High and low temperature magneto-optical Kerr probe station

Abstract

The utility model provides a high and low temperature magneto-optical Kerr probe station, which comprises a sample cavity, a sample seat, a cold source assembly, an optical path assembly, a probe assembly and an excitation assembly, and is characterized in that the sample seat is arranged in the sample cavity, the sample seat is used for supporting an object to be measured, and the excitation assembly is configured to be capable of generating a preset magnetic field at the position of the sample seat for supporting the object to be measured; the cold head of the cold source assembly and the sample seat realize heat exchange through heat conduction; a probe of the probe assembly extends into the sample cavity; the light path assembly comprises a light source, a polarizer, an analyzer and at least one of a camera and an eyepiece, light emitted by the light source passes through the polarizer and then irradiates a measured object, and light reflected by the measured object passes through the analyzer and then enters at least one of the corresponding camera and eyepiece; the electrical and magnetic detection of a detected object under high and low temperature states can be completed on one device, the use is convenient, and the integration level is high.

Description

Technical Field

[0001] The utility model belongs to the technical field of physics and semiconductor testing, and relates to a high-low temperature magneto-optical Kerr probe station. Background Art

[0002] The probe station test equipment is a precision instrument used for microscopic testing of semiconductors and electronic materials. It measures and analyzes electrical properties by contacting the tiny areas or contacts of the object under test with the probe. The magnetic field probe station test system further provides a magnetic field environment, so that the probe station test equipment can further study the performance and characteristics of the material or device under the magnetic field. Its typical applications include magnetism, spin electronics, semiconductor physics and devices, quantum devices, etc.

[0003] In some cases, probe station test equipment can also integrate temperature control systems to maintain a stable test environment under low temperature conditions, allowing users to study the electrical properties of materials and devices under the influence of low temperatures.

[0004] However, since the probe station test equipment is mainly used for testing electrical properties, it is unable to test the magnetic properties of the object under test, which is not conducive to comprehensive testing of the object under test.

[0005] The above information disclosed in the background technology section is only used to enhance the understanding of the background of the present invention and therefore may contain information that does not constitute the prior art known to ordinary technicians in this field. Utility Model Content

[0006] In order to provide a device capable of performing electrical and magnetic tests on an object to be tested under high and low temperature conditions, the utility model provides a high and low temperature magneto-optical Kerr probe station, comprising a sample cavity, a sample holder, a cold source component, an optical path component, a probe component, and an excitation component, wherein the sample holder is arranged in the sample cavity, the sample holder is used to support the object to be tested, and the excitation component is constructed to generate a preset magnetic field at the position of the sample holder supporting the object to be tested; heat exchange is achieved between the cold head of the cold source component and the sample holder through heat conduction; the probe of the probe component extends into the sample cavity; the optical path component comprises a light source, a polarizer, an analyzer, and at least one of a camera or an eyepiece, the light emitted by the light source is irradiated to the object to be tested after passing through the polarizer, and the light reflected by the object to be tested enters at least one of the corresponding camera or eyepiece after passing through the analyzer.

[0007] According to one embodiment of the present invention, the sample chamber is provided with an observation window, and the light emitted by the light source is irradiated to the object to be measured through the observation window.

[0008] According to one embodiment of the present utility model, the optical path component includes a light source, a polarizer, an analyzer, a camera, and an eyepiece, and at least part of the light reflected by the object to be measured enters the camera and at least part of the light enters the eyepiece.

[0009] According to one embodiment of the present utility model, heat exchange is achieved between the excitation component and the cold head of the cold source component through heat conduction.

[0010] According to one embodiment of the present invention, the sample chamber is in a vacuum environment.

[0011] According to one embodiment of the present utility model, the probe assembly also includes a probe seat, a bellows, and a probe arm. The probe seat is arranged outside the sample cavity, the probe is fixed to the probe arm, and the probe arm is fixed to the probe seat. The sample cavity is provided with a probe arm accommodating hole. The probe arm extends into the inner side of the sample cavity through the probe arm accommodating hole. The bellows connects the probe arm accommodating hole and the probe seat to close the probe arm accommodating hole.

[0012] According to one embodiment of the present utility model, the cold source assembly further includes a compressor, the cold head is connected to the sample holder via a flexible cold chain, and the compressor is connected to the sample chamber via a bellows.

[0013] According to one embodiment of the present utility model, the optical path assembly also includes a displacement device and an optical bracket, and the light source, polarizer, analyzer, and at least one of a camera or an eyepiece are installed on the optical bracket; the optical bracket is installed on the displacement device.

[0014] According to one embodiment of the present utility model, the excitation component is an excitation coil, and the excitation component is disposed in the sample cavity.

[0015] According to the description of one embodiment of the utility model, the high and low temperature magneto-optical Kerr probe station also includes a first mounting bracket and a second mounting bracket, the sample chamber, optical path assembly, and probe assembly are mounted on the first mounting bracket, the sample holder and excitation assembly are connected to the sample chamber; the cold source assembly is mounted on the second mounting bracket; the first mounting bracket and the second mounting bracket are arranged independently of each other.

[0016] According to one embodiment of the present invention, a heater is provided on the sample holder.

[0017] The utility model has at least the following beneficial effects: it can complete electrical and magnetic detection of the object to be tested under high and low temperature conditions on one device, is easy to use and has high integration; electrical detection and magnetic detection share the same excitation component, and can use the optical path of magnetic detection to assist the probe alignment process during electrical detection, which not only reduces the complexity of the equipment, but also facilitates the use of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 The figure is a schematic diagram of the overall structure of an embodiment of a high and low temperature magneto-optical Kerr probe station.

[0019] Figure 2 This is a schematic diagram of the internal structure of an embodiment of a high-low temperature magneto-optical Kerr probe station. DETAILED DESCRIPTION

[0020] In order to make the purpose and features of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are further described below in conjunction with the accompanying drawings. It should be noted that the accompanying drawings are all in a very simplified form and use inaccurate ratios, which are only used to conveniently and clearly assist in explaining the embodiments of the utility model.

[0021] The utility model provides a high-low temperature magneto-optical Kerr probe station, comprising a sample cavity 100, a sample holder 200, a cold source component 300, an optical path component 400, a probe component 500, and an excitation component 600.

[0022] The sample chamber 100 is mainly used to accommodate samples and provide a closed and easily controlled environment for the detection of samples to ensure the stability of the experiment. In some cases, the interior of the sample chamber 100 can be set to a vacuum environment to further reduce the temperature changes of the detection environment and related components caused by heat exchange. In addition, in some cases, specific gases can also be introduced into the sample chamber 100 to form a special detection environment, such as introducing inert gas to reduce oxidation of the object to be tested, introducing nitrogen to remove water vapor in the sample chamber 100, and, when the open-cycle cold source component 300 is partially adopted, a refrigerant can be introduced into the sample chamber 100.

[0023] The sample holder 200 is located inside the sample chamber 100 and is mainly used to fix and support the object to be measured. At the same time, the sample holder 200 is also used to adjust the temperature of the object to be measured. The cold head 310 of the cold source assembly 300 and the sample holder 200 realize heat exchange through heat conduction. More specifically, a cooling structure can be provided between the cold head 310 and the sample holder 200 to conduct heat conduction so that the cold head 310 can cool the sample holder 200.

[0024] The excitation component 600 is configured to generate a preset magnetic field at the position of the sample holder 200 supporting the object to be measured. For the excitation component 600, a magnetic field can generally be generated by an excitation coil, and the magnetic field generated by the excitation coil is adjusted by configuring the excitation coil and its position, or further setting components such as a pole head, so that the position of the sample holder 200 supporting the object to be measured forms a preset magnetic field. The specific form of the preset magnetic field can be set according to the needs of the detection, for example, the preset magnetic field can be made perpendicular to the measured surface of the object to be measured.

[0025] The probe 510 of the probe assembly 500 extends into the sample cavity 100 and extends toward the object to be measured. When the object to be measured is provided, the probe 510 can extend toward the object to be measured and contact with the corresponding contact on the object to be measured, thereby transmitting and receiving corresponding electrical signals to and from the object to be measured. When the sample cavity 100 is provided, the probe assembly 500 can be provided in the sample cavity 100 or outside the sample cavity 100, and the probe 510 is extended into the sample cavity 100 through the probe arm 520.

[0026] The optical path assembly 400 includes a light source 421, a polarizer 422, an analyzer 424, and at least one of a camera 426 or an eyepiece 425. The light emitted by the light source 421 is irradiated to the object to be measured after passing through the polarizer 422, and the light reflected by the object to be measured enters at least one of the corresponding camera 426 or eyepiece 425 after passing through the analyzer 424. The eyepiece 425 can be used for the human eye to directly observe the object to be measured and its magnetic domain conditions, and the camera 426 can be used to obtain an image of the object to be measured or the magnetic domain to further form a corresponding form that can be used for computer processing and display. In some cases, the eyepiece 425 can be connected to the camera 426 so that the camera 426 can obtain the corresponding image while observing with the human eye.

[0027] When in use, the excitation component 600 generates a corresponding magnetic field at the location of the object to be measured, so that the object to be measured is in a magnetic field environment; the cold source component 300 is used to transfer cold energy to the sample holder 200, thereby changing the temperature of the object to be measured, for example, being in a low temperature state; the object to be measured is electrically tested by the probe component 500, and the magnetic domain or magnetism of the object to be measured is observed or detected by the optical path component 400, so that a more comprehensive detection of the object to be measured can be achieved. The probe component 500 and the optical path 400 can be used separately in this device, for example, when only electrical testing is required, the probe component 500 can be used alone; when only magnetic domain or magnetism detection is required, the optical path component 400 can be used alone. Thus, electrical and magnetic detection of the object to be measured at high and low temperatures can be achieved. In addition, electrical detection and magnetic detection share the same excitation component 600, and the optical path of magnetic detection can be used to assist the probe alignment process during electrical detection, which not only reduces the complexity of the equipment, but also makes electrical and magnetic detection mutually auxiliary, making the use of the equipment convenient.

[0028] It should be noted that, in addition to being able to detect and observe the magnetic domains or magnetism of the object being measured, the optical path component 400 can also be used to observe the contact condition between the probe component 500 and the object being measured, so as to adjust the relative position between the probe component 500 and the object being measured.

[0029] See also Figure 1 , Figure 2 , shows a feasible implementation of the utility model, wherein the optical path component 400 includes an optical bracket 410, an optical path 420, the optical path includes a light source 421, a polarizer 422, an analyzer 424, a camera 426, and an eyepiece 425, and the optical path 420 is installed on the optical bracket 410. Specifically, the light source 421, the polarizer 422, the analyzer 424, and at least one of the camera 426 or the eyepiece 425 are installed on the optical bracket 410, and the optical bracket 410 is fixed to an external fixing device. In some cases, for the optical path component 420, the camera 426 may not be installed on the optical bracket 410, but observation may be performed directly through the eyepiece 425, or the eyepiece 425 may not be installed on the optical bracket 410, but imaging and output may be performed directly through the camera 426, and corresponding settings may be made as needed. For ease of use, the observation end of the eyepiece 425 may be arranged on the outside of the optical bracket 410 for ease of use. In some cases, a beam splitter 423 may be further provided in the optical path 420 to meet corresponding detection requirements, or to reduce the overall space occupied by the optical path 420 or to simplify the optical path 420 .

[0030] In some cases, the optical path component 400 may further include a corresponding displacement device, and the optical bracket 410 is fixed to the displacement device, so as to adjust the position of the optical bracket 410 and the corresponding components. Figure 1 , the optical path assembly 400 also includes a first moving device 431, a second moving device 432, and a third moving device 433. The first moving device 431, the second moving device 432, and the third moving device 433 are connected in sequence, and each has a moving end that moves in different directions. The first moving device 431, the second moving device 432, and the third moving device 433 can be set to three mutually orthogonal moving directions, so that the optical bracket 410 and the corresponding optical path 420 can be moved to any position in space, which can not only observe or detect different positions of the object to be measured, but also facilitate the focusing of the optical path 420. In some cases, the first moving device 431, the second moving device 432, and the third moving device 433 can be further provided with a corresponding driving device 434, and the movement of the mobile end of the corresponding mobile device is controlled by the driving device 434, so as to drive and control the corresponding movement. As a feasible implementation method, please refer to Figure 1The first moving device 431 can drive the optical bracket 410 to move in the front-to-back direction, the second moving device 432 can drive the optical bracket 410 to move in the up-down direction, and the third moving device 433 can drive the optical bracket 410 to move in the left-right direction. An optical path 420 is fixed in the optical bracket 410, and the optical path 420 moves with the optical bracket 410.

[0031] See also Figure 1 , Figure 2 , showing a feasible form of the probe assembly 500. Specifically, there are 4 probe assemblies 500, and the 4 probe assemblies 500 are evenly arranged around the circumference of the sample cavity 100. The probe assembly 500 is arranged outside the sample cavity 100, and the probe 510 is extended into the sample cavity 100 through the probe arm 520. The probe arm 520 is fixed to the probe seat 530, and the probe seat 530 can drive the probe arm 520 and the probe 510 to move to adjust the relative position between the probe 510 and the object to be measured. In order to make the cavity formed by the sample cavity 100 as a whole airtight, a bellows 540 can be arranged between the probe seat 530 and the cavity wall 110 of the sample cavity 100, so as to keep the internal and external environments of the sample cavity 100 isolated while allowing the probe 510 to extend into the sample cavity 100.

[0032] See also Figure 1 , Figure 2 The sample chamber 100 is provided with an observation window 120, and the light emitted by the light source 421 passes through the observation window 120 to irradiate the position of the object to be measured. Similarly, the light reflected by the object to be measured passes through the observation window 120 and the analyzer 424 and enters at least one of the camera 426 or the eyepiece 425 to detect or observe the magnetic domain or magnetism of the object to be measured. The observation window 120 is usually arranged on a side of the sample chamber 100 close to the optical path component 400. In order to isolate the environment in the sample chamber 100 from the external environment, the observation window 120 can be closed and transparent.

[0033] In some cases, it is also necessary to control the temperature of the excitation component 600. In this case, heat exchange is achieved between the excitation component 600 and the cold head 310 of the cold source component 300 through heat conduction. Figure 2 , shows a heat exchange connection mode of the excitation component 600, wherein a cooling structure is provided between the excitation component 600 and the cold head 310 for heat conduction. Figure 2When the excitation component 600 is an excitation coil, in order to make the excitation component 600 cool down evenly, the excitation component 600 can be installed on the heat spreader 140, and the heat spreader 140 can be connected to the cold head 310 through the cooling structure. In order to reduce the temperature interference between the excitation component 600 and the sample holder 200, which makes it difficult to control the temperature of the two, a cold shield 150 can be set between the excitation component 600 and the sample holder 200. In addition, in order to reduce the temperature interference between the excitation component 600 and the sample chamber 100, a cold shield 160 can also be set outside the excitation component 600.

[0034] In some cases, in order to further reduce heat conduction between the sample chamber 100 and the sample holder 200 and the excitation assembly 600, an insulation assembly 130 may be provided in the sample chamber 100, the insulation assembly 130 is mounted on the chamber wall 110 of the sample chamber 100, and the excitation assembly 600 and the sample holder 200 are fixed to the insulation assembly 130, respectively.

[0035] In some cases, the cold source assembly 300 also includes a compressor, so the cold source assembly 300 will vibrate, which may have an adverse effect on the position of the object to be measured, the relative position of the probe 510 and the object to be measured, and the relative position of the optical path 420 and the object to be measured. Therefore, a bellows 340 can be provided to connect the cold source assembly 300 and the sample chamber 100. In addition, a flexible cold chain 321 can be used to connect the cold head 310 and the sample holder 200, and a flexible cold chain 322 can be used to connect the cold head 310 and the excitation assembly 600. Please refer to Figure 2 In some cases, the compressor and the sample chamber 100 may be connected via a bellows 340 .

[0036] See also Figure 1 , Figure 2 The probe assembly 500 includes a probe 510, a probe seat 530, a bellows 540, and a probe arm 520. The probe seat 530 is disposed outside the sample chamber. The probe 510 is fixed to the probe arm 520. The probe arm 520 is fixed to the probe seat 530. The probe seat 530 is provided with a displacement device that can drive the probe arm 520 and the probe 510 to move. For details, please refer to Figure 1 , Figure 2 The probe base 530 is provided with a horizontal moving device, a vertical moving device, and a rotating device, which can drive the probe arm 520 and the probe 510 to move in the horizontal and vertical directions, and drive the probe arm 520 and the probe 510 to rotate. When the probe 510 extends toward the object to be measured, the specific position and angle of the probe 510 can be controlled by the probe base 530 to ensure that it can contact the corresponding position of the object to be measured. Figure 2A probe arm accommodating hole may be provided on the sample chamber 100, and the probe arm 520 extends into the inner side of the sample chamber 100 through the probe arm accommodating hole. The bellows 540 connects the probe arm accommodating hole with the probe seat 530 to close the probe arm accommodating hole, so that the sample chamber 100 forms a closed cavity, and can accommodate the position and angle changes of the probe 510, the probe arm 520, and the probe seat 530.

[0037] See also Figure 1 The high and low temperature magneto-optical Kerr probe station provided by the utility model may also include a corresponding mounting and fixing structure, specifically, a first mounting bracket for fixing the sample chamber 100, the sample holder 200, the optical path assembly 400, the probe assembly 500, and the excitation assembly 600, and a second mounting bracket for fixing the cold source assembly 300. The first mounting bracket and the second mounting bracket are independently arranged to avoid mutual influence of vibrations of the two, especially to isolate the vibration of the cold source assembly 300 fixed on the second mounting bracket.

[0038] The sample chamber 100, the optical path assembly 400, and the probe assembly 500 are directly mounted on the first mounting bracket. Specifically, the first mounting bracket includes a first mounting plate 711 and a first supporting leg 712. The first supporting leg 712 is used to support the first mounting plate 711 on the ground. The sample chamber 100, the optical path assembly 400, and the probe assembly 500 are respectively mounted on the first mounting plate 711; the sample holder 200 and the excitation assembly 600 are indirectly fixed to the first mounting plate 711 by being fixed to the sample chamber 100.

[0039] The cold source assembly 300 is installed on a second mounting bracket. Specifically, the second mounting bracket includes a second mounting plate 721 and a second supporting leg 722. The second supporting leg 722 is used to support the second mounting plate 721 on the ground. The cold source assembly 300 is fixed on the second mounting plate 721. Specifically, the compressor of the cold source assembly 300 can be fixed on the second mounting plate 721.

[0040] In addition, in some cases, a third mounting bracket may be included to separately fix the optical path component 400. Figure 1 The third mounting bracket includes a third mounting plate 732 and a third supporting leg 733. The third supporting leg 733 is used to support the third mounting plate 732 on the first mounting plate 711, or to support the third mounting plate 732 on the ground, and can be set as needed. The optical path component 400 is installed on the third mounting plate 732. When a displacement device is provided in the optical path component 400, the displacement device can be fixed to the third mounting package 732 so that the optical path 420 in the optical path component 400 can be moved. The third mounting bracket can be set as a bridge structure to improve stability.

[0041] See also Figure 2In some cases, the sample holder 200 needs to be heated to control the temperature of the sample holder 200 and the corresponding sample. Accordingly, a heater 210 may be provided on the sample holder 200 .

[0042] The above shows and describes the basic principles, main features and advantages of the utility model, so the above is only an embodiment of the utility model. The technicians in this industry should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions only describe the principles of the utility model. Without departing from the spirit and scope of the utility model, the utility model also includes various equivalent changes and improvements, which will fall within the scope of the utility model to be protected.

Claims

1. A high and low temperature magneto-optical Kerr probe station, characterized in that: It includes a sample chamber, a sample holder, a cold source assembly, an optical path assembly, a probe assembly, and an excitation assembly. The sample holder is disposed in the sample cavity, the sample holder is used to support the object to be measured, and the excitation component is configured to generate a preset magnetic field at the position of the sample holder supporting the object to be measured; The cold head of the cold source assembly and the sample holder realize heat exchange through heat conduction; The probe of the probe assembly extends into the sample cavity; The optical path component includes a light source, a polarizer, an analyzer, and at least one of a camera or an eyepiece. The light emitted by the light source is irradiated to the object to be measured after passing through the polarizer, and the light reflected by the object to be measured enters the corresponding at least one of the camera or eyepiece after passing through the analyzer.

2. A high and low temperature magneto-optical Kerr probe station as claimed in claim 1, characterized in that: The sample chamber is provided with an observation window, and the light emitted by the light source is irradiated to the object to be measured through the observation window.

3. A high and low temperature magneto-optical Kerr probe station as claimed in claim 1, characterized in that: The optical path component includes a light source, a polarizer, an analyzer, a camera, and an eyepiece. At least part of the light reflected by the object to be measured enters the camera and at least part of the light enters the eyepiece.

4. A high and low temperature magneto-optical Kerr probe station as claimed in claim 1, characterized in that: Heat exchange is achieved between the excitation component and the cold head of the cold source component through heat conduction.

5. A high and low temperature magneto-optical Kerr probe station as claimed in claim 1, characterized in that: The sample chamber is in a vacuum environment.

6. A high and low temperature magneto-optical Kerr probe station as claimed in claim 1, characterized in that: The probe assembly also includes a probe seat, a bellows, and a probe arm. The probe seat is arranged outside the sample cavity, the probe is fixed to the probe arm, and the probe arm is fixed to the probe seat. The sample cavity is provided with a probe arm accommodating hole, and the probe arm extends into the inside of the sample cavity through the probe arm accommodating hole. The bellows connects the probe arm accommodating hole and the probe seat to close the probe arm accommodating hole.

7. A high and low temperature magneto-optical Kerr probe station as claimed in claim 1, characterized in that: The cold source assembly also includes a compressor, the cold head is connected to the sample holder through a flexible cold chain, and the compressor is connected to the sample chamber through a bellows.

8. A high and low temperature magneto-optical Kerr probe station as claimed in claim 1, characterized in that: The optical path assembly also includes a displacement device and an optical bracket. The light source, the polarizer, the analyzer, and at least one of the camera or the eyepiece are mounted on the optical bracket; and the optical bracket is mounted on the displacement device.

9. A high and low temperature magneto-optical Kerr probe station as claimed in claim 1, characterized in that: The excitation component is an excitation coil, and the excitation component is arranged in the sample cavity.

10. A high and low temperature magneto-optical Kerr probe station as claimed in claim 1, characterized in that: The high and low temperature magneto-optical Kerr probe station also includes a first mounting bracket and a second mounting bracket. The sample chamber, optical path assembly, and probe assembly are mounted on the first mounting bracket. The sample holder and excitation assembly are connected to the sample chamber. The cold source assembly is mounted on the second mounting bracket. The first mounting bracket and the second mounting bracket are independently arranged.

Images