Laser scanning head system

Abstract

The utility model discloses a laser scanning head system, which relates to the technical field of laser marking, laser cutting and laser welding and comprises a laser transmitter, a light splitting assembly and a scanning head. The light splitting assembly is arranged on the laser emitting side of the laser emitter at an interval, and the light splitting assembly receives the laser emitted by the laser emitter and disperses the laser into two laser beams; the scanning head comprises a field lens and two galvanometer groups, and the two laser beams enter the same scanning head, are reflected by the two galvanometer groups respectively, are focused by the same field lens and are emitted out. According to the laser scanning head system, the two galvanometer groups are arranged in one scanning head, and laser beams are split, so that the laser scanning head system can generate two laser beams for laser processing at the same time, the working efficiency of the laser is improved, the two laser beams share components such as the laser transmitter and the field lens, and the production cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical fields of laser marking, laser cutting and laser welding, and particularly relates to a laser scanning head system. Background Art

[0002] Laser processing technology plays an important role in the field of industrial manufacturing. The core device of the laser processing technology, the scanning head, usually consists of a field lens and a pair of galvanometers. The galvanometer is responsible for the precise deflection of the laser beam, and the field lens ensures that a clear focus is formed on the target object by the laser. This configuration enables laser processing to have the characteristics of high speed, high precision and high stability. With the development of technology, the laser processing speed and efficiency are continuously improved, meeting the growing industrial production demands.

[0003] However, the deflection speed of the galvanometer affects the laser processing speed. Therefore, the existing laser processing speed is limited by the limit speed of the galvanometer, and the physical limit speed of the galvanometer has become the main bottleneck restricting the further improvement of the laser processing speed. In the existing laser processing industry, only by adopting multiple laser scanning production lines can the production demands be met, but this will lead to an increase in production costs. Summary of the Utility Model

[0004] The main purpose of the utility model is to propose a laser scanning head system, aiming to solve the problem that the laser processing efficiency of the existing laser scanning head is low, resulting in high production costs.

[0005] To achieve the above purpose, the laser scanning head system proposed by the utility model is used for laser marking, laser cutting and laser welding. The laser scanning head system includes a laser emitter, a beam splitting component and a scanning head. The beam splitting component is arranged at one side of the laser emitted by the laser emitter at intervals. The beam splitting component receives the laser emitted by the laser emitter and disperses the laser into two laser beams. The scanning head includes a field lens and two galvanometer groups. The two laser beams enter the same scanning head, and after being reflected by the two galvanometer groups respectively, they are focused and emitted through the same field lens.

[0006] In an embodiment of the utility model, each galvanometer group includes two galvanometer mirrors and two motors. Each motor is drivingly connected to a galvanometer mirror, so that the two galvanometer mirrors of each galvanometer group rotate in mutually perpendicular directions. Each laser beam is reflected by the two galvanometer mirrors of a galvanometer group in sequence and then enters the same field lens.

[0007] In an embodiment of the present utility model, the scanning head further includes a bracket. A cavity for light propagation is formed inside the bracket. An outgoing light port and two incoming light ports communicating with the cavity are provided on the surface of the bracket. The galvanometer mirrors are arranged inside the cavity, and the motor is installed on the bracket. Two laser beams respectively enter from the two incoming light ports, are reflected by the two galvanometer mirrors in sequence, and then enter the same field lens from the outgoing light port.

[0008] In an embodiment of the present utility model, the outgoing light port is provided on the bottom surface of the bracket, and the two incoming light ports are respectively provided on the opposite side surfaces of the bracket. The two galvanometer mirrors of each galvanometer mirror group are respectively arranged on the top surface of the bracket and the side surface provided with the incoming light port, and the two galvanometer mirror groups are rotationally symmetrically arranged along the center of the bracket.

[0009] In an embodiment of the present utility model, the beam splitting component includes two beam expanders, and the two beam expanders are respectively arranged at intervals on the incoming light side of the two galvanometer mirror groups. The beam expanders are used to expand the laser beams, and adjust the size and focal length of the focused light spots.

[0010] In an embodiment of the present utility model, the beam splitting component further includes an inverted beam expander, and the inverted beam expander is arranged at intervals on the side where the laser emitter emits laser. The inverted beam expander is used to reduce the spot size of the laser emitted by the laser emitter.

[0011] In an embodiment of the present utility model, the beam splitting component further includes a beam splitter, and the beam splitter is arranged between the laser emitter and the beam expander, and is used to split the laser emitted by the laser emitter into two laser beams.

[0012] In an embodiment of the present utility model, the beam splitting component further includes a plurality of reflecting mirrors, and the plurality of reflecting mirrors are respectively arranged at intervals between the beam splitter and different beam expanders. The two laser beams split by the beam splitter are respectively reflected by different reflecting mirrors and then enter the two galvanometer mirror groups through different beam expanders.

[0013] In an embodiment of the present utility model, at least two reflecting mirrors are arranged at intervals on the reflecting surface of the beam splitter, and at least two reflecting mirrors are arranged at intervals on the transmitting surface of the beam splitter. The laser beam reflected by the beam splitter and the laser beam transmitted by the beam splitter respectively pass through different reflecting mirrors and then enter different galvanometer mirror groups along directions that are parallel and opposite to each other.

[0014] In an embodiment of the present utility model, the laser scanning head system further includes a mounting plate. An opening is provided on the surface of the mounting plate. The laser emitter, the beam splitting component, and the galvanometer are all mounted on the top surface of the mounting plate, and the field lens is mounted on the bottom surface of the mounting plate. After the laser beam is reflected by the galvanometer, it enters the same field lens through the opening.

[0015] The laser scanning head system proposed by the present utility model is used for laser marking, laser cutting, and laser welding of products. The laser scanning head system includes a laser emitter, a beam splitting component, and a scanning head. The laser emitted by the laser emitter is successively passed through the beam splitting component and then dispersed into two laser beams, which are then injected into the same scanning head. The scanning head includes a field lens and two galvanometer groups. After the two laser beams are respectively reflected by the two galvanometer groups, they are focused and emitted onto the surface of the sample to be processed through the same field lens. Compared with the prior art, in this application, two galvanometer groups are provided in one scanning head, and the laser beam is split, so that the laser scanning head system can simultaneously generate two laser beams for laser processing, thereby improving the efficiency of laser processing. The two laser beams share components such as the laser emitter and the field lens, thus reducing the production cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on the structures shown in these drawings without creative efforts.

[0017] Figure 1 is a schematic structural diagram of the laser scanning head system provided by the present utility model;

[0018] Figure 2 is Figure 1 a partial enlarged view at A;

[0019] Figure 3 is a top view of the laser scanning head system provided by the present utility model;

[0020] Figure 4 is Figure 3 a sectional view of the laser scanning head system along B - B.

[0021] Explanation of the reference numerals in the drawings:

[0022] 1. Laser scanning head system; 10. Laser emitter; 20. Beam splitting component; 21. Beam expander; 22. Beam splitter; 23. Reflecting mirror; 24. Inverted beam expander; 30. Scanning head; 31. Field lens; 32. Galvanometer group; 321. Motor; 322. Galvanometer mirror; 33. Bracket; 331. Cavity; 332. Light inlet; 333. Light outlet; 40. Mounting plate; 41. Opening.

[0023] The realization, functional features and advantages of the purpose of the present utility model will be further described with reference to the embodiments and the accompanying drawings. Detailed implementation manners

[0024] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present utility model.

[0025] It should be noted that if there are directional indications (such as up, down, left, right, front, back,...) in the embodiments of the present utility model, the directional indications are only used to explain the relative positional relationship and movement conditions between components in a specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0026] In addition, if there are descriptions such as "first", "second", etc. in the embodiments of the present utility model, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In addition, if "and / or" or "and / or" appears throughout the text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or a solution where A and B are satisfied simultaneously. In addition, the technical solutions between the embodiments can be combined with each other, but it must be based on the fact that those of ordinary skill in the art can implement them. When the combination of technical solutions results in contradictions or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the protection scope required by the present utility model.

[0027] The present utility model provides a laser scanning head system 1 for laser marking, laser cutting, and laser welding.

[0028] Combined with Figure 1 and Figure 3As shown, in an embodiment of the present utility model, the laser scanning head system 1 includes a laser emitter 10, a beam splitting component 20, and a scanning head 30; the beam splitting component 20 is disposed at one side of the laser emitted by the laser emitter 10 at an interval, the beam splitting component 20 receives the laser emitted by the laser emitter 10, and disperses the laser into two laser beams; the scanning head 30 includes a field lens 31 and two galvanometer groups 32. The two laser beams enter the same scanning head 30, and after being reflected by the two galvanometer groups 32 respectively, they are focused and emitted through the same field lens 31.

[0029] In this embodiment, the laser emitter 10 can be a fiber laser, a CO2 laser, a solid laser, a semiconductor laser, etc., for marking, cutting, and welding different materials. The output power of the laser can be adjusted to meet the marking, cutting, and welding requirements of different materials and different depths.

[0030] The beam splitting component 20 includes a plurality of optical lenses, and these optical lenses are sequentially arranged between the laser emitter 10 and the scanning head 30 to adjust parameters such as the propagation direction, propagation path, optical path, spot size, beam focal length, and number of laser beams of the laser, so as to make the laser incident into the scanning head 30 the same as or similar to the preset light parameters, thereby ensuring the beam quality and positioning accuracy of laser marking, laser cutting, and laser welding. Specifically, the beam splitting component 20 includes some or all of a beam expander 21, a beam splitter 22, a reflector 23, and a collimator. The quantity and position of each component are set according to the laser propagation path, optical path, and beam performance requirements.

[0031] During the galvanometer scanning process, the field lens 31 ensures that the laser beam can enter the specified focus and maintains the focus within the same light spot or plane. Even if the light is incident on the field lens 31 obliquely, it can ensure that a uniformly sized focused spot is formed by the laser beam within the entire marking, welding, and cutting plane. The galvanometer group 32 is composed of a high-precision plane mirror and a motor 321. The motor 321 is a servo motor, and realizes the fast and precise deflection of the galvanometer through precise microstep control to adjust the emission angle of the laser beam. For example Figure 1 As shown, the laser emitter 10 and the beam splitting component 20 are arranged on a horizontal plane, and at the same time, the laser is parallel to the horizontal plane during the propagation process. When the laser is incident on the galvanometer group 32, through the reflection of the galvanometer group 32, the emitted laser enters the field lens 31 to meet the requirements of different laser propagation paths, directions, and optical paths.

[0032] Compared with the prior art, in the present application, two galvanometer groups 32 are arranged in the same scanning head 30, and the laser is split, so that two laser beams for laser processing can be generated simultaneously in the same laser scanning head system 1, thereby improving the efficiency of laser processing. The two laser beams share the same laser emitter 10, the same field lens 31 and other components, thus reducing the production cost.

[0033] Combined Figure 4 As shown, in an embodiment of the present utility model, each galvanometer group 32 includes two galvanometer mirrors 322 and two motors 321. Each motor 321 is drivingly connected to each galvanometer mirror 322 to enable the two galvanometer mirrors 322 of each galvanometer group 32 to rotate in mutually perpendicular directions. After each laser beam is reflected by the two galvanometer mirrors 322 of a galvanometer group 32 in sequence, it then enters the same field lens 31.

[0034] In this embodiment, an optical coating with a high reflectivity, such as a reflective film, is coated on the reflection surface of the galvanometer mirror 322, which can significantly improve the reflection efficiency of the galvanometer mirror 322 for the laser and reduce the scattering of the laser beam. One of the two galvanometer mirrors 322 in each galvanometer group 32 receives the incident laser beam and reflects the laser beam onto the other galvanometer mirror 322, and the other galvanometer mirror 322 reflects the laser beam to the field lens 31 again. Each galvanometer mirror 322 is driven by a servo motor 321 that is independently controlled. It can be understood that the two servo motors 321 in each galvanometer group 32 respectively correspond to the adjustments in the X-axis and Y-axis directions of the laser. By controlling different servo motors 321 to drive different galvanometer mirrors 322 to rotate, the position and angle of the laser reflected from the galvanometer group 32 are adjusted by adjusting the angle of the galvanometer mirror 322, thereby realizing the processing of different shapes or patterns of materials. The connection between the servo motor 321 and the galvanometer mirror 322 uses a coupling to enable the servo motor 321 and the galvanometer mirror 322 to deflect coaxially.

[0035] Combined Figure 2 and Figure 4 As shown, in an embodiment of the present utility model, the scanning head 30 further includes a bracket 33. A cavity 331 for light propagation is formed inside the bracket 33. An optical outlet 333 and two optical inlets 332 communicating with the cavity 331 are provided on the surface of the bracket 33. The galvanometer mirror 322 is disposed inside the cavity 331, and the motor 321 is installed on the bracket 33. Two laser beams respectively enter from the two optical inlets 332, are reflected by the two galvanometer mirrors 322 in sequence, and then enter the same field lens 31 from the optical outlet 333.

[0036] In this embodiment, the bracket 33 is made of aluminum alloy material, which has a relatively light mass and good heat dissipation efficiency. An anodic oxidation treatment is performed on the cavity 331 of the bracket 33 to form a black oxide film. This oxide film has a high absorption rate, can reduce the reflection of the laser beam, reduce the stray light inside the cavity 331, and thus improve the accuracy of marking, cutting, and welding.

[0037] The surface of the bracket 33 is provided with mounting holes. The motor 321 is installed on the outer surface of the bracket 33. The power output shaft of the motor 321 passes through the mounting holes, extends into the cavity 331, and is drivingly connected to the vibrating mirror 322. The positions and shapes of the light outlet 333 and the two light inlets 332 are optimized according to the layout of the galvanometer group 32, the field lens 31, and the laser propagation path, direction, and optical path to ensure that the propagation of the laser beam meets the design requirements.

[0038] Combined with Figure 2 and Figure 4 As shown, in an embodiment of the present invention, the light outlet 333 is opened on the bottom surface of the bracket 33, and the two light inlets 332 are respectively opened on the opposite side surfaces of the bracket 33. The two vibrating mirrors 322 of each galvanometer group 32 are respectively arranged on the top surface of the bracket 33 and the side surface where the light inlet 332 is opened. The two galvanometer groups 32 are rotationally symmetrically arranged along the center of the bracket 33.

[0039] In this embodiment, the two light inlets 332 are respectively opened on the opposite side surfaces of the bracket 33, that is, the two laser beams are input into the galvanometer group 32 in a left-right symmetric manner. At the same time, the two galvanometer groups 32 are designed to be a structure that is rotationally symmetric by 180 degrees along the center of the bracket 33 to adapt to the two laser beams input in a left-right symmetric manner. The above-mentioned structural design mainly considers injecting the two laser beams from the left and right sides of the same scanning head 30 respectively, thereby reducing the problem that the two laser beams affect each other due to the close distance.

[0040] The symmetric layout of the galvanometer group 32 not only facilitates the injection of the laser from the left and right sides of the scanning head 30, but also helps to improve the compactness of the structure of the two galvanometer groups 32, so as to reduce the volume of the bracket 33 and the field lens 31. To a certain extent, it can make the structural volumes of the bracket 33 and the field lens 31 required by the double galvanometer group 32 close to those required by the single galvanometer group 32, so that it is convenient to directly replace the laser scanning head system 1 with a single galvanometer group 32 with a laser scanning head system 1 with a double galvanometer group 32, thereby improving the applicability of the laser scanning head system 1.

[0041] Combined with Figure 1 and Figure 3 As shown, in an embodiment of the present invention, the beam splitting assembly 20 includes two beam expanders 21. The two beam expanders 21 are respectively arranged at intervals on the light inlet side of the two galvanometer groups 32. The beam expander 21 is used to expand the laser beam and adjust the size and focal length of the focused light spot.

[0042] In this embodiment, the beam expander 21 in the beam splitting component 20 has the functions of adjusting the laser focal length and the spot diameter of the laser beam. By adjusting the laser focal length, it is ensured that the two laser beams are focused on the same plane and the focused spots are consistent, so as to facilitate controlling the two laser beams to achieve the same processing effect and realizing the uniformity of laser marking, laser cutting, and laser welding.

[0043] The beam expander 21 adopts a variable focal length design, which allows the operator to quickly fine-tune the focusing position and the size of the focused spot of the laser beam to ensure the consistency of the product quality in mass production. The adjusting mechanism of the beam expander 21 for adjusting the focal length adopts a precise screw drive mechanism, and the operator can change the focal length of the beam expander 21 by rotating the adjusting knob. This design not only provides a convenient way for fine-tuning the focal length, but also ensures the smoothness and repeatability of the adjustment process. It can be understood that when adjusting the laser focusing position on this basis, it is necessary to ensure that the two laser beams pass through two beam expanders 21 respectively and then are focused on the same plane after entering the same field lens 31, that is, to ensure that the two laser beams achieve the same effect during marking, cutting, and welding. In other embodiments, the adjusting mechanism of the beam expander 21 can also automatically adjust the focal length. By presetting the path and the preset distances corresponding to different positions, the adjusting mechanism automatically adjusts the focusing positions at different positions, thereby improving the efficiency of laser marking, laser cutting, and laser welding.

[0044] Combined Figure 1 and Figure 3 As shown, in an embodiment of the present utility model, the beam splitting component 20 further includes an inverted beam expander 24, and the inverted beam expander 24 is spaced on one side of the laser emitted by the laser emitter 10. The inverted beam expander 24 is used to reduce the spot size of the laser emitted by the laser emitter 10.

[0045] The inverted beam expander 24 in this embodiment is also a kind of beam expander 21. The difference is that the beam expander 21 is installed on the light-emitting side of the laser emitter 10 in an inverted manner. That is, after the laser emitted by the laser emitter 10 passes through the inverted beam expander 24, the spot area of the laser beam decreases and the laser beam becomes more concentrated. The design of this structure mainly considers that in the above embodiment, after the laser beam passes through the beam expander 21, the spot diameter may become larger and may exceed the galvanometer mirror 322. Therefore, without increasing the area of the galvanometer mirror 322, by setting the inverted beam expander 24, the spot size of the laser beam is reduced in advance, so as to ensure that the spot after being expanded by the beam expander 21 is within the galvanometer mirror 322.

[0046] Combined Figure 1 and Figure 3 As shown, in an embodiment of the present utility model, the beam splitting component 20 further includes a beam splitter 22, and the beam splitter 22 is arranged between the laser emitter 10 and the beam expander 21 and is used to split the laser emitted by the laser emitter 10 into two laser beams.

[0047] In this embodiment, the beam splitter 22 can effectively split the laser emitted by the laser emitter 10 into two laser beams with the same laser power, so that the two laser beams are respectively reflected by different galvanometer groups 32 into the same field lens 31, realizing the uniformity of two-beam laser marking, laser cutting, and laser welding, and improving the marking, cutting, and welding quality.

[0048] Combined with Figure 1 and Figure 3 As shown, in an embodiment of the present utility model, the beam splitting assembly 20 further includes a plurality of reflectors 23. The plurality of reflectors 23 are respectively arranged at intervals between the beam splitter 22 and different beam expanders 21. The two laser beams split by the beam splitter 22 are respectively reflected by different reflectors 23 and respectively enter two galvanometer groups 32 through different beam expanders 21.

[0049] In this embodiment, the plurality of reflectors 23 in the beam splitting assembly 20 are used to accurately control the propagation direction, path, and optical path of the two laser beams split by the beam splitter 22. These reflectors 23 are made of lightweight and high-reflectivity materials such as aluminum or silicon to reduce the energy loss of the laser during transmission.

[0050] The installation position and tilt angle of the reflector 23 are calculated in advance to ensure that the laser beam can enter the corresponding galvanometer group 32 with the smallest deviation. The installation of the reflector 23 uses a high-precision positioning device to ensure the position accuracy and repeatability of the reflector 23. This design enables the laser scanning head system 1 to still maintain high precision and high stability during high-speed marking, cutting, and welding processes.

[0051] Combined with Figure 1 and Figure 3 As shown, in an embodiment of the present utility model, at least two reflectors 23 are arranged at intervals on the reflection surface of the beam splitter 22, and at least two reflectors 23 are arranged at intervals on the transmission surface of the beam splitter 22. The laser beam reflected by the beam splitter 22 and the laser beam transmitted by the beam splitter 22 respectively enter different galvanometer groups 32 in parallel and opposite directions after being reflected by different reflectors 23.

[0052] In this embodiment, the plurality of reflectors 23 are respectively arranged at intervals on the reflection surface and the transmission surface of the beam splitter 22 to achieve fine adjustment of the propagation direction, path, and optical path of the two laser beams. As Figure 1As shown, the laser beam reflected by the beam splitter 22 enters from the right side of the scanning head 30 after being reflected successively by two reflecting mirrors 23; the laser beam transmitted through the beam splitter 22 enters from the left side of the scanning head 30 after being reflected successively by two reflecting mirrors 23. This enables the laser beam to enter different galvanometer groups 32 in parallel and opposite directions after passing through the beam splitter 22, thus achieving the purpose that the two galvanometer groups 32 in the above embodiment are rotationally symmetrically designed. At the same time, the reflecting mirror 23 is installed with an adjustable design to flexibly adjust the tilt angle of the reflecting mirror 23, thereby improving the production and debugging efficiency in batch.

[0053] Combined with Figure 3 and Figure 4 As shown, in an embodiment of the present utility model, the laser scanning head system 1 further includes a mounting plate 40. An opening 41 is provided on the surface of the mounting plate 40. The laser emitter 10, the beam splitting assembly 20, and the galvanometer are all installed on the top surface of the mounting plate 40, and the field lens 31 is installed on the bottom surface of the mounting plate 40. After the laser beam is reflected by the galvanometer, it enters the field lens 31 from the opening 41.

[0054] In this embodiment, the laser emitter 10, the beam splitting assembly 20, and the galvanometer group 32 are all fixed on the top surface of the mounting plate 40 through precise positioning devices. These positioning devices include precise screws and adjustment shims to achieve precise adjustment of the positions of each component. The installation position of the laser emitter 10 takes into account the initial direction and divergence angle of the laser beam to ensure that the laser beam can effectively enter the beam splitting assembly 20. The installation position and angle of the beam splitting assembly 20 are precisely calculated to ensure that the laser beam can accurately enter the galvanometer group 32 after passing through the beam splitter 22 and the beam expander 21.

[0055] The mounting position of the bracket 33 of the scanning head 30 is arranged opposite to the opening 41. The bracket 33 is installed on the mounting plate 40 by means of threaded connection. At the same time, the light outlet 333 of the bracket 33 is coaxial with the opening 41. The size and shape of the opening 41 and the light outlet 333 are adapted to the diameter and shape of the field lens 31. One end of the field lens 31 passes through the opening 41 and is embedded in the light outlet 333 to fixedly connect the field lens 31 with the bracket 33. At the same time, the other end of the field lens 31 extends out of the opening 41 and is exposed on the bottom surface of the mounting plate 40. Through this structural design, while ensuring the accurate transmission of the laser beam, the structural compactness of the scanning head 30 is improved, and the structural volume of the laser scanning head system 1 is reduced.

[0056] The above is only an exemplary embodiment of the present utility model, and does not limit the patent scope of the present utility model. Any equivalent structural transformation made under the technical concept of the present utility model by using the content of the specification and drawings of the present utility model, or directly / indirectly applied in other related technical fields, is included in the patent protection scope of the present utility model.

Claims

1. A laser scanning head system for laser marking, laser cutting and laser welding, characterized in that: The laser scanning head system comprises: Laser transmitter; A beam splitter component, which is spaced apart at one side of the laser emitter from which the laser is emitted, and receives the laser emitted by the laser emitter and splits the laser into two laser beams; and The scanning head comprises a field lens and two galvanometer mirror groups. The two laser beams enter the same scanning head and are respectively reflected by the two galvanometer mirror groups before being focused and emitted by the same field lens.

2. The laser scanning head system according to claim 1, characterized in that: Each of the galvanometer mirror groups includes two galvanometer pieces and two motors. Each of the motors is driven and connected to a galvanometer piece so that the two galvanometer pieces of each galvanometer mirror group rotate in directions perpendicular to each other. Each of the laser beams is reflected by the two galvanometer pieces of a galvanometer mirror group in turn and then enters the same field lens.

3. The laser scanning head system according to claim 2, characterized in that: The scanning head also includes a bracket, a cavity for light propagation is formed inside the bracket, a light outlet and two light inlets connected to the cavity are opened on the surface of the bracket, the vibrating lens is arranged in the cavity, and the motor is installed on the bracket. The two laser beams enter from the two light inlets respectively, are reflected by the two vibrating lens in turn, and then enter the same field lens from the light outlet.

4. The laser scanning head system according to claim 3, characterized in that: The light outlet is opened on the bottom surface of the bracket, the two light inlets are respectively opened on the two opposite side surfaces of the bracket, the two vibrating mirror sheets of each vibrating mirror group are respectively arranged on the top surface of the bracket and the side surface with the light inlet, and the two vibrating mirror groups are rotationally symmetrically arranged along the center of the bracket.

5. The laser scanning head system according to any one of claims 1 to 4, characterized in that: The beam splitting component comprises two beam expanders, which are respectively arranged at intervals on the light-incoming side of the two galvanometer mirror groups, and are used to expand the laser beam and adjust the size and focal length of the focused light spot.

6. The laser scanning head system according to claim 5, characterized in that: The light splitting component also includes a flip-chip beam expander, which is spaced apart on one side of the laser emitter emitting laser light, and is used to reduce the spot size of the laser emitted by the laser emitter.

7. The laser scanning head system according to claim 5, characterized in that: The beam splitter assembly further comprises a beam splitter, which is disposed between the laser emitter and the beam expander and is used for splitting the laser emitted by the laser emitter into two laser beams.

8. The laser scanning head system according to claim 7, characterized in that: The beam splitter assembly also includes a plurality of reflectors, which are spaced apart between the beam splitter and different beam expanders. The two laser beams split by the beam splitter are respectively reflected by different reflectors and respectively emitted into the two galvanometer groups through different beam expanders.

9. The laser scanning head system according to claim 8, characterized in that: At least two of the reflectors are spaced apart on the reflective surface of the beam splitter, and at least two of the reflectors are spaced apart on the transmissive surface of the beam splitter. The laser beam reflected by the beam splitter and the laser beam transmitted by the beam splitter are respectively reflected by different reflectors and then incident on different galvanometer groups in parallel and opposite directions.

10. The laser scanning head system according to any one of claims 1 to 4, characterized in that: The laser scanning head system also includes a mounting plate, a surface of which is provided with an opening, the laser emitter, the beam splitter assembly and the galvanometer are all mounted on the top surface of the mounting plate, one end of the field mirror is embedded in the opening, and the other end is exposed on the bottom surface of the mounting plate.

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