110, the first side plate 110 has at least one first groove 111 along a first horizontal direction, the first groove 111 is configured to accommodate the first end of the pressure rod 200, and the first horizontal direction is perpendicular to the axial direction and vertical direction of the rod body 210; a second side plate 120, which is arranged opposite to the first side plate 110, and the second side plate 120 is arranged along the first horizontal At least one second groove 121 is opened in the direction, and the second groove 121 is configured to accommodate the second end of the pressure rod 200. The first groove 111 and the second groove 121 are arranged in a one-to-one correspondence, and the geometric center of the first groove 111 and the corresponding second groove 121 The geometric center of the line forming a center line; at least two baffles 130 are arranged between the first side plate 110 and the second side plate 120, and are arranged at intervals along the first horizontal direction. Two adjacent baffles 130 are respectively arranged on both sides of a center line to form a placement space for accommodating the pressure rod 200; wherein, in any placement space, a first distance between a baffle 130 and the center line is greater than a second distance between another baffle 130 and the center line, and the center line and the baffle 130 at the first distance are used to accommodate the side of the pressure rod 200 with the groove teeth 220.

[0034] Specifically, Figure 4 and Figure 5As shown, the rod body 210 has a first side and a second side relative to each other, the groove teeth 220 are located on the first side of the rod body 210, and at least one pressure rod 200 is placed between every two baffles 130. The baffle 130 whose distance from the center line is a first distance is close to the first side of the rod body 210 of the pressure rod 200 facing the positive direction and close to the groove teeth 220, and the baffle 130 whose distance from the center line is a second distance is close to the second side of the rod body 210 of the pressure rod 200 facing the positive direction and close to the groove teeth 220, and the third distance between the axis of the rod body 210 and the second side is smaller than the fourth distance between the axis of the rod body 210 and the side of the groove teeth 220 away from the axis, and the third distance can be smaller than or equal to the second distance, the fourth distance can be smaller than or equal to the first distance, and the fourth distance can be larger than the second distance. In this way, since the fourth distance is greater than the second distance, if the groove teeth 220 of the pressure rod 200 face in the opposite direction when the pressure rod 200 is inserted, the groove teeth 220 will be blocked by the baffle 130 whose distance from the center line is the second distance, so that the pressure rod 200 with the groove teeth 220 facing in the opposite direction cannot be placed in the placement space, thereby avoiding human error causing the pressure rod 200 to be placed in the pressure rod loading and unloading machine 100 with the groove teeth 220 facing in the opposite direction.

[0035] In the above embodiment, if the groove teeth 220 of the pressure rod 200 face in the opposite direction when the pressure rod 200 is inserted, the groove teeth 220 will be blocked by the baffle 130 whose distance from the center line is the second distance, so that the pressure rod 200 with the groove teeth 220 facing in the opposite direction cannot be placed in the placement space, thereby avoiding human error that causes the pressure rod 200 to be placed in the pressure rod loading and unloading machine 100 with the groove teeth 220 facing in the opposite direction.

[0036] In some embodiments, Figure 3 As shown, the shape of the horizontal cross section of the first groove 111 is the same as the shape of the horizontal cross section of the first end of the pressure rod 200; and / or the shape of the horizontal cross section of the second groove 121 is the same as the shape of the horizontal cross section of the second end of the pressure rod 200. With this structure, after the two ends of the pressure rod 200 are respectively placed in the first groove 111 and the second groove 121, they will not be able to rotate, so that the pressure rod loading and unloading machine 100 can carry the pressure rod 200 more stably.

[0037] In some embodiments, Figure 3 As shown, the placement space is configured to accommodate more than two vertically arranged pressure rods 200, each first groove 111 is configured to accommodate the first ends of more than two vertically arranged pressure rods 200, and each second groove 121 is configured to accommodate the second ends of more than two vertically arranged pressure rods 200. Through this structure, the capacity of the pressure rod loading and unloading machine 100 is improved, which can reduce the number of manual loading times and reduce the labor burden.

[0038] In some embodiments, the first end of the pressure rod 200 has a first mark, the first side panel 110 has a first mark, the first mark includes a first color and / or a first pattern; and / or, the second end of the pressure rod 200 has a second mark, the second side panel 120 has a second mark, and the second mark includes a second color and / or a second pattern.

[0039] If the two ends of the pressure rod 200 are placed in reverse, the transport device will rotate the pressure rod 200 with the two ends in reverse after placing the pressure rod 200 with the two ends in reverse into the slot of the flower basket, which will also cause the pressure rod 200 to break. By setting the same first mark on the first side plate 110 and the first end of the pressure rod 200, the staff can be prompted to turn the first end of the pressure rod 200 toward the first side plate 110, and by setting the same second mark on the second side plate 120 and the second end of the pressure rod 200, the staff can be prompted to turn the second end of the pressure rod 200 toward the second side plate 120. Therefore, through this structure, the staff can be prompted to the placement direction of the pressure rod 200, reducing the occurrence of the situation where the two ends of the pressure rod 200 are placed in reverse. Among them, the first color and the second color are exemplarily red, yellow, white, black, blue, etc., and the first pattern and the second pattern are exemplarily triangular patterns, circular patterns, etc. In a specific example, the first mark is black, that is, the first side plate 110 is black, and the first end of the pressure rod 200 is black; the second mark is white, that is, the second side plate 120 is white, and the second end of the pressure rod 200 is white.

[0040] In some embodiments, Figure 2 As shown, the pressure rod loading and unloading machine 100 also includes: a color sensor 150, which is installed at the unloading end of the pressure rod loading and unloading machine 100 and is configured to detect the first color of the first end of the pressure rod 200 passing through the unloading end and / or the second color of the second end of the pressure rod 200.

[0041] Specifically, the transport device is configured to grab the pressure rod 200 carried in the placement space. In the process of grabbing the pressure rod 200 carried in the placement space, the pressure rod 200 will pass through the unloading end. At this time, the color sensor 150 can determine whether the pressure rod 200 is reversed at both ends by detecting whether the first color of the first end of the pressure rod 200 is the first preset color and / or whether the second color of the second end of the pressure rod 200 is the second preset color. If the two ends are reversed, the transport device can be controlled to rotate the pressure rod 200 to the forward direction, or the pressure rod 200 with reversed ends can be placed in the waste box, thereby preventing the transport device from placing the reverse pressure rod 200 in the flower basket. Among them, the unloading end is exemplarily located on the side close to the passing area of ​​the transport device. Exemplarily, when the pressure rod 200 grabbed by the transport device passes above the color sensor 150, the color sensor 150 can detect the first color of the first end of the pressure rod 200 in the area above it, and / or the second color of the second end of the pressure rod 200.

[0042] Figure 6 Shown is a side view of a pressure rod loading and unloading machine provided by an exemplary embodiment of the present application.

[0043] In some embodiments, Figure 6 As shown, the pressure rod loading and unloading machine 100 also includes: a fixed plate 191; a slide rail 170, which is arranged above the fixed plate 191; a sliding plate 160, which is arranged above the fixed plate 191 and is slidably connected to the slide rail 170; a bottom plate assembly 140, the lower surface of the bottom plate assembly 140 is connected to the top of the sliding plate 160, the upper surface of the bottom plate assembly 140 is connected to the bottom of the first side plate 110 and the bottom of the second side plate 120, and the bottom of the baffle 130 is connected to the upper surface of the bottom plate assembly 140.

[0044] By setting the fixed plate 191, the slide rail 170 can be installed. By setting the bottom plate assembly 140, the bottom plate assembly 140 can support the baffle 130 and provide an installation position for the baffle 130. In addition, the bottom plate assembly 140 can also support the pressure rod 200. Exemplarily, the bottom plate assembly 140 (such as the fourth bottom plate 144 described later) can support the central area of ​​the bottom pressure rod 200. Among them, the slide rail 170 is exemplarily a three-section pull-out type linear slide rail. The first side plate 110, the second side plate 120, the baffle 130 and the bottom plate assembly 140 can form a material box for accommodating the pressure rod 200, and the bottom of the material box is connected to the sliding plate 160, so that it can move along the extension direction of the slide rail 170. The pressure rod loading and unloading machine 100 can also include a slide rail mounting plate 171, the bottom of the slide rail mounting plate 171 is connected to the upper surface of the fixed plate 191, and the side of the slide rail mounting plate 171 is connected to the slide rail 170.

[0045] In actual applications, the transportation device can grab the pressure rod 200 on the side of the first end of the pressure rod loading and unloading machine 100 close to the slide rail 170, and the staff can place the pressure rod 200 in the material box on the side of the second end of the pressure rod loading and unloading machine 100 close to the slide rail 170, and when placing the pressure rod 200, the staff can slide the material box toward the second end of the slide rail 170, so that the staff can stay away from the transportation device when loading materials, which improves the safety of the staff's loading and allows the staff to move the material box more effortlessly; in addition, the sliding plate 160 and the slide rail 170 are arranged under the bottom plate assembly 140 to save space.

[0046] In some embodiments, Figure 1 and Figure 2As shown, the bottom plate assembly 140 includes: a first bottom plate 141, connected to the bottom of the first side plate 110; a second bottom plate 142, connected to the bottom of the second side plate 120; two third bottom plates 143, the two third bottom plates 143 are arranged opposite to each other, each third bottom plate 143 extends along a second horizontal direction, the second horizontal direction is a direction perpendicular to the first horizontal direction and the vertical direction, the first end of each third bottom plate 143 is connected to the first bottom plate 141, and the second end of each third bottom plate 143 is connected to the second bottom plate 142; a fourth bottom plate 144, the first end of the fourth bottom plate 144 is connected to one third bottom plate 143, the second end of the fourth bottom plate 144 is connected to another third bottom plate 143, and the baffle 130 is connected to the upper surface of the fourth bottom plate 144.

[0047] Figure 7 The figure is a schematic structural diagram of a pressure rod loading and unloading machine provided by another exemplary embodiment of the present application. Figure 8 An exemplary embodiment of the present application is shown. Figure 2 A partial enlarged view of area E in the middle.

[0048] In some embodiments, Figure 1 , Figure 2 , Figure 6 , Figure 7 and Figure 8 As shown, the pressure rod loading and unloading machine 100 also includes: a handle 180, which is connected to the base plate assembly 140; a sensor assembly 193, which is installed to the fixed plate 191 and / or the base plate assembly 140 and is configured to sense the position of the base plate assembly 140 relative to the fixed plate 191; a stopper 194, which is connected to the end of the slide rail 170 located on the unloading side to limit the extreme position of the sliding plate 160.

[0049] Specifically, the handle 180 can be installed on the third side plate 143 near the second end of the slide rail 170. The staff can pull the handle 180 to slide the sliding plate 160 along the slide rail 170, thereby driving the material box to move, which is convenient for moving the material box. After loading, the staff will push the material box back to the first end of the slide rail 170. By setting the sensor component 193, it can be detected whether the material box is pushed back to the first end of the slide rail 170. For example, the sensor component 193 can include an inductive sensor and a sensor block. The inductive sensor can be connected to the fixed plate 191, and the sensor block is connected to the lower surface of the bottom plate assembly 140. When the material box moves to the first end of the slide rail 170, the sensor block is located within the detection range of the inductive sensor. The stopper 194 can be specifically located outside the first end of the slide rail 170. By setting the stopper 194, when the staff pushes the material box back, the stopper 194 can prevent the sliding plate 160 from moving further toward the first end of the slide rail 170.

[0050] In some embodiments, Figure 6 and Figure 7 As shown, the sliding plate 160 has a relative sliding in direction (i.e., the first end direction of the sliding rail 170) and a sliding out direction (i.e., the second end direction of the sliding rail 170) relative to the sliding rail 170, and the pressure rod loading and unloading machine 100 also includes: a driving member 190, the driving member 190 is installed to the fixed plate 191, and is arranged below the base plate assembly 140; a blocking member 192, the first end of the blocking member 192 is slidably connected to the driving member 190 along an inclined extension direction, so that the second end of the blocking member 192 can abut against the lower surface of the base plate assembly 140, and the extension direction of the blocking member 192 is set at an obtuse angle to the sliding out direction of the sliding plate 160.

[0051] The driving member 190 can be illustratively arranged at a position close to the second end of the slide rail 160. Specifically, if the transport device grabs the pressure bar 200 in the material box, the staff pulls the material box to move, which may damage the transport device, the pressure bar loading and unloading machine 100 or the pressure bar 200. Therefore, through this structure, since the extending direction of the blocking member 192 is set at an obtuse angle to the sliding direction of the sliding plate 160, the force applied by the blocking member 192 can prevent the sliding plate 160 from sliding in the sliding direction, thereby preventing the material box from moving when the transport device grabs the pressure bar 200 in the material box.

[0052] In some embodiments, when the sensor assembly 193 detects that the material box has been pushed back to the first end of the slide rail 170, the driver 190 drives the blocking member 192 to move so that the second end of the blocking member 192 abuts against the lower surface of the bottom plate assembly 140, so that the material box loaded by the staff cannot move, ensuring that the material box cannot move when the transport device grabs the pressure rod 200 in the material box. In actual applications, the staff can also press the button of the driver 190 to drive the blocking member 192 to separate from the lower surface of the bottom plate assembly 140, so that the material box can be pulled for loading.

[0053] Fig. 9 An exemplary embodiment of the present application is shown. Figure 7 A partial enlarged view of the middle area F.

[0054] In some embodiments, Fig. 9 As shown, the blocking member 192 includes: a cylinder rod 1921, one end of which can be slidably inserted into the driving member 190 along the extension direction; and an abutment block 1922, which is connected to the other end of the cylinder rod 1921, and the end of the abutment block 1922 facing away from the cylinder rod 1921 is conical; wherein, the base plate assembly 140 has a clamping portion 145, and the cylinder rod 1921 can drive the abutment block 1922 to abut against the clamping portion 145.

[0055] Specifically, the third side plate 143 near the second end of the slide rail 170 has a clamping portion 145, that is, the third side plate 143 includes a transverse plate and a clamping portion 145, the first end of the transverse plate is connected to the first bottom plate 141, the second end of the transverse plate is connected to the second bottom plate 142, the clamping portion 145 is connected to the bottom of the transverse plate, and when the abutment block 1922 abuts against the clamping portion 145, the side surface of the conical end can be abutted against the side of the clamping portion 145 close to the driving member 190.

[0056] Fig.10 Shown is a schematic structural diagram of a processing device provided by an exemplary embodiment of the present application.

[0057] Based on the same concept, Fig.10 As shown, the embodiment of the present application also provides a processing device 300, which includes: any one of the pressure rod loading and unloading machines 100 in the above embodiments, configured to receive and carry a horizontally placed pressure rod 200; a transportation device 310, configured to grab the pressure rod 200 carried by the pressure rod loading and unloading machine 100, and transport the pressure rod 200; a carrier 320, configured to receive and carry the pressure rod 200 and sheet material transported by the transportation device 310, the pressure rod 200 carried by the carrier 320 is located above the sheet material carried by the carrier 320, and the pressure rod 200 is configured to apply downward pressure to the sheet material; a reaction chamber 330, configured to carry the carrier 320 and the reaction solution to process the sheet material.

[0058] The sheet material is exemplarily a silicon wafer or a glass substrate, and the transport device is exemplarily a movable transport robot.

[0059] In actual work, the staff places the pressure rod 200 in the pressure rod loading and unloading machine 100 on the second side of the pressure rod loading and unloading machine 100; the transportation device 310 can move to the first side of the pressure rod loading and unloading machine 100, and grab the pressure rod 200 from the pressure rod loading and unloading machine 100 through the pressure rod gripper, and then move to the vicinity of the carrier 320, and respectively clamp the two ends of the pressure rod 200 in the clamping slots of the carrier 320, and rotate the pressure rod 200 so that the pressure rod 200 is clamped in the clamping slot. At this time, the sheet material is placed vertically in the carrier 320, and the pressure rod 200 is located above the sheet material and presses the sheet material 200 downward; the carrier 320 is transported to the reaction chamber 330 through other transportation mechanisms and immersed in the reaction solution. Finally, the reaction chamber 330 begins to process the sheet material.

[0060] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0061] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.

[0062] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0063] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0064] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A pressure rod loading and unloading machine, configured to carry a horizontally placed pressure rod and provide the pressure rod to a transport device, the pressure rod comprising a rod body and groove teeth, the groove teeth being axially arranged on the outer side wall of the rod body; characterized in that: The pressure rod loading and unloading machine comprises: A first side plate, wherein the first side plate is provided with at least one first groove along a first horizontal direction, wherein the first groove is configured to accommodate a first end of the compression rod, and the first horizontal direction is perpendicular to the axial direction and the vertical direction of the rod body; a second side plate, arranged opposite to the first side plate, the second side plate being provided with at least one second groove along the first horizontal direction, the second groove being configured to accommodate the second end of the compression rod, the first groove being arranged in one-to-one correspondence with the second groove, and a line connecting the geometric center of the first groove and the corresponding geometric center of the second groove forming a center line; At least two baffles are arranged between the first side plate and the second side plate and are spaced apart along the first horizontal direction, and two adjacent baffles are respectively arranged on both sides of a center line to form a placement space for accommodating the pressure rod; Among them, in any one of the placement spaces, a first distance between one baffle and the center line is greater than a second distance between another baffle and the center line, and the center line and the baffle at the first distance are used to accommodate one side of the pressure rod having the groove teeth.

2. The pressure rod loading and unloading machine according to claim 1, characterized in that: The shape of the horizontal cross section of the first groove is the same as the shape of the horizontal cross section of the first end of the pressure rod; And / or, a shape of a horizontal cross section of the second groove is the same as a shape of a horizontal cross section of the second end of the pressure rod.

3. The pressure rod loading and unloading machine according to claim 1 or 2, characterized in that: The placement space is configured to accommodate more than two vertically arranged pressure rods, each of the first grooves is configured to accommodate the first ends of more than two vertically arranged pressure rods, and each of the second grooves is configured to accommodate the second ends of more than two vertically arranged pressure rods.

4. The pressure rod loading and unloading machine according to claim 1 or 2, characterized in that: The first end of the compression rod has a first mark, and the first side plate has the first mark; The first mark includes a first color and / or a first pattern; and / or, The second end of the pressure rod has a second mark, and the second side plate has the second mark; The second mark includes a second color and / or a second pattern.

5. The pressure rod loading and unloading machine according to claim 1, characterized in that: The pressure rod loading and unloading machine also includes: A color sensor is mounted to a feed end of the plunger loading and unloading machine and is configured to detect a first color of a first end of the plunger passing through the feed end and / or a second color of a second end of the plunger.

6. The pressure rod loading and unloading machine according to claim 1 or 2, characterized in that: Also includes: Fixed plate; A slide rail, arranged above the fixed plate; A sliding plate, disposed above the fixed plate and slidably connected to the slide rail; A bottom plate assembly, wherein the lower surface of the bottom plate assembly is connected to the top of the sliding plate, the upper surface of the bottom plate assembly is connected to the bottom of the first side plate and the bottom of the second side plate, and the bottom of the baffle is connected to the upper surface of the bottom plate assembly.

7. The pressure rod loading and unloading machine according to claim 6, characterized in that: Also includes: A handle connected to the base plate assembly; a sensing assembly mounted to the fixing plate and / or the base plate assembly and configured to sense a position of the base plate assembly relative to the fixing plate; A stopper is connected to the end of the slide rail at the material unloading side to limit the limit position of the slide plate.

8. The pressure rod loading and unloading machine according to claim 6, characterized in that: The sliding plate has a relative sliding in direction and sliding out direction relative to the sliding rail, and the pressure rod loading and unloading machine also includes: A driving member, the driving member is mounted to the fixing plate and is disposed below the bottom plate assembly; A blocking member, wherein the first end of the blocking member is slidably connected to the driving member along an inclined extension direction so that the second end of the blocking member can abut against the lower surface of the base plate assembly, and the extension direction of the blocking member is set at an obtuse angle to the sliding direction of the sliding plate.

9. The pressure rod loading and unloading machine according to claim 8, characterized in that: The blocking member comprises: a cylinder rod, one end of which is slidably inserted into the driving member along the extending direction; and an abutment block, the abutment block being connected to the other end of the cylinder rod, and the end of the abutment block facing away from the cylinder rod being tapered; Wherein, the base plate assembly has a clamping portion, and the cylinder rod can drive the abutment block to abut against the clamping portion.

10. A processing equipment, characterized in that: include: The pressure rod loading and unloading machine as described in any one of claims 1 to 9 above is configured to receive and carry a horizontally placed pressure rod; A transport device is configured to grab the pressure rod carried by the pressure rod loading and unloading machine and transport the pressure rod; A carrier configured to receive and carry the pressure rod and the sheet material transported by the transport device, wherein the pressure rod carried by the carrier is located above the sheet material carried by the carrier, and the pressure rod is configured to apply downward pressure to the sheet material; The reaction chamber is configured to carry the carrier and the reaction solution to process the sheet material.

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