Evaporation boat of vacuum coating machine

Abstract

The utility model relates to the technical field of evaporation boats, in particular to an evaporation boat of a vacuum coating machine, which comprises an evaporation boat body and a protection device, a placing groove is arranged on the surface of the evaporation boat body, the evaporation boat body is rectangular, the protection device is arranged on the surface of the evaporation boat body, the protection device comprises a placing piece, and the placing piece is arranged above the evaporation boat body. The placing piece is embedded into a placing groove in the surface of the evaporation boat body, the placing piece comprises a placing shell, the shape of the placing shell is the same as that of the placing groove, the placing shell is matched with the inner wall of the placing groove, the surface of the placing shell is fixedly connected with a placing plate, and the placing plate is in lap joint with the upper surface of the evaporation boat body. The surface of the evaporation boat and the discharging groove can be protected conveniently, the situation that the whole evaporation boat cannot be used due to the fact that the surface of the evaporation boat and the discharging groove are corroded due to long-time coating is reduced, the whole evaporation boat does not need to be replaced when damaged, cost is saved, and the service life is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of evaporation boats, in particular to an evaporation boat of a vacuum coating machine. Background Art

[0002] Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a higher vacuum degree. There are many specific types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering and many other types. The main idea is to divide it into evaporation and sputtering. Evaporation coating generally heats the target material to evaporate the surface components in the form of atomic groups or ions, and settle on the surface of the substrate, and form a thin film through the film forming process (scattered points-island structure-vagal structure-layered growth). For sputtering coating, it can be simply understood as using electrons or high-energy lasers to bombard the target material, and sputter the surface components in the form of atomic groups or ions, and finally deposit on the surface of the substrate, undergoing a film forming process, and finally forming a thin film.

[0003] The evaporation boat is an important part of the vacuum coating machine. During the vacuum coating process, the evaporation boat is usually used to carry and heat the evaporated coating material, so that the material is vaporized and deposited on the surface of the workpiece to form a film. Its performance and quality have an important impact on the effect, stability, uniformity and other aspects of the coating.

[0004] Prior art such as the utility model with publication number CN220012783U, the utility model discloses a novel evaporation boat, including an evaporation boat body, an evaporation tank is arranged on the top of the evaporation boat body, a melting tank is arranged on the side of the evaporation tank, the evaporation tank is connected with the melting tank, the depth of the evaporation tank is greater than the depth of the melting tank, the bottom of the melting tank is provided with an inclined bottom surface inclined downward toward the evaporation tank, a melting tank is arranged on one side of the evaporation tank or melting tanks are arranged on both sides of the evaporation tank, the melting tank area of ​​the utility model has low resistance and low temperature, and is used for melting filamentary evaporation materials, and the evaporation tank area is composed of Due to the large resistance and high temperature, the evaporation efficiency is improved. The bottom of the melting tank is inclined, which is convenient for the molten material to flow into the evaporation tank, ensuring that there is a certain amount of evaporation material in the evaporation tank, solving the problem of unstable evaporation of the existing evaporation boat. The separation of the melting tank and the evaporation tank also solves the problem of metal splashing during the evaporation process, improves the evaporation stability of the evaporation boat, ensures the evaporation effect, and solves the problem that the evaporation boat currently used for vacuum evaporation generally uses an evaporation boat with one tank. Since the metal evaporates while melting in the evaporation tank, there is metal splashing during the evaporation process, resulting in unstable evaporation of the evaporation boat, affecting the evaporation effect.

[0005] In daily work, it is found that when the existing evaporation boat is in use, the evaporation boat works at high temperature and comes into contact with various coating materials. Some coating materials may chemically react with the evaporation boat material at high temperature, resulting in corrosion. Once the placement of the evaporation boat is damaged, the entire evaporation boat cannot be used anymore and needs to be replaced as a whole, causing a large amount of losses, which in turn causes the existing evaporation boat to be easily corroded at the discharge point, resulting in the problem that the entire evaporation boat cannot be used. Utility Model Content

[0006] The utility model aims to solve the defect in the prior art that the discharge part of the evaporation boat is easily corroded, resulting in the whole boat being unusable, and proposes an evaporation boat for a vacuum coating machine.

[0007] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: an evaporation boat of a vacuum coating machine comprises an evaporation boat body and a protective device, a surface of the evaporation boat body is provided with a placement groove, the evaporation boat body is arranged in a rectangular shape, the protective device is arranged on the surface of the evaporation boat body, the protective device comprises a placement piece, the placement piece is arranged above the evaporation boat body, the placement piece is embedded in the placement groove on the surface of the evaporation boat body, the placement piece comprises a placement shell, the placement shell has the same shape as the placement groove and is adapted to the inner wall of the placement groove, a placement plate is fixedly connected to the surface of the placement shell, the placement plate is overlapped on the upper surface of the evaporation boat body, through the above-mentioned components, the placement shell in the placement piece is inserted into the placement groove, and then the placement plate is overlapped on the surface of the evaporation boat body, the placement piece can shield and protect the upper surface and the placement groove of the evaporation boat body, reduce corrosion, and after the placement piece is damaged, it only needs to be replaced separately, without replacing the entire evaporation boat body, thereby improving the service life of the evaporation boat body.

[0008] Preferably, four positioning posts are fixedly connected to the lower surface of the placement plate, and four positioning holes are opened on the surface of the evaporation boat, and the positioning posts are plugged into the inner walls of the positioning holes. Through the above components, when the placement piece is installed, the positioning posts on the surface of the placement plate will be inserted into the positioning holes on the surface of the evaporation boat, thereby achieving overall stability and enhancing the strength of the placement piece.

[0009] Preferably, two screws are provided on the surface of the placement plate, and two screw holes are opened on the surface of the evaporation boat, and the screws are threadedly connected to the screw holes. Through the above components, the placement plate and the placement shell can be stably installed in the evaporation boat and the placement groove by screws, thereby improving the overall stability.

[0010] Preferably, an auxiliary component is arranged above the placement shell, and the auxiliary component includes a cover plate, and the cover plate is arranged above the placement shell. A plug-in is fixedly connected to the lower surface of the placement shell. Through the above components, when the evaporation boat is placed and not in use, the plug-in on the cover plate can be inserted into the placement shell, thereby protecting the placement shell and reducing the entry of dust and impurities that affect the next coating.

[0011] Preferably, a filling pad is fixedly connected to the outer surface of the plug-in. Through the above components, when the plug-in is inserted into the placement shell, the plug-in and the filling pad can squeeze the inner wall of the placement shell, thereby improving the stability effect during placement.

[0012] Preferably, a handle is fixedly connected to the upper surface of the cover plate, and the handle is arranged in a C shape. Through the above-mentioned components, the C-shaped handle facilitates the removal of the cover plate and the plug-in, thereby improving the overall usability.

[0013] Compared with the prior art, the advantages and positive effects of the utility model are:

[0014] 1. In the utility model, by setting a protective device, the placement shell in the placement piece is inserted into the placement groove, and then the placement plate is overlapped on the surface of the evaporation boat body. The placement piece can shield and protect the upper surface of the evaporation boat body and the placement groove, reduce corrosion, and after the placement piece is damaged, it only needs to be replaced separately, without replacing the entire evaporation boat body. By setting a protective device, it is convenient to protect the surface of the evaporation boat and the discharge groove, reduce the corrosion of the surface of the evaporation boat and the discharge groove due to long-term coating, thereby causing the entire evaporation boat to be unusable. When damaged, it does not need to be replaced as a whole, saving costs and increasing service life.

[0015] 2. In the present invention, by providing an auxiliary component, the placement shell in the placement piece can be shielded when not in use, thereby reducing the entry of dust and impurities that may affect the subsequent coating effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 The utility model provides a three-dimensional structural schematic diagram of the evaporation boat of the vacuum coating machine;

[0017] Figure 2 This is a partial structural schematic diagram of the evaporation boat of the vacuum coating machine proposed in the utility model;

[0018] Figure 3 The utility model provides a partial structural schematic diagram of the evaporation boat of the vacuum coating machine;

[0019] Figure 4 This is a partial structural schematic diagram of the protective device of the evaporation boat of the vacuum coating machine proposed by the utility model;

[0020] Figure 5 The utility model provides a partial structural schematic diagram of the auxiliary device of the evaporation boat of the vacuum coating machine.

[0021] Legend:

[0022] 1. Evaporation boat body; 2. Placement slot; 3. Protective device; 31. Placement piece; 311. Placement shell; 312. Placement plate; 32. Screw; 33. Screw hole; 34. Positioning hole; 35. Positioning column; 36. Auxiliary component; 361. Cover plate; 362. Plug-in; 363. Filling pad; 364. Handle. DETAILED DESCRIPTION

[0023] See also Figure 1-Figure 5 The utility model provides a technical solution: an evaporation boat of a vacuum coating machine includes an evaporation boat body 1 and a protective device 3. A placement groove 2 is opened on the surface of the evaporation boat body 1. The evaporation boat body 1 is arranged in a rectangular shape. The protective device 3 is arranged on the surface of the evaporation boat body 1.

[0024] Specifically, the protective device 3 includes a placement piece 31, which is arranged above the evaporation boat 1. The placement piece 31 is embedded in the placement groove 2 on the surface of the evaporation boat 1. The placement piece 31 includes a placement shell 311. The placement shell 311 has the same shape as the placement groove 2 and is adapted to the inner wall of the placement groove 2. A placement plate 312 is fixedly connected to the surface of the placement shell 311, and the placement plate 312 is overlapped on the upper surface of the evaporation boat 1.

[0025] In this embodiment: the placement shell 311 in the placement piece 31 is inserted into the placement groove 2, and then the placement plate 312 is overlapped on the surface of the evaporation boat 1. The placement piece 31 can shield and protect the upper surface of the evaporation boat 1 and the placement groove 2 to reduce corrosion. After the placement piece 31 is damaged, it only needs to be replaced separately, which reduces the corrosion of the surface of the evaporation boat 1 and the placement groove 2 due to long-term coating, thereby causing the entire evaporation boat 1 to be unusable, thereby increasing the service life of the evaporation boat 1.

[0026] Specifically, four positioning posts 35 are fixedly connected to the lower surface of the placement plate 312 , and four positioning holes 34 are opened on the surface of the evaporation boat 1 . The positioning posts 35 are plugged into the inner walls of the positioning holes 34 .

[0027] In this embodiment, when the placement piece 31 is installed, the positioning posts 35 on the surface of the placement plate 312 are inserted into the positioning holes 34 on the surface of the evaporation boat 1 , thereby achieving overall stability and enhancing the strength of the placement piece 31 .

[0028] Specifically, two screws 32 are provided on the surface of the placement plate 312, and two screw holes 33 are opened on the surface of the evaporation boat body 1. The screws 32 are threadedly connected with the screw holes 33. The screws 32 can be used to stably install the placement plate 312 and the placement shell 311 in the evaporation boat body 1 and the placement groove 2 to improve the overall stability.

[0029] Specifically, an auxiliary component 36 is disposed above the placement shell 311 . The auxiliary component 36 includes a cover plate 361 . The cover plate 361 is disposed above the placement shell 311 . A plug-in 362 is fixedly connected to the lower surface of the placement shell 311 .

[0030] In this embodiment, when the evaporation boat 1 is not in use, the plug-in 362 on the cover plate 361 can be inserted into the placement shell 311, so as to protect the placement shell 311 and reduce the situation where dust and impurities enter and affect the next coating.

[0031] Specifically, the outer surface of the plug-in 362 is fixedly connected with a filling pad 363. When the plug-in 362 is inserted into the placement shell 311, the plug-in 362 cooperates with the filling pad 363 to squeeze the inner wall of the placement shell 311, thereby improving the stability effect during placement.

[0032] Specifically, a handle 364 is fixedly connected to the upper surface of the cover plate 361 , and the handle 364 is arranged in a C shape.

[0033] In this embodiment: the C-shaped handle 364 facilitates the removal of the cover plate 361 and the plug-in 362, thereby improving the overall usability.

[0034] Working principle: By setting the protective device 3, when the equipment needs to be used, the placement piece 31 is placed on the evaporation boat 1, and then the placement shell 311 is inserted into the placement groove 2, and the placement plate 312 is overlapped on the surface of the evaporation boat 1. The four positioning columns 35 under the placement plate 312 are respectively inserted into the four positioning holes 34 on the surface of the evaporation boat 1. Then the screw 32 is turned, and the screw 32 can be connected with the screw hole 33 on the surface of the evaporation boat 1. The placement piece 31 can protect the surface of the evaporation boat 1 and the placement groove 2. When the placement piece 31 is damaged, it can be replaced separately. That is, when the evaporation boat body 1 is not in use, the plug-in 362 on the cover plate 361 is inserted into the placement shell 311 through the handle 364, and then the plug-in 362 cooperates with the filling pad 363 to squeeze the inner wall of the placement shell 311 to stably place the cover plate 361 and play a role in blocking dust. By setting the protective device 3, it is convenient to protect the surface of the evaporation boat and the discharge trough, reduce the corrosion of the surface of the evaporation boat and the discharge trough due to long-term coating, thereby reducing the entire evaporation boat from being unusable. When damaged, it does not need to be replaced as a whole, saving costs and increasing service life.

Claims

1. An evaporation boat of a vacuum coating machine, comprising an evaporation boat body (1) and a protective device (3), characterized in that: The surface of the evaporation boat (1) is provided with a placement groove (2); the evaporation boat (1) is arranged in a rectangular shape; the protective device (3) is arranged on the surface of the evaporation boat (1); the protective device (3) comprises a placement piece (31); the placement piece (31) is arranged above the evaporation boat (1); the placement piece (31) is embedded in the placement groove (2) on the surface of the evaporation boat (1); the placement piece (31) comprises a placement shell (311); the placement shell (311) has the same shape as the placement groove (2) and is adapted to the inner wall of the placement groove (2); a placement plate (312) is fixedly connected to the surface of the placement shell (311); the placement plate (312) is overlapped on the upper surface of the evaporation boat (1).

2. The evaporation boat of the vacuum coating machine according to claim 1, characterized in that: Four positioning columns (35) are fixedly connected to the lower surface of the placement plate (312), four positioning holes (34) are opened on the surface of the evaporation boat (1), and the positioning columns (35) are plugged into the inner walls of the positioning holes (34).

3. The evaporation boat of the vacuum coating machine according to claim 1, characterized in that: Two screws (32) are arranged on the surface of the placement plate (312), and two screw holes (33) are opened on the surface of the evaporation boat (1), and the screws (32) are threadedly connected to the screw holes (33).

4. The evaporation boat of the vacuum coating machine according to claim 1, characterized in that: An auxiliary component (36) is arranged above the placement shell (311), and the auxiliary component (36) comprises a cover plate (361). The cover plate (361) is arranged above the placement shell (311), and a plug-in unit (362) is fixedly connected to the lower surface of the placement shell (311).

5. The evaporation boat of the vacuum coating machine according to claim 4, characterized in that: A filling pad (363) is fixedly connected to the outer surface of the plug-in unit (362).

6. The evaporation boat of the vacuum coating machine according to claim 4, characterized in that: A handle (364) is fixedly connected to the upper surface of the cover plate (361), and the handle (364) is arranged in a C shape.

Images