Anti-cracking graphite bottom heater

Abstract

The utility model belongs to the technical field of single crystal furnaces, and particularly relates to an anti-cracking graphite bottom heater which comprises bottom foot plates which are symmetrically arranged, and two groups of heating strips are symmetrically arranged between the two bottom foot plates; the fixing part is arranged between the foot plate and the end part of the heating strip and is used for mounting the heating strip on the foot plate; wherein a connecting hole is formed in the footing piece. When the position of the connecting hole is damaged, only the damaged bottom foot plate is replaced instead of replacing the whole bottom heater, so that the production cost is reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of single crystal furnaces, and in particular relates to an anti-cracking graphite bottom heater. Background Art

[0002] The bottom heater is an important graphite component that cannot be missing in the single crystal furnace. When the heater is powered on, it generates heat through its own resistance. The silicon material in the crucible melts by absorbing heat, and the temperature is increased or decreased by changing the heater power.

[0003] However, most of the existing bottom heaters are integrated, and the connection between the bottom heater and the main heater foot plate is easily damaged. If the connection between the bottom heater and the main heater foot plate is damaged, the entire bottom heater needs to be replaced, resulting in increased production costs. Utility Model Content

[0004] The purpose of the utility model is to provide an anti-cracking graphite bottom heater in view of the above-mentioned technical problems, so as to solve the problems raised in the background technology.

[0005] In view of this, the utility model provides an anti-cracking graphite bottom heater, characterized in that it includes:

[0006] Base plates, the base plates are symmetrically arranged, and two groups of heating strips are centrally symmetrically arranged between the two base plates;

[0007] A fixing portion, which is arranged between the foot plate and the end of the heating strip and is used to install the heating strip on the foot plate;

[0008] Wherein, a connecting hole is provided on the base plate.

[0009] In the present technical solution, the heating plate and the base plate can be separated by cooperating with each other through the base plate, the fixing part and the heating strip. When damage occurs at the connecting hole, only the damaged base plate can be replaced instead of replacing the entire bottom heater, which is beneficial to reduce production costs.

[0010] In the above technical solution, further, the fixing part includes:

[0011] A platform, which is provided on the base plate and is used to support the end of the heating strip;

[0012] A perforation, wherein the perforation is arranged between the base plate and the heating strip and passes through the base plate and the heating plate;

[0013] A locking block and a locking bolt are respectively arranged in the through holes on the base plate and the heating plate, and the locking block and the locking bolt are threadedly connected.

[0014] In the present technical solution, the heating plate is installed on the base plate by passing the locking bolt through the through-hole and being threadedly connected to the locking block. The threadedly connected locking block and locking bolt make it easy for maintenance personnel to disassemble the bottom heater and the heating strip, which is beneficial to improving replacement efficiency.

[0015] In the above technical solution, further, the perforations and connecting holes are both waist holes.

[0016] In the present technical solution, by setting the perforations and the connecting holes as waist holes, the damage caused by deformation between the main heater, the base plate or the heating strip can be effectively reduced, which is beneficial to extending the service life.

[0017] In the above technical solution, further, the heating strip is arranged in a serpentine shape.

[0018] In the present technical solution, the serpentine-shaped heating strips can increase the contact area with the contact object, which is beneficial to improving the efficiency of heat transfer.

[0019] In the above technical solution, further, the end of the heating strip and the through-holes arranged on the base plate are both provided with recessed platforms.

[0020] In the technical solution, the recessed platform is provided so that the top surface of the locking bolt can be lower than the top surface of the bottom heater, which is beneficial to increase the contact area between the heating strip and the contact object.

[0021] In the above technical solution, further, the bottom of the locking block is rectangular, the width of which is consistent with the width of the recessed platform, and is embedded in the through hole on the base plate.

[0022] In the present technical solution, a locking block having a width consistent with the width of the recess is provided, and the locking block is embedded in the through hole, so that the locking block can be prevented from shaking or rotating in the through hole, and the connection between the locking bolt and the locking block can be facilitated, which is beneficial to improving the installation efficiency of the maintenance personnel.

[0023] In the above technical solution, further, the locking bolt and the locking block are both made of carbon-carbon material.

[0024] The beneficial effects of the utility model are:

[0025] 1. Through the cooperation between the base plate, the fixing part and the heating strip, the heating plate and the base plate can be separated. When the connecting hole is damaged, only the damaged base plate can be replaced instead of the entire bottom heater, which is conducive to reducing production costs.

[0026] 2. By setting the perforations and connection holes as waist holes, the damage caused by deformation between the main heater, the base plate or the heating strip can be effectively reduced, which is beneficial to extend the service life.

[0027] 3. By using a locking block with the same width as the concave platform and embedding the locking block in the through hole, the locking block can be prevented from shaking or rotating in the through hole, which can facilitate the connection between the locking bolt and the locking block, and is beneficial to improving the installation efficiency of the maintenance personnel. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a three-dimensional schematic diagram of the utility model;

[0029] Figure 2 This utility model Figure 1 A magnified image of area A;

[0030] Figure 3 It is a top view of the utility model;

[0031] Figure 4 This utility model Figure 3 The cross-sectional view shown in ;

[0032] The symbols in the figure are:

[0033] 1. Base plate; 2. Heating strip; 3. Fixing part; 301. Platform; 302. Through hole; 303. Locking block; 304. Locking bolt; 4. Connecting hole; 5. Concave platform. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the present application to clearly describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments in the present application belong to the scope of protection of this application.

[0035] In the description of the present application, it should be noted that the terms used herein are only for describing specific embodiments, and are not intended to limit the exemplary embodiments according to the present application. For ease of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship. The technology, methods and equipment known to ordinary technicians in the relevant field may not be discussed in detail, but in appropriate cases, the technology, methods and equipment should be regarded as part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as merely exemplary, rather than as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that similar numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0036] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here, and the objects distinguished by "first", "second", etc. are generally of one type, and the number of objects is not limited. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally indicates that the objects associated with each other are in an "or" relationship.

[0037] It should be noted that, in the description of the present application, the orientation or positional relationship indicated by terms such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description. Unless otherwise stated, these orientation words do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the scope of protection of the present application; the orientation words "inside and outside" refer to the inside and outside relative to the contour of each component itself.

[0038] It should be noted that, in the present application, the terms "comprise", "include" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises one..." does not exclude the presence of other identical elements in the process, method, article or device including the element. In addition, it should be noted that the scope of the method and device in the embodiment of the present application is not limited to performing functions in the order shown or discussed, and may also include performing functions in a substantially simultaneous manner or in reverse order according to the functions involved, for example, the described method may be performed in an order different from that described, and various steps may also be added, omitted, or combined. In addition, the features described with reference to certain examples may be combined in other examples.

[0039] Embodiment 1:

[0040] Depend on Figure 1-Figure 4As shown, this embodiment provides an anti-cracking graphite bottom heater, including: a base plate 1, the base plate 1 is symmetrically arranged, and two groups of heating strips 2 are centrally symmetrically arranged between the two base plates 1; a fixing portion 3, the fixing portion 3 is arranged between the base plate and the end of the heating strip 2, and is used to install the heating strip 2 to the base plate; wherein, a connecting hole 4 is opened on the base plate 1.

[0041] Through the coordination among the base plate 1, the fixing part 3 and the heating strip 2, the heating plate can be separated from the base plate 1. When damage occurs at the connection hole 4, only the damaged base plate 1 can be replaced instead of replacing the entire base heater, which is beneficial to reduce production costs.

[0042] Furthermore, the fixing part 3 includes: a platform 301, which is opened on the base plate 1 to support the end of the heating strip 2; a through hole 302, which is arranged between the base plate 1 and the heating strip 2, and passes through the base plate 1 and the heating plate; a locking block 303, a locking bolt 304, which are respectively arranged in the through holes 302 on the base plate 1 and the heating plate, and the locking block 303 and the locking bolt 304 are threadedly connected.

[0043] The heating plate is installed on the base plate 1 by passing the locking bolt 304 through the through-hole 302 and being threadedly connected with the locking block 303. The threadedly connected locking block 303 and the locking bolt 304 can facilitate the maintenance personnel to disassemble the bottom heater and the heating strip 2, which is beneficial to improving the replacement efficiency.

[0044] Embodiment 2:

[0045] Depend on Figure 1-Figure 4 As shown, this embodiment provides an anti-cracking graphite bottom heater, which, in addition to the technical solutions of the above embodiments, also has the following technical features.

[0046] Furthermore, the through hole 302 and the connecting hole 4 are both waist holes.

[0047] By setting the through hole 302 and the connecting hole 4 as waist holes, the damage caused by deformation between the main heater, the base plate 1 or the heating strip 2 can be effectively reduced, which is beneficial to prolonging the service life.

[0048] Furthermore, the heating strip 2 is arranged in a serpentine shape.

[0049] The serpentine-shaped heating strip 2 can increase the contact area with the contact object, which is beneficial to improving the efficiency of heat transfer.

[0050] Furthermore, the end of the heating strip 2 and the through hole 302 arranged on the base plate 1 are both provided with a recessed platform 5 .

[0051] The recessed platform 5 can make the top surface of the locking bolt 304 lower than the top surface of the bottom heater, which is beneficial to increase the contact area between the heating strip 2 and the contact object.

[0052] Furthermore, the bottom of the locking block 303 is rectangular, the width of which is consistent with the width of the recessed platform 5 , and is embedded in the through hole 302 on the base plate 1 .

[0053] By having a locking block 303 with a width consistent with the width of the recessed platform 5 and embedding the locking block 303 in the through hole 302, the locking block 303 can be prevented from shaking or rotating in the through hole 302, and the connection between the locking bolt 304 and the locking block 303 can be facilitated, which is beneficial to improving the installation efficiency of the maintenance personnel.

[0054] Furthermore, the locking bolt 304 and the locking block 303 are both made of carbon-carbon material.

[0055] The embodiments of the present application are described above in conjunction with the accompanying drawings. In the absence of conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of the present application, ordinary technicians in this field can also make many forms without departing from the purpose of the present application and the scope of protection of the claims, all of which are within the protection of the present application.

Claims

1. A crack-proof graphite bottom heater, characterized in that ,include: Base plates (1), the base plates (1) are symmetrically arranged, and two groups of heating strips (2) are centrally symmetrically arranged between the two base plates (1); A fixing portion (3), the fixing portion (3) being arranged between the foot plate and the end of the heating strip (2) and being used for mounting the heating strip (2) on the foot plate; Wherein, a connecting hole (4) is provided on the base plate (1).

2. The anti-crack graphite bottom heater according to claim 1, characterized in that: The fixing part (3) comprises: A platform (301), the platform (301) is provided on the base plate (1) and is used to support the end of the heating strip (2); A perforation (302), wherein the perforation (302) is arranged between the base plate (1) and the heating strip (2), and penetrates the base plate (1) and the heating plate; A locking block (303) and a locking bolt (304) are respectively arranged in the through holes (302) on the base plate (1) and the heating plate, and the locking block (303) and the locking bolt (304) are threadedly connected.

3. The anti-crack graphite bottom heater according to claim 2, characterized in that: The through hole (302) and the connecting hole (4) are both waist holes.

4. The anti-crack graphite bottom heater according to claim 1, characterized in that: The heating strip (2) is arranged in a serpentine shape.

5. The anti-crack graphite bottom heater according to claim 2, characterized in that: The end of the heating strip (2) and the through hole (302) provided on the base plate (1) are both provided with a concave platform (5).

6. The anti-crack graphite bottom heater according to claim 2, characterized in that: The bottom of the locking block (303) is rectangular, with a width consistent with the width of the concave platform (5), and is embedded in the through hole (302) on the base plate (1).

7. The anti-crack graphite bottom heater according to claim 2, characterized in that: The locking bolt (304) and the locking block (303) are both made of carbon-carbon material.

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